MULTIPLE CHARGED-PARTICLE BEAM IRRADIATION APPARATUS, MULTIPLE CHARGED-PARTICLE BEAM IRRADIATION METHOD, CORRECTION MAP GENERATION APPARATUS, AND CORRECTION MAP GENERATION METHOD

Sample Processing Apparatus and Sample Processing Method

METHODS OF MANUFACTURING SEMICONDUCTOR DEVICE

Optical Probe System for the Electron Microscope

Image Acquisition Method and Scanning Transmission Electron Microscope

METHODS AND SYSTEMS FOR IMPROVING PLASMA IGNITION STABILITY

WAFER POSITIONING METHOD AND APPARATUS

CHARGED PARTICLE PROCESSING SYSTEM

CHARGED PARTICLE BEAM DEVICE AND METHOD FOR OUTPUTTING IMAGE DATA OF INTEREST

IN-SITU, PRE-IMPLANT WAFER CHARACTERIZATION SYSTEM AND METHOD

Radiation Heating to Dry Moisture from Air Bearing Shaft

SEGMENTED ENDPOINTING FOR SAMPLE PREPARATION

MICROSECOND MELTING AND REVITRIFICATION OF CRYO SAMPLES WITH A CORRELATIVE LIGHT ELECTRON MICROSCOPY SETUP

Ion Milling Device

SEMICONDUCTING COLD PHOTOCATHODE DEVICE USING ELECTRIC FIELD TO CONTROL THE ELECTRON AFFINITY

METHODS AND SYSTEMS FOR IMPROVING PLASMA IGNITION STABILITY

IN-VACUUM CHAMBER CONTROLLED-GAS-FILM DEVICE TO REDUCE LASER ABLATION REDEPOSITS

SYSTEMS AND METHODS OF CLEANING ELECTRON SOURCES IN CHARGED-PARTICLE BEAM SYSTEMS

METHOD FOR EVALUATING THERMIONIC ELECTRON EMITTER IN SITU

USE OF OPTICAL POLARIZATION STATES TO CONTROL A PONDEROMOTIVE PHASE PLATE

WAFER POSITIONING METHOD AND APPARATUS

SYSTEM AND METHOD OF GENERATING TEM SADP IMAGE WITH HIGH DISCERNMENT

METHOD AND APPARATUS FOR INSPECTION

Electron gun and electron beam application apparatus

DETECTOR AND METHOD FOR OBTAINING KIKUCHI IMAGES

SUBSTRATE PROCESSING MODULE AND LASER BEAM PROVIDING METHOD

CHARGED PARTICLE BEAM DEVICE AND IMAGING METHOD

Creating multiple electron beams with a photocathode film

METHODS AND SYSTEMS FOR IMPROVING PLASMA IGNITION STABILITY

SEMICONDUCTOR REACTION CHAMBER

ELECTRON MICROSCOPE WITH IMPROVED IMAGING RESOLUTION

Charged Particle Beam Device and Sample Observation Method

MULTIPLE PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATION, METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATION AND ASSOCIATED COMPUTER PROGRAM PRODUCT

SURFACE ANALYSIS SYSTEM COMPRISING A PULSED ELECTRON SOURCE

Wafer positioning method and apparatus

Wafer Positioning Method and Apparatus

Plasma processing apparatus and plasma processing method

Systems and methods of profiling charged-particle beams

Machine learning on wafer defect review

Electron microscope and specimen contamination prevention method

LASER ARRAY SYSTEM FOR IMPROVED LOCAL CD UNIFORMITY

Use of optical polarization states to control a ponderomotive phase plate

Vibration isolation system with one or more magnetic actuators

Electron beam apparatus

Charged particle beam device

Charged particle beam apparatus

System and method for bare wafer inspection

Charged particle beam device

Charged particle beam apparatus

Charged particle beam system

Alignment system and seal for positional alignment

In-situ optical chamber surface and process sensor

Scanning electron microscope

Method and apparatus for inspection

Imaging method and imaging system

Charged particle beam device with interferometer for height measurement

Electron beam observation device, electron beam observation system, and control method of electron beam observation device

Spin polarimeter

Multi modal cryo compatible GUID grid

Charged particle beam device

Charged particle beam apparatus

Focus adjustment method for charged particle beam device and charged particle beam device

Machine learning on wafer defect review

Method for determining irradiation conditions for charged particle beam device and charged particle beam device

PLASMA PROCESSING APPARATUS

Electron microscope and beam irradiation method

In-situ optical chamber surface and process sensor

Charged particle beam device

Charged particle beam device

Semiconductor manufacturing apparatus and method of manufacturing semiconductor device

Electron microscope

Charged particle beam apparatus and sample observation method using the same

Photocathode emitter system that generates multiple electron beams

Observation method, image processing device, and electron microscope

CHARGED PARTICLE BEAM APPARATUS

Method for a remote control of a radiation detection apparatus

Microscope system and method for operating a microscope system

Electron beam device

Charged particle beam device and method for setting condition in charged particle beam device

Machine learning on wafer defect review

Holography reconstruction method and program

Plasma treatment method

Charged particle beam device

System and method for bare wafer inspection

Charged particle beam apparatus, observation method using charged particle beam apparatus, and program

ELECTRON MICROSCOPE WITH IMPROVED IMAGING RESOLUTION

Charged-particle beam device

Transmission charged particle microscope with adjustable beam energy spread

Electron beam inspection apparatus and electron beam inspection method

Electron microscope device and inclined hole measurement method using same

Multiple charged particle beam inspection apparatus and multiple charged particle beam inspection method

Method for driving member and processing apparatus

Cathodoluminescence optical hub

Operating a particle beam apparatus

Charged particle beam apparatus

Charged particle beam apparatus and sample observation method using superimposed comparison image display

Combined SEM-CL and FIB-IOE microscopy

Charged particle beam device

Endpointing for focused ion beam processing

Cross section processing observation method and charged particle beam apparatus

Method of acquiring holograms by off-axis electron holography in precession mode

Charged particle beam apparatus

Phase contrast transmission electron microscope device

Charged particle beam device and sample holder

Charged particle beam device

Stage device and charged particle beam device

Electron beam image acquisition apparatus, and electron beam image acquisition method

DEVICE AND METHOD FOR GENERATING CHARGED PARTICLE BEAM PULSES

Driver of sample holder for electron microscope and stage comprising same

Electron reflectometer and process for performing shape metrology

Charged particle beam device for imaging vias inside trenches

Measurement device, method and display device

Sample holding mechanism, manufacturing method for same, and charged particle beam device

Overlay error measurement device and computer program

Method and apparatus for inspection

Charged particle beam device having inspection scan direction based on scan with smaller dose

Charged particle beam device and scanning electron microscope

Correlation microscope

Charged particle beam apparatus, observation method using charged particle beam apparatus, and program

Transmission scanning microscopy including electron energy loss spectroscopy and observation method thereof

Electron microscope

Charged particle beam apparatus

Charged particle beam apparatus

Charged particle beam apparatus

Post column filter with enhanced energy range

Charged particle beam apparatus and alignment adjustment method of sample stage

Charged particle beam device

Plasma treatment apparatus

Charged particle beam device and pattern measurement device

Method for adjusting height of sample and observation system

Liner tube and electron microscope

Method and apparatus for alignment of optical and charged-particle beams in an electron microscope

Charged particle beam device and control method of charged particle beam device

Charged particle beam apparatus

Electron microscope and image acquisition method

Charged particle beam apparatus, alignment method of charged particle beam apparatus, alignment program, and storage medium

Defect inspection method and defect inspection apparatus

Method for measuring resolution of charged particle beam and charged particle beam drawing apparatus

Charged particle beam inspection apparatus and charged particle beam inspection method

Mirror ion microscope and ion beam control method

Sample observation method and sample observation device

Pattern measurement apparatus and defect inspection apparatus

Composite charged particle beam detector, charged particle beam device, and charged particle beam detector

Active substrate alignment system and method

Charged particle beam device

Measurement method, manufacturing method of device, and measurement system

Electron microscope and method of aberration measurement

Universal liquid sample device and process for high resolution transmission electron microscope imaging and multimodal analyses of liquid sample materials

Method of adjusting the primary side of an X-ray diffractometer

Electron microscope and sample observation method

Post column filter with enhanced energy range

Charged particle beam apparatus

Sample positioning method and charged particle beam apparatus

Measurement system and measurement method

Evaluation condition setting method of semiconductor device, and evaluation condition setting apparatus

Analysis method using electron microscope, and electron microscope

Method of improving quality of scanning charged particle microscope image, and scanning charged particle microscope apparatus

Protective agent for electron microscopic observation of biological sample in water-containing state, kit for electron microscopic observation, methods for observation, diagnosis, evaluation, and quantification by electron microscope, and sample stage

Electron beam microscope with improved imaging gas and method of use

Method for enabling modular part replacement within an electron microscope sample holder

Control device, control method, and analysis system

Method of generating a zoom sequence and microscope system configured to perform the method

Apparatus of plural charged-particle beams

Near-field optical transmission electron emission microscope

Charged particle beam device

Electron microscope

Weak signal detection system and electron microscope equipped with same

Electron microscope

Electron microscope and method of operating same

HIGHLY CONDUCTIVE NANOCOMPOSITE, BIOLOGICAL AND SMALL MOLECULE MATERIALS FOR ENHANCED RESIN CONDUCTIVITY

Endpointing for focused ion beam processing

Charged particle-beam device and specimen observation method

Method of Producing a Freestanding Thin Film of Nano-Crystalline Carbon

Charged particle beam device

Method of constructing 3D image, image processor, and electron microscope

Tube-detector alignment using light projections

Sample observation device

Sample holder for scanning electron microscope, scanning electron microscope image observation system, and scanning electron microscope image observation method

ACHROMATIC DUAL-FIB INSTRUMENT FOR MICROFABRICATION AND MICROANALYSIS

Radiation analyzer including a support for tilting an energy-dispersive radiation detector

TEM sample mounting geometry

Charged particle beam apparatus, stage controlling method, and stage system

High-speed multiframe dynamic transmission electron microscope image acquisition system with arbitrary timing

Charged particle beam apparatus

Composite charged particle detector, charged particle beam device, and charged particle detector

Identification of Trace Constituent Phases in Nuclear Power Plant Deposits Using Electron Backscatter Diffraction (EBSD)

Charged particle beam apparatus and trajectory correction method in charged particle beam apparatus

Charged particle beam device

Charged particle beam apparatus and program

Semiconductor inspection device including a counter electrode with adjustable potentials used to obtain images for detection of defects, and inspection method using charged particle beam

Focusing a charged particle system

Stage device and charged particle beam apparatus using the stage device

Defect observation system and defect observation method

Ion source and method for making same

Method for controlling an interaction between droplet targets and a laser and apparatus for conducting said method

Charged particle lithography system with sensor assembly

Charged particle beam apparatus

Method of producing a freestanding thin film of nano-crystalline graphite

Charged particle beam apparatus

Integrated optical and charged particle inspection apparatus

INSPECTION APPARATUS

Charged particle beam apparatus

Inspection or observation apparatus and sample inspection or observation method

Non-invasive charged particle beam monitor

Asymmetrical detector design and methodology

Method for electron tomography

Specimen observation method and device using secondary emission electron and mirror electron detection

PATTERN FORMATION METHOD, MASK FOR PATTERN FORMATION, METHOD FOR MANUFACTURING MASK, AND PATTERN FORMATION APPARATUS

Charged particle beam apparatus and method of correcting landing angle of charged particle beam

Method of using an environmental transmission electron microscope

Scanning charged particle microscope, image acquisition method, and electron detection method

Orientation imaging using wide angle convergent beam diffraction in transmission electron microscopy

Control for optically aligning an X-ray tube and X-ray detector

Electron beam melting furnace and method for operating same

Charged particle beam apparatus

Inspection or observation apparatus and sample inspection or observation method

Multi-color nanoscale imaging based on nanoparticle cathodoluminescence

Backscatter reduction in thin electron detectors

Characterization of nanoscale structures using an ultrafast electron microscope

Method of performing tomographic imaging of a sample in a charged-particle microscope

Control imaging methods in advanced ultrafast electron microscopy

Electro-optical inspection apparatus and method with dust or particle collection function

Photon induced near field electron microscope and biological imaging system

Electron microscope and method of adjusting the same

Transmission electron microscope and method of observing TEM images

Electron beam device including a first electron biprism to split an electron beam into two beams and a second electron biprism in the image forming lens system to superpose the two beams

Charged particle beam writing apparatus and charged particle beam writing method

Photon induced near field electron microscope and biological imaging system

Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus

OPTICAL APPARATUS, POSITION DETECTION APPARATUS, MICROSCOPE APPARATUS, AND EXPOSURE APPARATUS

Method for adjusting a stem equipped with an aberration corrector

Charged particle beam drawing apparatus and method of manufacturing article

Characterization of nanoscale structures using an ultrafast electron microscope

Image processing method for mass spectrum image, program, and apparatus

Charged-particle microscope and method for controlling same

Modulation device and charged particle multi-beamlet lithography system using the same

Lithography system, modulation device and method of manufacturing a fiber fixation substrate

Charged particle source with light monitoring for tip temperature determination

Electro-optical inspection apparatus and method with dust or particle collection function

Backscatter reduction in thin electron detectors

Orientation imaging using wide angle convergent beam diffraction in transmission electron microscopy

Photon induced near field electron microscope and biological imaging system

Specimen observation method and device using secondary emission electron and mirror electron detection

Charged particle optical system comprising an electrostatic deflector

Electron microscope device

Characterization of nanoscale structures using an ultrafast electron microscope

4D imaging in an ultrafast electron microscope

Ion implanting apparatus

Focusing and positioning device for a particle-optical raster microscope

Ion beam inspection apparatus, ion beam inspecting method, semiconductor manufacturing apparatus, and ion source apparatus

Charged particle beam equipment with magnification correction

Method of inspecting a specimen surface, apparatus and use of fluorescent material

Stereoscopic image regenerating apparatus, stereoscopic image regenerating method, and stereoscopic image regenerating program

Method and device for aligning a charged particle beam column

Device and method for milling of material using ions

Vacuum chamber with recessed viewing tube and imaging device situated therein

Method and apparatus for the automated process of in-situ lift-out

Apparatus and method of detecting probe tip contact with a surface

Device and method for milling of material using ions

Structure determination of materials using electron microscopy

Electron microscope

System and method for fast focal length alterations

Method and device for aligning a charged particle beam column

Method and device for aligning a charged particle beam column

Three-dimensional (3D) imaging system and method for nanostructure

Imaging device with gated integrator

Using images from secondary microscope detectors to automatically generate labeled images from primary microscope detectors

Apparatus, method and system for imaging and utilization of SEM charged particles

Utilization of voltage contrast during sample preparation for transmission electron microscopy

Apparatus for protecting EUV optical elements