Patents-Review.com
ClassID:

205195 ⎘

H01J37/045 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge

Recent Application in this class:
#1
20260142118
2026-05-21

ULTRA FAST PULSER FOR LOW ENERGY ELECTRON BEAMS

 #2
20260135056
2026-05-14

MULTI-CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND MULTI-CHARGED PARTICLE BEAM IRRADIATION METHOD

 #3
20260100325
2026-04-09

DARK CORRECTION FOR LONG TERM ACQUISITION

 #4
20260081106
2026-03-19

MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS

 #5
20260038764
2026-02-05

METHODS OF OPERATING A CHARGED PARTICLE MICROSCOPE SYSTEM INCLUDING A BEAM DEFLECTOR AND ASSOCIATED SYSTEMS

 #6
20260010079
2026-01-08

APERTURE CORRECTION AMOUNT CALCULATION METHOD FOR APERTURE ARRAY SUBSTRATE, APERTURE ARRAY SUBSTRATE, BLANKING APERTURE ARRAY SUBSTRATE, MULTIPLE CHARGED-PARTICLE BEAM WRITING APPARATUS, AND MULTIPLE CHARGED-PARTICLE BEAM WRITING METHOD

 #7
20250379029
2025-12-11

MULTI-CHARGED PARTICLE BEAM WRITING METHOD

 #8
20250379021
2025-12-11

CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND CHARGED PARTICLE BEAM IRRADIATION METHOD

 #9
20250349503
2025-11-13

BEAM ALIGNMENT AND SYNCHRONIZATION IN MICROSCOPY

 #10
20250349492
2025-11-13

BEAM SYNCHRONIZATION IN MICROSCOPY

 #11
20250349491
2025-11-13

BEAM ALIGNMENT AND SYNCHRONIZATION IN MICROSCOPY

 #12
20250336640
2025-10-30

ILLUMINATION LENS ADJUSTMENT METHOD, MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS, AND STORAGE MEDIUM

 #13
20250323017
2025-10-16

MULTIPLE CHARGED-PARTICLE BEAM WRITING METHOD AND MULTIPLE CHARGED-PARTICLE BEAM WRITING APPARATUS

 #14
20250299964
2025-09-25

PATTERN SHAPING OF METAL RESIST LAYER USING REACTIVE ANGLED BEAM PROCESSING

 #15
20250299918
2025-09-25

POSITION MEASUREMENT APPARATUS, CHARGED PARTICLE BEAM WRITING APPARATUS, AND MARK POSITION MEASUREMENT METHOD

 #16
20250299915
2025-09-25

IMAGE GENERATION WITH IMPROVED SCANNING LINES FOR SMART CHARGE DISTRIBUTION

 #17
20250232942
2025-07-17

ION EXTRACTION OPTICS FOR ION PROCESSING SYSTEM

 #18
20250210332
2025-06-26

SHUTTER SYSTEM FOR GAP-FREE SHIELDING OF A COATING SOURCE, AND ASSOCIATED METHOD

 #19
20250157779
2025-05-15

MINIMIZATION OF ENERGY SPREAD IN FOCUSED ION BEAM (FIB) SYSTEMS

 #20
20250140517
2025-05-01

MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTIPLE CHARGED PARTICLE BEAM WRITING METHOD

 #21
20250104958
2025-03-27

BLANKER-ENHANCED MOIRE IMAGING

 #22
20250095951
2025-03-20

ELECTRONIC COMPONENT AND CHARGED PARTICLE BEAM IRRADIATION APPARATUS

 #23
20250095948
2025-03-20

ELECTRONIC COMPONENT AND CHARGED PARTICLE BEAM IRRADIATION APPARATUS

 #24
20250069845
2025-02-27

TECHNIQUES FOR IMAGING LOW DUTY CYCLE SIGNALS USING A SCANNING ELECTRON MICROSCOPE

 #25
20250069842
2025-02-27

TECHNIQUES FOR WAVEFORM DETECTION OF PERIODIC SIGNALS USING VOLTAGE CONTRAST

 #26
20250037960
2025-01-30

BLANKING APERTURE ARRAY SYSTEM, CHARGED PARTICLE BEAM WRITING APPARATUS, AND METHOD FOR INSPECTING BLANKING APERTURE ARRAY SYSTEM

 #27
20240395493
2024-11-28

BLANKING APERTURE ARRAY MECHANISM AND WRITING APPARATUS

 #28
20240379325
2024-11-14

SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAGE CONTRAST DEFECT SIGNAL

 #29
20240363304
2024-10-31

IN-VACUUM CHAMBER CONTROLLED-GAS-FILM DEVICE TO REDUCE LASER ABLATION REDEPOSITS

 #30
20240304413
2024-09-12

Optimizing Image Distortion in a Multi Beam Charged Particle Processing Apparatus

 #31
20240297010
2024-09-05

CONTROL METHOD OF WRITING APPARATUS AND WRITING APPARATUS

 #32
20240258062
2024-08-01

Ion Milling Apparatus

 #33
20240242933
2024-07-18

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

 #34
20240242922
2024-07-18

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

 #35
20240242920
2024-07-18

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

 #36
20240242919
2024-07-18

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

 #37
20240203684
2024-06-20

METHOD FOR ANALYZING DISTURBING INFLUENCES IN A MULTI-BEAM PARTICLE MICROSCOPE, ASSOCIATED COMPUTER PROGRAM PRODUCT AND MULTI-BEAM PARTICLE MICROSCOPE

 #38
20240186100
2024-06-06

BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

 #39
20240128045
2024-04-18

CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD OF ALIGNING A SAMPLE IN A CHARGED PARTICLE ASSESSMENT SYSTEM

 #40
20240055218
2024-02-15

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM WRITING METHOD

 #41
20240029999
2024-01-25

BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

 #42
20240013999
2024-01-11

MOUNTING SUBSTRATE, BLANKING APERTURE ARRAY CHIP, BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM IRRADIATION APPARATUS

 #43
20230402253
2023-12-14

MULTI CHARGED PARTICLE BEAM EVALUATION METHOD, MULTI CHARGED PARTICLE BEAM WRITING METHOD, INSPECTION METHOD FOR APERTURE ARRAY SUBSTRATE FOR MULTI CHARGED PARTICLE BEAM IRRADIATION APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM

 #44
20230369015
2023-11-16

COVERAGE CALCULATING METHOD, CHARGED PARTICLE BEAM WRITING METHOD, COVERAGE CALCULATING DEVICE, CHARGED PARTICLE BEAM WRITING APPARATUS, AND COMPUTER-READABLE STORAGE MEDIUM

 #45
20230360880
2023-11-09

Multi-Beam Pattern Definition Device

 #46
20230335366
2023-10-19

CHARGED PARTICLE BLOCKING ELEMENT, EXPOSURE APPARATUS COMPRISING SUCH AN ELEMENT, AND METHOD FOR USING SUCH AN EXPOSURE APPARATUS

 #47
20230317399
2023-10-05

Charged Particle Beam Device

 #48
20230268158
2023-08-24

Charged Particle Beam Apparatus

 #49
20230260741
2023-08-17

ION IMPLANTER AND ION IMPLANTATION METHOD

 #50
20230253175
2023-08-10

PARTICLE BEAM IRRADIATION SYSTEM, CONTROL METHOD FOR PARTICLE BEAM IRRADIATION SYSTEM, AND CONTROL DEVICE FOR PARTICLE BEAM IRRADIATION SYSTEM

 #51
20230187172
2023-06-15

MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI-CHARGED PARTICLE BEAM WRITING METHOD

 #52
20230115486
2023-04-13

Charged particle beam system and control method therefor

 #53
20230111566
2023-04-13

CONTROL METHOD OF WRITING APPARATUS AND WRITING APPARATUS

 #54
20230081240
2023-03-16

Multi-charged-particle-beam writing apparatus and multi-charged-particle-beam writing method

 #55
20230078311
2023-03-16

Multi-charged-particle-beam writing method, multi-charged-particle-beam writing apparatus, and computer-readable recording medium

 #56
20230072991
2023-03-09

Charged Particle Beam Device and Image Generation Method

 #57
20230048507
2023-02-16

MEMORY DEVICE WITH PREDETERMINED START-UP VALUE

 #58
20230040558
2023-02-09

System and method for reducing the charging effect in a transmission electron microscope system

 #59
20230019113
2023-01-19

Multi-modal operations for multi-beam inspection system

 #60
20230010272
2023-01-12

CHARGED PARTICLE BEAM DEVICE

 #61
20230005711
2023-01-05

Multi charged particle beam adjustment method, multi charged particle beam irradiation method, and multi charged particle beam irradiation apparatus

 #62
20230005705
2023-01-05

Time-gated detection, dual-layer SPAD-based electron detection

 #63
20230005699
2023-01-05

APERTURE BODY, FLOOD COLUMN AND CHARGED PARTICLE TOOL

 #64
20220399181
2022-12-15

Multi charged particle beam writing apparatus

 #65
20220392731
2022-12-08

Blanking aperture array unit

 #66
20220336186
2022-10-20

Charged particle beam apparatus, multi-beamlet assembly, and method of inspecting a specimen

 #67
20220319807
2022-10-06

Charged particle beam writing apparatus and charged particle beam writing method

 #68
20220277927
2022-09-01

PARTICLE BEAM SYSTEM INCLUDING A MULTI-BEAM DEFLECTION DEVICE AND A BEAM STOP, METHOD FOR OPERATING THE PARTICLE BEAM SYSTEM AND ASSOCIATED COMPUTER PROGRAM PRODUCT

 #69
20220270850
2022-08-25

Semiconductor device, multi-charged-particle beam writing apparatus, and multi-charged-particle beam exposure apparatus

 #70
20220254599
2022-08-11

MULTIPLE LANDING ENERGY SCANNING ELECTRON MICROSCOPY SYSTEMS AND METHODS

 #71
20220244201
2022-08-04

Transmission electron microscope and inspection method using transmission electron microscope

 #72
20220189734
2022-06-16

Electron beam irradiation apparatus and electron beam irradiation method

 #73
20220172919
2022-06-02

Drawing apparatus and deflector

 #74
20220102113
2022-03-31

Multiple-charged particle-beam irradiation apparatus and multiple-charged particle-beam irradiation method

 #75
20220084784
2022-03-17

Method for scanning a sample by a charged particle beam system

 #76
20220084783
2022-03-17

Charged particle beam device

 #77
20220059310
2022-02-24

Multiple electron beam writing apparatus and multiple electron beam writing method

 #78
20220020559
2022-01-20

Time-resolved cathodoluminescence sample probing

 #79
20220020557
2022-01-20

Tunable extraction assembly for wide angle ion beam

 #80
20210384002
2021-12-09

Charged particle blocking element, exposure apparatus comprising such an element, and method for using such an exposure apparatus

 #81
20210358713
2021-11-18

Fill pattern to enhance ebeam process margin

 #82
20210296074
2021-09-23

Multi-beam blanking device and multi-charged-particle-beam writing apparatus

 #83
20210287873
2021-09-16

Charged particle beam deflection device

 #84
20210257185
2021-08-19

Multi-charged particle beam writing apparatus and multi-charged particle beam writing method

 #85
20210249224
2021-08-12

ELECTRON BEAM APPARATUS, INSPECTION TOOL AND INSPECTION METHOD

 #86
20210175046
2021-06-10

Beam blanking device for a multi-beamlet charged particle beam apparatus

 #87
20210142979
2021-05-13

Systems and methods for charged particle flooding to enhance voltage contrast defect signal

 #88
20210142978
2021-05-13

Electron beam inspection apparatus and electron beam inspection method

 #89
20210142976
2021-05-13

Multibeamlet charged particle device and method

 #90
20210090846
2021-03-25

Pulsed CFE electron source with fast blanker for ultrafast TEM applications

 #91
20210074510
2021-03-11

Multi charged particle beam evaluation method and multi charged particle beam writing device

 #92
20210066037
2021-03-04

Multi-beam particle beam system

 #93
20210043410
2021-02-11

Coating on dielectric insert of a resonant RF cavity

 #94
20200343073
2020-10-29

Multi charged particle beam writing apparatus

 #95
20200328060
2020-10-15

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #96
20200273668
2020-08-27

Set of aperture substrates for multiple beams and multi charged particle beam apparatus

 #97
20200258716
2020-08-13

Multi-charged-particle beam writing apparatus and multi-charged-particle beam writing method

 #98
20200211820
2020-07-02

Method for scanning a sample by a charged particle beam system

 #99
20200203125
2020-06-25

Memory device with predetermined start-up value

 #100
20200203121
2020-06-25

OPTICAL SYSTEM ADJUSTMENT METHOD OF IMAGE ACQUISITION APPARATUS

 #101
20200194214
2020-06-18

Charged particle blocking element, exposure apparatus comprising such an element, and method for using such an exposure apparatus

 #102
20200176219
2020-06-04

Systems and methods for charged particle beam modulation

 #103
20200118791
2020-04-16

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #104
20200098540
2020-03-26

Extraction apparatus and system for high throughput ion beam processing

 #105
20200051782
2020-02-13

Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatus

 #106
20200043701
2020-02-06

Multiple charged particle beam writing apparatus and multiple charged particle beam writing method

 #107
20200043698
2020-02-06

Electron optical system and multi-beam image acquiring apparatus

 #108
20200027687
2020-01-23

Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam device

 #109
20190393013
2019-12-26

Multi-beam charged particle imaging apparatus

 #110
20190378688
2019-12-12

Data processing method, data processing apparatus, and multiple charged-particle beam writing apparatus

 #111
20190378676
2019-12-12

Deflector for multiple electron beams and multiple beam image acquiring apparatus

 #112
20190348255
2019-11-14

Scanning electron microscope and sample observation method using scanning electron microscope

 #113
20190318906
2019-10-17

Measurement and inspection device

 #114
20190311882
2019-10-10

Studying dynamic specimens in a transmission charged particle microscope

 #115
20190283177
2019-09-19

Laser processing system and laser processing method

 #116
20190259575
2019-08-22

Multi-beam particle beam system

 #117
20190214218
2019-07-11

Aperture array alignment method and multi charged particle beam writing apparatus

 #118
20190198294
2019-06-27

Multiple charged particle beam writing method and apparatus using beams for straddling regions

 #119
20190198290
2019-06-27

Multiple charged particle beam writing apparatus, and multiple charged particle beam writing method

 #120
20190189395
2019-06-20

Aperture set for multi-beam

 #121
20190172678
2019-06-06

Method of obtaining beam deflection shape and method of obtaining arrangement angle of blanking aperture array plate

 #122
20190164723
2019-05-30

Fill pattern to enhance e-beam process margin

 #123
20190155160
2019-05-23

Ebeam universal cutter

 #124
20190122856
2019-04-25

Multi-charged-particle beam writing apparatus

 #125
20190121236
2019-04-25

Cross scan proximity correction with ebeam universal cutter

 #126
20190115185
2019-04-18

Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method

 #127
20190096630
2019-03-28

DEVICE AND METHOD FOR GENERATING CHARGED PARTICLE BEAM PULSES

 #128
20190080877
2019-03-14

Charged particle beam writing apparatus and method for diagnosing failure of blanking circuit

 #129
20190051494
2019-02-14

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

 #130
20190051487
2019-02-14

Optical system adjustment method of image acquisition apparatus

 #131
20190043691
2019-02-07

Systems and methods for charged particle flooding to enhance voltage contrast defect signal

 #132
20190035603
2019-01-31

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #133
20190027338
2019-01-24

Sample holding mechanism, manufacturing method for same, and charged particle beam device

 #134
20190013175
2019-01-10

Aperture size modulation to enhance ebeam patterning resolution

 #135
20190004429
2019-01-03

Method for acquiring parameter for dose correction of charged particle beam, charged particle beam writing method, and charged particle beam writing apparatus

 #136
20180350552
2018-12-06

Multi charged particle beam drawing apparatus and multi charged particle beam drawing method

 #137
20180323034
2018-11-08

Reduced Coulomb interactions in a multi-beam column

 #138
20180277332
2018-09-27

Charged particle beam apparatus

 #139
20180269034
2018-09-20

Charged particle beam writing method and charged particle beam writing apparatus

 #140
20180261427
2018-09-13

Microstructure manufacturing method and microstructure manufacturing apparatus

 #141
20180261421
2018-09-13

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

 #142
20180247788
2018-08-30

Multi charged particle beam writing apparatus and adjusting method for multi charged particle beam writing apparatus

 #143
20180166248
2018-06-14

Blanking deflector, and multi charged particle beam writing apparatus using three deflector electrodes and a transmission line

 #144
20180151327
2018-05-31

Beam blanker and method for blanking a charged particle beam

 #145
20180151326
2018-05-31

Time-resolved charged particle microscopy

 #146
20180144905
2018-05-24

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #147
20180143526
2018-05-24

Ebeam three beam aperture array

 #148
20180138013
2018-05-17

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #149
20180138012
2018-05-17

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #150
20180130634
2018-05-10

Electron microscope and image acquisition method

 #151
20180108514
2018-04-19

Multi-column electron beam lithography including field emitters on a silicon substrate with boron layer

 #152
20180106610
2018-04-19

Charged particle beam device with transient signal correction during beam blanking

 #153
20180076002
2018-03-15

Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method

 #154
20180040453
2018-02-08

Multi charged particle beam writing apparatus and method of adjusting the same

 #155
20180033593
2018-02-01

Fine alignment system for electron beam exposure system

 #156
20180033586
2018-02-01

APPARATUS AND METHOD FOR PROCESSING OR IMAGING A SAMPLE

 #157
20180012731
2018-01-11

Blanking aperture array, method for manufacturing blanking aperture array, and multi-charged particle beam writing apparatus

 #158
20180005799
2018-01-04

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #159
20170358426
2017-12-14

Exposure apparatus and exposure method

 #160
20170358425
2017-12-14

Multi charged-particle beam writing apparatus and adjustment method for the same

 #161
20170352520
2017-12-07

Multi charged particle beam exposure method, and multi charged particle beam exposure apparatus

 #162
20170345612
2017-11-30

Blanking device for multi charged particle beams, and multi charged particle beam irradiation apparatus

 #163
20170316914
2017-11-02

Stage mechanism

 #164
20170309440
2017-10-26

Multi charged particle beam irradiation apparatus, multi charged particle beam irradiation method, and multi charged particle beam adjustment method

 #165
20170301506
2017-10-19

Multi charged particle beam exposure method, and multi charged particle beam blanking apparatus

 #166
20170271118
2017-09-21

Multi charged particle beam blanking apparatus, multi charged particle beam blanking method, and multi charged particle beam writing apparatus

 #167
20170271117
2017-09-21

Corner rounding correction for electron beam (Ebeam) direct write system

 #168
20170269481
2017-09-21

Cross scan proximity correction with ebeam universal cutter

 #169
20170243713
2017-08-24

Studying dynamic specimen behavior in a charged-particle microscope

 #170
20170229280
2017-08-10

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #171
20170207057
2017-07-20

Multi-piece electrode aperture

 #172
20170207056
2017-07-20

Multi charged particle beam writing method and multi charged particle beam writing apparatus

 #173
20170200581
2017-07-13

Heat-spreading blanking system for high throughput electron beam apparatus

 #174
20170186582
2017-06-29

Control system and method for lithography apparatus

 #175
20170178862
2017-06-22

Multiple charged particle beam apparatus

 #176
20170169993
2017-06-15

Multi charged particle beam apparatus, and shape adjustment method of multi charged particle beam image

 #177
20170162361
2017-06-08

Ultra broad band continuously tunable electron beam pulser

 #178
20170133199
2017-05-11

Systems including a beam projection device providing variable exposure duration resolution

 #179
20170125208
2017-05-04

Pattern inspection apparatus and pattern inspection method

 #180
20170098524
2017-04-06

Multi charged particle beam writing method and multi charged particle beam writing apparatus

 #181
20170090298
2017-03-30

Exposure apparatus and exposure method

 #182
20170084421
2017-03-23

Backscattered electrons (BSE) imaging using multi-beam tools

 #183
20170077029
2017-03-16

Unidirectional metal on layer with ebeam

 #184
20170076906
2017-03-16

Ebeam staggered beam aperture array

 #185
20170076905
2017-03-16

Ebeam three beam aperture array

 #186
20170069509
2017-03-09

DATA COMPRESSION FOR EBEAM THROUGHPUT

 #187
20160365223
2016-12-15

Method for evaluating charged particle beam drawing apparatus

 #188
20160322199
2016-11-03

Apparatus for charged particle lithography system

 #189
20160322196
2016-11-03

Multi-charged particle beam writing apparatus and multi-charged particle beam writing method

 #190
20160314930
2016-10-27

Device, manufacturing method, and exposure apparatus

 #191
20160240344
2016-08-18

Charged particle inspection method and charged particle system

 #192
20160189930
2016-06-30

Exposure apparatus and exposure method

 #193
20160161849
2016-06-09

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #194
20160155608
2016-06-02

Multi charged particle beam writing apparatus, and multi charged particle beam writing method

 #195
20160155600
2016-06-02

Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams

 #196
20160148784
2016-05-26

Dynamic pattern generator and method of toggling mirror cells of the dynamic pattern generator

 #197
20160141142
2016-05-19

Blanking system for multi charged particle beams, and multi charged particle beam writing apparatus

 #198
20160111252
2016-04-21

Charged particle beam writing apparatus, charged particle beam writing method, and shot correction method of charged particle beam writing method

 #199
20160111246
2016-04-21

Blanking device for multi charged particle beams, and multi charged particle beam writing apparatus

 #200
20160093470
2016-03-31

Chicane blanker assemblies for charged particle beam systems and methods of using the same

 #201
20160086768
2016-03-24

Ozone supplying apparatus, ozone supplying method, and charged particle beam drawing system

 #202
20160071692
2016-03-10

Data generating apparatus, energy beam writing apparatus, and energy beam writing method

 #203
20160071682
2016-03-10

Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method

 #204
20160064179
2016-03-03

Blanking device for multi-beam of charged particle writing apparatus using multi-beam of charged particle and defective beam blocking method for multi-beam of charged particle

 #205
20160064178
2016-03-03

Blanking device for multi charged particle beams, and multi charged particle beam writing apparatus

 #206
20160061876
2016-03-03

Inspection method for blanking device for blanking multi charged particle beams

 #207
20160049278
2016-02-18

Apparatus for charged particle lithography system

 #208
20160042908
2016-02-11

Multi charged particle beam writing method and multi charged particle beam writing apparatus

 #209
20160020063
2016-01-21

Charged particle beam writing apparatus and charged particle beam writing method

 #210
20160013019
2016-01-14

Compensation of imaging deviations in a particle-beam writer using a convolution kernel

 #211
20160013012
2016-01-14

Charged Particle Beam System

 #212
20160012170
2016-01-14

Customizing a particle-beam writer using a convolution kernel

 #213
20150380214
2015-12-31

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

 #214
20150380213
2015-12-31

Apparatus and method for calculating drawing speeds of a charged particle beam

 #215
20150340196
2015-11-26

Multi charged particle beam writing method, and multi charged particle beam writing apparatus

 #216
20150318139
2015-11-05

TARGET DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

 #217
20150311035
2015-10-29

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING AN ARTICLE

 #218
20150311030
2015-10-29

Multi-beam tool for cutting patterns

 #219
20150303029
2015-10-22

Multi charged particle beam writing apparatus, and multi charged particle beam writing method

 #220
20150303028
2015-10-22

Ion beam processing method and ion beam processing apparatus

 #221
20150303026
2015-10-22

Electron beam writing apparatus, and method for adjusting convergence half angle of electron beam

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20150303025
2015-10-22

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING AN ARTICLE

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20150255249
2015-09-10

Multi charged particle beam writing apparatus

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20150248993
2015-09-03

Compensation of defective beamlets in a charged-particle multi-beam exposure tool

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20150243481
2015-08-27

Proximity effect correction in a charged particle lithography system

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20150155138
2015-06-04

Multi charged particle beam writing apparatus, and multi charged particle beam writing method

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20150155130
2015-06-04

DRAWING APPARATUS, DRAWING METHOD, AND METHOD FOR MANUFACTURING ARTICLE

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20150144801
2015-05-28

PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING THE SAME

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20150136994
2015-05-21

Modulation device and power supply arrangement

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20150129773
2015-05-14

Blanking device for multi charged particle beam, and multi charged particle beam writing method

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2015-04-02

DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

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20150069260
2015-03-12

CHARGED-PARTICLE MULTI-BEAM APPARATUS HAVING CORRECTION PLATE

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20150021493
2015-01-22

Pattern definition device having multiple blanking arrays

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20150008331
2015-01-08

Charged particle inspection method and charged particle system

 #235
20150004807
2015-01-01

Drawing apparatus, and method of manufacturing article

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20150001417
2015-01-01

Blanking apparatus, drawing apparatus, and method of manufacturing article

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20140367586
2014-12-18

Charged particle beam system and method of operating thereof

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20140346355
2014-11-27

Electron microscope

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2014-10-30

Drawing apparatus, and method of manufacturing article

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20140264086
2014-09-18

Charged particle lithography system

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20140264085
2014-09-18

Method for exposing a wafer

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20140264066
2014-09-18

Deflection scan speed adjustment during charged particle exposure

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20140217303
2014-08-07

Particle beam system and method for operating the same

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20140203185
2014-07-24

Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method

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20140124684
2014-05-08

Multi charged particle beam writing method and multi charged particle beam writing apparatus

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20140106279
2014-04-17

Drawing apparatus, and method of manufacturing article

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20140103225
2014-04-17

Beam pulsing device for use in charged-particle microscopy

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20140041684
2014-02-13

Techniques for improving the performance and extending the lifetime of an ion source

 #249
20140008534
2014-01-09

Measuring/inspecting apparatus and measuring/inspecting method enabling blanking control of electron beam

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2013-12-05

Devices and methods for improved reflective electron beam lithography

 #251
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2013-11-14

Charged particle beam applied apparatus, and irradiation method

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2013-10-03

Automated ion beam idle

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2013-09-26

Multi charged particle beam writing apparatus utilizing multiple staged mutually orthogonal beam blankers

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20130193341
2013-08-01

Methods, devices, and systems for manipulating charged particle streams

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20130149646
2013-06-13

Charged particle beam writing apparatus and charged particle beam writing method

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20130112891
2013-05-09

Charged particle optical system and scribing apparatus

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20130082188
2013-04-04

Particle beam system and method for operating the same

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20130078577
2013-03-28

CHARGED PARTICLE BEAM DRAWING APPARATUS, DRAWING DATA GENERATION METHOD, DRAWING DATA GENERATION PROGRAM STORAGE MEDIUM, AND ARTICLE MANUFACTURING METHOD

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2013-01-31

ELECTROLYTIC PLATING METHOD AND ELECTROSTATIC DEFLECTING DEVICE

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2012-11-22

Charged particle lithography system with aperture array cooling

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2012-11-22

Charged particle beam modulator

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2012-11-15

Dual pass scanning

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2012-11-01

Charged particle system comprising a manipulator device for manipulation of one or more charged particle beams

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2012-11-01

Modulation device and charged particle multi-beamlet lithography system using the same

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2012-10-18

Beam blanker for interrupting a beam of charged particles

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2012-09-13

Charged particle beam drawing apparatus and article manufacturing method using same

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2012-08-30

DRAWING APPARATUS, DRAWING METHOD AND METHOD OF MANUFACTURING ARTICLE

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2012-08-30

Bladed Ion Slicer

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2012-08-30

Ion slicer with accelleration and decelleration optics

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2012-06-14

Lithography system, modulation device and method of manufacturing a fiber fixation substrate

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2012-05-24

Drawing apparatus, method of manufacturing article, method of manufacturing deflecting apparatus, and method of manufacturing drawing apparatus

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2012-05-10

DEFLECTOR ARRAY, CHARGED PARTICLE BEAM DRAWING APPARATUS, DEVICE MANUFACTURING METHOD, AND DEFLECTOR ARRAY MANUFACTURING METHOD

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2012-05-10

Apparatus and method for controlled particle beam manufacturing

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2012-04-19

Beamlet blanker arrangement

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2012-02-23

OPTICAL SWITCHING IN A LITHOGRAPHY SYSTEM

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2012-02-02

Particle beam system

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2012-01-19

Drawing apparatus and method of manufacturing article

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2011-11-03

Charged particle multi-beamlet lithography system, modulation device, and method of manufacturing thereof

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2011-10-27

Modulation device and charged particle multi-beamlet lithography system using the same

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2011-10-27

Charged particle multi-beamlet lithography system with modulation device

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2011-08-25

Pattern definition device with multiple multibeam array

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2011-08-18

SHUTTER DEVICE AND VACUUM PROCESSING APPARATUS

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2011-07-14

WEAK-LENS COUPLING OF HIGH CURRENT ELECTRON SOURCES TO ELECTRON MICROSCOPE COLUMNS

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2010-11-18

Multi-beam deflector array means with bonded electrodes

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2010-10-14

Device for deflecting or guiding in a particle beam

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2010-09-23

Charged particle beam writing apparatus

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2010-09-09

Charged particle beam processing

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2010-07-29

Method for producing a multi-beam deflector array device having electrodes

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2010-06-17

Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns

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20100117510
2010-05-13

Apparatus and method for generating femtosecond electron beam

 #291
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2010-04-22

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

 #292
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2010-03-25

Pattern forming apparatus and pattern forming method

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2010-02-25

Lithography system

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2009-10-22

INSPECTION APPARATUS AND INSPECTION METHOD

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2009-10-15

Charged Particle Inspection Method and Charged Particle System

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20090212240
2009-08-27

Charged particle beam exposure system

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20090206272
2009-08-20

Variable-ratio double-deflection beam blanker

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2009-08-13

Particle-beam exposure apparatus with overall-modulation of a patterned beam

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2009-05-07

Charged particle-optical systems, methods and components

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2009-04-02

Charged-particle beam writing apparatus and charged-particle beam writing method