205198 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement; Electron sources; Electron guns Electron guns using electron multiplication
Multi-electron beam device
#2Energy radiation generator with bi-polar voltage ladder
#3Energy radiation generator with uni-polar voltage ladder
#4Energy radiation generator with bi-polar voltage ladder
#5Electron gun and electron beam apparatus field of invention