ULTRA FAST PULSER FOR LOW ENERGY ELECTRON BEAMS

MEASUREMENT DEVICE

Charged Particle Beam Apparatus and Charged Particle Gun

LINEAR TCP SOURCE, A CHARGED PARTICLE BEAM SOURCE USING THE LINEAR TCP SOURCE AND A GRID FOR THE CHARGED PARTICLE BEAM SOURCE

METHOD AND SYSTEM FOR 3D RECONSTRUCTION OF WAFER STRUCTURE BY DIAGONAL MILLING

METHOD AND SYSTEMS FOR BALANCING CHARGES ON A SURFACE OF AN OBJECT COMPRISING INTEGRATED CIRCUIT PATTERNS IN A SCANNING ELECTRON MICROSCOPE

ELECTRON SOURCE

ELECTRON BEAM DEVICE FOR SURFACE TREATMENT

HYBRID BACKGROUND EXTRACTION IN ELECTRON HOLOGRAPHY

MULTI-BEAM CHARGED PARTICLE MICROSCOPE DESIGN WITH DETECTION SYSTEM FOR FAST CHARGE COMPENSATION

Energy Converter and Method

CHARGED PARTICLE BEAM DISTORTION CORRECTION METHOD

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

CONTAMINATION PREVENTION DEVICE FOR EXTREME ULTRA-VIOLET (EUV) RETICLE AND EUV EXPOSURE APPARATUS INCLUDING THE SAME

DRY ELECTRON SOURCE ENVIRONMENT

MOBILE ACCELERATOR-BASED VOLUMETRIC FABRICATION METHOD FOR IN-SITU CONSTRUCTION OF THREE-DIMENSIONAL STRUCTURES

System and Method for Determining Properties of a Substrate

COATING METHOD

METHOD FOR EVALUATING THERMIONIC ELECTRON EMITTER IN SITU

MICRO DEVICE FABRICATING METHOD AND APPARATUS

ELECTRON-ENHANCED ATOMIC LAYER DEPOSITION (EE-ALD) METHODS AND DEVICES PREPARED BY SAME

ELECTRON BEAM IRRADIATION DEVICE

POWER POLISHING APPARATUSES AND METHODS FOR IN-SITU FINISHING AND COATING OF OPTICAL COMPONENT

SYSTEM AND METHOD FOR TARGETED RE-EXAMINATION, INNER LAYER DEFECT ANALYSIS, PROTEIN IDENTIFICATION, AND PHOTON COMPUTER

PATHOGENIC CONTROL COMPOSITIONS AND METHODS

SUBSTRATE INSPECTION APPARATUS AND A METHOD OF INSPECTING A SUBSTRATE USING THE SAME

Beam bending snout for mobile electron accelerators

Apparatus of plural charged-particle beams

Method and system of image-forming multi-electron beams

Electron-beam irradiation apparatus and maintenance method for electron-beam irradiation apparatus

ELECTRON BEAM APPLICATION DEVICE

ELECTRON SOURCE AND METHOD FOR MANUFACTURING SAME, AND EMITTER AND DEVICE PROVIDED WITH SAME

EMITTER AND DEVICE PROVIDED WITH SAME

PHOTOELECTRIC SURFACE ELECTRON SOURCE

Apparatus of plural charged-particle beams

Forming method of plasma resistant oxyfluoride coating layer

SURFACE ANALYSIS SYSTEM COMPRISING A PULSED ELECTRON SOURCE

Charged particle beam device

Power supply module and charged particle beam device

Inspection apparatus

Apparatus for multiple charged-particle beams

ELECTRON BEAM EMITTING ASSEMBLY

CHARGED PARTICLE BEAM APPARATUS

Charged particle beam system

Charged particle beam device

Infrastructure-scale additive manufacturing using mobile electron accelerators

Coating apparatus and coating method

Coating Apparatus and Coating Method

Apparatus of plural charged-particle beams

Electron source and production method therefor

Plasma processing apparatuses including multiple electron sources

Cleaning device

Device and method for pasteurizing and/or sterilizing particulate material

Charged particle beam system

Method and system for in situ cross-linking of materials to produce three-dimensional features via electron beams from mobile accelerators

Charged particle beam lithography apparatus and charged particle beam pattern writing method

Electron beam irradiation device and electron beam irradiation method

Charged particle beam device

ELECTRON BEAM IRRADIATION DEVICE

Cylindrical shaped arc chamber for indirectly heated cathode ion source

Nano vacuum tube

Apparatus of plural charged-particle beams

Method and system for in situ cross-linking of materials to produce three-dimensional features via electron beams from mobile accelerators

Multi-beam electron characterization tool with telecentric illumination

Electron source and production method therefor

Deflection array apparatus for multi-electron beam system

Photocathode designs and methods of generating an electron beam using a photocathode

Local alignment point calibration method in die inspection

Apparatus for multiple charged-particle beams

Charged particle beam device

Robust and precise synchronization of microwave oscillators to a laser oscillator in pulsed electron beam devices

Method for operating a plurality of FIB-SEM systems

Substrate processing apparatus

Coating arrangement and method

3D defect characterization of crystalline samples in a scanning type electron microscope

Charged particle beam image acquisition apparatus

POWER POLISHING APPARATUSES AND METHODS FOR IN-SITU FINISHING AND COATING OF OPTICAL COMPONENT

Charge control device for a system with multiple electron beams

Charged particle beam system

Electron beam column for three-dimensional printing device, three-dimensional printing device, and three-dimensional printing method

Attomicroscopy: attosecond electron imaging and microscopy

Operating a particle beam apparatus

Transmission Electron Microscopy

Charged particle beam apparatus, and method and program for limiting stage driving range thereof

Tunable charged particle vortex beam generator and method

PLASMA BRIDGE NEUTRALIZER FOR ION BEAM ETCHING

Deflection sensitivity calculation method and deflection sensitivity calculation system

Electron source and production method therefor

Vibration control system and optical equipment equipped therewith

Electron beam 3D printing machine

Charged particle beam lithography apparatus and charged particle beam pattern writing method

Pattern measuring method, pattern measuring apparatus, and computer program storage device

Electron beam generation and measurement

Ruthenium encapsulated photocathode electron emitter

Photocathode designs and methods of generating an electron beam using a photocathode

Silicon electron emitter designs

Inspection method for wafer or DUT

Electron reflectometer and process for performing shape metrology

Nano vacuum tube

Charged particle beam apparatus using focus evaluation values for pattern length measurement

Plasmon-excited electron beam array for complementary patterning

High voltage power supply device and charged particle beam device

Generation and acceleration of charged particles using compact devices and systems

Method and apparatus for an imaging system

ELECTRON BEAM GENERATOR AND ELECTRON BEAM STERLIZING DEVICE

Simplified particle emitter and method of operating thereof

Local alignment point calibration method in die inspection

Multi-column spacing for photomask and reticle inspection and wafer print check verification

Electron microscope electron gun for facilitating position adjustment and electron microscope including same

Electron beam emitters with ruthenium coating

Additive manufacturing of three-dimensional articles

Method and apparatus for alignment of optical and charged-particle beams in an electron microscope

Wafer and DUT inspection apparatus and method using thereof

Electron beam apparatus and positional displacement correcting method of electron beam

Low Electron Temperature Etch Chamber with Independent Control Over Plasma Density, Radical Composition Ion Energy for Atomic Precision Etching

Sensing analytical instrument parameters, specimen characteristics, or both from sparse datasets

Composite charged particle beam device

Method and apparatus for an imaging system of biological material

Charged-particle microscope with in situ deposition functionality

Charged particle bean device and information-processing device

Electron microscope and method of controlling same

Method and system for scanning an object

Charged particles accelerator apparatus, charged particle gun and method of accelerating charged particles

Apparatus of plural charged-particle beams

Hybrid inspectors

Electron beam generator and electron beam sterilizing device

Scanning electron microscope

Electron gun, control method and control program thereof, and three-dimensional shaping apparatus

Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etching

Method and system for focus adjustment of a multi-beam scanning electron microscopy system

Multi-beam dark field imaging

Mass spectrometer performing mass spectrometry for sample with laser irradiation

Ebeam non-universal cutter

Method of cleaning electron source and electron beam writing apparatus

Method of determining crystallographic properties of a sample and electron beam microscope for performing the method

Apparatus of plural charged-particle beams

MEASUREMENT APPARATUS, MEASUREMENT METHOD, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

Apparatus for impinging bulk material with accelerated electrons

Systems and methods for particle pulse modulation

Plasmon-excited electron beam array for complementary patterning

Charge drain coating for electron-optical MEMS

High-speed hotspot or defect imaging with a charged particle beam system

Apparatus of plural charged-particle beams

Apparatus for GHz rate high duty cycle pulsing and manipulation of low and medium energy DC electron beams

Apparatus of plural charged-particle beams

Apparatus of plural charged-particle beams

Method and apparatus for inspection of scattered hot spot areas on a manufactured substrate

Electron beam generator, image apparatus including the same and optical apparatus

Multifunctional ultrafast electron gun of transmission electron microscope

Local alignment point calibration method in die inspection

Plasma ion source and charged particle beam apparatus

Plasma ion source and charged particle beam apparatus

Scanning electron microscope

Electron microscopy sample support including porous metal foil

Generation and acceleration of charged particles using compact devices and systems

Activation chamber, kit used in treatment device and treatment device, for lowering electron affinity

Method for S/TEM sample analysis

Multi charged particle beam writing method, and multi charged particle beam writing apparatus

Charged particle beam writing apparatus, charged particle beam writing method, and shot correction method of charged particle beam writing method

Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun

Method and system for in-situ cross linking of polymers, bitumen and similar materials to increase strength, toughness and durability via irradiation with electron beams from mobile accelerators

Electron microscope and sample observation method

Charged particle beam apparatus and image generation method

Systems and methods for particle pulse modulation

Method and apparatus for a high resolution imaging system

Apparatus and method for calculating drawing speeds of a charged particle beam

High-resolution amplitude contrast imaging

Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample

Charged particle beam application device

Phase analyzer, phase analysis method, and surface analyzer

Cathode obtaining method and electron beam writing apparatus

Charged particle beam device and method for analyzing defect therein

Multi charged particle beam writing method, and multi charged particle beam writing apparatus

Apparatus and method of applying small-angle electron scattering to characterize nanostructures on opaque substrate

Electron beam imaging with dual Wien-filter monochromator

Ion generator and thermal electron emitter

Multipole lens, aberration corrector, and electron microscope

Focused ion beam low kV enhancement

Method for creating S/TEM sample and sample structure

Focusing a charged particle system

Imaging a Sample with Multiple Beams and Multiple Detectors

Transmission electron microscope and method of displaying TEM images

Method for manufacturing electron source

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

Method for acquiring settling time

Method for S/TEM sample analysis

Device for producing an electron beam

Enhanced defect detection in electron beam inspection and review

Focused ion beam low kV enhancement

Method and device for measuring unoccupied states of solid

Ion implantation with charge and direction control

Electrode material with low work function and high chemical stability

Self-sustained non-ambipolar direct current (DC) plasma at low power

Transmission electron diffraction measurement apparatus and method for measuring transmission electron diffraction pattern

SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD

Charged particle vortex wave generation

Inspection system by charged particle beam and method of manufacturing devices using the system

Current regulation method of multiple beams

Cathode operating temperature adjusting method, and writing apparatus

Exposure apparatus for forming a reticle

Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample

ELECTRON BEAM EXPOSURE APPARATUS

Enclosure and method for handling electron gun or ion gun

Charged particle beam apparatus with cleaning photo-irradiation apparatus

Apparatus and method for removal of surface oxides via fluxless technique involving electron attachment

Ion implantation with charge and direction control

Particle sources and methods for manufacturing the same

Exposure apparatus for forming a reticle and method of forming a reticle using the same

Electron source having a tungsten single crystal electrode

APPARATUS FOR GENERATING ELECTRON BEAMS, AND METHOD FOR MANUFACTURING SAME

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

Charged particle source with multiple selectable particle emitters

Method for creating S/TEM sample and sample structure

Method and apparatus for inspection of scattered hot spot areas on a manufactured substrate

Variable energy charged particle systems

Electron beam source and method of manufacturing the same

Charged particle source with integrated electrostatic energy filter

CHARGED PARTICLE GUN AND CHARGED PARTICLE BEAM DEVICE

SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF

Inspection system by charged particle beam and method of manufacturing devices using the system

Multi-column electron beam exposure apparatus and magnetic field generation device

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

Spin-polarized electron source

Method and apparatus of pretreatment of an electron gun chamber

Mobile type electron accelerator

Method for S/TEM sample analysis

Magnetically insulated cold-cathode electron gun

Electron microscope with an emitter operating in medium vacuum

Method for creating S/TEM sample and sample structure

Electron emitting source and manufacturing method of electron emitting source

Method for creating S/tem sample and sample structure

Electron source

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

Electron beam source and method of manufacturing the same

Surface emission type electron source and drawing device

Electron beam exciter for use in chemical analysis in processing systems

Method of controlling electron beam focusing of pierce-type electron gun and control apparatus therefor

Charged particle beam exposure system

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

Inspection system by charged particle beam and method of manufacturing devices using the system

Electron source manufacturing method

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

Sheet beam-type testing apparatus

Apparatus for producing secondary electrons, a secondary electrode, and an acceleration electrode

Ultra-bright pulsed electron beam with low longitudinal emittance

Electron beam apparatus and device production method using the electron beam apparatus

Diamond Electron Emission Cathode, Electron Emission Source, Electron Microscope, And Electron Beam Exposure Device

Method for inspecting substrate, substrate inspecting system and electron

Diamond electron emission cathode, electron emission source, electron microscope, and electron beam exposure device

Electron Beam Etching Apparatus and Method for the same

Diamond electron emission cathode, electron emission source, electron microscope, and electron beam exposure device

Inspection system by charged particle beam and method of manufacturing devices using the system

Electron beam generator for multiple columns

Electron beam apparatus and device production method using the electron beam apparatus

Inspection system by charged particle beam and method of manufacturing devices using the system

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

Method of electric discharge machining a cathode for an electron gun

Method of fabricating nanodevices

Portable scanning electron microscope

Electron microscope apparatus using CRT-type optics

Device and method for selecting an emission area of an emission pattern

Inspection system by charged particle beam and method of manufacturing devices using the system

Method for inspecting substrate, substrate inspecting system and electron beam apparatus

Field emitter arrangement and method of cleansing an emitting surface of a field emitter

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

CONTINUOUSLY CLEANING OF THE EMISSION SURFACE OF A COLD FIELD EMISSION GUN USING UV OR LASER BEAMS

Sheet beam-type testing apparatus

Electron source

Charged particle beam exposure system

Electron beam exposure system

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

Sheet beam-type inspection apparatus

Internal conductively-heated cathode

Cathode with improved work function and method for making the same

Positron source and method

Three-dimensional (3D) imaging system and method for nanostructure

System and method for targeted re-examination, inner layer defect analysis, protein identification, and photon computer

Apparatus, method and system for imaging and utilization of SEM charged particles

Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays

Image generation apparatus

Multi-beam electron microscope for electron channeling contrast imaging of semiconductor material

Precision deposition using miniature-column charged particle beam arrays

Precision deposition using miniature-column charged particle beam arrays

Inspection site preparation