Patents-Review.com
ClassID:

205199 ⎘

H01J37/063 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement; Electron sources; Electron guns Geometrical arrangement of electrodes for beam-forming

Recent Application in this class:
#1
20260135014
2026-05-14

ELECTRON BEAM IRRADIATION DEVICE

 #2
20260128252
2026-05-07

VERTICAL ELECTRODE CONFIGURATION

 #3
20260120989
2026-04-30

APPARATUS AND METHOD FOR IMPROVED ELECTRON BEAM INSPECTION WITH A CHARGE TREATMENT ELECTRON SOURCE

 #4
20260066607
2026-03-05

LIGHT SOURCE SYSTEM AND METHOD OF OPERATION

 #5
20250273423
2025-08-28

ELECTRON GUN AND ELECTRON BEAM WRITING APPARATUS

 #6
20250174424
2025-05-29

ION GENERATOR AND ION IMPLANTER

 #7
20250062095
2025-02-20

PHOTO-ASSISTED ELECTRON BEAM EMITTER

 #8
20250014861
2025-01-09

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CLEANING ELECTRODE ASSEMBLY

 #9
20240282546
2024-08-22

PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION REACTORS AND ASSOCIATED METHODS

 #10
20240242918
2024-07-18

Structure for Particle Acceleration And Charged Particle Beam Apparatus

 #11
20240145213
2024-05-02

WIRE OR ROD SHAPED EXTRACTION ELECTRODE OPTICS

 #12
20240120173
2024-04-11

EBEAM INSPECTION

 #13
20240079199
2024-03-07

Ion generator and ion implanter

 #14
20230215679
2023-07-06

Electron source, method for manufacturing same, emitter, and device including same

 #15
20230131413
2023-04-27

Electron gun, electron beam applicator, and method for controlling electron gun

 #16
20230017894
2023-01-19

FLOOD COLUMN, CHARGED PARTICLE TOOL AND METHOD FOR CHARGED PARTICLE FLOODING OF A SAMPLE

 #17
20230010176
2023-01-12

Cold-Field-Emitter Electron Gun with Self-Cleaning Extractor Using Reversed E-Beam Current

 #18
20220301808
2022-09-22

Ion generator and ion implanter

 #19
20220262598
2022-08-18

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

 #20
20220148851
2022-05-12

Apparatus of plural charged-particle beams

 #21
20220130634
2022-04-28

Emitter, electron gun using same, and electronic device

 #22
20220130633
2022-04-28

Schottky thermal field emitter with integrated beam splitter

 #23
20220108862
2022-04-07

ELECTRON SOURCE WITH MAGNETIC SUPPRESSOR ELECTRODE

 #24
20220068589
2022-03-03

CHARGED PARTICLE SOURCE

 #25
20210335573
2021-10-28

Charged-particle source

 #26
20210327770
2021-10-21

Electron beam system for inspection and review of 3D devices

 #27
20210110997
2021-04-15

Electron beam generator, plasma processing apparatus having the same and plasma processing method using the same

 #28
20210104377
2021-04-08

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

 #29
20210078252
2021-03-18

Apparatus for generating electron radiation and 3D printing apparatus

 #30
20200411280
2020-12-31

Multiple electron-beam image acquisition apparatus and multiple electron-beam image acquisition method using beam arrangement with omitted corners in a scan direction

 #31
20200395191
2020-12-17

Multibeam inspection apparatus

 #32
20200388464
2020-12-10

Apparatus of plural charged-particle beams

 #33
20200321186
2020-10-08

METHOD AND APPARATUS FOR ANGLED ETCHING

 #34
20200303153
2020-09-24

Ion generator and ion implanter

 #35
20200286704
2020-09-10

Multiple electron beams irradiation apparatus

 #36
20200279718
2020-09-03

Charged particle multi-beam device

 #37
20200266020
2020-08-20

Electron gun and electron beam application device

 #38
20200219695
2020-07-09

Ion source device

 #39
20200126753
2020-04-23

Charged particle source

 #40
20190259572
2019-08-22

Charged particle beam inspection method

 #41
20190237288
2019-08-01

Charged-particle source and method for cleaning a charged-particle source using back-sputtering

 #42
20190193192
2019-06-27

Enhanced electron beam generation

 #43
20190108973
2019-04-11

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

 #44
20190080879
2019-03-14

Charged-particle beam apparatus, charged-particle beam writing apparatus, and charged-particle beam controlling method

 #45
20190080878
2019-03-14

Electron gun and electron beam device

 #46
20190057833
2019-02-21

Charged particle source

 #47
20180254165
2018-09-06

Simplified particle emitter and method of operating thereof

 #48
20180240640
2018-08-23

Electron source architecture for a scanning electron microscopy system

 #49
20170309436
2017-10-26

Electron-beam spot optimization

 #50
20170296844
2017-10-19

Beam position monitors for medical radiation machines

 #51
20170271118
2017-09-21

Multi charged particle beam blanking apparatus, multi charged particle beam blanking method, and multi charged particle beam writing apparatus

 #52
20170213685
2017-07-27

X-ray tube including hybrid electron emission source

 #53
20160336141
2016-11-17

Charged particle beam writing apparatus and charged particle beam writing method

 #54
20160247657
2016-08-25

MICRO-ELECTRON COLUMN HAVING NANO STRUCTURE TIP WITH EASILY ALIGNING

 #55
20160189911
2016-06-30

High dose output, through transmission target X-ray system and methods of use

 #56
20160189908
2016-06-30

Low aberration, high intensity electron beam for X-ray tubes

 #57
20160104597
2016-04-14

Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun

 #58
20160064185
2016-03-03

Imaging apparatus having a plurality of movable beam columns, and method of inspecting a plurality of regions of a substrate intended to be substantially identical

 #59
20160056016
2016-02-25

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

 #60
20150270088
2015-09-24

Electron gun, method of controlling same, and electron beam additive manufacturing machine

 #61
20140264063
2014-09-18

High brightness electron gun, system using the same, and method of operating thereof

 #62
20140264019
2014-09-18

Electron gun arrangement

 #63
20140077077
2014-03-20

Dual-lens-gun electron beam apparatus and methods for high-resolution imaging with both high and low beam currents

 #64
20130032716
2013-02-07

Electron beam apparatus and a device manufacturing method by using said electron beam apparatus

 #65
20120126697
2012-05-24

Crossover point regulation method for electro-static focusing systems

 #66
20120091359
2012-04-19

SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF

 #67
20120062094
2012-03-15

Electron gun

 #68
20110294071
2011-12-01

ELECTRON GUN, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING ARTICLE, AND ELECTRON BEAM APPARATUS

 #69
20110284763
2011-11-24

Charged particle source with integrated energy filter

 #70
20110084591
2011-04-14

THERMAL FIELD EMISSION CATHODE

 #71
20110068675
2011-03-24

Multiple device shaping uniform distribution of current density in electro-static focusing systems

 #72
20110062898
2011-03-17

Dual element switched electron gun

 #73
20110018470
2011-01-27

Electron gun with magnetic immersion double condenser lenses

 #74
20100320942
2010-12-23

Electron gun used in particle beam device

 #75
20100277053
2010-11-04

Multiple device shaping uniform distribution of current density in electro-static focusing systems

 #76
20100117510
2010-05-13

Apparatus and method for generating femtosecond electron beam

 #77
20100090581
2010-04-15

Electron source

 #78
20100090579
2010-04-15

Device for the field emission of particles and production method

 #79
20100019648
2010-01-28

Electron gun minimizing sublimation of electron source and electron beam exposure apparatus using the same

 #80
20090315444
2009-12-24

Thermal field emission cathode

 #81
20090289204
2009-11-26

Electron beam emitter with slotted gun

 #82
20090289195
2009-11-26

Charged particle source with integrated energy filter

 #83
20090218508
2009-09-03

COLD CATHODE FIELD EMISSION ELECTRON GUN AND ITS APPLICATION TO ELECTRON BEAM INSTRUMENTS

 #84
20090039262
2009-02-12

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

 #85
20090026912
2009-01-29

INTENSITY MODULATED ELECTRON BEAM AND APPLICATION TO ELECTRON BEAM BLANKER

 #86
20080277584
2008-11-13

Method for Changing Energy of Electron Beam in Electron Column

 #87
20080217531
2008-09-11

Integrated deflectors for beam alignment and blanking in charged particle columns

 #88
20080211376
2008-09-04

Electron gun, electron beam exposure apparatus, and exposure method

 #89
20080153376
2008-06-26

Processing method and processing device of conditioning electron gun

 #90
20080073547
2008-03-27

Apparatus for generating a plurality of beamlets

 #91
20070029509
2007-02-08

Apparatus for generating a plurality of beamlets

 #92
20070029499
2007-02-08

Apparatus for generating a plurality of beamlets

 #93
20070018112
2007-01-25

Apparatus for generating a plurality of beamlets

 #94
20070018101
2007-01-25

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

 #95
20060097200
2006-05-11

Electron beam apparatus and a device manufacturing method by using said electron beam apparatus

 #96
20050199820
2005-09-15

Particle beam generator

 #97
16033987
2019-12-10

High performance inspection scanning electron microscope device and method of operating the same