ELECTRON BEAM IRRADIATION DEVICE

STABILIZING A TIP WIRE OF AN ELECTRON SOURCE

CATHODE ASSEMBLY FOR ELECTRON GUN

SYSTEM AND APPARATUS FOR STABILIZING ELECTRON SOURCES IN CHARGED PARTICLE SYSTEMS

SYSTEM AND METHOD FOR ADJUSTING BEAM CURRENT USING A FEEDBACK LOOP IN CHARGED PARTICLE SYSTEMS

High-Voltage Insulating Structure, Charged Particle Gun, and Charged Particle Beam Device

FILAMENT ALIGNMENT DEVICE

Electron gun cathode mount

Emitter, electron gun in which same is used, electronic device in which same is used, and method for manufacturing same

Electron source, method for manufacturing same, and device provided with electron source

ELECTRON SOURCE, ELECTRON GUN, AND CHARGED PARTICLE BEAM DEVICE

ELECTROMAGNETIC LENS AND ELECTRON SOURCE MECHANISM

Cathode mechanism of electron emission source, and method for manufacturing cathode mechanism of electron emission source

ABERRATION CORRECTION IN CHARGED PARTICLE SYSTEM

Charged particle beam apparatus, scanning electron microscope, and method of operating a charged particle beam apparatus

Electron emitter and method of fabricating same

CHARGED PARTICLE SOURCE

Electron gun device

Electron beam system for inspection and review of 3D devices

Electron source, method for manufacturing the same, and electron beam device using the same

Broad-energy spectrum electron gun

Electron emitter and method of fabricating same

Method of manufacturing electron source

Electron source and electron gun

Cathode assembly for electron gun

Multibeam inspection apparatus

Inspection tool, lithographic apparatus, electron beam source and an inspection method

ELECTRON MICROSCOPE EQUIPPED WITH AUTOMATIC BEAM ALIGNMENT

Charged particle source

Space charge insensitive electron gun designs

Charged-particle source and method for cleaning a charged-particle source using back-sputtering

Axial electron gun

Accelerator system for mineral component analysis, system and method for mineral component analysis

Electron emitter and method of fabricating same

ELECTRON EMISSION TUBE, ELECTRON IRRADIATION DEVICE, AND METHOD OF MANUFACTURING ELECTRON EMISSION TUBE

Charged particle source

Gun lens design in a charged particle microscope

Aberration correction in charged particle system

Low work function electron beam filament assembly

Electron source architecture for a scanning electron microscopy system

ELECTRON BEAM PROJECTOR WITH LINEAR THERMAL CATHODE

Electron microscope electron gun for facilitating position adjustment and electron microscope including same

Additive manufacturing of three-dimensional articles

X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal

Charged particle beam device, and method of manufacturing component for charged particle beam device

X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal

Electron-beam spot optimization

Exposure apparatus

High voltage feedthrough assembly, time-resolved transmission electron microscope and method of electrode manipulation in a vacuum environment

Ultra broad band continuously tunable electron beam pulser

Electron gun, control method and control program thereof, and three-dimensional shaping apparatus

Electron beam device

System and method for providing a clean environment in an electron-optical system

Micro-electron column having an electron emitter improving the density of an electron beam emitted from a nano structure tip

MICRO-ELECTRON COLUMN HAVING NANO STRUCTURE TIP WITH EASILY ALIGNING

Charged particle source arrangement for a charged particle beam device, charged particle beam device for sample inspection, and method for providing a primary charged particle beam for sample inspection in a charged particle beam

Electron gun supporting member and electron gun apparatus

X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal

Individually switched field emission arrays

Method for manufacturing electron source

Multi-electrode stack arrangement

Multi-electrode cooling arrangement

Multi-electrode electron optics

Cathode filament assembly

X-ray tube

Methods of ion source fabrication

Electron microscope

Electron gun and charged particle beam device having an aperture with flare-suppressing coating

Thermionic cathode with even electric field distribution on electron emitting surface

High-brightness, long life thermionic cathode and methods of its fabrication

Method of producing rapid heating of a cathode installed in a thermionic emission assembly

Electron gun and electron beam device

Enclosure and method for handling electron gun or ion gun

Compact high-voltage electron gun

Charged particle source from a photoionized cold atom beam

Electron beam source and method of manufacturing the same

Crossover point regulation method for electro-static focusing systems

Filament for electron source

Charged particle radiation device

ELECTRON GUN, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING ARTICLE, AND ELECTRON BEAM APPARATUS

Electron beam device and electron beam application device using the same

System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission

Carbon nanotube electron gun

EVAPORATION SYSTEM

THERMAL FIELD EMISSION CATHODE

Multiple device shaping uniform distribution of current density in electro-static focusing systems

Gas field ion source with coated tip

Electron emitting source and manufacturing method of electron emitting source

Multiple device shaping uniform distribution of current density in electro-static focusing systems

Tip-sharpened carbon nanotubes and electron source using thereof

Electron source and electron beam apparatus

System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission

ELECTRON EMITTER HAVING NANO-STRUCTURE TIP AND ELECTRON COLUMN USING THE SAME

Electron source

IMPROVED PARTICLE BEAM GENERATOR

Electron beam control method, electron beam generating apparatus, apparatus using the same, and emitter

Electron beam source and method of manufacturing the same

Hot cathode and ion source including the same

ELECTRON SOURCE

Electron source

Thermal field emission cathode

Method and system for ultrafast photoelectron microscope

DIAMOND ELECTRON SOURCE AND METHOD FOR MANUFACTURING THE SAME

Electron beam heating system having carbon nanotubes

SCANNING ELECTRON MICROSCOPE

EMITTER CHAMBER, CHARGED PARTICAL APPARATUS AND METHOD FOR OPERATING SAME

Charged particle gun

Carbon nanotube electron gun

Ultra-bright pulsed electron beam with low longitudinal emittance

Charged beam gun

Conductive probe and method for producing the same

Electron beam apparatus and an aberration correction optical apparatus

Electron gun assembly

Method and system for ultrafast photoelectron microscope

Electron beam gun

System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission

Electron gun

Electron beam source having an extraction electrode provided with a magnetic disk element

Charged particle beam device with cleaning unit and method of operation thereof

Electron gun

High power, long focus electron source for beam processing

System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission

Method and system for ultrafast photoelectron microscope

Sample dimension measuring method and scanning electron microscope

Integrated sub-nanometer-scale electron beam systems

Multi-column charged particle optics assembly

Conical heat shield for electron emitting cathode

Low temperature, high-brightness, cathode

Extractor electrode for electron source