205201 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement; Electron sources; Electron guns Replacing parts of guns; Mutual adjustment of electrodes
Electron gun and system and method using electron gun
#2Charged Particle Beam Source and Charged Particle Beam System
#3Filament positioning system and filament positioning method
#4Gun lens design in a charged particle microscope
#5Electron source architecture for a scanning electron microscopy system
#6Charged particle beam generating apparatus, charged particle beam apparatus, high voltage generating apparatus, and high potential apparatus
#7Ion beam device
#8Enclosure and method for handling electron gun or ion gun
#9High brightness electron gun with moving condenser lens
#10ELECTRON BEAM DRAWING APPARATUS AND METHOD OF MANUFACTURING DEVICE
#11Indirectly heated cathode cartridge design
#12Ion sources, systems and methods
#13Ion beam device
#14Housing for A Micro-Column
#15Extraction electrode manipulator
#16Nanotip repair and characterization using field ion microscopy
#17SCANNING ELECTRON MICROSCOPE
#18Charged particle beam equipment
#19Charged particle gun
#20Electron gun assembly
#21Micro-column electron beam apparatus
#22Focusing apparatus and lithography system using the same
#23Extractor for an microcolumn, an alignment method for an extractor aperture to an electron emitter, and a measuring method and an alignment method using thereof