205208 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement Lenses
Sub-classes:COLLATION SYSTEM
#2SCANNING ELECTRON MICROSCOPE WITH ENHANCED THREE-DIMENSIONAL IMAGING
#3ELECTRON BEAM MICROSCOPE
#4APPARATUSES AND METHODS FOR MERGING ION BEAMS
#5Charged Particle Beam Apparatus and Charged Particle Gun
#6APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
#7APPARATUS FOR DETECTING ELECTRON, METHOD FOR DETECTING ELECTRON SIGNAL, AND ELECTRON MICROSCOPE
#8CHARGED PARTICLE OPTICAL DEVICE, OBJECTIVE LENS ASSEMBLY, DETECTOR, DETECTOR ARRAY, AND METHODS
#9MULTI-BEAM CHARGED PARTICLE MICROSCOPE DESIGN WITH A DETECTION UNIT FOR FAST COMPENSATION OF CHARGING EFFECTS
#10ELECTRON GUN, ELECTRON BEAM APPLICATION DEVICE, AND METHOD FOR FORMING MULTI-ELECTRON BEAM
#11ILLUMINATION LENS ADJUSTMENT METHOD, MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS, AND STORAGE MEDIUM
#12CHARGED PARTICLE BEAM DEVICE
#13USE OF MULTIPLE ELECTRON BEAMS FOR HIGH THROUGHPUT INSPECTION
#14ELECTRON GUN AND ELECTRON BEAM WRITING APPARATUS
#15REFLECTANCE CONFOCAL SCANNING ELECTRON MICROSCOPE AND OPERATING METHOD THEREOF
#16APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
#17MINIMIZATION OF ENERGY SPREAD IN FOCUSED ION BEAM (FIB) SYSTEMS
#18ABERRATION CORRECTION SYSTEMS AND CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME
#19Charged Particle Beam Device, and Beam Deflection Method in Charged Particle Beam Device
#20INSPECTION DEVICE AND FILM QUALITY INSPECTION METHOD
#21SEMICONDUCTOR MANUFACTURING DEVICE AND CONTROL OF THE SAME
#22MULTI-BEAM PARTICLE MICROSCOPE FOR REDUCING PARTICLE BEAM-INDUCED TRACES ON A SAMPLE
#23System and Method for Fully Integrated Microcrystal Electron Diffraction (MICROED)
#24METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM IMAGING DEVICE
#25MULTIPLE CHARGED PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATION, METHOD FOR OPERATING A MULTI-BEAM CHARGED PARTICLE MICROSCOPE SYSTEM WITH A MIRROR MODE OF OPERATION AND ASSOCIATED COMPUTER PROGRAM PRODUCT
#26IN-VACUUM CHAMBER CONTROLLED-GAS-FILM DEVICE TO REDUCE LASER ABLATION REDEPOSITS
#27METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING THE NUMERICAL APERTURE, ASSOCIATED COMPUTER PROGRAM PRODUCT AND MULTIPLE PARTICLE BEAM SYSTEM
#28CHARGED PARTICLE DEVICE, CHARGED PARTICLE ASSESSMENT APPARATUS, MEASURING METHOD, AND MONITORING METHOD
#29CHARGED-PARTICLE APPARATUS, MULTI-DEVICE APPARATUS, METHOD OF USING CHARGED-PARTICLE APPARATUS AND CONTROL METHOD
#30CHARGED-PARTICLE OPTICAL DEVICE
#31PARTICLE BEAM MICROSCOPE
#32Transmission charged particle microscope with an electron energy loss spectroscopy detector
#33MULTI-BEAM PARTICLE BEAM SYSTEM
#34Method for Alignment Free Ion Column
#35MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED BEAM CURRENT CONTROL
#36MULTI-BEAM PARTICLE BEAM SYSTEM
#37Apparatus of plural charged-particle beams
#38Multi-beam charged particle source with alignment means
#39CHARGED PARTICLE OPTICAL DEVICE, OBJECTIVE LENS ASSEMBLY, DETECTOR, DETECTOR ARRAY, AND METHODS
#40Charged particle beam system, method of operating a charged particle beam system, method of recording a plurality of images and computer programs for executing the methods
#41ELECTRON-OPTICAL SYSTEM AND METHOD OF OPERATING AN ELECTRON-OPTICAL SYSTEM
#42APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
#43Charged Particle Beam Device and Specimen Observation Method
#44Electron beam system
#45PHOTOELECTRIC SURFACE ELECTRON SOURCE
#46Gas reservoir, gas feed device having a gas reservoir, and particle beam apparatus having a gas feed device
#47Apparatus of plural charged-particle beams
#48GAS SUPPLY DEVICE, SYSTEM HAVING A GAS SUPPLY DEVICE, AND PARTICLE BEAM APPARATUS HAVING A GAS DELIVERY DEVICE OR THE SYSTEM
#49Focused Ion Beam System and Method of Correcting Deviation of Field of View of Ion Beam
#50ELECTRON-OPTICAL DEVICE, METHOD OF COMPENSATING FOR VARIATIONS IN A PROPERTY OF SUB-BEAMS
#51Charged particle beam system, method of operating a charged particle beam system, method of recording a plurality of images and computer programs for executing the methods
#52Charged particle source module
#53Electron Microscope and Image Acquisition Method
#54Methods of determining aberrations of a charged particle beam, and charged particle beam system
#55SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION
#56ELECTRON BEAM APPLICATION APPARATUS AND INSPECTION METHOD
#57Particle beam device, method for operating the particle beam device and computer program product
#58METHOD FOR OPERATING A PARTICLE BEAM DEVICE, COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM DEVICE FOR CARRYING OUT THE METHOD
#59SEMICONDUCTOR APPARATUS AND METHOD OF OPERATING THE SAME
#60Particle beam device having a deflection unit
#61Charged particle beam apparatus and method of controlling sample charge
#62Method to correct first order astigmatism and first order distortion in multi-beam scanning electron microscopes
#63Charged particle beam device and inspection method
#64APPARATUSES AND METHODS FOR MERGING ION BEAMS
#65Multi charged particle beam writing apparatus and method of adjusting same
#66Apparatus of charged-particle beam such as scanning electron microscope comprising plasma generator, and method thereof
#67Apparatus for multiple charged-particle beams
#68Charged particle beam device
#69APPARATUS AND METHOD FOR DETECTING ONE OR MORE SCANNING CHARGED PARTICLE BEAMS
#70Charged particle beam device
#71Method of measuring aberration and electron microscope
#72Multi-beam electronics scan
#73Charged particle optical device, objective lens assembly, detector, detector array, and methods
#74Transmission electron microscope and method of adjusting optical system
#75Wien filter and charged particle beam imaging apparatus
#76Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams
#77Method for operating a multiple particle beam system while altering the numerical aperture, associated computer program product and multiple particle beam system
#78ABLATING MATERIAL FOR AN OBJECT IN A PARTICLE BEAM DEVICE
#79Spatially phase-modulated electron wave generation device
#80Charged particle beam adjustment method, charged particle beam drawing method, and charged particle beam irradiation apparatus
#81Multiple electron beam writing apparatus and multiple electron beam writing method
#82Thermoelectric field emission electron source and electron beam application device
#83Transmission electron microscope and adjustment method of objective aperture
#84Pattern inspection apparatus and pattern outline position acquisition method
#85Charged particle beam apparatus
#86Apparatus of plural charged-particle beams
#87Multi-beam inspection methods and systems
#88Scanning transmission electron microscope and adjustment method of optical system
#89Electron source, method for manufacturing the same, and electron beam device using the same
#90ELECTRON BEAM APPLICATION DEVICE
#91Particle beam system and method for the particle-optical examination of an object
#92Transmission charged particle microscope with an electron energy loss spectroscopy detector
#93Electron microscope and sample observation method using the same
#94Charged particle beam apparatus
#95Apparatus of plural charged-particle beams
#96Charged particle beam device and charged particle beam adjustment method
#97Secondary charged particle imaging system
#98Electron microscope, and method for observing measurement sample
#99Calibration sample, electron beam adjustment method and electron beam apparatus using same
#100Electron beam observation device, electron beam observation system, and control method of electron beam observation device
#101Charged particle beam device
#102Focused ion beam apparatus
#103Pulsed CFE electron source with fast blanker for ultrafast TEM applications
#104MULTI-COLUMN SCANNING ELECTRON MICROSCOPY SYSTEM
#105Method of acquiring dark-field image
#106Multi-beam particle beam system
#107Multi modal cryo compatible GUID grid
#108Wien filter and charged particle beam imaging apparatus
#109Multi-pole deflector for charged particle beam and charged particle beam imaging apparatus
#110Spatially phase-modulated electron wave generation device
#111Beam profile determination method and ion beam irradiation apparatus
#112System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination
#113Charged particle beam apparatus
#114Multiple electron-beam image acquisition apparatus and multiple electron-beam image acquisition method using beam arrangement with omitted corners in a scan direction
#115Semiconductor apparatus and method of operating the same
#116Multi-beam particle microscope
#117Inspection device
#118Multi-beam charged particle system
#119Charged particle beam device and control method of optical system of charged particle beam device
#120Charged particle beam device
#121Method of manufacturing emitter, emitter, and focused ion beam apparatus
#122Device and method for electron transfer from a sample to an energy analyzer and electron spectrometer device
#123Charged particle beam apparatus
#124Charged Particle Beam Apparatus
#125Multiple electron beams irradiation apparatus
#126Charged particle multi-beam device
#127Device and method for operating a charged particle device with multiple beamlets
#128CHARGED PARTICLE BEAM APPARATUS
#129Multi-beam charged particle system
#130Method and system for charged particle microscopy with improved image beam stabilization and interrogation
#131Charged particle beam device
#132APPARATUS FOR GENERATING A MULTIPLICITY OF PARTICLE BEAMS, AND MULTI-BEAM PARTICLE BEAM SYSTEMS
#133Charged particle beam device, and observation method and elemental analysis method using the same
#134Apparatus of plural charged-particle beams
#135Electron beam device
#136Apparatus of plural charged-particle beams
#137Setting position of a particle beam device component
#138Multi-beam electron characterization tool with telecentric illumination
#139Measuring apparatus and method of setting observation condition
#140Particle beam system and method for the particle-optical examination of an object
#141Multi-electron-beam imaging apparatus with improved performance
#142Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatus
#143Apparatus for multiple charged-particle beams
#144Charged particle source module
#145Aberration-corrected multibeam source, charged particle beam device and method of imaging or illuminating a specimen with an array of primary charged particle beamlets
#146Multi-beam charged particle imaging apparatus
#147Charged particle beam device
#148Transmission charged particle microscope with adjustable beam energy spread
#149Beam bender
#150Charge control device for a system with multiple electron beams
#151Charged particle beam device
#152Charged particle beam system and method
#153Scanning electron microscope and sample observation method using scanning electron microscope
#154Charged particle beam device
#155Aberration corrector and charged particle beam device
#156Multi-beam particle beam system
#157Device and method for forming a plurality of charged particle beamlets
#158Measuring device and measuring method
#159Particle beam device, observation method, and diffraction grating
#160Enhanced electron beam generation
#161Charged particle beam writing apparatus and charged particle beam writing method
#162Transmission charged particle microscope with improved EELS/EFTEM module
#163Aperture system of electron beam apparatus, electron beam exposure apparatus, and electron beam exposure apparatus system
#164Method for adjusting a particle beam microscope
#165Phase contrast transmission electron microscope device
#166Particle beam system and method for the particle-optical examination of an object
#167Electron microscope and specimen tilt angle adjustment method
#168Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method
#169Inspection method for wafer or DUT
#170MINIATURE ELECTRON BEAM LENS ARRAY USE AS COMMON PLATFORM EBEAM WAFER METROLOGY, IMAGING AND MATERIAL ANALYSIS SYSTEM
#171Particle beam system
#172Charged particle beam writing apparatus and method for diagnosing failure of blanking circuit
#173Electron reflectometer and process for performing shape metrology
#174Plasmon-excited electron beam array for complementary patterning
#175Aberration-corrected multibeam source, charged particle beam device and method of imaging or illuminating a specimen with an array of primary charged particle beamlets
#176Scanning electron microscope objective lens calibration using X-Y voltages iteratively determined from images obtained using said voltages
#177Sample holder and electron microscope
#178Charged particle beam device and scanning electron microscope
#179Apparatus of plural charged-particle beams
#180Scanning transmission electron microscope and method of image generation
#181Particle source for producing a particle beam and particle-optical apparatus
#182Reduced Coulomb interactions in a multi-beam column
#183Ion beam apparatus
#184Charged particle beam writing method and charged particle beam writing apparatus
#185Charged particle detector and charged particle beam device using the same
#186Scanning electron microscope
#187Focused ion beam apparatus
#188CONTINUOUSLY VARIABLE APERTURE
#189Multi-column scanning electron microscopy system
#190Charged particle beam device
#191Liner tube and electron microscope
#192Three-dimensional layer-by-layer shaping apparatus, three-dimensional layer-by-layer shaping apparatus control method, and three-dimensional layer-by-layer shaping apparatus control program
#193Wafer and DUT inspection apparatus and method using thereof
#194Method and system for aberration correction in an electron beam system
#195Method for inspecting a specimen and charged particle multi-beam device
#196Multi charged particle beam writing apparatus and multi charged particle beam writing method
#197Multi-column electron beam lithography including field emitters on a silicon substrate with boron layer
#198Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method
#199Charged particle beam device and sample observation method in charged particle beam device
#200Particle beam system and method for operating a particle optical unit
#201Composite charged particle beam detector, charged particle beam device, and charged particle beam detector
#202Multi charged particle beam exposure method, and multi charged particle beam exposure apparatus
#203Particle beam system and method for the particle-optical examination of an object
#204Method for generating a composite image of an object and particle beam device for carrying out the method
#205Method and system for charge control for imaging floating metal structures on non-conducting substrates
#206Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
#207System and method for drift compensation on an electron beam based characterization tool
#208Scanning electron microscope and electron trajectory adjustment method therefor
#209In-situ spatially resolved plasma monitoring by using optical emission spectroscopy
#210Charged particle beam system
#211Multiple charged particle beam apparatus
#212Method and device for testing samples by means of an electron or ion beam microscope
#213Charged particle system and method for measuring deflection fields in a sample
#214Particle beam system
#215Method for optimizing charged particle beams formed by shaped apertures
#216Method and system for focus adjustment of a multi-beam scanning electron microscopy system
#217Focused ion beam apparatus
#218Charged particle beam device and detection method using said device
#219Electron microscope
#220Apparatus of plural charged-particle beams
#221Apparatus of plural charged-particle beams
#222Method and system for charged particle microscopy with improved image beam stabilization and interrogation
#223Analyzing energy of charged particles
#224Plasmon-excited electron beam array for complementary patterning
#225Apparatus of plural charged-particle beams
#226Apparatus for charged particle lithography system
#227Inspection device
#228Apparatus of plural charged-particle beams
#229Multi-beam writing of pattern areas of relaxed critical dimension
#230Micro stage for particle beam column using piezo elements as actuator
#231Apparatus of plural charged-particle beams
#232MICRO-ELECTRON COLUMN HAVING NANO STRUCTURE TIP WITH EASILY ALIGNING
#233Apparatus and method to control ion beam current
#234Electron microscope
#235Electron microscope and method of measuring aberrations
#236Particle beam microscope and method for operating a particle beam microscope
#237Electron microscope
#238Source for selectively providing positively or negatively charged particles for a focusing column
#239Charged particle-beam device and specimen observation method
#240Target processing unit
#241Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
#242Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method
#243Apparatus for charged particle lithography system
#244Energy filter for charged particle beam apparatus
#245Ion implanter and method of controlling the same
#246Charged Particle Beam System
#247Imaging and processing for plasma ion source
#248Ion implantation apparatus
#249Charged particle beam apparatus
#250Surface processing apparatus
#251Composite charged particle detector, charged particle beam device, and charged particle detector
#252Ion implantation apparatus and ion implantation method
#253Particle beam system and method for operating a particle optical unit
#254Particle beam system
#255Electron beam imaging with dual Wien-filter monochromator
#256Pillar-supported array of micro electron lenses
#257High-speed multi-frame dynamic transmission electron microscope image acquisition system with arbitrary timing
#258Focused ion beam low kV enhancement
#259Electron beam writing apparatus, and method for adjusting convergence half angle of electron beam
#260Transmission electron microscope and method of displaying TEM images
#261Energy-discrimination detection device
#262Charged-particle-beam device and method for correcting aberration
#263Charged particle beam writing apparatus, and charged particle beam writing method
#264High-energy ion implanter, beam collimator, and beam collimation method
#265SAMPLE PROCESSING APPARATUS AND METHOD
#266Scanning electron microscope
#267Charged Particle Device
#268Charged particle beam apparatus
#269Asymmetric electrostatic quadrupole deflector for improved field uniformity
#270Charged particle beam device
#271Charged particle beam device
#272Particle beam transport apparatus
#273Target processing unit
#274Charged particle beam apparatus
#275Charged particle beam apparatus
#276Particle optical system
#277Ion implantation apparatus, beam parallelizing apparatus, and ion implantation method
#278Gas field ionization ion source and ion beam apparatus
#279Pattern critical dimension measurement equipment and method for measuring pattern critical dimension
#280Switchable multi perspective detector, optics therefore and method of operating thereof
#281Charged particle beam apparatus
#282Micro-column with double aligner
#283Charged-particle microscope
#284Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
#285Charged particle beam apparatus
#286Device for correcting diffraction aberration of electron beam
#287Particle beam device and method for operating a particle beam device
#288Charged-particle beam lens
#289SCANNING ELECTRON MICROSCOPE AND LENGTH MEASURING METHOD USING THE SAME
#290Ion beam apparatus
#291ELECTRON BEAM APPARATUS AND LENS ARRAY
#292Transmission electron microscope
#293Inductively coupled plasma source as an electron beam source for spectroscopic analysis
#294Inspection device
#295Projection lens arrangement
#296CHARGED-PARTICLE MICROSCOPE
#297Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
#298Projection lens arrangement
#299Particle beam transport apparatus and method of transporting a particle beam with small beam spot size
#300LITHOGRAPHY SYSTEM WITH LENS ROTATION