Patents-Review.com
ClassID:

205215 ⎘

H01J37/145 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement; Lenses Combinations of electrostatic and magnetic lenses

Recent Application in this class:
#1
20260081105
2026-03-19

MULTIPLE PARTICLE BEAM MICROSCOPE AND ASSOCIATED METHOD WITH FAST AUTOFOCUS AROUND AN ADJUSTABLE WORKING DISTANCE

 #2
20260074141
2026-03-12

EXAMINING, ANALYZING AND/OR PROCESSING AN OBJECT USING AN OBJECT RECEIVING CONTAINER

 #3
20250391627
2025-12-25

GAS CLUSTER ION BEAM APPARATUS

 #4
20250379024
2025-12-11

LENS ARRANGEMENT IN AN ELECTRON MICROSCOPY SYSTEM

 #5
20250357070
2025-11-20

ELECTRON-OPTICAL ASSEMBLY

 #6
20250349504
2025-11-13

CHARGED PARTICLE DEVICE, DETECTOR, AND METHODS

 #7
20250349498
2025-11-13

SPLIT-COLUMN ACCELERATION TUBE FOR SCANNING ELECTRON MICROSCOPE

 #8
20250349497
2025-11-13

METHOD FOR DESIGNING A MULTI-BEAM PARTICLE BEAM SYSTEM HAVING MONOLITHIC PATH TRAJECTORY CORRECTION PLATES, COMPUTER PROGRAM PRODUCT AND MULTI-BEAM PARTICLE BEAM SYSTEM

 #9
20250336635
2025-10-30

CHARGED-PARTICLE BEAM APPARATUS WITH FAST FOCUS CORRECTION AND METHODS THEREOF

 #10
20250299905
2025-09-25

MULTI-BEAM CHARGED PARTICLE MICROSCOPE DESIGN WITH DETECTION SYSTEM FOR FAST CHARGE COMPENSATION

 #11
20250299904
2025-09-25

ELECTRON-OPTICAL STACK, MODULE, ASSESSMENT APPARATUS, METHOD OF MANUFACTURING AN ELECTRON-OPTICAL STACK

 #12
20250037967
2025-01-30

CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS FOR IMAGING

 #13
20240347316
2024-10-17

METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING THE NUMERICAL APERTURE, ASSOCIATED COMPUTER PROGRAM PRODUCT AND MULTIPLE PARTICLE BEAM SYSTEM

 #14
20240290571
2024-08-29

CHARGED PARTICLE OPTICS, CHARGED PARTICLE BEAM APPARATUS, AND METHOD FOR SCANNING A CHARGED PARTICLE BEAM

 #15
20240258065
2024-08-01

METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND COMPUTER PROGRAM PRODUCT

 #16
20240242933
2024-07-18

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

 #17
20240242922
2024-07-18

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

 #18
20240242920
2024-07-18

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

 #19
20240242919
2024-07-18

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

 #20
20240234081
2024-07-11

CHARGED PARTICLE-OPTICAL DEVICE, CHARGED PARTICLE APPARATUS AND METHOD

 #21
20240212970
2024-06-27

Adjustable Magnetic Lens Having Permanent-Magnetic and Electromagnetic Components

 #22
20240212969
2024-06-27

CHARGED PARTICLE OPTICAL SYSTEM AND CHARGED PARTICLE APPARATUS

 #23
20240212968
2024-06-27

LENS FOR A CHARGED PARTICLE BEAM APPARATUS, CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF FOCUSING A CHARGED PARTICLE BEAM

 #24
20240145214
2024-05-02

MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS

 #25
20240145209
2024-05-02

Objective lens system for fast scanning large FOV

 #26
20240145208
2024-05-02

CHARGED PARTICLE APPARATUS AND METHOD

 #27
20240136147
2024-04-25

CHARGED PARTICLE-OPTICAL DEVICE, CHARGED PARTICLE APPARATUS AND METHOD

 #28
20240079200
2024-03-07

MULTI-ELECTRON BEAM IMAGE ACQUIRING APPARATUS AND MULTI-ELECTRON BEAM IMAGE ACQUIRING METHOD

 #29
20230420224
2023-12-28

Operating a gas feed device for a particle beam apparatus

 #30
20230377829
2023-11-23

Charged particle beam device and axis adjustment method thereof

 #31
20230326707
2023-10-12

EXAMINING, ANALYZING AND/OR PROCESSING AN OBJECT USING AN OBJECT RECEIVING CONTAINER

 #32
20230260744
2023-08-17

METHOD FOR PRODUCING A SAMPLE ON AN OBJECT, COMPUTER PROGRAM PRODUCT, AND MATERIAL PROCESSING DEVICE FOR CARRYING OUT THE METHOD

 #33
20230245852
2023-08-03

MULTIPLE PARTICLE BEAM MICROSCOPE AND ASSOCIATED METHOD WITH FAST AUTOFOCUS AROUND AN ADJUSTABLE WORKING DISTANCE

 #34
20230170182
2023-06-01

Charged Particle Beam Apparatus

 #35
20230154723
2023-05-18

Systems and methods for real time stereo imaging using multiple electron beams

 #36
20230101108
2023-03-30

Electron optical module for providing an off-axial electron beam with a tunable coma

 #37
20230065039
2023-03-02

PARTICLE BEAM COLUMN

 #38
20230015805
2023-01-19

Electromagnetic Lens

 #39
20230005706
2023-01-05

CHARGED PARTICLE DEVICE, DETECTOR, AND METHODS

 #40
20220230837
2022-07-21

Multi-beam image acquisition apparatus and multi-beam image acquisition method

 #41
20220230836
2022-07-21

Charged particle beam manipulation device and method for manipulating charged particle beamlets

 #42
20220199354
2022-06-23

Counter pole with permanent magnets

 #43
20220139665
2022-05-05

Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams

 #44
20220130640
2022-04-28

Method for operating a multiple particle beam system while altering the numerical aperture, associated computer program product and multiple particle beam system

 #45
20220005665
2022-01-06

Apparatus using multiple charged particle beams

 #46
20210384006
2021-12-09

Electron microscope and method of adjusting focus of electron microscope

 #47
20210366683
2021-11-25

Charged particle beam device and method for inspecting and/or imaging a sample

 #48
20210319977
2021-10-14

Charged particle beam apparatus with multiple detectors and methods for imaging

 #49
20210296081
2021-09-23

Charged particle beam device and method for adjusting position of detector of charged particle beam device

 #50
20210241992
2021-08-05

Examining, analyzing and/or processing an object using an object receiving container

 #51
20210217578
2021-07-15

Aberration reduction in multipass electron microscopy

 #52
20210151279
2021-05-20

Charged particle beam device and axis adjustment method thereof

 #53
20210110994
2021-04-15

Scanning electron microscope objective lens system and method for specimen observation

 #54
20210066031
2021-03-04

Scanning electron microscope with composite detection system and specimen detection method

 #55
20210050178
2021-02-18

Charged particle optical apparatus for through-the-lens detection of particles

 #56
20210027977
2021-01-28

Charged particle beam device

 #57
20210005423
2021-01-07

Charged particle beam system and method

 #58
20200381211
2020-12-03

Multiple charged-particle beam apparatus and methods

 #59
20200381208
2020-12-03

Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen

 #60
20200335309
2020-10-22

Operating a gas supply device for a particle beam device

 #61
20200321191
2020-10-08

Multi-beam inspection apparatus with single-beam mode

 #62
20200243296
2020-07-30

Objective lens arrangement usable in particle-optical systems

 #63
20200234914
2020-07-23

Low voltage scanning electron microscope and method for specimen observation

 #64
20200227231
2020-07-16

Scanning electron microscope with objective lens below sample stage

 #65
20200176216
2020-06-04

Multiple electron beam inspection apparatus with through-hole with spiral shape

 #66
20200168430
2020-05-28

ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND ELECTRON BEAM IMAGE ACQUISITION METHOD

 #67
20200161079
2020-05-21

Apparatus of plural charged particle beams

 #68
20200135425
2020-04-30

Charged particle optical apparatus for through-the-lens detection of particles

 #69
20200118785
2020-04-16

Objective lens arrangement

 #70
20200090903
2020-03-19

Charged particle beam device

 #71
20200035450
2020-01-30

Charged particle beam device

 #72
20200013585
2020-01-09

Multiple electron beam irradiation apparatus, multiple electron beam irradiation method, and multiple electron beam inspection apparatus

 #73
20190393014
2019-12-26

Charged-particle beam device

 #74
20190333732
2019-10-31

Apparatus using multiple charged particle beams

 #75
20190206655
2019-07-04

Measuring spherical and chromatic aberrations in cathode lens electrode microscopes

 #76
20190096628
2019-03-28

Objective lens system for fast scanning large FOV

 #77
20190019649
2019-01-17

Charged particle beam device, charged particle beam influencing device, and method of operating a charged particle beam device

 #78
20180342368
2018-11-29

Charged particle optical apparatus for through-the-lens detection of particles

 #79
20180337017
2018-11-22

Measuring spherical and chromatic aberrations in cathode lens electrode microscopes

 #80
20180323036
2018-11-08

Gun lens design in a charged particle microscope

 #81
20180254167
2018-09-06

Patterned substrate imaging using multiple electron beams

 #82
20180166250
2018-06-14

High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture

 #83
20180114670
2018-04-26

Spherical aberration corrector for electromagnetic lens for charged particle beam

 #84
20180025886
2018-01-25

Charged particle beam device and aberration corrector

 #85
20170294287
2017-10-12

Objective lens arrangement usable in particle-optical systems

 #86
20170236681
2017-08-17

Method of aberration correction and charged particle beam system

 #87
20170213688
2017-07-27

Apparatus of plural charged-particle beams

 #88
20170076910
2017-03-16

System for imaging a secondary charged particle beam with adaptive secondary charged particle optics

 #89
20170047192
2017-02-16

Charged particle beam device and method for inspecting and/or imaging a sample

 #90
20170040139
2017-02-09

Electron beam device

 #91
20170032927
2017-02-02

High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture

 #92
20170018402
2017-01-19

Method of reducing coma and chromatic aberration in a charged particle beam device, and charged particle beam device

 #93
20170018394
2017-01-19

Scanning electron microscope

 #94
20170003235
2017-01-05

System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics

 #95
20160351371
2016-12-01

Scanning transmission electron microscope with variable axis objective lens and detective system

 #96
20160240344
2016-08-18

Charged particle inspection method and charged particle system

 #97
20160217968
2016-07-28

Objective lens system for fast scanning large FOV

 #98
20160181054
2016-06-23

OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS

 #99
20160172150
2016-06-16

Swing objective lens

 #100
20160104597
2016-04-14

Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun

 #101
20160042911
2016-02-11

Desktop electron microscope and combined round-multipole magnetic lens thereof

 #102
20160042910
2016-02-11

Desktop electron microscope and wide range tunable magnetic lens thereof

 #103
20150340201
2015-11-26

Apparatus and method of applying small-angle electron scattering to characterize nanostructures on opaque substrate

 #104
20150213998
2015-07-30

Charged particle beam device with dynamic focus and method of operating thereof

 #105
20150060662
2015-03-05

Apparatus of plural charged particle beams with multi-axis magnetic lens

 #106
20140326895
2014-11-06

Permanent magnet based high performance multi-axis immersion electron lens array with low axial leakage field

 #107
20140326879
2014-11-06

Charged particle beam apparatus permitting high-resolution and high-contrast observation

 #108
20140197734
2014-07-17

Spin rotation device

 #109
20140097341
2014-04-10

In-column detector for particle-optical column

 #110
20140070098
2014-03-13

Method of using a compound particle-optical lens

 #111
20140061499
2014-03-06

Charged particle beam pattern writing method and charged particle beam writing apparatus that corrects beam rotation utilizing a correlation table

 #112
20130264477
2013-10-10

Particle-beam column corrected for both chromatic and spherical aberration

 #113
20130240750
2013-09-19

Multi charged particle beam writing apparatus and multi charged particle beam writing method with fixed voltage ratio einzel lens

 #114
20130214155
2013-08-22

CHARGED PARTICLE BEAM DEVICE WITH DYNAMIC FOCUS AND METHOD OF OPERATING THEREOF

 #115
20130153782
2013-06-20

Multi-axis magnetic lens for focusing a plurality of charged particle beams

 #116
20120286158
2012-11-15

Scanning electron microscope and inspection method using same

 #117
20120280126
2012-11-08

Charged particle beam apparatus permitting high resolution and high-contrast observation

 #118
20120273677
2012-11-01

IN-COLUMN DETECTOR FOR PARTICLE-OPTICAL COLUMN

 #119
20120217393
2012-08-30

Electron microscope

 #120
20120205550
2012-08-16

Objective lens

 #121
20120199740
2012-08-09

Particle beam system

 #122
20120119087
2012-05-17

CHARGED-PARTICLE MICROSCOPE

 #123
20120070066
2012-03-22

Charged particle beam device and evaluation method using the charged particle beam device

 #124
20120049064
2012-03-01

Charged particle apparatus

 #125
20110215242
2011-09-08

Particle beam device and method for operation of a particle beam device

 #126
20100270468
2010-10-28

System and method for a charged particle beam

 #127
20100084567
2010-04-08

Chromatic aberration corrector for charged-particle beam system and correction method therefor

 #128
20100084566
2010-04-08

Electron Column Using A Magnetic Lens Layer Having Permanent Magnets

 #129
20100038538
2010-02-18

Objective lens

 #130
20090309025
2009-12-17

Particle optical arrangement

 #131
20090261266
2009-10-22

Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens

 #132
20090256076
2009-10-15

Charged particle beam apparatus permitting high-resolution and high-contrast observation

 #133
20090256075
2009-10-15

Charged Particle Inspection Method and Charged Particle System

 #134
20090173887
2009-07-09

Charged particle beam trajectory corrector and charged particle beam apparatus

 #135
20090159810
2009-06-25

Particle-Optical Component

 #136
20090114818
2009-05-07

Charged particle-optical systems, methods and components

 #137
20090101818
2009-04-23

Corrector

 #138
20090057571
2009-03-05

Charged-particle beam lithography apparatus and device manufacturing method

 #139
20090026384
2009-01-29

Electrostatic lens assembly

 #140
20080121810
2008-05-29

System and method for a charged particle beam

 #141
20080073531
2008-03-27

Charged particle beam system and a method for inspecting a sample

 #142
20070023673
2007-02-01

Electric-magnetic field-generating element and assembling method for same

 #143
20060169910
2006-08-03

Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens

 #144
20060163488
2006-07-27

Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens

 #145
20060151712
2006-07-13

Focusing apparatus and lithography system using the same

 #146
20060097184
2006-05-11

Focusing lens and charged particle beam device for titled landing angle operation

 #147
20060016988
2006-01-26

Beam directing system and method for use in a charged particle beam column

 #148
20050035299
2005-02-17

Lens array with a laterally movable optical axis for corpuscular rays

 #149
18164379
2026-02-03

Method of operating a particle beam system, particle beam system, non-transitory storage medium and program

 #150
17089861
2022-07-05

Operating a particle beam generator for a particle beam device

 #151
17039478
2022-02-01

Method and system for correcting two-fold, fifth-order parasitic aberrations in charged particle systems

 #152
17002499
2021-12-28

System and method for simultaneous phase contrast imaging and electron energy-loss spectroscopy

 #153
15666666
2018-10-09

Electron beam apparatus with high resolutions

 #154
15366455
2018-03-20

Method for inspecting a specimen and charged particle multi-beam device

 #155
14828352
2016-05-24

Charged particle beam device, beam deflector device and methods of operating thereof

 #156
14499843
2016-01-26

Charged particle beam specimen inspection system and method for operation thereof