205214 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement; Lenses magnetic Permanent magnetic lenses
HIGH-VOLTAGE COLUMN WITH PERMANENT MAGNET LENS AND POSITIVE WAFER BIAS FOR OVERLAY
#2Electron Microscope
#3CHARGED PARTICLE OPTICAL SYSTEM AND CHARGED PARTICLE APPARATUS
#4Adjustable Permanent Magnetic Lens Having Thermal Control Device
#5Adjustable Permanent Magnetic Lens Having Shunting Device
#6MULTIPLE PARTICLE BEAM SYSTEM WITH A CONTRAST CORRECTION LENS SYSTEM
#7Counter pole with permanent magnets
#8CHARGED PARTICLE SOURCE
#9Charged particle source
#10Magnetically microfocused electron emission source
#11Apparatus and methods for selectively transmitting objects
#12Charged particle source
#13Charged particle source
#14Charged particle source
#15Charged particle source
#16Device and method for optimizing diffusion section of electron beam
#17Charged particle source
#18Permanent magnet based high performance multi-axis immersion electron lens array with low axial leakage field
#19Tubular permanent magnet used in a multi-electron beam device
#20Scanning electron microscope
#21Magnet for ion beam irradiation apparatus equipped with protective member that covers plurality of magnetic field concentrating members
#22Multi-column electron beam exposure apparatus and magnetic field generation device
#23Device for the field emission of particles and production method
#24Electron Column Using A Magnetic Lens Layer Having Permanent Magnets
#25SCANNING ELECTRON MICROSCOPE
#26Electron lens and charged particle beam apparatus
#27Electron beam source having an extraction electrode provided with a magnetic disk element
#28Apparatus with permanent magnetic lenses
#29Electron microscope array for inspection and lithography
#30Apparatus with permanent magnetic lenses