Charged particle beam apparatus

Spherical aberration corrector, method of spherical aberration correction, and charged particle beam instrument

Pattern definition device having multiple blanking arrays

Switchable multi perspective detector, optics therefore and method of operating thereof

Scanning electron microscope

Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby

Particle beam irradiation apparatus and particle beam therapy system

Ebeam tomosynthesis for radiation therapy tumor tracking

Electron beam interference device and electron beam interferometry

Method and system for adaptively scanning a sample during electron beam inspection

E-beam lithography with alignment gating

Electron beam lithography device and lithographic method

Phase plate and electron microscope

High-voltage insulation device for charged-particle optical apparatus

CHARGED PARTICLE BEAM WRITING METHOD

Drawing apparatus and method of manufacturing article

Device for correcting diffraction aberration of electron beam

Retarding field analyzer integral with particle beam column

Charged particle beam irradiation apparatus

Method for acquiring settling time

Method and apparatus for neutral beam processing based on gas cluster ion beam technology

Scanning electron microscope

Charged particle beam applied apparatus, and irradiation method

Switchable multi perspective detector, optics therefor and method of operating thereof

Ion implantation apparatus and control method thereof

CREATION OF OFF-AXIS NULL MAGNETIC FIELD LOCUS FOR IMPROVED UNIFORMITY IN PLASMA DEPOSITION AND ETCHING

Phase plate

Electron beam irradiation method and scanning electronic microscope

Beam line design to reduce energy contamination

Electromechanical magnetometer and applications thereof

Multi-ion beam implantation apparatus and method

GRID PROVIDING BEAMLET STEERING

System and method for ion implantation with improved productivity and uniformity

ELECTRON BEAM EXPOSURE APPARATUS AND ELECTRON BEAM EXPOSURE METHOD

Bladed Ion Slicer

Ion slicer with accelleration and decelleration optics

Multiple-pole electrostatic deflector for improving throughput of focused electron beam instruments

Projection lens arrangement

ION BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

Projection lens arrangement

Grid providing beamlet steering

Method and apparatus for neutral beam processing based on gas cluster ion beam technology

TEM PHASE PLATE LOADING SYSTEM

Apparatus and method for doping

Ion implanting apparatus and deflecting electrode

Reflection electron beam projection lithography using an ExB separator

Particle beam irradiation apparatus and particle beam therapy system

Twin beam charged particle column and method of operating thereof

Particle beam transport apparatus and method of transporting a particle beam with small beam spot size

HIGH THROUGHPUT SEM TOOL

CHARGED PARTICLE BEAM DEVICE, METHOD OF OPERATING A CHARGED PARTICLE BEAM DEVICE

Charged Particle Beam Irradiation System

COMPONENT FOR MANIPULATING A STREAM OF CHARGED PARTICLES

Beam quality in FIB systems

Multi-beam scanning electron beam device and methods of using the same

CHARGED PARTICLE SEPARATION APPARATUS AND CHARGED PARTICLE BOMBARDMENT APPARATUS

System and method for ion implantation with improved productivity and uniformity

Magnetic domain imaging system

Device for deflecting or guiding in a particle beam

Particle optical device with magnet assembly

Magnetic deflector for an electron column

ADJUSTABLE DEFLECTION OPTICS FOR ION IMPLANTATION

PLASMA GENERATING APPARATUS RENDERED ELECTRICALLY NEUTRAL ON THE PERIPHERY OF PLASMA GUN

Electron beam processing device

Open-ended electromagnetic corrector assembly and method for deflecting, focusing, and controlling the uniformity of a traveling ion beam

Charged Particle Inspection Method and Charged Particle System

Electron beam apparatus

Apparatus and methods for ion beam implantation using ribbon and spot beams

Apparatus and method for doping

Inspection method and inspection system using charged particle beam

Electrostatic deflector

Charged particle-optical systems, methods and components

Charged particle beam irradiation system

Method and system for treating an interior surface of a workpiece using a charged particle beam

Electron Microscope And Electron Beam Inspection System

Method and apparatus for simultaneously depositing and observing materials on a target

ELECTRON BEAM DRAWING APPARATUS

Charged particle system

Charged-particle beam system

Directed Multi-Deflected Ion Beam Milling of a Work Piece and Determining and Controlling Extent Thereof

Apparatus and method for doping

STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF MANUFACTURING SUBSTRATE

Electron holography system

Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate

Ion implantation device

Charged beam drawing apparatus

Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate

Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate

Controlling the characteristics of implanter ion-beams

Technique for improving uniformity of a ribbon beam

Charged-particle beam instrument

Charged particle beam writing method and apparatus

Method of manufacturing electrostatic deflector, and electrostatic deflector

Electrostatic deflection system with impedance matching for high positioning accuracy

Controlling the characteristics of implanter ion-beams

Method and apparatus for simultaneously depositing and observing materials on a target

Constant power and temperature coil

Charged particle beam device with detection unit switch and method of operation thereof

Inspection method and inspection system using charged particle beam

Controlling the characteristics of implanter ion-beams

Apparatus and method for inspection and testing of flat panel display substrates

Ion implantation apparatus and method for implanting ions by using the same

Beam directing system and method for use in a charged particle beam column

Electron microscope and electron beam inspection system

Apparatus and method for doping

Controlling the characteristics of implanter ion-beams

Charged particle beam apparatus, charged particle beam control method, substrate inspection method and method of manufacturing semiconductor device

Electronic optical lens barrel and production method therefor

Method and apparatus for simultaneously depositing and observing materials on a target

Scanning electron microscope

Low-aberration deflectors for use in charged-particle-beam optical systems, and methods for fabricating such deflectors

Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam device

Methods of operating particle microscopes and particle microscopes

Transmission charged particle microscope with imaging beam rotation

Innovative source assembly for ion beam production

Particle beam inspector with independently-controllable beams

Mirror support module, a kit and a scanning electron microscope

Electron beam device, cold field emitter, and method for regeneration of a cold field emitter

Image generation apparatus

System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device

E-beam inspection apparatus and method of using the same on various integrated circuit chips

Method for detecting signal charged particles in a charged particle beam device, and charged particle beam device

Ion beam manipulator

Frequency dependent clock apparatus and method

Electromagnetic electron reflector

Method for operating a charged particle beam device with adjustable landing energies

Method and apparatus for electron beam lithography

Method and apparatus for electron beam lithography