Patents-Review.com
ClassID:

205216 ⎘

H01J37/147 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement Arrangements for directing or deflecting the discharge along a desired path

Sub-classes:
Recent Application in this class:
#1
20260135061
2026-05-14

Charged Particle Beam Device and Method for Estimating Sample Characteristics

 #2
20260128254
2026-05-07

ELECTRON-OPTICAL MODULE

 #3
20260088247
2026-03-26

SCANNING ELECTRON MICROSCOPE WITH ENHANCED THREE-DIMENSIONAL IMAGING

 #4
20260081103
2026-03-19

NOTCH FILTER FOR HIGH THROUGHPUT X-RAY PHOTON SPECTROSCOPY

 #5
20260074143
2026-03-12

COLUMN, PROCESSING ARRANGEMENT AND METHOD

 #6
20260045442
2026-02-12

SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR IN A SINGLE-BEAM OR MULTI-BEAM APPARATUS

 #7
20260031302
2026-01-29

HIGH ENERGY IMPLANTER WITH SMALL FOOTPRINT

 #8
20250349496
2025-11-13

System and Method for Uniform Ion Milling

 #9
20250336643
2025-10-30

ELECTRON BEAM PROCESSING METHODS

 #10
20250323017
2025-10-16

MULTIPLE CHARGED-PARTICLE BEAM WRITING METHOD AND MULTIPLE CHARGED-PARTICLE BEAM WRITING APPARATUS

 #11
20250323015
2025-10-16

ION IMPLANTER AND ION IMPLANTATION METHOD

 #12
20250323014
2025-10-16

DETECTION SYSTEMS IN SEMICONDUCTOR METROLOGY TOOLS

 #13
20250299906
2025-09-25

OPTICAL SYSTEM FOR A PLURALITY OF PRIMARY BEAMLETS, CHARGED PARTICLE MULTI-BEAM APPARATUS AND METHOD OF FOCUSING A PLURALITY OF PRIMARY BEAMLETS

 #14
20250253118
2025-08-07

Imaging System and Imaging Method

 #15
20250201514
2025-06-19

Radiation Heating to Clean Deposits from Air Bearing Shaft

 #16
20250183001
2025-06-05

CALIBRATION OF AN EXAMINATION SYSTEM

 #17
20250174429
2025-05-29

METHOD AND DEVICE FOR CORRECTING IMAGE ERRORS WHEN SCANNING A CHARGED PARTICLE BEAM OVER A SAMPLE

 #18
20250157779
2025-05-15

MINIMIZATION OF ENERGY SPREAD IN FOCUSED ION BEAM (FIB) SYSTEMS

 #19
20250116264
2025-04-10

GAS JET DEFLECTION IN PRESSURIZED SYSTEMS

 #20
20250104965
2025-03-27

HIGH ENERGY IMPLANTER WITH SMALL FOOTPRINT

 #21
20250104959
2025-03-27

PROXIMITY-ELECTRODE, CHARGED PARTICLE BEAM DEVICE AND METHOD FOR INSPECTING AND/OR IMAGING A SAMPLE

 #22
20250069849
2025-02-27

DEVICE FOR PERFORMING AN INTERFEROMETRIC MEASUREMENT

 #23
20250062098
2025-02-20

SYSTEM AND METHOD FOR DYNAMIC ABERRATION CORRECTION

 #24
20240420915
2024-12-19

CHARGED PARTICLE BEAM DEVICE

 #25
20240412889
2024-12-12

Low-voltage electron beam control of conductive state at a complex-oxide interface

 #26
20240347316
2024-10-17

METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING THE NUMERICAL APERTURE, ASSOCIATED COMPUTER PROGRAM PRODUCT AND MULTIPLE PARTICLE BEAM SYSTEM

 #27
20240304412
2024-09-12

PARTICLE BEAM MICROSCOPE

 #28
20240304410
2024-09-12

ELECTRON BEAM MICROSCOPE

 #29
20240295213
2024-09-05

Gas jet deflection in pressurized systems

 #30
20240272099
2024-08-15

HIGH RESOLUTION, LOW ENERGY ELECTRON MICROSCOPE FOR PROVIDING TOPOGRAPHY INFORMATION AND METHOD OF MASK INSPECTION

 #31
20240203683
2024-06-20

GRID SURFACE CONDITIONING FOR ION BEAM SYSTEM

 #32
20240186102
2024-06-06

SYSTEM AND METHOD FOR RESOLUTION IMPROVEMENT OF CHARGED PARTICLES MICROSCOPY

 #33
20240177960
2024-05-30

Lattice Based Voltage Standoff

 #34
20240153731
2024-05-09

MANUFACTURING METHOD FOR ELECTROSTATIC DEFLECTOR AND ELECTROSTATIC DEFLECTOR

 #35
20240128043
2024-04-18

CHARGED PARTICLE APPARATUS AND METHOD

 #36
20240096585
2024-03-21

Multi-beam charged particle source with alignment means

 #37
20240055218
2024-02-15

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM WRITING METHOD

 #38
20240014000
2024-01-11

MINIATURE ELECTRON OPTICAL COLUMN WITH A LARGE FIELD OF VIEW

 #39
20240013999
2024-01-11

MOUNTING SUBSTRATE, BLANKING APERTURE ARRAY CHIP, BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM IRRADIATION APPARATUS

 #40
20230420217
2023-12-28

MULTIPLE CHARGED PARTICLE BEAM WRITING METHOD AND MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS

 #41
20230417233
2023-12-28

Gas jet deflection in pressurized systems

 #42
20230411112
2023-12-21

Arbitrary electron dose waveforms for electron microscopy

 #43
20230290606
2023-09-14

Charged Particle Beam Device

 #44
20230282440
2023-09-07

APERTURE PATTERNS FOR DEFINING MULTI-BEAMS

 #45
20230238213
2023-07-27

APPARATUS FOR ANALYZING AND/OR PROCESSING A SAMPLE WITH A PARTICLE BEAM AND METHOD

 #46
20230178326
2023-06-08

CHARGED PARTICLE BEAM GENERATION

 #47
20230154639
2023-05-18

Low-voltage electron beam control of conductive state at a complex-oxide interface

 #48
20230109236
2023-04-06

MANIPULATOR, MANIPULATOR ARRAY, CHARGED PARTICLE TOOL, MULTI-BEAM CHARGED PARTICLE TOOL, AND METHOD OF MANIPULATING A CHARGED PARTICLE BEAM

 #49
20230101644
2023-03-30

MODULAR ULTRA-HIGH VACUUM ELECTRON MICROSCOPE

 #50
20230088951
2023-03-23

PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD

 #51
20230028903
2023-01-26

Electron microscope

 #52
20230005709
2023-01-05

Scanning electron microscope device and electron beam inspection apparatus

 #53
20220406561
2022-12-22

Arbitrary electron dose waveforms for electron microscopy

 #54
20220384143
2022-12-01

Pattern data processing for programmable direct-write apparatus

 #55
20220384142
2022-12-01

Charged particle beam writing method, charged particle beam writing apparatus, and computer-readable recording medium

 #56
20220367141
2022-11-17

Monochromator device and methods of use thereof

 #57
20220336185
2022-10-20

Arbitrary electron dose waveforms for electron microscopy

 #58
20220328278
2022-10-13

Charged particle beam writing apparatus

 #59
20220319798
2022-10-06

Electron beam application apparatus

 #60
20220301818
2022-09-22

Charged particle beam writing device and charged particle beam writing method

 #61
20220277922
2022-09-01

Conduction inspection method for multipole aberration corrector, and conduction inspection apparatus for multipole aberration corrector

 #62
20220262594
2022-08-18

SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR IN A SINGLE-BEAM OR MULTI-BEAM APPARATUS

 #63
20220262593
2022-08-18

System and Method for Uniform Ion Milling

 #64
20220254667
2022-08-11

High resolution electron beam apparatus with dual-aperture schemes

 #65
20220246396
2022-08-04

Waveform generating device, waveform generating method, and charged particle beam irradiation apparatus

 #66
20220172924
2022-06-02

Transmission electron microscope and method of adjusting optical system

 #67
20220148845
2022-05-12

Stage Movement Control Apparatus and Charged Particle Beam System

 #68
20220139665
2022-05-05

Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams

 #69
20220130640
2022-04-28

Method for operating a multiple particle beam system while altering the numerical aperture, associated computer program product and multiple particle beam system

 #70
20220122804
2022-04-21

Charged particle beam device

 #71
20220051880
2022-02-17

Apparatus and techniques for angled etching using multielectrode extraction source

 #72
20220037110
2022-02-03

Charged particle beam device and method for controlling sample stage

 #73
20210405523
2021-12-30

INHIBITING BACTERIA COLONIZATION WITHOUT ANTIBIOTICS

 #74
20210391138
2021-12-16

Apparatus of plural charged-particle beams

 #75
20210366756
2021-11-25

System apparatus and method for enhancing electrical clamping of substrates using photo-illumination

 #76
20210366687
2021-11-25

DETECTION SYSTEMS IN SEMICONDUCTOR METROLOGY TOOLS

 #77
20210305008
2021-09-30

Charged particle beam writing apparatus and charged particle beam writing method

 #78
20210296074
2021-09-23

Multi-beam blanking device and multi-charged-particle-beam writing apparatus

 #79
20210287873
2021-09-16

Charged particle beam deflection device

 #80
20210233741
2021-07-29

Electron microscope and sample observation method using the same

 #81
20210193436
2021-06-24

Settling time determination method and multi charged particle beam writing method

 #82
20210175046
2021-06-10

Beam blanking device for a multi-beamlet charged particle beam apparatus

 #83
20210159043
2021-05-27

APPARATUS AND METHOD FOR CONTROLLING ION BEAM USING ELECTOSTATIC FILTER

 #84
20210090844
2021-03-25

MULTI-COLUMN SCANNING ELECTRON MICROSCOPY SYSTEM

 #85
20210082663
2021-03-18

Method of acquiring dark-field image

 #86
20210078252
2021-03-18

Apparatus for generating electron radiation and 3D printing apparatus

 #87
20210050177
2021-02-18

SYSTEMS AND METHODS FOR PROVIDING AN ION BEAM

 #88
20210035773
2021-02-04

System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination

 #89
20210020422
2021-01-21

Charged particle beam apparatus

 #90
20210017972
2021-01-21

Gas jet deflection in pressurized systems

 #91
20210005421
2021-01-07

Conductive beam optic containing internal heating element

 #92
20200388463
2020-12-10

Operating a particle beam device

 #93
20200381206
2020-12-03

Particle-optical apparatus and particle beam system

 #94
20200343072
2020-10-29

Charged particle beam device and control method of optical system of charged particle beam device

 #95
20200321191
2020-10-08

Multi-beam inspection apparatus with single-beam mode

 #96
20200312615
2020-10-01

Charged particle beam device

 #97
20200312610
2020-10-01

CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PLURALITY OF CHARGED PARTICLE BEAMLETS

 #98
20200303177
2020-09-24

Device and method for electron transfer from a sample to an energy analyzer and electron spectrometer device

 #99
20200286705
2020-09-10

Apparatus of plural charged-particle beams

 #100
20200273657
2020-08-27

Interferometric electron microscope

 #101
20200266033
2020-08-20

Charged particle beam lithography apparatus and charged particle beam pattern writing method

 #102
20200249565
2020-08-06

Method and apparatus for neutral beam processing based on gas cluster ion beam technology

 #103
20200211815
2020-07-02

Charged particle beam device

 #104
20200211814
2020-07-02

Scanning efficiency by individual beam steering of multi-beam apparatus

 #105
20200185201
2020-06-11

Apparatus and techniques for angled etching using multielectrode extraction source

 #106
20200185189
2020-06-11

Charged-particle beam apparatus

 #107
20200176219
2020-06-04

Systems and methods for charged particle beam modulation

 #108
20200161078
2020-05-21

Apparatus and method for controlling ion beam using electrostatic filter

 #109
20200161077
2020-05-21

Electrostatic filter and ion implanter having asymmetric electrostatic configuration

 #110
20200161076
2020-05-21

Electostatic filter and method for controlling ion beam properties using electrostatic filter

 #111
20200144022
2020-05-07

Diffraction pattern detection in a transmission charged particle microscope

 #112
20200126752
2020-04-23

Multi-beam electron characterization tool with telecentric illumination

 #113
20200083018
2020-03-12

Repeller, cathode, chamber wall and slit member for ion implanter and ion generating devices including the same

 #114
20200083017
2020-03-12

Defect observation system and defect observation method for semiconductor wafer

 #115
20200083016
2020-03-12

Semiconductor apparatus and charged particle ray exposure apparatus

 #116
20200066485
2020-02-27

Compensated location specific processing apparatus and method

 #117
20200066476
2020-02-27

Ion source device

 #118
20200058463
2020-02-20

Methods and systems for plasma deposition and treatment

 #119
20200051782
2020-02-13

Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatus

 #120
20200027687
2020-01-23

Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam device

 #121
20200006033
2020-01-02

Detection systems in semiconductor metrology tools

 #122
20190393014
2019-12-26

Charged-particle beam device

 #123
20190378677
2019-12-12

Beam bender

 #124
20190371580
2019-12-05

System for using O-rings to apply holding forces

 #125
20190355544
2019-11-21

Charged particle beam system and method

 #126
20190337085
2019-11-07

Electron beam column for three-dimensional printing device, three-dimensional printing device, and three-dimensional printing method

 #127
20190333733
2019-10-31

Laser-assisted electron-beam inspection for semiconductor devices

 #128
20190318906
2019-10-17

Measurement and inspection device

 #129
20190295809
2019-09-26

Charged particle beam deflection device

 #130
20190287760
2019-09-19

Charged particle beam system, opto-electro simultaneous detection system and method

 #131
20190287759
2019-09-19

Transmission Electron Microscopy

 #132
20190279872
2019-09-12

Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby

 #133
20190259570
2019-08-22

Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column

 #134
20190259564
2019-08-22

Signal separator for a multi-beam charged particle inspection apparatus

 #135
20190214221
2019-07-11

Multiple beam inspection apparatus and sensitivity correction method for multi-detector

 #136
20190202000
2019-07-04

Electron beam 3D printing machine

 #137
20190198293
2019-06-27

Charged particle beam lithography apparatus and charged particle beam pattern writing method

 #138
20190198290
2019-06-27

Multiple charged particle beam writing apparatus, and multiple charged particle beam writing method

 #139
20190193192
2019-06-27

Enhanced electron beam generation

 #140
20190185991
2019-06-20

Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby

 #141
20190180979
2019-06-13

Charged particle beam device

 #142
20190180973
2019-06-13

Transmission charged particle microscope with improved EELS/EFTEM module

 #143
20190172678
2019-06-06

Method of obtaining beam deflection shape and method of obtaining arrangement angle of blanking aperture array plate

 #144
20190171098
2019-06-06

DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF

 #145
20190164721
2019-05-30

Systems and methods for charged particle beam modulation

 #146
20190157035
2019-05-23

Ion implanter and method of controlling ion implanter

 #147
20190148106
2019-05-16

Charged particle beam device

 #148
20190139734
2019-05-09

Electron microscope and method of controlling same

 #149
20190137868
2019-05-09

Method for modifying the wettability and/or other biocompatibility characteristics of a surface of a biological material by the application of gas cluster ion beam technology and biological materials made thereby

 #150
20190108970
2019-04-11

Charged particle beam device

 #151
20190108969
2019-04-11

Charged particle beam device and method for adjusting charged particle beam device

 #152
20190108968
2019-04-11

Systems and methods for directing an ion beam using electromagnets

 #153
20190096626
2019-03-28

Cold cathode field-emission electron gun, adjustment method for cold cathode field-emission electron gun, sharpening method for emitter, and electron microscope

 #154
20190088446
2019-03-21

MINIATURE ELECTRON BEAM LENS ARRAY USE AS COMMON PLATFORM EBEAM WAFER METROLOGY, IMAGING AND MATERIAL ANALYSIS SYSTEM

 #155
20190080880
2019-03-14

Device for modulating the intensity of a particle beam from a charged particle source

 #156
20190074157
2019-03-07

Apparatus of plural charged-particle beams

 #157
20190057836
2019-02-21

Diffraction pattern detection in a transmission charged particle microscope

 #158
20190035600
2019-01-31

Charged particle beam device for imaging vias inside trenches

 #159
20190035595
2019-01-31

Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus

 #160
20190027340
2019-01-24

Charged particle beam writing apparatus and charged particle beam writing method

 #161
20190013175
2019-01-10

Aperture size modulation to enhance ebeam patterning resolution

 #162
20180374768
2018-12-27

Semiconductor device

 #163
20180374674
2018-12-27

Charged particle beam device having inspection scan direction based on scan with smaller dose

 #164
20180374670
2018-12-27

Methods and systems for plasma deposition and treatment

 #165
20180342367
2018-11-29

Low profile extraction electrode assembly

 #166
20180330917
2018-11-15

Electron microscope and control method

 #167
20180321583
2018-11-08

MEDICAL DEVICE FOR BONE IMPLANT AND METHOD FOR PRODUCING SUCH A DEVICE

 #168
20180308658
2018-10-25

Ion beam apparatus

 #169
20180299771
2018-10-18

Method and apparatus for neutral beam processing based on gas cluster ion beam technology

 #170
20180292745
2018-10-11

Enhanced high aspect ratio etch performance using accelerated neutral beams derived from gas-cluster ion beams

 #171
20180286629
2018-10-04

Charged particle beam apparatus

 #172
20180286627
2018-10-04

Charged particle beam apparatus

 #173
20180286626
2018-10-04

SEM image acquisition device and SEM image acquisition method

 #174
20180286625
2018-10-04

Particle-optical apparatus and particle beam system

 #175
20180269026
2018-09-20

Charged particle beam device

 #176
20180240644
2018-08-23

Scanning electron microscope

 #177
20180233324
2018-08-16

Charged particle beam writing method

 #178
20180233320
2018-08-16

Charged particle beam device

 #179
20180226219
2018-08-09

Multi-column scanning electron microscopy system

 #180
20180226218
2018-08-09

Repeller, cathode, chamber wall and slit member for ion implanter and ion generating devices including the same

 #181
20180218875
2018-08-02

Innovative source assembly for ion beam production

 #182
20180211813
2018-07-26

DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF

 #183
20180197715
2018-07-12

Compensated location specific processing apparatus and method

 #184
20180190468
2018-07-05

Treatment method for inhibiting platelet attachment and articles treated thereby

 #185
20180174798
2018-06-21

Methods, apparatuses, systems and software for treatment of a specimen by ion-milling

 #186
20180174795
2018-06-21

Charged particle device, charged particle irradiation method, and analysis device

 #187
20180166248
2018-06-14

Blanking deflector, and multi charged particle beam writing apparatus using three deflector electrodes and a transmission line

 #188
20180158646
2018-06-07

Method of image acquisition and electron microscope

 #189
20180151326
2018-05-31

Time-resolved charged particle microscopy

 #190
20180144905
2018-05-24

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #191
20180143110
2018-05-24

Tomography sample preparation systems and methods with improved speed, automation, and reliability

 #192
20180138013
2018-05-17

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #193
20180138012
2018-05-17

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #194
20180108514
2018-04-19

Multi-column electron beam lithography including field emitters on a silicon substrate with boron layer

 #195
20180106610
2018-04-19

Charged particle beam device with transient signal correction during beam blanking

 #196
20180090296
2018-03-29

Measurement of overlay and edge placement errors with an electron beam column array

 #197
20180090295
2018-03-29

DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF

 #198
20180068828
2018-03-08

In situ beam current monitoring and control in scanned ion implantation systems

 #199
20180068826
2018-03-08

Charged particle beam device and sample observation method in charged particle beam device

 #200
20180040452
2018-02-08

Inspection device

 #201
20180033586
2018-02-01

APPARATUS AND METHOD FOR PROCESSING OR IMAGING A SAMPLE

 #202
20180019096
2018-01-18

Charged particle beam device, and method of manufacturing component for charged particle beam device

 #203
20170358421
2017-12-14

Composite charged particle beam detector, charged particle beam device, and charged particle beam detector

 #204
20170330723
2017-11-16

Electron microscope and method of controlling same

 #205
20170323760
2017-11-09

Multicolumn charged particle beam exposure apparatus

 #206
20170296844
2017-10-19

Beam position monitors for medical radiation machines

 #207
20170278672
2017-09-28

Charged particle beam writing method, and charged particle beam writing apparatus

 #208
20170278671
2017-09-28

Charged particle beam device

 #209
20170250053
2017-08-31

High voltage shielding and cooling in a charged particle beam generator

 #210
20170243716
2017-08-24

Inspection apparatus and inspection method

 #211
20170243713
2017-08-24

Studying dynamic specimen behavior in a charged-particle microscope

 #212
20170229280
2017-08-10

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #213
20170221672
2017-08-03

Charged particle beam device

 #214
20170207058
2017-07-20

Electron energy loss spectrometer

 #215
20170207057
2017-07-20

Multi-piece electrode aperture

 #216
20170200581
2017-07-13

Heat-spreading blanking system for high throughput electron beam apparatus

 #217
20170178866
2017-06-22

APPARATUS AND TECHNIQUES FOR TIME MODULATED EXTRACTION OF AN ION BEAM

 #218
20170148609
2017-05-25

Electrostatic multipole device, electrostatic multipole arrangement, and method of manufacturing an electrostatic multipole device

 #219
20170133196
2017-05-11

Charged particle system and method for measuring deflection fields in a sample

 #220
20170125214
2017-05-04

Ion implantation tool and ion implantation method

 #221
20170125205
2017-05-04

Apparatus of plural charged-particle beams

 #222
20170123309
2017-05-04

Treatment method for defect reduction in a substrate and substrates treated thereby

 #223
20170092459
2017-03-30

Charged-particle-beam device

 #224
20170053777
2017-02-23

Charged particle beam device and detection method using said device

 #225
20170047193
2017-02-16

Method and system for edge-of-wafer inspection and review

 #226
20170023862
2017-01-26

METHOD AND SYSTEM FOR FORMING PATTERNS WITH CHARGED PARTICLE BEAM LITHOGRAPHY

 #227
20170018400
2017-01-19

Semiconductor plasma antenna apparatus

 #228
20170011898
2017-01-12

Beam transmission system and method thereof

 #229
20170011883
2017-01-12

System and method for scanning an object with an electron beam using overlapping scans and electron beam counter-deflection

 #230
20160365223
2016-12-15

Method for evaluating charged particle beam drawing apparatus

 #231
20160329189
2016-11-10

Method and system for aberration correction in an electron beam system

 #232
20160322196
2016-11-03

Multi-charged particle beam writing apparatus and multi-charged particle beam writing method

 #233
20160314929
2016-10-27

Beam Guidance System, Particle Beam Therapy System and Method

 #234
20160300690
2016-10-13

Charged particle-beam device

 #235
20160276125
2016-09-22

Phase plate, method of fabricating same, and electron microscope

 #236
20160240348
2016-08-18

Charged particle beam device

 #237
20160240344
2016-08-18

Charged particle inspection method and charged particle system

 #238
20160233049
2016-08-11

Charged particle beam device

 #239
20160225582
2016-08-04

Method and system for imaging of a photomask through a pellicle

 #240
20160217969
2016-07-28

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Electron microscope

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2016-06-30

ANTENNA STRUCTURE

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2016-06-23

Electron beam window tile having non-uniform cross-sections

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2016-06-23

Method of adjusting a stigmator in a particle beam apparatus and a Particle beam system

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2016-06-16

Method and apparatus for neutral beam processing based on gas cluster ion beam technology and articles produced thereby

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2016-06-16

Apparatus and method to control an ion beam

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2016-06-16

Image type electron spin polarimeter

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2016-06-02

Multiple charged particle beam lithography apparatus and multiple charged particle beam pattern writing method

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2016-06-02

Method and system for adaptively scanning a sample during electron beam inspection

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2016-05-26

Dynamic pattern generator and method of toggling mirror cells of the dynamic pattern generator

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2016-04-28

E-beam inspection apparatus and method of using the same on various integrated circuit chips

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2016-04-21

Blanking device for multi charged particle beams, and multi charged particle beam writing apparatus

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2016-04-21

ELECTRODE ASSEMBLY HAVING PIERCE ELECTRODES FOR CONTROLLING SPACE CHARGE EFFECTS

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2016-03-24

Ozone supplying apparatus, ozone supplying method, and charged particle beam drawing system

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2016-03-10

Method of performing spectroscopy in a transmission charged-particle microscope

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2016-02-04

Charged particle beam specimen inspection system and method for operation thereof

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2016-02-04

Method for analyzing and/or processing an object as well as a particle beam device for carrying out the method

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Composite charged particle detector, charged particle beam device, and charged particle detector

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2015-12-10

Ion implantation apparatus and ion implantation method

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Charged particle beam apparatus and trajectory correction method in charged particle beam apparatus

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Charged particle beam device

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Charged particle beam device

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Electromagnet support frame

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2015-11-26

Multi charged particle beam writing method, and multi charged particle beam writing apparatus

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2015-11-19

Electron beam writing apparatus and electron beam writing method

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2015-11-19

High-speed multi-frame dynamic transmission electron microscope image acquisition system with arbitrary timing

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Charged particle beam apparatus and program

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Low-dose radiographic imaging system

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2015-10-29

Multi-Beam Tool for Cutting Patterns

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Multi-beam tool for cutting patterns

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Method and apparatus for neutral beam processing based on gas cluster ion beam technology

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Charged particle beam apparatus

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Grid assembly and ion beam etching apparatus

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Ion implantation apparatus, final energy filter, and ion implantation method

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Charged particle beam writing apparatus and charged particle beam writing method

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Ion implanter, beam energy measuring device, and method of measuring beam energy

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Method and system for forming patterns with charged particle beam lithography

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Methods, apparatuses, systems and software for treatment of a specimen by ion-milling

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Charged particle beam system

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Digital pattern generator (DPG) for E-beam lithography

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SECONDARY ELECTRON OPTICS AND DETECTION DEVICE

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Method and apparatus for control of coherent synchrotron radiation effects during recirculation with bunch compression

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Method and apparatus for neutral beam processing based on gas cluster ion beam technology

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Charged particle beam device, control method for charged particle beam device, and cross-section processing observation apparatus

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Method and apparatus for transferring pixel data for electron beam lithography

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Deflection plate and deflection device for deflecting charged particles

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Device for producing an electron beam

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Charged particle beam device

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Charged particle beam device

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2015-05-07

Deflection plate and deflection device for deflecting charged particles

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2015-05-07

Particle beam transport apparatus

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2015-04-16

Blanking device for multiple charged particle beams

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Charged particle beam apparatus

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Method for transmitting a broadband ion beam and ion implanter

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Ion implanter, magnetic field measurement device, and ion implantation method

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2015-02-26

Charged particle beam apparatus and method of correcting landing angle of charged particle beam

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2015-02-12

Gas field ionization ion source and ion beam apparatus

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2015-02-12

Pattern critical dimension measurement equipment and method for measuring pattern critical dimension

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2015-02-12

Method of using an environmental transmission electron microscope

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2015-02-05

DRAWING APPARATUS AND ARTICLE MANUFACTURING METHOD