COLLATION SYSTEM

MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS

SYSTEMS AND METHODS FOR FOCUSING CHARGED-PARTICLE BEAMS

APPARATUS FOR DETECTING ELECTRON, METHOD FOR DETECTING ELECTRON SIGNAL, AND ELECTRON MICROSCOPE

THERMALLY OPTIMIZED EXTRACTION PLATE FOR ION IMPLANTER

PARTICLE BEAM SYSTEM

ELECTRON BEAM METROLOGY HAVING A SOURCE ENERGY SPREAD WITH FILTERED TAILS

Image Acquisition Method and Scanning Transmission Electron Microscope

DRIFT COMPENSATION FOR RADIATION-SENSITIVE SPECIMENS

MULTI-BEAM CHARGED PARTICLE MICROSCOPE DESIGN WITH A DETECTION UNIT FOR FAST COMPENSATION OF CHARGING EFFECTS

SPLIT-COLUMN ACCELERATION TUBE FOR SCANNING ELECTRON MICROSCOPE

Scanning Transmission Electron Microscope and Aligning Method of Aperture

CHARGED PARTICLE BEAM DISTORTION CORRECTION METHOD

SYSTEMS AND METHODS OF SEM INSPECTION USING SELECTIVE SCAN APPROACH

PARTICLE BEAM SYSTEM

HIGH BANDWIDTH VARIABLE DOSE ION IMPLANTATION SYSTEM AND METHOD

DEFLECTOR FOR A CHARGED PARTICLE BEAM APPARATUS, DEFLECTING SYSTEM, CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF FABRICATING A DEFLECTOR

MULTIPLE-BEAM IMAGE ACQUISITION APPARATUS AND MULTIPLE-BEAM IMAGE ACQUISITION METHOD

DUAL BEAM SYSTEMS AND METHODS FOR DECOUPLING THE WORKING DISTANCE OF A CHARGED PARTICLE BEAM DEVICE FROM FOCUSED ION BEAM GEOMETRY INDUCED CONSTRAINTS

BEAM POSITION MEASUREMENT METHOD AND CHARGED PARTICLE BEAM WRITING METHOD

CHARGED PARTICLE BEAM APPARATUS

BEAM POSITION DISPLACEMENT CORRECTION IN CHARGED PARTICLE INSPECTION

FIB AND SEM RESOLUTION ENHANCEMENT USING ASYMMETRIC PROBE DECONVOLUTION

ION IMPLANTER AND ION IMPLANTATION METHOD

METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM IMAGING DEVICE

CHARGED-PARTICLE APPARATUS, MULTI-DEVICE APPARATUS, METHOD OF USING CHARGED-PARTICLE APPARATUS AND CONTROL METHOD

MAGNETIZATION DEVICE FOR AN ELECTRON MICROSCOPE AND METHOD

Electron Gun, Electron Beam Applying Device, and Irradiation Position Shifting Method

ELECTRON BEAM APPLICATION DEVICE

CHARGED PARTICLE OPTICAL DEVICE, OBJECTIVE LENS ASSEMBLY, DETECTOR, DETECTOR ARRAY, AND METHODS

Simple Spherical Aberration Corrector for SEM

IMAGING, PROCESSING, AND/OR ANALYZING AN OBJECT USING A PARTICLE BEAM DEVICE

ABERRATION CORRECTOR AND ELECTRON MICROSCOPE

Automated ion-beam alignment for dual-beam instrument

PROCESSING APPARATUS AND METHOD OF MANUFACTURE

SEMICONDUCTOR INSPECTION APPARATUS AND SEMICONDUCTOR INSPECTION METHOD USING THE SAME

Methods and Systems for Processing of Microscopy Images

Method Of Imaging And Milling A Sample

METHOD AND APPARATUS FOR PROCESSING A LITHOGRAPHIC MASK

Bandpass charged particle energy filtering detector for charged particle tools

Electron optical module for providing an off-axial electron beam with a tunable coma

METHOD FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROLITHOGRAPHIC PHOTOMASK

Multi-charged-particle-beam writing apparatus and multi-charged-particle-beam writing method

In-die metrology methods and systems for process control

PARTICLE BEAM COLUMN

ION GUN AND METHODS FOR SURFACE TREATMENT

Apparatus and method for generating particle wave carrying electric charge

Charged particle beam device

Multiple electron beam image acquisition method, multiple electron beam image acquisition apparatus, and multiple electron beam inspection apparatus

Multi-beam inspection apparatus with improved detection performance of signal electrons

Charged particle beam manipulation device and method for manipulating charged particle beamlets

System and method for bare wafer inspection

Charged particle beam adjustment method, charged particle beam drawing method, and charged particle beam irradiation apparatus

SYSTEMS AND METHODS FOR FOCUSING CHARGED -PARTICLE BEAMS

Incident axis alignment method for electron gun equipped with photocathode, computer program, and electron gun equipped with photocathode

Axial alignment assembly, and charged particle microscope comprising such an alignment assembly

Charged-particle source

Scanning transmission electron microscope and adjustment method of optical system

Multi-beam inspection apparatus with improved detection performance of signal electrons

Particle beam system

Charged particle optical apparatus for through-the-lens detection of particles

Charged particle beam device

Multi-beam writing method and multi-beam writing apparatus

Adjustment method and electron beam device

Charged particle beam system and method

Multi charged particle beam writing apparatus and multi charged particle beam writing method

Plasma processing apparatus and plasma processing method

Scanning electron microscope

Electron beam irradiation apparatus and electron beam alignment method

Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring

In-die metrology methods and systems for process control

OPTICAL SYSTEM ADJUSTMENT METHOD OF IMAGE ACQUISITION APPARATUS

ELECTRON MICROSCOPE EQUIPPED WITH AUTOMATIC BEAM ALIGNMENT

Charged particle beam device and optical-axis adjusting method thereof

Charged particle optical apparatus for through-the-lens detection of particles

System and method for bare wafer inspection

Multiple electron beam image acquisition apparatus, and alignment method of multiple electron beam optical system

MULTIPLE ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTIPLE ELECTRON BEAM IMAGE ACQUISITION METHOD

Operating a particle beam apparatus

Method for automatically aligning a scanning transmission electron microscope for precession electron diffraction data mapping

Charged particle beam axial alignment device, charged particle beam irradiation device and charged particle beam axial alignment method

Electron beam device and sample inspection method

Multi-beam inspection apparatus with improved detection performance of signal electrons

Two-axis variable width mass resolving aperture with fast acting shutter motion

Ion beam apparatus including slit structure for extracting ion beam

Multiple charged particle beam writing method and apparatus using beams for straddling regions

Method for adjusting a particle beam microscope

Electron microscope and specimen tilt angle adjustment method

Electron spectroscopy system

Charged particle beam apparatus

Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring

Electron reflectometer and process for performing shape metrology

Optical system adjustment method of image acquisition apparatus

Method for alignment of a light beam to a charged particle beam

Apparatus and techniques to treat substrates using directional plasma and point of use chemistry

Charged particle beam device and optical-axis adjusting method thereof

Multi-column scanning electron microscopy system

Charged particle optical apparatus for through-the-lens detection of particles

Control method and control program for focused ion beam device

Multi charged particle beam writing apparatus and adjusting method for multi charged particle beam writing apparatus

Electron source architecture for a scanning electron microscopy system

Focused ion beam apparatus

Multi-column scanning electron microscopy system

Ion beam apparatus including slit structure for extracting ion beam, etching method using the same, and method for manufacturing magnetic memory device using the ion beam apparatus

Charged particle beam apparatus, alignment method of charged particle beam apparatus, alignment program, and storage medium

Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring

Multi charged particle beam exposure method, and multi charged particle beam exposure apparatus

Beam alignment method and electron microscope

Charged particle optical apparatus for through-the lens detection of particles

Low profile extraction electrode assembly

Apparatus and techniques to treat substrates using directional plasma and point of use chemistry

Electron beam splitter

Charged particle beam device

Source for selectively providing positively or negatively charged particles for a focusing column

Aberration correction apparatus, device having the same, and method for correcting aberration of charged particles

Method and apparatus for controlling a magnetic field in a plasma chamber

Processing apparatus and processing method

Apparatus and method of applying small-angle electron scattering to characterize nanostructures on opaque substrate

Multi charged particle beam writing method, and multi charged particle beam writing apparatus

LITHOGRAPHY APPARATUS AND METHOD, AND METHOD OF MANUFACTURING AN ARTICLE

Electron beam writing apparatus, and method for adjusting convergence half angle of electron beam

Scanning electron microscope

Multi charged particle beam writing apparatus, and multi charged particle beam writing method

DRAWING APPARATUS, DRAWING METHOD, AND METHOD FOR MANUFACTURING ARTICLE

Method and device for bunching a beam of charged particles

Electron emitter device with integrated multi-pole electrode structure

Processing apparatus and method using a scanning electron microscope

Method for axial alignment of charged particle beam and charged particle beam system

Electron microscope

Beam control assembly for ribbon beam of ions for ion implantation

Micro-column with double aligner

ELECTRON BEAM EXPOSURE APPARATUS

Method of axial alignment of charged particle beam and charged particle beam system

Charged particle beam system and method of axial alignment of charged particle beam

Inductively coupled plasma source as an electron beam source for spectroscopic analysis

ELECTRON MICROSCOPE, AND METHOD FOR ADJUSTNG OPTICAL AXIS OF ELECTRON MICROSCOPE

Electron beam apparatus and a device manufacturing method by using said electron beam apparatus

Integrable magnetic field compensation for use in scanning and transmission electron microscopes

Objective lens

Charged particle source with multiple selectable particle emitters

Projection lens arrangement

Method of making axial alignment of charged particle beam and charged particle beam system

Method for axial alignment of charged particle beam and charged particle beam system

Projection lens arrangement

Electron beam device with tilting and dispersion compensation, and method of operating same

Electron beam device with dispersion compensation, and method of operating same

Twin beam charged particle column and method of operating thereof

ALIGNING CHARGED PARTICLE BEAMS

Beam control assembly for ribbon beam of ions for ion implantation

Dual beam system

Charged particle beam writing apparatus and optical axis deviation correcting method for charged particle beam

Techniques for independently controlling deflection, deceleration and focus of an ion beam

Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns

Method and device for improved alignment of a high brightness charged particle gun

METHOD OF DETERMINING ANGLE MISALIGNMENT IN BEAM LINE ION IMPLANTERS

Objective lens

Method and apparatus for measurement of beam angle in ion implantation

CHARGED PARTICLE BEAM ALIGNMENT METHOD AND CHARGED PARTICLE BEAM APPARATUS

Ion implanting apparatus and method of correcting beam orbit

Charged particle beam device

Scanning electron microscope and method for detecting an image using the same

Scanning electron microscope alignment method and scanning electron microscope

Electron beam apparatus with aberration corrector

Charged particle beam deflection method with separate stage tracking and stage positional error signals

Beam control assembly for ribbon beam of ions for ion implantation

Integrated deflectors for beam alignment and blanking in charged particle columns

Method of determining angle misalignment in beam line ion implanters

Beam line architecture for ion implanter

Automatic method of axial adjustments in electron beam system

Systems and methods for beam angle adjustment in ion implanters

Focused ION beam apparatus

Charged particle beam apparatus and method for charged particle beam adjustment

Method and device for aligning a charged particle beam column

Apparatus and adjusting method for a scanning transmission electron microscope

Charged particle beam apparatus

Electron beam apparatus with aberration corrector

Method and apparatus for applying charged particle beam

Charged-particle-beam mapping projection-optical systems and methods for adjusting same

Scanning electron microscope and method for detecting an image using the same

Electron beam apparatus and a device manufacturing method by using said electron beam apparatus

Ion implanter having enhanced low energy ion beam transport

Electron beam apparatus with aberration corrector

Scanning electron microscope

Electromagnetic regulator assembly for adjusting and controlling the current uniformity of continuous ion beams

Method and device for aligning a charged particle beam column

Method and device for aligning a charged particle beam column

Charged-particle beam microscope with differential vacuum pressures

Wafer temperature control with consideration to beam power input

Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring

Mirror pulse compressor for electron beam apparatus

Hybrid charged-particle beam and light beam microscopy

Particle beam device comprising an electrode unit