Patents-Review.com
ClassID:

205218 ⎘

H01J37/1472 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement; Arrangements for directing or deflecting the discharge along a desired path Deflecting along given lines

Sub-classes:
Recent Application in this class:
#1
20260148926
2026-05-28

DISTRIBUTIVE IMAGING ALLOWING SAMPLE RELAXATION

 #2
20260085932
2026-03-26

MEASUREMENT DEVICE

 #3
20260081096
2026-03-19

ELECTRONIC COMPONENT

 #4
20260058088
2026-02-26

CHARGED PARTICLE BEAM DEVICE AND CONTROL METHOD THEREOF

 #5
20260045442
2026-02-12

SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR IN A SINGLE-BEAM OR MULTI-BEAM APPARATUS

 #6
20260045440
2026-02-12

CREATION OF ELECTRON BEAMS USING A MICRO-DEFLECTOR ARRAY

 #7
20260024716
2026-01-22

APPARATUS FOR APPLYING ACCELERATED ELECTRONS TO BULK MATERIAL

 #8
20250385067
2025-12-18

METHOD FOR OPERATING A PARTICLE BEAM APPARATUS, COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM APPARATUS FOR CARRYING OUT THE METHOD

 #9
20250379021
2025-12-11

CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND CHARGED PARTICLE BEAM IRRADIATION METHOD

 #10
20250372342
2025-12-04

CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRITING APPARATUS

 #11
20250357067
2025-11-20

ABERRATION CORRECTOR FOR SCANNING ELECTRON MICROSCOPE WITH MULTIPLE ELECTRON BEAMS

 #12
20250357066
2025-11-20

ELECTRON BEAM METROLOGY HAVING A SOURCE ENERGY SPREAD WITH FILTERED TAILS

 #13
20250349497
2025-11-13

METHOD FOR DESIGNING A MULTI-BEAM PARTICLE BEAM SYSTEM HAVING MONOLITHIC PATH TRAJECTORY CORRECTION PLATES, COMPUTER PROGRAM PRODUCT AND MULTI-BEAM PARTICLE BEAM SYSTEM

 #14
20250349493
2025-11-13

ELECTRON MICROSCOPE AND IMAGE CAPTURING METHOD THEREOF

 #15
20250329509
2025-10-23

MODULAR ASSEMBLY

 #16
20250316442
2025-10-09

Microscope System

 #17
20250299903
2025-09-25

Aberration Correction Device and Aberration Correction Method

 #18
20250292994
2025-09-18

GRID-LESS ION ENERGY DETECTOR

 #19
20250232944
2025-07-17

MULTIPOLE LENS AND CHARGED PARTICLE BEAM DEVICE

 #20
20250201513
2025-06-19

TECHNIQUES FOR GUIDE STAR ALIGNMENT OF AN ION IMPLANTER

 #21
20250201508
2025-06-19

Natural Frequency Adjuster For Extraction Electrodes

 #22
20250182998
2025-06-05

SIGNAL ELECTRON BEAM DEFLECTOR FOR AN ELECTRON BEAM APPARATUS, ELECTRON BEAM APPARATUS AND METHOD OF DEFLECTING A SIGNAL ELECTRON BEAM

 #23
20250166959
2025-05-22

HIGH BANDWIDTH VARIABLE DOSE ION IMPLANTATION SYSTEM AND METHOD

 #24
20250140511
2025-05-01

METHOD OF CHARACTERIZING A DETECTION PATH OF A CHARGED PARTICLE BEAM AND A CHARGED PARTICLE MIRROR

 #25
20250112023
2025-04-03

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #26
20250095958
2025-03-20

CONOSCOPIC WAFER ORIENTATION FOR ION IMPLANTATION

 #27
20250095951
2025-03-20

ELECTRONIC COMPONENT AND CHARGED PARTICLE BEAM IRRADIATION APPARATUS

 #28
20250083381
2025-03-13

MOBILE ACCELERATOR-BASED VOLUMETRIC FABRICATION METHOD FOR IN-SITU CONSTRUCTION OF THREE-DIMENSIONAL STRUCTURES

 #29
20250062096
2025-02-20

Charged Particle Beam Device, and Beam Deflection Method in Charged Particle Beam Device

 #30
20250014854
2025-01-09

ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN THE PRODUCTION OF WAFERS

 #31
20240429017
2024-12-26

ELECTRON BEAM POSITION DETECTION AND REPOSITIONING

 #32
20240387140
2024-11-21

MULTIPLE ELECTRON BEAM OPTICS

 #33
20240382166
2024-11-21

CHARGED PARTICLE IMAGING SYSTEM AND USE THEREOF

 #34
20240355575
2024-10-24

BEAM MANIPULATOR IN CHARGED PARTICLE-BEAM APPARATUS

 #35
20240339288
2024-10-10

HYBRID APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM

 #36
20240339287
2024-10-10

APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM

 #37
20240321545
2024-09-26

SEMICONDUCTOR DEVICE

 #38
20240274396
2024-08-15

METHOD OF FORMING A MULTIPOLE DEVICE, METHOD OF INFLUENCING AN ELECTRON BEAM, AND MULTIPOLE DEVICE

 #39
20240258065
2024-08-01

METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND COMPUTER PROGRAM PRODUCT

 #40
20240212969
2024-06-27

CHARGED PARTICLE OPTICAL SYSTEM AND CHARGED PARTICLE APPARATUS

 #41
20240170249
2024-05-23

CHARGED PARTICLE BEAM SYSTEM, CORRECTOR FOR ABERRATION CORRECTION OF A CHARGED PARTICLE BEAM, AND METHOD THEREOF

 #42
20240161998
2024-05-16

DIRECT WRITING SYSTEM USED FOR ELECTRON BEAM LITHOGRAPHY

 #43
20240151664
2024-05-09

SUBSTRATE INSPECTION APPARATUS AND A METHOD OF INSPECTING A SUBSTRATE USING THE SAME

 #44
20240145209
2024-05-02

Objective lens system for fast scanning large FOV

 #45
20240140025
2024-05-02

Beam bending snout for mobile electron accelerators

 #46
20240112881
2024-04-04

SUBSTRATE ANALYSIS SYSTEM

 #47
20240055219
2024-02-15

ELECTRON OPTICAL COLUMN AND METHOD FOR DIRECTING A BEAM OF PRIMARY ELECTRONS ONTO A SAMPLE

 #48
20240055217
2024-02-15

Energy filter element for ion implantation systems for the use in the production of wafers

 #49
20240047171
2024-02-08

Charged particle optics components and their fabrication

 #50
20240017301
2024-01-18

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

 #51
20230411110
2023-12-21

Apparatus using charged particle beams

 #52
20230395349
2023-12-07

Creating multiple electron beams with a photocathode film

 #53
20230377831
2023-11-23

ANTI-SCANNING OPERATION MODE OF SECONDARY-ELECTRON PROJECTION IMAGING SYSTEM FOR APPARATUS WITH PLURALITY OF BEAMLETS

 #54
20230360880
2023-11-09

Multi-Beam Pattern Definition Device

 #55
20230324318
2023-10-12

CHARGED PARTICLE TOOL, CALIBRATION METHOD, INSPECTION METHOD

 #56
20230317406
2023-10-05

Charged Particle Beam System

 #57
20230290608
2023-09-14

CHARGED PARTICLE BEAM WRITING METHOD, CHARGED PARTICLE BEAM WRITING APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM

 #58
20230170181
2023-06-01

MULTIPLE PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATION, METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATION AND ASSOCIATED COMPUTER PROGRAM PRODUCT

 #59
20230170177
2023-06-01

ELECTRODE STRUCTURE FOR GUIDING A CHARGED PARTICLE BEAM

 #60
20230139482
2023-05-04

Ion implanter and ion implantation method

 #61
20230116381
2023-04-13

SYSTEM AND METHOD FOR HIGH THROUGHPUT DEFECT INSPECTION IN A CHARGED PARTICLE SYSTEM

 #62
20230112447
2023-04-13

SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION

 #63
20230102923
2023-03-30

CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRITING APPARATUS

 #64
20230078311
2023-03-16

Multi-charged-particle-beam writing method, multi-charged-particle-beam writing apparatus, and computer-readable recording medium

 #65
20230065475
2023-03-02

PARTICLE BEAM SYSTEM WITH MULTI-SOURCE SYSTEM AND MULTI-BEAM PARTICLE MICROSCOPE

 #66
20230055778
2023-02-23

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

 #67
20230052445
2023-02-16

Beam pattern device having beam absorber structure

 #68
20230040534
2023-02-09

Particle beam gun control systems and methods

 #69
20220392734
2022-12-08

CERTAIN IMPROVEMENTS OF MULTI-BEAM GENERATING AND MULTI-BEAM DEFLECTING UNITS

 #70
20220392733
2022-12-08

Apparatus and method for generating particle wave carrying electric charge

 #71
20220392731
2022-12-08

Blanking aperture array unit

 #72
20220367143
2022-11-17

Charged particle beam writing apparatus, charged particle beam writing method and recording medium

 #73
20220367142
2022-11-17

Particle beam device having a deflection unit

 #74
20220359156
2022-11-10

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

 #75
20220359150
2022-11-10

Charged particle beam device

 #76
20220319808
2022-10-06

Multi-beam inspection apparatus with improved detection performance of signal electrons

 #77
20220317066
2022-10-06

Methods and systems for acquiring three-dimensional electron diffraction data

 #78
20220262594
2022-08-18

SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR IN A SINGLE-BEAM OR MULTI-BEAM APPARATUS

 #79
20220208510
2022-06-30

Stroboscopic illumination synchronized electron detection and imaging

 #80
20220208509
2022-06-30

Primary charged particle beam current measurement

 #81
20220148851
2022-05-12

Apparatus of plural charged-particle beams

 #82
20220130638
2022-04-28

Charged particle beam device

 #83
20220115236
2022-04-14

METHOD AND APPARATUS TO ELIMINATE CONTAMINANT PARTICLES FROM AN ACCELERATED NEUTRAL ATOM BEAM AND THEREBY PROTECT A BEAM TARGET

 #84
20220115203
2022-04-14

Charged particle beam apparatus and control method

 #85
20220108864
2022-04-07

Charged particle beam system

 #86
20220102111
2022-03-31

IN-LENS WAFER PE-CHARGING AND INSPECTION WITH MULTIPLE BEAMS

 #87
20220068588
2022-03-03

ION IMPLANTER AND ION SELECTION METHOD

 #88
20220020556
2022-01-20

Energy filter element for ion implantation systems for the use in the production of wafers

 #89
20210398770
2021-12-23

Charged particle beam apparatus

 #90
20210387405
2021-12-16

Infrastructure-scale additive manufacturing using mobile electron accelerators

 #91
20210296079
2021-09-23

Particle beam apparatus and composite beam apparatus

 #92
20210296075
2021-09-23

Method and device for implanting ions in wafers

 #93
20210257185
2021-08-19

Multi-charged particle beam writing apparatus and multi-charged particle beam writing method

 #94
20210257184
2021-08-19

Multi-beam writing method and multi-beam writing apparatus

 #95
20210241995
2021-08-05

Charged particle beam writing apparatus, charged particle beam writing method, and a non-transitory computer-readable storage medium

 #96
20210239524
2021-08-05

Sampling assembly and testing instrument

 #97
20210237129
2021-08-05

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

 #98
20210233738
2021-07-29

Charged particle beam apparatus

 #99
20210151291
2021-05-20

Multi-beam inspection apparatus with improved detection performance of signal electrons

 #100
20210151280
2021-05-20

Multi-beam inspection apparatus

 #101
20210090845
2021-03-25

ELECTROSTATIC FILTER WITH SHAPED ELECTRODES

 #102
20210090844
2021-03-25

MULTI-COLUMN SCANNING ELECTRON MICROSCOPY SYSTEM

 #103
20210066036
2021-03-04

Methods of optical device fabrication using an electron beam apparatus

 #104
20210066025
2021-03-04

Charged particle beam device

 #105
20210066021
2021-03-04

Multi-pole deflector for charged particle beam and charged particle beam imaging apparatus

 #106
20210066020
2021-03-04

Ion milling device and ion source adjusting method for ion milling device

 #107
20210027975
2021-01-28

Energy filter element for ion implantation systems for the use in the production of wafers

 #108
20200411274
2020-12-31

Charged particle beam system

 #109
20200388464
2020-12-10

Apparatus of plural charged-particle beams

 #110
20200365366
2020-11-19

Laser-based phase plate image contrast manipulation

 #111
20200330798
2020-10-22

Particle beam gun control systems and methods

 #112
20200316853
2020-10-08

Method and system for in situ cross-linking of materials to produce three-dimensional features via electron beams from mobile accelerators

 #113
20200303163
2020-09-24

Ion implanter

 #114
20200303161
2020-09-24

Ion implanter and ion implantation method

 #115
20200303155
2020-09-24

Apparatus using charged particle beams

 #116
20200294757
2020-09-17

Charged Particle Beam Apparatus

 #117
20200294755
2020-09-17

Apparatus, system and techniques for mass analyzed ion beam

 #118
20200292308
2020-09-17

Pattern measurement device and pattern measurement method

 #119
20200249564
2020-08-06

Apparatus and method for repairing a photolithographic mask

 #120
20200243297
2020-07-30

Deflector and charged particle beam system

 #121
20200230665
2020-07-23

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

 #122
20200211818
2020-07-02

In-lens wafer pre-charging and inspection with multiple beams

 #123
20200194218
2020-06-18

Methods of optical device fabrication using an electron beam apparatus

 #124
20200194217
2020-06-18

Ion beam source for optical device fabrication using a segmented ion source having one or more angled surfaces

 #125
20200192028
2020-06-18

Methods of optical device fabrication using an ion beam source

 #126
20200192027
2020-06-18

Electron beam apparatus for optical device fabrication

 #127
20200152411
2020-05-14

Method of ion implantation and an apparatus for the same

 #128
20200139620
2020-05-07

Method and system for in situ cross-linking of materials to produce three-dimensional features via electron beams from mobile accelerators

 #129
20200091056
2020-03-19

Semiconductor device

 #130
20200090899
2020-03-19

Multi-electron-beam imaging apparatus with improved performance

 #131
20200083048
2020-03-12

Method and apparatus to eliminate contaminant particles from an accelerated neutral atom beam and thereby protect a beam target

 #132
20200066477
2020-02-27

Coil-integrated-type yoke and manufacturing method of the same

 #133
20200006031
2020-01-02

Charged particle beam image acquisition apparatus

 #134
20190369035
2019-12-05

Electron beam inspection apparatus and electron beam inspection method

 #135
20190362938
2019-11-28

Charged particle beam device

 #136
20190355545
2019-11-21

Charged particle beam system

 #137
20190341222
2019-11-07

Multi-beam inspection apparatus

 #138
20190326089
2019-10-24

Ion source and ion implantation apparatus

 #139
20190295816
2019-09-26

Interference optical system unit, charged particle beam interference apparatus, and method for observing charged particle beam interference image

 #140
20190279844
2019-09-12

Multi-beam inspection apparatus with improved detection performance of signal electrons

 #141
20190272976
2019-09-05

Two-axis variable width mass resolving aperture with fast acting shutter motion

 #142
20190267209
2019-08-29

Method and device for implanting ions in wafers

 #143
20190259574
2019-08-22

Charged particle beam apparatus and sample processing observation method

 #144
20190259573
2019-08-22

Apparatus of plural charged-particle beams

 #145
20190252152
2019-08-15

Charged particle beam steering arrangement

 #146
20190237297
2019-08-01

Charged particle beam writing method and charged particle beam writing apparatus

 #147
20190237292
2019-08-01

Ion beam apparatus including slit structure for extracting ion beam

 #148
20190228946
2019-07-25

Aberration correcting device for an electron microscope and an electron microscope comprising such a device

 #149
20190228944
2019-07-25

Method of eliminating thermally induced beam drift in an electron beam separator

 #150
20190206655
2019-07-04

Measuring spherical and chromatic aberrations in cathode lens electrode microscopes

 #151
20190189389
2019-06-20

Charged particle beam writing apparatus and charged particle beam writing method

 #152
20190122850
2019-04-25

Energy filter element for ion implantation systems for the use in the production of wafers

 #153
20190096628
2019-03-28

Objective lens system for fast scanning large FOV

 #154
20190066974
2019-02-28

Charged particle beam system and method of operating the same

 #155
20190057837
2019-02-21

Apparatus of plural charged-particle beams

 #156
20190035595
2019-01-31

Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus

 #157
20190022422
2019-01-24

Particle beam gun control systems and methods

 #158
20180350559
2018-12-06

Ion implanter and ion implantation method

 #159
20180343734
2018-11-29

Generation and acceleration of charged particles using compact devices and systems

 #160
20180337017
2018-11-22

Measuring spherical and chromatic aberrations in cathode lens electrode microscopes

 #161
20180330912
2018-11-15

Particle source for producing a particle beam and particle-optical apparatus

 #162
20180301314
2018-10-18

Energy filter and charged particle beam system

 #163
20180254168
2018-09-06

Aberration measurement in a charged particle microscope

 #164
20180236505
2018-08-23

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

 #165
20180226221
2018-08-09

Wide field atmospheric scanning electron microscope

 #166
20180226219
2018-08-09

Multi-column scanning electron microscopy system

 #167
20180166248
2018-06-14

Blanking deflector, and multi charged particle beam writing apparatus using three deflector electrodes and a transmission line

 #168
20180158643
2018-06-07

Ion beam apparatus including slit structure for extracting ion beam, etching method using the same, and method for manufacturing magnetic memory device using the ion beam apparatus

 #169
20180122616
2018-05-03

Charged particle beam writing apparatus, and charged particle beam writing method

 #170
20180090298
2018-03-29

Electron beam apparatus and positional displacement correcting method of electron beam

 #171
20170309449
2017-10-26

Apparatus of plural charged-particle beams

 #172
20170309440
2017-10-26

Multi charged particle beam irradiation apparatus, multi charged particle beam irradiation method, and multi charged particle beam adjustment method

 #173
20170304878
2017-10-26

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

 #174
20170301506
2017-10-19

Multi charged particle beam exposure method, and multi charged particle beam blanking apparatus

 #175
20170271121
2017-09-21

Charged particle beam device

 #176
20170263415
2017-09-14

Scanning electron microscope and electron trajectory adjustment method therefor

 #177
20170200582
2017-07-13

Charged particle beam writing apparatus and charged particle beam writing method

 #178
20170125206
2017-05-04

Apparatus of plural charged-particle beams

 #179
20170062173
2017-03-02

Light bath for particle suppression

 #180
20170025242
2017-01-26

Electron beam splitter

 #181
20170007848
2017-01-12

Particle beam treatment system with solenoid magnets

 #182
20160343535
2016-11-24

Charged particle beam drawing apparatus and charged particle beam drawing method

 #183
20160329186
2016-11-10

Charged particle beam device

 #184
20160300687
2016-10-13

Charged particle beam writing apparatus and charged particle beam writing method

 #185
20160293377
2016-10-06

Apparatus for GHz rate high duty cycle pulsing and manipulation of low and medium energy DC electron beams

 #186
20160268096
2016-09-15

Apparatus of plural charged-particle beams

 #187
20160247663
2016-08-25

Charged particle beam system and method of operating the same

 #188
20160247657
2016-08-25

MICRO-ELECTRON COLUMN HAVING NANO STRUCTURE TIP WITH EASILY ALIGNING

 #189
20160240347
2016-08-18

Signal charged particle deflection device, signal charged particle detection system, charged particle beam device and method of detection of a signal charged particle beam

 #190
20160233053
2016-08-11

Method for rapid switching between a high current mode and a low current mode in a charged particle beam system

 #191
20160233046
2016-08-11

X-ray generation device having multiple metal target members

 #192
20160217968
2016-07-28

Objective lens system for fast scanning large FOV

 #193
20160217967
2016-07-28

Charged particle beam device

 #194
20160196952
2016-07-07

Electron microscope

 #195
20160189912
2016-06-30

Combined electrostatic lens system for ion implantation

 #196
20160181057
2016-06-23

High resolution charged particle beam device and method of operating the same

 #197
20160174355
2016-06-16

Generation and acceleration of charged particles using compact devices and systems

 #198
20160155604
2016-06-02

Multi charged particle beam writing method, and multi charged particle beam writing apparatus

 #199
20160141144
2016-05-19

Method and apparatus for electron beam lithography

 #200
20160141143
2016-05-19

Electron beam writing apparatus and output control method

 #201
20160126082
2016-05-05

Mass analyzing electromagnet and ion beam irradiation apparatus

 #202
20160097823
2016-04-07

DEVICE FOR MEASURING AND CLOSED-LOOP CONTROL OF A MAGNETIC FIELD GENERATED BY AN ELECTROMAGNET

 #203
20160086765
2016-03-24

Electron detection system

 #204
20160086764
2016-03-24

Method of measuring beam position of multi charged particle beam, and multi charged particle beam writing apparatus

 #205
20160027610
2016-01-28

Annular cooling fluid passage for magnets

 #206
20160020063
2016-01-21

Charged particle beam writing apparatus and charged particle beam writing method

 #207
20160005567
2016-01-07

High-speed multiframe dynamic transmission electron microscope image acquisition system with arbitrary timing

 #208
20150380206
2015-12-31

Single bend energy filter for controlling deflection of charged particle beam

 #209
20150364290
2015-12-17

Charged particle beam application device

 #210
20150348750
2015-12-03

Charged particle beam device and method for analyzing defect therein

 #211
20150348748
2015-12-03

Charged particle beam apparatus

 #212
20150348747
2015-12-03

Charged-particle beam device

 #213
20150348741
2015-12-03

Multi charged particle beam writing method, and multi charged particle beam writing apparatus

 #214
20150325401
2015-11-12

Low-dose radiographic imaging system

 #215
20150311032
2015-10-29

Exposure method using control of settling times and methods of manufacturing integrated circuit devices by using the same

 #216
20150279615
2015-10-01

Imaging a Sample with Multiple Beams and Multiple Detectors

 #217
20150270098
2015-09-24

Charged particle beam treatment apparatus and method of adjusting path length of charged particle beam

 #218
20150262791
2015-09-17

ELECTRON BEAM DRAWING METHOD, ELECTRON BEAM DRAWING APPARATUS AND DATA GENERATING METHOD

 #219
20150235800
2015-08-20

High-speed multiframe dynamic transmission electron microscope image acquisition system with arbitrary timing

 #220
20150228454
2015-08-13

High-energy ion implanter, beam collimator, and beam collimation method

 #221
20150179392
2015-06-25

Method and apparatus for electron beam lithography

 #222
20150157881
2015-06-11

Circular accelerator and particle beam therapy apparatus

 #223
20150144801
2015-05-28

PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING THE SAME

 #224
20150144785
2015-05-28

Asymmetric electrostatic quadrupole deflector for improved field uniformity

 #225
20150136996
2015-05-21

High energy ion implanter, beam current adjuster, and beam current adjustment method

 #226
20150136967
2015-05-21

Deceleration apparatus for ribbon and spot beams

 #227
20150069261
2015-03-12

Method for transmitting a broadband ion beam and ion implanter

 #228
20150069260
2015-03-12

CHARGED-PARTICLE MULTI-BEAM APPARATUS HAVING CORRECTION PLATE

 #229
20150069235
2015-03-12

Particle optical system

 #230
20150060690
2015-03-05

Charged particle beam writing apparatus, and charged particle beam writing method

 #231
20150048254
2015-02-19

HYBRID ELECTROSTATIC LENS WITH INCREASED NATURAL FREQUENCY

 #232
20150029593
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Spherical aberration corrector, method of spherical aberration correction, and charged particle beam instrument

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METHOD AND SYSTEM FOR FORMING HIGH ACCURACY PATTERNS USING CHARGED PARTICLE BEAM LITHOGRAPHY

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20140084158
2014-03-27

Scanning electron microscope

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2014-02-06

Hybrid electrostatic lens with increased natural frequency

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2013-04-04

Particle beam system and method for operating the same

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2013-02-07

Electron beam apparatus and a device manufacturing method by using said electron beam apparatus

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2013-01-03

SYSTEM AND METHOD FOR PRODUCING A MASS ANALYZED ION BEAM FOR HIGH THROUGHPUT OPERATION

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2012-11-29

Deflecting device for electron beams, magnetic deflecting unit for such a deflecting device, and device for vapor coating a planar substrate using such a deflecting device

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2012-09-06

Electrostatic lenses and systems including the same

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2012-08-30

Method for rapid switching between a high current mode and a low current mode in a charged particle beam system

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2012-05-03

Ion implantation method and ion implantation apparatus

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2012-05-03

CHARGED PARTICLE GUN AND CHARGED PARTICLE BEAM DEVICE

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2012-04-26

Deceleration apparatus for ribbon and spot beams

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Generalized Focusing And Deflection Utilizing Deformed Conducting Electrodes

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2011-11-10

Throughput Enhancement for Scanned Beam Ion Implanters

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2011-09-08

Ion implantation method and ion implantation apparatus

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2011-09-08

Method for improving implant uniformity during photoresist outgassing

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2011-05-05

EVAPORATION SYSTEM

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2011-04-21

Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separator

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2011-03-03

Pattern modification schemes for improved FIB patterning

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2011-01-06

Use of beam scanning to improve uniformity and productivity of a 2D mechanical scan implantation system

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2010-12-23

Off-axis ion milling device for manufacture of magnetic recording media and method for using the same

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2010-09-02

Ion deflector for two-dimensional control of ion beam cross sectional spread

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2010-04-08

Implant uniformity control

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Charged particle beam apparatus

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2010-01-07

PLASMA GENERATING APPARATUS AND FILM FORMING APPARATUS USING PLASMA GENERATING APPARATUS

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2010-01-07

Method of acquiring offset deflection amount for shaped beam and lithography apparatus

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2009-09-10

Apparatus and method for processing a wafer

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20090189096
2009-07-30

Apparatus and methods for ion beam implantation using ribbon and spot beams

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Charged particle beam deflection method with separate stage tracking and stage positional error signals

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Broad energy-range ribbon ion beam collimation using a variable-gradient dipole

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Pattern definition device having distinct counter-electrode array plate

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2008-09-04

Pattern measuring method and electron microscope

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20080061246
2008-03-13

Apparatus for blanking a charged particle beam

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2008-03-13

Systems and methods for beam angle adjustment in ion implanters

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2008-03-06

Variable shaped electron beam lithography system and method for manufacturing substrate

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20080054188
2008-03-06

Electron beam lithography apparatus and method for compensating for electron beam misalignment

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2008-03-06

Method of aberration correction and electron beam system

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2008-02-28

Charged particle beam device and method for inspecting specimen

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2008-02-07

Apparatus and method for ion beam implantation using ribbon and spot beams

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2007-08-16

Electromagnet with active field containment

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2007-08-09

Controlling the characteristics of implanter ion-beams

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20070023697
2007-02-01

Controlling the characteristics of implanter ion-beams

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2006-09-07

Broad energy-range ribbon ion beam collimation using a variable-gradient dipole

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2006-08-03

Controlling the characteristics of implanter ion-beams

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2006-05-11

Electron beam apparatus and a device manufacturing method by using said electron beam apparatus

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Controlling the characteristics of implanter ion-beams

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2005-06-09

Charged particle beam irradiation method, method of manufacturing semiconductor device and charged particle beam apparatus

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2005-04-21

Method and fine-control collimator for accurate collimation and precise parallel alignment of scanned ion beams

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2005-01-27

Electromagnetic regulator assembly for adjusting and controlling the current uniformity of continuous ion beams

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Positioning samples for microscopy, inspection, or analysis

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2017-08-15

Beam current density distribution adjustment device and ion implanter

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2018-08-21

Scanning UV light source utilizing semiconductor heterostructures

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2017-04-25

Emitter for an electron beam, electron beam device and method for producing and operating an electron emitter

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Beam separator device, charged particle beam device and methods of operating thereof

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Dual mode ion implanter