205222 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement; Arrangements for directing or deflecting the discharge along a desired path Beam tilting means, i.e. for stereoscopy or for beam channelling
MODULAR OPTICAL BENCH ASSEMBLY
#2METHOD FOR THE AUTOMATED MECHANICAL ADJUSTMENT OF A PARTICLE BEAM COLUMN, ASSOCIATED COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM COLUMN
#3PROTECTING A DETECTOR WHILE DISCHARGING A REGION OF A SAMPLE
#4APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
#5ION ANGLE SENSOR
#6RIBBON BEAM ANGLE ADJUSTMENT IN AN ION IMPLANTATION SYSTEM
#7METHOD TO MORE PRECISELY CALIBRATE THE MECHANICAL TILT AND ROTATION ANGLES OF AN SEM COLUMN
#8FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS
#93D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUME INSPECTION METHOD
#10APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE BY USING FOCUSED ION BEAM AND SCANNING ELECTRON MICROSCOPE SUPPORTED BY ELECTRON DIFFRACTION PATTERN
#11Apparatus of plural charged-particle beams
#12Optical auto-focus unit and a method for auto-focus
#13Method, device and system for reducing off-axial aberration in electron microscopy
#14CHARGED-PARTICLE BEAM APPARATUS WITH BEAM-TILT AND METHODS THEREOF
#15Charged Particle Beam Apparatus
#16Apparatus of plural charged-particle beams
#17Modulation of rolling k vectors of angled gratings
#18TECHNIQUES AND APPARATUS FOR UNIDIRECTIONAL HOLE ELONGATION USING ANGLED ION BEAMS
#19Method, device and system for reducing off-axial aberration in electron microscopy
#20MULTIPLE PARTICLE BEAM SYSTEM WITH A CONTRAST CORRECTION LENS SYSTEM
#21Microscopy feedback for improved milling accuracy
#22Systems and methods for real time stereo imaging using multiple electron beams
#23Electron Microscope and Image Acquisition Method
#24Semiconductor manufacturing apparatus, semiconductor device and manufacturing method of semiconductor device
#25Ribbon beam angle adjustment in an ion implantation system
#26Pattern inspecting device
#27Geometry based three dimensional reconstruction of a semiconductor specimen by solving an optimization problem, using at least two SEM images acquired at different illumination angles
#28Method, device and system for reducing off-axial aberration in electron microscopy
#29Ion milling device
#30Apparatus of plural charged-particle beams
#31Calibration sample, electron beam adjustment method and electron beam apparatus using same
#32Charged particle beam apparatus
#33Modulation of rolling k vectors of angled gratings
#34Pattern measurement device and non-transitory computer readable medium having stored therein program for executing measurement
#35MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS OF OPERATING THE SAME
#36Diagonal compound mill
#37Apparatus and method for repairing a photolithographic mask
#38Modulation of ion beam angle
#39Modulation of rolling K vectors of angled gratings
#40Apparatus of plural charged-particle beams
#41Charged particle beam device and capturing condition adjusting method in charged particle beam device
#42Enabling high throughput electron channeling contrast imaging (ECCI) by varying electron beam energy
#43Apparatus for combined stem and EDS tomography
#44Charged particle beam device
#45Rock sample preparation method by using focused ion beam for minimizing curtain effect
#46Method for sample orientation for TEM lamella preparation
#47Aberration measurement method and electron microscope
#48Focused ion beam apparatus
#49Rock sample preparation method by using focused ion beam for minimizing curtain effect
#50Automatic alignment for high throughput electron channeling contrast imaging
#51Beam alignment method and electron microscope
#52Apparatus of plural charged-particle beams
#53Method of reducing coma and chromatic aberration in a charged particle beam device, and charged particle beam device
#54Method and system for aberration correction in an electron beam system
#55Charged particle beam inclination correction method and charged particle beam device
#56Swing objective lens
#57Specimen preparation device
#58Charged particle beam application device
#59Charged particle beam apparatus and trajectory correction method in charged particle beam apparatus
#60Angular scanning using angular energy filter
#61Charged particle beam apparatus
#62Method of matching two or more plasma reactors
#63Charged particle beam system and method of operating thereof
#64Charged particle beam device and image display method for stereoscopic observation and stereoscopic display
#65Charged particle beam device
#66Pattern evaluation method, device therefor, and electron beam device
#67Electron Beam Biprism Device and Electron Beam Device
#68Focused ion beam device and focused ion beam processing method
#69Projection lens arrangement
#70CHARGED PARTICLE BEAM DEVICE AND IMAGE DISPLAY METHOD
#71Projection lens arrangement
#72Electron beam device with tilting and dispersion compensation, and method of operating same
#73Charged particle beam device and a method of operating a charged particle beam device
#74SACP method and particle optical system for performing the method
#75Charged particle beam apparatus
#76Charged particle beam apparatus and method for operating a charged particle beam apparatus
#77Charged particle beam device and method for inspecting specimen
#78Charged particle beam column
#79System and method for determining a cross sectional feature of a structural element using a reference structural element
#80Charged-particle beam instrument and method of detection
#81Irradiation system ion beam and method to enhance accuracy of irradiation
#82Irradiation system with ion beam
#83Method to increase low-energy beam current in irradiation system with ion beam
#84Charged particle beam adjustment method and apparatus
#85Charged particle beam column
#86Method and system for the examination of specimen