205223 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement; Arrangements for directing or deflecting the discharge along a desired path External mechanical adjustment of electron or ion optical components
ION IMPLANTER
#2SPLIT-COLUMN ACCELERATION TUBE FOR SCANNING ELECTRON MICROSCOPE
#3SUBSTRATE PROCESSING APPARATUS
#4FIB AND SEM RESOLUTION ENHANCEMENT USING ASYMMETRIC PROBE DECONVOLUTION
#5METHOD AND APPARATUS FOR INSPECTION
#6Mechanism for adjusting angle of incidence on charged particle beam aperture, and charged particle beam device
#7Charged particle beam device and axis adjustment method thereof
#8ACTUATOR ARRANGEMENT AND ELECTRON-OPTICAL COLUMN
#9POLE PIECE FOR A TRANSMISSION ELECTRON MICROSCOPE
#10Replaceable module for a charged particle apparatus
#11Method and apparatus for inspection
#12Axial alignment assembly, and charged particle microscope comprising such an alignment assembly
#13Charged particle beam device and axis adjustment method thereof
#14Plasma processing system
#15Plasma processing system
#16Ion beam apparatus including slit structure for extracting ion beam
#17Method and apparatus for inspection
#18Control method and control program for focused ion beam device
#19CONTINUOUSLY VARIABLE APERTURE
#20Ion beam apparatus including slit structure for extracting ion beam, etching method using the same, and method for manufacturing magnetic memory device using the ion beam apparatus
#21Electron-beam spot optimization
#22Method of adjusting a stigmator in a particle beam apparatus and a Particle beam system
#23High-energy ion implanter, beam collimator, and beam collimation method
#24Device for producing an electron beam
#25High-voltage insulation device for charged-particle optical apparatus
#26Double ended electrode manipulator
#27Optical module for X-ray microscope
#28Ion beam device
#29Method and structure for controlling magnetic field distributions in an ExB Wien filter
#30Method and apparatus for controlling an asymmetric electrostatic lens about a central ray trajectory of an ion beam
#31Ion beam device
#32Selectable coulomb aperture in E-beam system
#33Method for controlling charging of sample and scanning electron microscope
#34Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus
#35Extraction electrode manipulator
#36Multi-beam ion/electron spectra-microscope
#37Charged particle beam apparatus and method adjusting axis of aperture
#38INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS
#39Beam optical component having a charged particle lens
#40Apparatus for blanking a charged particle beam
#41Techniques for reducing effects of photoresist outgassing
#42Techniques for preventing parasitic beamlets from affecting ion implantation
#43Technique for implementing a variable aperture lens in an ion implanter
#44Irradiation system ion beam and method to enhance accuracy of irradiation
#45Irradiation system with ion beam
#46Method to increase low-energy beam current in irradiation system with ion beam
#47Extractor for an microcolumn, an alignment method for an extractor aperture to an electron emitter, and a measuring method and an alignment method using thereof
#48Pattern-definition device for maskless particle-beam exposure apparatus