205233 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Optical or photographic arrangements associated with the tube Luminescent screens or photographic plates for imaging ; Apparatus specially adapted therefor, e.g. cameras, TV-cameras, photographic equipment, exposure control; Optical subsystems specially adapted therefor, e.g. microscopes for observing image on luminescent screen
CHARGED PARTICLE BEAM DEVICE
#2Charged Particle Beam Apparatus
#3Recipe Creating System, Length Measurement System, and Recipe Creating Method
#4INSPECTION DEVICE AND FILM QUALITY INSPECTION METHOD
#5SAMPLE IMAGE OBSERVATION DEVICE AND METHOD
#6Transmission Electron Microscope
#7Method and apparatus for Schottky TFE inspection
#8APPARATUS FOR ANALYZING AND/OR PROCESSING A SAMPLE WITH A PARTICLE BEAM AND METHOD
#9Method and apparatus for Schottky TFE inspection
#10Transmission electron microscope and imaging method
#11CHARGED PARTICLE BEAM DEVICE
#12APPARATUS AND METHOD FOR DETECTING ONE OR MORE SCANNING CHARGED PARTICLE BEAMS
#13Method for producing phosphor panel, phosphor panel, image intensifier and scanning-type electronic microscope
#14Charged particle beam device
#15Method for high speed EELS spectrum acquisition
#16Scanning electron microscope
#17Holder and charged particle beam apparatus
#18Holder and charged particle beam apparatus
#19Charged particle beam apparatus
#20Apparatus and method for inspecting a sample using a plurality of charged particle beams
#21Charge control device for a system with multiple electron beams
#22Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column
#23Signal separator for a multi-beam charged particle inspection apparatus
#24Charged particle beam device and method for adjusting charged particle beam device
#25Scanning electron microscope
#26Object preparation device and particle beam device having an object preparation device and method for operating the particle beam device
#27Image capture assembly and method for electron back scatter diffraction
#28Charged particle beam device for moving an aperture having plurality of openings and sample observation method
#29Apparatus and method for inspecting a sample using a plurality of charged particle beams
#30Electron spectrometer and measurement method
#31Particle beam detector
#32Charged particle beam device, sample stage unit, and sample observation method
#33Detection method for use in charged-particle microscopy
#34ELECTRON MICROSCOPE
#35Circuit and method for controlling a microscope
#36ELECTRON MICROSCOPE, AND METHOD FOR ADJUSTNG OPTICAL AXIS OF ELECTRON MICROSCOPE
#37Method for determining a distance between two beamlets in a multi-beamlet exposure apparatus
#38Detector for use in charged-particle microscopy
#39Charged particle beam apparatus
#40Electron microscope with electron spectrometer
#41Retractable lens-coupled electron microscope camera with image sensor in electron microscope vacuum chamber
#42Method and apparatus allowing simultaneous direct observation and electronic capture of scintillation images in an electron microscope
#43Electron microscope with electron spectrometer
#44Electron beam inspection system and inspection method and method of manufacturing devices using the system
#45TDI detecting device, a feed-through equipment, an electron beam apparatus using these device and equipment, and a semiconductor device manufacturing method using the same electron beam apparatus
#46Image pickup device and method of manufacturing the same
#47Direct collection transmission electron microscopy
#48Imaging device comprising optically coupled fiber optic plate assembly
#49Electron beam inspection system and inspection method and method of manufacturing devices using the system
#50Transmission electron microscope and image observation method using it