ClassID:

205235

H01J37/228 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Optical or photographic arrangements associated with the tube; Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge

Recent Application in this class:
#1
20260155332
2026-06-04

SYSTEMS AND METHODS FOR PULSED VOLTAGE CONTRAST DETECTION AND CAPTURE OF CHARGING DYNAMICS

#2
20260088248
2026-03-26

METHOD AND SYSTEM FOR CALIBRATING A CHARGED-PARTICLE SPECTROMETER

#3
20250391631
2025-12-25

LIGHT COLLECTION/INJECTION MIRROR ALIGNMENT

#4
20250285834
2025-09-11

ELECTRON MICROSCOPE IMAGING STAGES AND SYSTEMS

#5
20250146943
2025-05-08

OPTICAL APPARATUS

#6
20250087450
2025-03-13

Optics for In-Situ Scanning Electron Microscope Repair

#7
20240177964
2024-05-30

Charged Particle Beam System

#8
20240096588
2024-03-21

Transmission Electron Microscope

#9
20230335374
2023-10-19

SYSTEMS AND METHODS FOR PULSED VOLTAGE CONTRAST DETECTION AND CAPTURE OF CHARGING DYNAMICS

#10
20230333034
2023-10-19

OPTICAL EXTRACTION PROBE FOR ELECTRON MICROSCOPE AND OTHER VACUUM CHAMBERS

#11
20230298855
2023-09-21

METHOD AND APPARATUS FOR MICROMACHINING A SAMPLE USING A FOCUSED ION BEAM

#12
20220285195
2022-09-08

Load lock device having optical measuring device for acquiring distance

#13
20220230841
2022-07-21

Cost effective probing in high volume manufacture of micro LEDs

#14
20220216028
2022-07-07

CATHODOLUMINESCENCE ELECTRON MICROSCOPE

#15
20220199359
2022-06-23

Inspection devices and methods of inspecting a sample

#16
20210257183
2021-08-19

Device and method for determining a property of a sample that is to be used in a charged particle microscope

#17
20210210305
2021-07-08

Apparatus for wavelength resolved angular resolved cathodoluminescence

#18
20210134684
2021-05-06

Apparatus and method

#19
20210125807
2021-04-29

System and method for alignment of cathodoluminescence optics

#20
20210066030
2021-03-04

Photoabsorption microscopy using electron analysis

#21
20210062326
2021-03-04

ELECTRON BEAM PVD ENDPOINT DETECTION AND CLOSED-LOOP PROCESS CONTROL SYSTEMS

#22
20210035773
2021-02-04

System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination

#23
20200279715
2020-09-03

Optical height detection system

#24
20200273662
2020-08-27

Method and apparatus for an advanced charged controller for wafer inspection

#25
20190371569
2019-12-05

Apparatus for wavelength resolved angular resolved cathodoluminescence

#26
20190287760
2019-09-19

Charged particle beam system, opto-electro simultaneous detection system and method

#27
20190189392
2019-06-20

CHARGED PARTICLE BEAM SYSTEM AND METHODS

#28
20190013178
2019-01-10

Method for alignment of a light beam to a charged particle beam

#29
20180358199
2018-12-13

Charged particle beam device and scanning electron microscope

#30
20180079003
2018-03-22

Additive manufacturing device utilizing EB-laser composite scan

#31
20180019098
2018-01-18

Method of imaging a specimen using ptychography

#32
20170295633
2017-10-12

X-ray beam alignment device and method

#33
20170271123
2017-09-21

Method and device for time-resolved pump-probe electron microscopy

#34
20170221675
2017-08-03

Method for inspecting a sample using an assembly comprising a scanning electron microscope and a light microscope

#35
20170018399
2017-01-19

Device for correlative scanning transmission electron microscopy (STEM) and light microscopy

#36
20160377544
2016-12-29

Method and apparatus for determining a density of fluorescent markers in a sample

#37
20160260642
2016-09-08

System for inspecting and reviewing a sample

#38
20160203948
2016-07-14

Charged particle beam system and methods

#39
20160189918
2016-06-30

Sample holding device for studying light-driven reactions and sample analysis method using the same

#40
20160126059
2016-05-05

Method for coincident alignment of a laser beam and a charged particle beam

#41
20160005566
2016-01-07

Method and system for electron microscope with multiple cathodes

#42
20150380205
2015-12-31

Integrated light optics and gas delivery in a charged particle lens

#43
20150369737
2015-12-24

System and method for simultaneous detection of secondary electrons and light in a charged particle beam system

#44
20150318143
2015-11-05

Sample base, charged particle beam device and sample observation method

#45
20150262784
2015-09-17

Integrated optical and charged particle inspection apparatus

#46
20150235802
2015-08-20

Holder device for electron microscope

#47
20150228448
2015-08-13

Observation apparatus and optical axis adjustment method

#48
20150189730
2015-07-02

Method for generating extreme ultraviolet light and device for generating extreme ultraviolet light

#49
20150108350
2015-04-23

Integrated optical and charged particle inspection apparatus

#50
20150076364
2015-03-19

Adjustable cathodoluminescence detection system and microscope employing such a system

#51
20150060660
2015-03-05

Method for coincident alignment of a laser beam and a charged particle beam

#52
20150028205
2015-01-29

System for in situ reactivation of fluorescence marker

#53
20140346355
2014-11-27

Electron microscope

#54
20140231644
2014-08-21

In situ reactivation of fluorescence marker

#55
20140131573
2014-05-15

System and method for simultaneous detection of secondary electrons and light in a charged particle beam system

#56
20140131195
2014-05-15

Dual laser beam system used with an electron microscope and FIB

#57
20130200262
2013-08-08

Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus

#58
20130141803
2013-06-06

APPARATUS FOR COLLECTION OF CATHODOLUMINESCENCE SIGNALS

#59
20130088775
2013-04-11

Compound microscope device

#60
20130087706
2013-04-11

Cathodoluminescence detector including inner and outer tubes sealed from a vacuum chamber of an associated particle beam system

#61
20130068966
2013-03-21

Adjustable cathodoluminescence detection system and microscope employing such a system

#62
20120326033
2012-12-27

METHOD FOR SUPERIMPOSING AND DISPLAYING ELECTRON MICROSCOPE IMAGE AND OPTICAL IMAGE

#63
20120287244
2012-11-15

NON-COHERENT LIGHT MICROSCOPY

#64
20120257720
2012-10-11

Charged particle beam analyzer and analysis method

#65
20120200007
2012-08-09

Charged particle beam masking for laser ablation micromachining

#66
20120193530
2012-08-02

System and method for localization of large numbers of fluorescent markers in biological samples

#67
20120168623
2012-07-05

Observation and analysis unit

#68
20120138795
2012-06-07

Specimen observation method

#69
20120138792
2012-06-07

OPTICAL PROBING IN ELECTRON MICROSCOPES

#70
20120025103
2012-02-02

In situ holder assembly

#71
20120025075
2012-02-02

Method and apparatus for acquiring simultaneous and overlapping optical and charged particle beam images

#72
20120001070
2012-01-05

Magnifying observation apparatus

#73
20120001069
2012-01-05

Magnifying observation apparatus

#74
20110315877
2011-12-29

Electron microscope device

#75
20110284744
2011-11-24

Method and system for 4D tomography and ultrafast scanning electron microscopy

#76
20110226949
2011-09-22

Inspection system

#77
20110220793
2011-09-15

Detection device and particle beam device having a detection device

#78
20110168889
2011-07-14

Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment

#79
20110163068
2011-07-07

Multibeam System

#80
20110036981
2011-02-17

Charged particle beam inspection method

#81
20100224780
2010-09-09

Beam device system comprising a particle beam device and an optical microscope

#82
20100181476
2010-07-22

Spectrometer for Surface Analysis and Method Therefor

#83
20100127190
2010-05-27

Charged particle beam masking for laser ablation micromachining

#84
20100096549
2010-04-22

Sample inspection apparatus, sample inspection method and sample inspection system

#85
20100091362
2010-04-15

Complex type microscopic device

#86
20100038555
2010-02-18

Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner

#87
20090314955
2009-12-24

Specimen holder, specimen inspection apparatus, and specimen inspection method

#88
20090274359
2009-11-05

Specimen observation method

#89
20090256074
2009-10-15

Method and apparatus for simultaneous SEM and optical examination

#90
20090250609
2009-10-08

Inspection method and reagent solution

#91
20090242762
2009-10-01

Apparatus and method for inspecting sample

#92
20080308731
2008-12-18

Specimen holder, specimen inspection apparatus, specimen inspection method, and method of fabricating specimen holder

#93
20080296499
2008-12-04

Charged particle instrument equipped with optical microscope

#94
20080283777
2008-11-20

In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques

#95
20080185509
2008-08-07

Particle-optical apparatus for simultaneous observing a sample with particles and photons

#96
20080164410
2008-07-10

Emission detecting analysis system and method of detecting emission on object

#97
20080121799
2008-05-29

SAMPLE ANALYZING APPARATUS

#98
20080111084
2008-05-15

Column simultaneously focusing a particle beam and an optical beam

#99
20080073527
2008-03-27

Specimen observation method

#100
20080029699
2008-02-07

Charge particle beam system, sample processing method, and semiconductor inspection system

#101
20070293052
2007-12-20

Apparatus and method for optical interference fringe based integrated circuit processing

#102
20070145267
2007-06-28

Portable scanning electron microscope

#103
20070115468
2007-05-24

Spectrometer for surface analysis and method therefor

#104
20070023655
2007-02-01

Sample measuring device

#105
20060098188
2006-05-11

Method of localizing fluorescent markers

#106
20060097198
2006-05-11

Column simultaneously focusing a particle beam and an optical beam

#107
20060079086
2006-04-13

Apparatus and method of forming silicide in a localized manner

#108
20060076503
2006-04-13

Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner

#109
18519325
2025-10-07

Charged-particle beam microscope with differential vacuum pressures

#110
16015772
2020-03-31

Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays

#111
14694710
2016-10-11

Precision substrate material removal using miniature-column charged particle beam arrays