205235 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Optical or photographic arrangements associated with the tube; Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
SYSTEMS AND METHODS FOR PULSED VOLTAGE CONTRAST DETECTION AND CAPTURE OF CHARGING DYNAMICS
#2METHOD AND SYSTEM FOR CALIBRATING A CHARGED-PARTICLE SPECTROMETER
#3LIGHT COLLECTION/INJECTION MIRROR ALIGNMENT
#4ELECTRON MICROSCOPE IMAGING STAGES AND SYSTEMS
#5OPTICAL APPARATUS
#6Optics for In-Situ Scanning Electron Microscope Repair
#7Charged Particle Beam System
#8Transmission Electron Microscope
#9SYSTEMS AND METHODS FOR PULSED VOLTAGE CONTRAST DETECTION AND CAPTURE OF CHARGING DYNAMICS
#10OPTICAL EXTRACTION PROBE FOR ELECTRON MICROSCOPE AND OTHER VACUUM CHAMBERS
#11METHOD AND APPARATUS FOR MICROMACHINING A SAMPLE USING A FOCUSED ION BEAM
#12Load lock device having optical measuring device for acquiring distance
#13Cost effective probing in high volume manufacture of micro LEDs
#14CATHODOLUMINESCENCE ELECTRON MICROSCOPE
#15Inspection devices and methods of inspecting a sample
#16Device and method for determining a property of a sample that is to be used in a charged particle microscope
#17Apparatus for wavelength resolved angular resolved cathodoluminescence
#18Apparatus and method
#19System and method for alignment of cathodoluminescence optics
#20Photoabsorption microscopy using electron analysis
#21ELECTRON BEAM PVD ENDPOINT DETECTION AND CLOSED-LOOP PROCESS CONTROL SYSTEMS
#22System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination
#23Optical height detection system
#24Method and apparatus for an advanced charged controller for wafer inspection
#25Apparatus for wavelength resolved angular resolved cathodoluminescence
#26Charged particle beam system, opto-electro simultaneous detection system and method
#27CHARGED PARTICLE BEAM SYSTEM AND METHODS
#28Method for alignment of a light beam to a charged particle beam
#29Charged particle beam device and scanning electron microscope
#30Additive manufacturing device utilizing EB-laser composite scan
#31Method of imaging a specimen using ptychography
#32X-ray beam alignment device and method
#33Method and device for time-resolved pump-probe electron microscopy
#34Method for inspecting a sample using an assembly comprising a scanning electron microscope and a light microscope
#35Device for correlative scanning transmission electron microscopy (STEM) and light microscopy
#36Method and apparatus for determining a density of fluorescent markers in a sample
#37System for inspecting and reviewing a sample
#38Charged particle beam system and methods
#39Sample holding device for studying light-driven reactions and sample analysis method using the same
#40Method for coincident alignment of a laser beam and a charged particle beam
#41Method and system for electron microscope with multiple cathodes
#42Integrated light optics and gas delivery in a charged particle lens
#43System and method for simultaneous detection of secondary electrons and light in a charged particle beam system
#44Sample base, charged particle beam device and sample observation method
#45Integrated optical and charged particle inspection apparatus
#46Holder device for electron microscope
#47Observation apparatus and optical axis adjustment method
#48Method for generating extreme ultraviolet light and device for generating extreme ultraviolet light
#49Integrated optical and charged particle inspection apparatus
#50Adjustable cathodoluminescence detection system and microscope employing such a system
#51Method for coincident alignment of a laser beam and a charged particle beam
#52System for in situ reactivation of fluorescence marker
#53Electron microscope
#54In situ reactivation of fluorescence marker
#55System and method for simultaneous detection of secondary electrons and light in a charged particle beam system
#56Dual laser beam system used with an electron microscope and FIB
#57Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus
#58APPARATUS FOR COLLECTION OF CATHODOLUMINESCENCE SIGNALS
#59Compound microscope device
#60Cathodoluminescence detector including inner and outer tubes sealed from a vacuum chamber of an associated particle beam system
#61Adjustable cathodoluminescence detection system and microscope employing such a system
#62METHOD FOR SUPERIMPOSING AND DISPLAYING ELECTRON MICROSCOPE IMAGE AND OPTICAL IMAGE
#63NON-COHERENT LIGHT MICROSCOPY
#64Charged particle beam analyzer and analysis method
#65Charged particle beam masking for laser ablation micromachining
#66System and method for localization of large numbers of fluorescent markers in biological samples
#67Observation and analysis unit
#68Specimen observation method
#69OPTICAL PROBING IN ELECTRON MICROSCOPES
#70In situ holder assembly
#71Method and apparatus for acquiring simultaneous and overlapping optical and charged particle beam images
#72Magnifying observation apparatus
#73Magnifying observation apparatus
#74Electron microscope device
#75Method and system for 4D tomography and ultrafast scanning electron microscopy
#76Inspection system
#77Detection device and particle beam device having a detection device
#78Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment
#79Multibeam System
#80Charged particle beam inspection method
#81Beam device system comprising a particle beam device and an optical microscope
#82Spectrometer for Surface Analysis and Method Therefor
#83Charged particle beam masking for laser ablation micromachining
#84Sample inspection apparatus, sample inspection method and sample inspection system
#85Complex type microscopic device
#86Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner
#87Specimen holder, specimen inspection apparatus, and specimen inspection method
#88Specimen observation method
#89Method and apparatus for simultaneous SEM and optical examination
#90Inspection method and reagent solution
#91Apparatus and method for inspecting sample
#92Specimen holder, specimen inspection apparatus, specimen inspection method, and method of fabricating specimen holder
#93Charged particle instrument equipped with optical microscope
#94In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques
#95Particle-optical apparatus for simultaneous observing a sample with particles and photons
#96Emission detecting analysis system and method of detecting emission on object
#97SAMPLE ANALYZING APPARATUS
#98Column simultaneously focusing a particle beam and an optical beam
#99Specimen observation method
#100Charge particle beam system, sample processing method, and semiconductor inspection system
#101Apparatus and method for optical interference fringe based integrated circuit processing
#102Portable scanning electron microscope
#103Spectrometer for surface analysis and method therefor
#104Sample measuring device
#105Method of localizing fluorescent markers
#106Column simultaneously focusing a particle beam and an optical beam
#107Apparatus and method of forming silicide in a localized manner
#108Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner
#109Charged-particle beam microscope with differential vacuum pressures
#110Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays
#111Precision substrate material removal using miniature-column charged particle beam arrays