205251 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Charge control device for a system with multiple electron beams
#1202Space charge insensitive electron gun designs
#1203Display device and production method thereof
#1204Charged particle beam apparatus and image acquisition method
#1205Electron microscope device and inclined hole measurement method using same
#1206Pulse processing
#1207Charged particle beam device
#1208Charged particle beam apparatus and image acquisition method
#1209Scanning electron microscope
#1210Charged particle beam apparatus and machine learning method
#1211Process window analysis
#1212Charged particle beam apparatus
#1213Method for operating a particle beam generator for a particle beam device and particle beam device comprising a particle beam generator
#1214Charged particle detector and charged particle beam apparatus
#1215Charged particle beam system
#1216Charged particle beam system and method
#1217Methods for acquiring planar view STEM images of device structures
#1218Scanning electron microscope and sample observation method using scanning electron microscope
#1219Method of performing tomographic imaging in a charged-particle microscope
#1220Observation method, specimen support, and transmission electron microscope
#1221Method for measuring critical dimension and image-processing apparatus for measuring critical dimension
#1222Optically addressed, thermionic electron beam device
#1223Method and system for correlating optical images with scanning electron microscopy images
#1224Charged particle beam device and scanning electron microscope
#1225Apparatus for combined stem and EDS tomography
#1226Method for producing a TEM sample
#1227Operating a particle beam apparatus
#1228Method for implementing a CD-SEM characterisation technique
#1229Studying dynamic specimens in a transmission charged particle microscope
#1230Nondestructive sample imaging
#1231Charged particle radiation device
#1232Charged particle beam device
#1233Methods for acquiring planar view stem images of device structures
#1234Evaluation method and evaluation apparatus for electronic device
#1235Charged particle beam apparatus
#1236Aberration corrector and charged particle beam device
#1237Charged particle beam apparatus
#1238Intelligent pre-scan in scanning transmission charged particle microscopy
#1239Method of observing liquid specimen, method of analyzing liquid specimen and electron microscope
#1240Method for operating a pressure system of a device for imaging, analyzing and/or processing an object and a device for carrying out the method
#1241Method for automatically aligning a scanning transmission electron microscope for precession electron diffraction data mapping
#1242Charged particle beam axial alignment device, charged particle beam irradiation device and charged particle beam axial alignment method
#1243Electron beam device
#1244Ion beam device
#1245Apparatus and method for measuring micrometer scale features of electronic component over millimeter scale distances to nanometer scale precision
#1246Method, device and system for remote deep learning for microscopic image reconstruction and segmentation
#1247Charged particle beam system, opto-electro simultaneous detection system and method
#1248Transmission Electron Microscopy
#1249Electron beam device and sample inspection method
#1250Sample stage
#1251Beam irradiation device
#1252REGION OF INTEREST AND PATTERN OF INTEREST GENERATION FOR CRITICAL DIMENSION MEASUREMENT
#1253Multi-beam inspection apparatus with improved detection performance of signal electrons
#1254Apparatus, method, and program for processing and observing cross section, and method of measuring shape
#1255Apparatus of plural charged-particle beams
#1256Scan strategies to minimize charging effects and radiation damage of charged particle beam metrology system
#1257System and method for performing failure analysis using virtual three-dimensional imaging
#1258Electron microscope
#1259Electron beam inspection apparatus and electron beam inspection method
#1260Composite structure, semiconductor manufacturing apparatus and display manufacturing apparatus provided with composite structure
#1261Automated TEM sample preparation
#1262Discriminative imaging technique in scanning transmission charged particle microscopy
#1263Sample chip for electron microscope and its related application
#1264Method of aberration measurement and electron microscope
#1265Charged particle beam apparatus and sample processing observation method
#1266Apparatus of plural charged-particle beams
#1267Charged particle beam inspection method
#1268Signal separator for a multi-beam charged particle inspection apparatus
#1269Device and method for forming a plurality of charged particle beamlets
#1270Post-lithography defect inspection using an e-beam inspection tool
#1271Evaluation of component condition through analysis of material interaction
#1272Inspection system, image processing device and inspection method
#1273Systems and methods for in situ high temperature X-ray spectroscopy in electron microscopes
#1274Defect observation device
#1275Electron beam apparatus
#1276Innovative imaging technique in transmission charged particle microscopy
#1277Scanning electron microscope and measurement method for obtaining images of a specimen using an ion beam and an electron beam
#1278Method of eliminating thermally induced beam drift in an electron beam separator
#1279Charged particle beam device
#1280Scanning probe and electron microscope probes and their manufacture
#1281Load lock system for charged particle beam imaging
#1282Compensating for scanning electron microscope beam distortion-induced metrology error using design
#1283Defect discovery using electron beam inspection and deep learning with real-time intelligence to reduce nuisance
#1284Temporal compressive sensing systems
#1285Image analysis apparatus and charged particle beam apparatus
#1286Scanning electron microscope and method for determining crystal orientations
#1287Combined SEM-CL and FIB-IOE microscopy
#1288Method for sample orientation for TEM lamella preparation
#1289ELECTRON SOURCE AND ELECTRON BEAM IRRADIATION DEVICE
#1290Multiple beam image acquisition apparatus and multiple beam image acquisition method
#1291Displacement measuring apparatus, electron beam inspection apparatus, and displacement measuring method
#1292Retractable detector
#1293Edge detection system and its use for optical proximity correction
#1294Charged particle beam device
#1295System and method for generating and analyzing roughness measurements
#1296System and method for generating and analyzing roughness measurements
#1297Imaging of crystalline defects
#1298Endpointing for focused ion beam processing
#1299Apparatus of plural charged-particle beams
#1300Charged particle beam apparatus and method for adjusting imaging conditions for the same
#1301Method and system for focus adjustment of a multi-beam scanning electron microscopy system
#1302Blade deployment mechanisms for surgical forceps
#1303Method and system for inspecting an EUV mask
#1304Systems and methods for charged particle beam modulation
#1305Ion source and electron source having single-atom termination structure, tip having single-atom termination structure, gas field ion source, focused ion beam apparatus, electron source, electron microscope, mask repair apparatus, and method of manufacturing tip having single-atom termination structure
#1306System and method for generating and analyzing roughness measurements
#1307Method of detecting a defect and apparatus for performing the same
#1308Charged particle beam apparatus
#1309Defect inspection method and defect inspection system
#1310Electron beam apparatus comprising monochromator
#1311Thermal bonding sheet and thermal bonding sheet with dicing tape
#1312System and method for measuring patterns
#1313Reference sample with inclined support base, method for evaluating scanning electron microscope, and method for evaluating SiC substrate
#1314Charged particle beam device
#1315Charged particle beam apparatus
#1316Method for adjusting a particle beam microscope
#1317Electron beam detection element, electron microscope, and transmission electron microscope
#1318Edge detection system
#1319Tomography-assisted TEM prep with requested intervention automation workflow
#1320Charged particle beam device
#1321Image processing system and method of processing images
#1322Charged particle beam device and sample holder
#1323Particle beam system and method for the particle-optical examination of an object
#1324Mirror device, mirror drive method, light irradiation device, and image acquisition device
#1325Image-forming device, and dimension measurement device
#1326Pattern measuring method, pattern measuring apparatus, and computer program storage device
#1327Light guide, detector having light guide, and charged particle beam device
#1328Method of inspecting a sample with a charged particle beam device, and charged particle beam device
#1329System and method for removing noise from roughness measurements
#1330Charged particle beam device
#1331Electron beam generation and measurement
#1332Ruthenium encapsulated photocathode electron emitter
#1333Photocathode designs and methods of generating an electron beam using a photocathode
#1334Silicon electron emitter designs
#1335Charged Particle Beam Device
#1336Object preparation device and particle beam device with an object preparation device and method for operating the particle beam device
#1337Charged particle beam device and scanning electron microscope
#1338Scanning electron microscope
#1339Electron beam image acquisition apparatus, and electron beam image acquisition method
#1340DEVICE AND METHOD FOR GENERATING CHARGED PARTICLE BEAM PULSES
#1341Cold cathode field-emission electron gun, adjustment method for cold cathode field-emission electron gun, sharpening method for emitter, and electron microscope
#1342Measurement method and electron microscope
#1343Device with ion column and scanning electron microscope
#1344Electron-Beam Inspection Systems with optimized throughput
#1345Particle beam system
#1346Scanning electron microscope
#1347Apparatus of plural charged-particle beams
#1348Defect location accuracy using shape based grouping guided defect centering
#1349Charged particle beam system and method of operating the same
#1350Pattern measuring method and pattern measuring apparatus
#1351Image generation method
#1352Charged particle beam apparatus
#1353Aberration measurement method and electron microscope
#1354Field emission electron source, method for manufacturing same, and electron beam device
#1355Apparatus of plural charged-particle beams
#1356Charged particle source
#1357Three-dimensional image reconstruction method
#1358Charged particle beam device with distance setting between irradiation regions in a scan line
#1359Specimen observation method
#1360Determining the impacts of stochastic behavior on overlay metrology data
#1361Systems and methods for charged particle flooding to enhance voltage contrast defect signal
#1362Optimized sub-sampling in an electron microscope
#1363Systems and methods for high energy X-ray detection in electron microscopes
#1364System and method for axial scanning based on static phase masks
#1365Method for detecting voids and an inspection system
#1366Methods and devices for examining an electrically charged specimen surface
#1367Charged particle beam device for imaging vias inside trenches
#1368System and method for performing nano beam diffraction analysis
#1369Nano vacuum tube
#1370Scanning electron microscope and image processing apparatus
#1371Charged particle beam apparatus using focus evaluation values for pattern length measurement
#1372Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus
#1373System and method of inspecting substrate and method of fabricating semiconductor device using the same
#1374Imaging system and imaging method
#1375Method for the in situ preparation of microscopic specimens
#1376Charged particle beam device, charged particle beam influencing device, and method of operating a charged particle beam device
#1377Overlay error measurement device and computer program
#1378Device processing method and device processing apparatus
#1379Method for alignment of a light beam to a charged particle beam
#1380Observation support unit for charged particle microscope and sample observation method using same
#1381Method and apparatus for inspection
#1382Method of verifying operation parameter of scanning electron microscope
#1383Scanning electron microscope objective lens calibration using X-Y voltages iteratively determined from images obtained using said voltages
#1384Charged particle beam device having inspection scan direction based on scan with smaller dose
#1385Charged particle beam device and optical-axis adjusting method thereof
#1386Sample holder and electron microscope
#1387Point-spread-function measurement device and measurement method, image acquisition apparatus, and image acquisition method
#1388Distortion correction method and electron microscope
#1389ELECTRON BEAM APPARATUS, AND X-RAY GENERATION APPARATUS AND SCANNING ELECTRON MICROSCOPE EACH INCLUDING THE SAME
#1390METHOD AND APPARATUS FOR INSPECTING A SAMPLE
#1391Charged particle beam device and scanning electron microscope
#1392Apparatus of plural charged-particle beams
#1393Charged particle beam apparatus and control method thereof
#1394Electrophotographic belt and electrophotographic image forming apparatus
#1395Distortion measurement method for electron microscope image, electron microscope, distortion measurement specimen, and method of manufacturing distortion measurement specimen
#1396Charged particle optical apparatus for through-the-lens detection of particles
#1397Scanning transmission electron microscope and method of image generation
#1398Pattern inspection method using charged particle beam
#1399Method of operating a charged particle beam specimen inspection system
#1400Methods and apparatus for high throughput SEM and AFM for characterization of nanostructured surfaces
#1401Electron microscope and control method
#1402METHOD OF DETECTING DEFECT OF CONTACT HOLE
#1403Scanning probe and electron microscope probes and their manufacture
#1404Guided scanning electron microscopy metrology based on wafer topography
#1405Transmission scanning microscopy including electron energy loss spectroscopy and observation method thereof
#1406Ion beam apparatus
#1407Charged particle beam device and image processing method in charged particle beam device
#1408Energy filter and charged particle beam system
#1409Dynamic response analysis prober device
#1410Transmission small-angle X-ray scattering metrology system
#1411Apparatus and methods for generating and enhancing Smith-Purcell radiation
#1412Methods for inspection sampling on full patterned wafer using multiple scanning electron beam column array
#1413Ion milling system
#1414Object preparation device and particle beam device having an object preparation device and method for operating the particle beam device
#1415Charged particle beam apparatus
#1416Charged particle beam apparatus
#1417SEM image acquisition device and SEM image acquisition method
#1418Apparatus for and method of net trace prior level subtraction
#1419METHOD OF OBSERVING ORGANIC SPECIMEN, AND OBSERVATION HOLDER AND OBSERVATION STAGE USED THEREIN
#1420Care areas for improved electron beam defect detection
#1421Scanning electron microscope and sample observation method
#1422Scanning transmission electron microscope
#1423Scanning transmission electron microscope with an objective electromagnetic lens and a method of use thereof
#1424Method for acquiring image and ion beam apparatus
#1425Charged particle beam device
#1426Defect observation device and defect observation method
#1427Charged particle beam device
#1428Charged particle detector and charged particle beam device using the same
#1429Electron beam inspection apparatus and electron beam inspection method
#1430Scanning electron microscope
#1431Method and system of measuring semiconductor device and method of fabricating semiconductor device using the same
#1432Vacuum apparatus
#1433Post column filter with enhanced energy range
#1434Patterned substrate imaging using multiple electron beams
#1435Charged particle beam device and image forming method using same
#1436Pattern-measuring apparatus and semiconductor-measuring system
#1437Circuit inspection method and sample inspection apparatus
#1438Load lock system for charged particle beam imaging
#1439Scanning electron microscope
#1440Electron microscope
#1441Method and apparatus for transmission electron microscopy
#1442Charged particle beam apparatus and alignment adjustment method of sample stage
#1443Electron source architecture for a scanning electron microscopy system
#1444Electron energy loss spectrometer using direct detection sensor
#1445Sample observation device and sample observation method
#1446Systems and methods for automated microscopy
#1447Charged particle beam device
#1448Focused ion beam apparatus
#1449Multi-column spacing for photomask and reticle inspection and wafer print check verification
#1450Wide field atmospheric scanning electron microscope
#1451Multi-column scanning electron microscopy system
#1452Three-dimensional calibration structures and methods for measuring buried defects on a three-dimensional semiconductor wafer
#1453Enhanced FIB-SEM systems for large-volume 3D imaging
#1454Imaging device for imaging an object and for imaging a structural unit in a particle beam apparatus
#1455Innovative source assembly for ion beam production
#1456SEGMENTED DETECTOR FOR A CHARGED PARTICLE BEAM DEVICE
#1457High-voltage supply unit and circuit arrangement for generating a high voltage for a particle beam apparatus
#1458Charged particle beam device
#1459Charged particle beam apparatus
#1460CHARGED PARTICLE BEAM APPARATUS
#1461Diagnostic methods for the classifiers and the defects captured by optical tools
#1462Integrated circuit analysis systems and methods with localized evacuated volume for e-beam operation
#1463System and method for performing nano beam diffraction analysis
#1464Aberration correction method, aberration correction system, and charged particle beam apparatus
#1465Charged particle beam apparatus and method for controlling charged beam apparatus
#1466Charged particle beam device and pattern measurement device
#1467Charged particle device, charged particle irradiation method, and analysis device
#1468Electron beam emitters with ruthenium coating
#1469Image capture assembly and method for electron back scatter diffraction
#1470Method and apparatus for alignment of optical and charged-particle beams in an electron microscope
#1471Cross sectional depth composition generation utilizing scanning electron microscopy
#1472Charged particle beam device provided with ion pump
#1473Method of image acquisition and electron microscope
#1474Method and system for aberration correction in an electron beam system
#1475Method for inspecting a specimen and charged particle multi-beam device
#1476Detecting method and detecting equipment therefor
#1477Cross sectional depth composition generation utilizing scanning electron microscopy
#1478Charged particle beam device and control method of charged particle beam device
#1479Beam blanker and method for blanking a charged particle beam
#1480Whole object surface area and volume of partial-view 3-D models
#1481Charged particle beam apparatus
#1482Temporal compressive sensing systems
#1483Electron microscope and method of operating same
#1484Electron microscope and image acquisition method
#1485Electron scanning microscope and image generation method
#1486Method for making transparent conductive layer
#1487Monochromator and charged particle beam apparatus comprising the same
#1488Method and system for generating programmed defects for use in metrology measurements
#1489Charged particle beam apparatus, alignment method of charged particle beam apparatus, alignment program, and storage medium
#1490Charged particle beam device with transient signal correction during beam blanking
#1491Measurement of overlay and edge placement errors with an electron beam column array
#1492Observation method and specimen observation apparatus
#1493Carbon material-polymer strain sensitive film and its preparation method
#1494Diblock copolymer containing fluorine group
#1495Charged particle beam device and evacuation method for same
#1496Tomographic imaging method
#1497SILVER-COATED COPPER POWDER AND CONDUCTIVE PASTE, CONDUCTIVE MATERIAL, AND CONDUCTIVE SHEET USING SAME
#1498Apparatus and method for correcting arrayed astigmatism in a multi-column scanning electron microscopy system
#1499Scanning microscope with controlled variable measurement parameters
#1500Method for validating measurement data