205251 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Apparatus for high-speed imaging sensor data transfer
#1502Methods, systems and devices relating to distortion correction in imaging devices
#1503Microscopy imaging method and system
#1504Virtual inspection systems with multiple modes
#1505Particle beam system and method for operating a particle optical unit
#1506Charged particle beam device and scanning electron microscope
#1507Mirror ion microscope and ion beam control method
#1508Sparse sampling methods and probe systems for analytical instruments
#1509Composite charged particle beam device
#1510Method of imaging a specimen using ptychography
#1511Retractable detector
#1512Charged particle beam device
#1513System and method for performing nano beam diffraction analysis
#1514SCANNING ELECTRON MICROSCOPE
#1515Pattern matching device and computer program for pattern matching
#1516Reduction catalyst and chemical reactor
#1517Charged particle beam system and method of aberration correction
#1518Composite charged particle beam detector, charged particle beam device, and charged particle beam detector
#1519Ion beam device
#1520Vanadium dioxide
#1521Method of extracting defects
#1522Charged-particle microscope with in situ deposition functionality
#1523SYSTEMS AND METHODS FOR ADAPTIVE SCANNING
#1524Image processing system and method of processing images
#1525Charged particle bean device and information-processing device
#1526Charged particle beam device
#1527Scanning electron microscope and method of use thereof
#1528Quantitative analysis device for trace carbon and quantitative analysis method for trace carbon
#1529Generating an image of an object or a representation of data about the object
#1530Charged particle beam device
#1531Composite charged particle beam apparatus and control method thereof
#1532Method for forensic analysis of electronic components
#1533Scanning electron microscope and methods of inspecting and reviewing samples
#1534Ion beam device
#1535Charged Particle Beam Device
#1536CHARGED PARTICLE BEAM APPARATUS, ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD
#1537CHARGED PARTICLE DETECTOR
#1538Compressive scanning spectroscopy
#1539Charged particle beam apparatus
#1540Sample Stage
#1541Particle beam system and method for the particle-optical examination of an object
#1542IN SITU-FORMING OF DENDRIMER HYDROGELS USING MICHAEL-ADDITION REACTION
#1543Apparatus of plural charged-particle beams
#1544Three-dimensional imaging in charged-particle microscopy
#1545Quantitative secondary electron detection
#1546Method for generating a composite image of an object and particle beam device for carrying out the method
#1547High voltage electron beam system and method
#1548Method and system for scanning an object
#1549Scanning electron microscope
#1550STA-18, a new member of the SFW family of molecular sieve zeotypes, methods of preparation and use
#1551Scanning electron microscope
#1552Energy discriminating electron detector and scanning electron microscope using the same
#1553Multi-stage/multi-chamber electron-beam inspection system
#1554Beam alignment method and electron microscope
#1555Microporous polyimide sponge and method for producing the same
#1556Objective lens arrangement usable in particle-optical systems
#1557Device and method for analysing a defect of a photolithographic mask or of a wafer
#1558Method and system for charge control for imaging floating metal structures on non-conducting substrates
#1559Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
#1560Charged particle beam device
#1561Method for cross-section processing and observation and apparatus therefor
#1562System and method for drift compensation on an electron beam based characterization tool
#1563X-ray analysis in air
#1564Secondary particle detection system of scanning electron microscope
#1565Charged particle beam device
#1566Charged particle filter
#1567COMPOSITE CHARGED PARTICLE BEAM APPARATUS
#1568Method for structuring an object and associated particle beam system
#1569Scanning electron microscope and electron trajectory adjustment method therefor
#1570Multi-beam lens device, charged particle beam device, and method of operating a multi-beam lens device
#1571Automated TEM sample preparation
#1572High throughput TEM preparation processes and hardware for backside thinning of cross-sectional view lamella
#1573System for discharging an area that is scanned by an electron beam
#1574Multi electron beam inspection apparatus
#1575Studying dynamic specimen behavior in a charged-particle microscope
#1576Cross sectional depth composition generation utilizing scanning electron microscopy
#1577Electron microscope and method of aberration measurement
#1578Particle beam apparatus and method for operating a particle beam apparatus
#1579Charged particle beam system
#1580Ion beam device and sample observation method
#1581METHOD FOR EVALUATING SHAPING APERTURE ARRAY
#1582Field curvature correction for multi-beam inspection systems
#1583Ion beam apparatus and ion beam irradiation method
#1584Charged particle beam device, electron microscope and sample observation method
#1585Method for inspecting a sample using an assembly comprising a scanning electron microscope and a light microscope
#1586Charged particle beam device
#1587Multi mode system with a dispersion X-ray detector
#1588Multi mode systems with retractable detectors
#1589Apparatus of plural charged-particle beams
#1590Charged particle beam apparatus and image forming method of charged particle beam apparatus
#1591Electron energy loss spectrometer using direct detection sensor
#1592Electron energy loss spectrometer
#1593Cross sectional depth composition generation utilizing scanning electron microscopy
#1594Multimodality mineralogy segmentation system and method
#1595Hybrid inspectors
#1596CD-SEM technique for wafers fabrication control
#1597Scanning electron microscope and method for controlling same
#1598Test device for defect inspection
#1599Scanning electron microscope
#1600Sample holder for scanning electron microscopy (SEM) and atomic force microscopy (AFM)
#16013D profiling system of semiconductor chip and method for operating the same
#1602Method for detecting defects and associated device
#1603Detecting charged particles
#1604STRUCTURE ANALYSIS METHOD USING A SCANNING ELECTRON MICROSCOPE
#1605Pattern measurement condition setting device and pattern measuring device
#1606Apparatus of plural charged-particle beams
#1607Method and device for testing samples by means of an electron or ion beam microscope
#1608Housing device for magnetic shielding, housing arrangement for magnetic shielding, charged particle beam device, and method of manufacturing a housing device
#1609Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus
#1610X-ray imaging technique
#1611Pattern measurement method and pattern measurement device
#1612Apparatus and method for inspecting a sample using a plurality of charged particle beams
#1613Charged particle system and method for measuring deflection fields in a sample
#1614Electron microscope and sample observation method
#1615Particle beam system
#1616Post column filter with enhanced energy range
#1617Apparatus of plural charged-particle beams
#1618Apparatus of plural charged-particle beams
#1619Charged particle source
#1620Charged particle source
#1621Charged particle source
#1622Charged particle filter
#1623Pattern inspection method and pattern inspection apparatus
#1624Method for operating a multi-beam particle microscope
#1625Charged particle beam apparatus
#1626INVESTIGATION OF HIGH-TEMPERATURE SPECIMENS IN A CHARGED PARTICLE MICROSCOPE
#1627Measurement device, calibration method of measurement device, and calibration member
#1628Method for acquiring image and ion beam apparatus
#1629Charged-particle-beam device
#1630Scanning an object using multiple mechanical stages
#1631Method and system for focus adjustment of a multi-beam scanning electron microscopy system
#1632Method and system for noise mitigation in a multi-beam scanning electron microscopy system
#1633Multi-beam dark field imaging
#1634Backscattered electrons (BSE) imaging using multi-beam tools
#1635Wafer Defect Discovery
#1636System and method for providing real-time visual feedback to control multiple autonomous nano-robots
#1637ION BEAM DEVICE
#1638METHOD AND APPARATUS FOR INSPECTING A SUBSTRATE
#1639Miniature serial sectioning microtome for block-face imaging
#1640Methods and devices for examining an electrically charged specimen surface
#1641Vacuum tube electron microscope
#1642CAD-assisted TEM prep recipe creation
#1643Charged particle beam device and detection method using said device
#1644Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask
#1645Method and system for inspecting an EUV mask
#1646Measurement system and measurement method
#1647Sample processing method and charged particle beam device
#1648Determining a position of a defect in an electron beam image
#1649Range-based real-time scanning electron microscope non-visual binner
#1650Electron beam device
#1651Electron microscope and measurement method
#1652TEM phase contrast imaging with image plane phase grating
#1653Fiducial formation for TEM/STEM tomography tilt-series acquisition and alignment
#1654Apparatus of plural charged-particle beams
#1655Apparatus of plural charged-particle beams
#1656Review of suspected defects using one or more reference dies
#1657Scanning electron microscope
#1658HYBRID METROLOGY TECHNIQUE
#1659System and method for scanning an object with an electron beam using overlapping scans and electron beam counter-deflection
#1660Imaging low electron yield regions with a charged beam imager
#1661Analytical apparatus, sample holder and analytical method
#1662Manufactured Article with a Nanostructured Surface
#1663Scanning electron microscope system, pattern measurement method using same, and scanning electron microscope
#1664Charged particle beam apparatus
#1665Method and system for charged particle microscopy with improved image beam stabilization and interrogation
#1666Microsample stage and method of manufacturing the same
#1667Evaluation of component condition through analysis of material interaction
#1668Analyzing energy of charged particles
#1669Analysis method using electron microscope, and electron microscope
#1670Method and system for planning metrology measurements
#1671Defect image classification apparatus
#1672Charged particle beam apparatus
#1673System and method for providing a clean environment in an electron-optical system
#1674Scanning transmission electron microscope with variable axis objective lens and detective system
#1675Charged particle beam apparatus, specimen observation system and operation program
#1676Cross-section processing-and-observation method and cross-section processing-and-observation apparatus
#1677Method of improving quality of scanning charged particle microscope image, and scanning charged particle microscope apparatus
#1678Electron scanning microscope and image generation method
#1679Electron beam microscope with improved imaging gas and method of use
#1680Alignment monitoring structure and alignment monitoring method for semiconductor devices
#1681System for discharging an area that is scanned by an electron beam
#1682Charged-particle-beam device, specimen-image acquisition method, and program recording medium
#1683CHARGED PARTICLE BEAM APPARATUS AND METHOD OF CALIBRATING SAMPLE POSITION
#1684Apparatus of plural charged-particle beams
#1685Method and system for aberration correction in an electron beam system
#1686Charged particle beam device, image generation method, observation system
#1687Charged particle beam device
#1688Inspection of regions of interest using an electron beam system
#1689Adaptive scanning for particle size using directed beam signal analysis
#1690Inspection device and measurement device
#1691Inspection apparatus
#1692Methods, systems, and computer readable media for measuring and correcting drift distortion in images obtained using a scanning microscope
#1693Method for validating measurement data
#1694Pattern measurement device, and computer program for measuring pattern
#1695High-voltage supply unit and circuit arrangement for generating a high voltage for a particle beam apparatus
#1696Pattern measurement device and computer program
#1697Method of performing tomographic imaging in a charged-particle microscope
#1698Method of manipulating a sample in an evacuated chamber of a charged particle apparatus
#1699Inspection device
#1700Charged particle-beam device
#1701Scanning transmission electron microscope having multiple beams and post-detection image correction
#1702Method of inspecting wafer using electron beam
#1703Process window analysis
#1704Method of generating a zoom sequence and microscope system configured to perform the method
#1705Stage apparatus with braking system for lens, beam, or vibration compensation
#1706Apparatus of plural charged-particle beams
#1707Inspection of a lithographic mask that is protected by a pellicle
#1708Method of performing spectroscopy in a transmission charged-particle microscope
#1709Charged particle beam apparatus, image forming method using a charged particle beam apparatus, and image processing apparatus
#1710System and method for scanning an object
#1711SCANNING ELECTRON MICROSCOPE CAPABLE OF CONTROLLING BEAM SPOT AND MEASUREMENT METHOD USING THE SAME
#1712Apparatus of plural charged-particle beams
#1713DETECTING THICKNESS VARIATION AND QUANTITATIVE DEPTH UTILIZING SCANNING ELECTRON MICROSCOPY WITH A SURFACE PROFILER
#1714Laser SDE effect compensation by adaptive tuning
#1715Method and system for reducing charging artifacts in scanning electron microscopy images
#1716Methods and devices for charge compensation
#1717Pulse processing
#1718Measurement method and electron microscope
#1719Multifunctional ultrafast electron gun of transmission electron microscope
#1720Charged particle beam system and method of operating the same
#1721Pattern matching using a lamella of known shape for automated S/TEM acquisition and metrology
#1722Charged particle beam device
#1723Method for determining 3D primitive reciprocal basis of unknown crystal based on single EBSD pattern
#1724X-ray analysis in air
#1725Charged particle beam device and charged particle beam measurement method
#1726Method and system for imaging of a photomask through a pellicle
#1727Electron microscope and method of measuring aberrations
#1728Particle beam microscope and method for operating a particle beam microscope
#1729Scanning electron microscope
#1730Charged particle beam device
#1731Devices and systems for spatial averaging of electron backscatter diffraction patterns
#1732Weak signal detection system and electron microscope equipped with same
#1733Charged particle beam device and charged particle beam device control method
#1734Method for calibration of a CD-SEM characterisation technique
#1735Charged particle beam apparatus and sample image acquiring method
#1736Electron microscope
#1737Diaphragm mounting member and charged particle beam device
#1738Electron microscope
#1739Electron microscope and method of operating same
#1740APPARATUS AND METHOD
#1741Localized, in-vacuum modification of small structures
#1742SCANNING CHARGED PARTICLE BEAM DEVICE HAVING AN ABERRATION CORRECTION APERTURE AND METHOD OF OPERATING THEREOF
#1743Pattern shape evaluation device and method
#1744Method for processing and/or for observing an object, and particle beam device for carrying out the method
#1745Determination of spatial distribution of charged particle beams
#1746Charged particle beam device
#1747Electron microscope having a carrier
#1748Swing objective lens
#1749SEMICONDUCTOR INSPECTION APPARATUS, SEMICONDUCTOR INSPECTION METHOD, AND RECORDING MEDIUM
#1750Fixture for in situ electromigration testing during X-ray microtomography
#1751Method for S/TEM sample analysis
#1752HIGHLY CONDUCTIVE NANOCOMPOSITE, BIOLOGICAL AND SMALL MOLECULE MATERIALS FOR ENHANCED RESIN CONDUCTIVITY
#1753Charged particle beam device enabling facilitated EBSD detector analysis of desired position and control method thereof
#1754Electron microscope with plural X-ray detectors for acquiring elemental spectrum
#1755Method and compound system for inspecting and reviewing defects
#1756Charged Particle Beam Device and Image Acquisition Method
#1757Charged particle source
#1758INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENVIRONMENT AND A SCANNING ELECTRON MICROSCOPE
#1759Method and system for adaptively scanning a sample during electron beam inspection
#1760Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
#1761Scanning electron microscope
#1762Charged particle beam apparatus and inspection method using the same
#1763Quantitative secondary electron detection
#1764Automated TEM sample preparation
#1765Endpointing for focused ion beam processing
#1766Charged particle-beam device and specimen observation method
#1767Composite scan path in a charged particle microscope
#1768Method for adjusting charged particle beam device and adjusting beam aperture based on a selected emission condition and charged particle beam device for same
#1769Method for measuring a distance of a component from an object and for setting a position of a component in a particle beam device
#1770Automated decision-based energy-dispersive x-ray methodology and apparatus
#1771Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
#1772Electron microscope and elemental mapping image generation method
#1773Charged particle microscope with special aperture plate
#1774Defect detection using structural information
#1775Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun
#1776SUBSTRATE TRANSFER SYSTEM HAVING IONIZER
#1777Charged particle beam apparatus
#1778Method for correcting drift of accelerating voltage, method for correcting drift of charged particle beam, and charged particle beam writing apparatus
#1779Digital pore alteration methods and systems
#1780Semiconductor inspection system and methods of inspecting a semiconductor device using the same
#1781Information processing device and information processing method
#1782Materials, components, and methods for use with extreme ultraviolet radiation in lithography and other applications
#1783Method of constructing 3D image, image processor, and electron microscope
#1784Method of performing spectroscopy in a transmission charged-particle microscope
#1785Sample observation device
#1786Charged particle radiation device and specimen preparation method using said device
#1787Pattern analysis method of a semiconductor device
#1788Method of calculating a shift vale of a cell contact
#1789Scanning electron microscope and methods of inspecting and reviewing samples
#1790Electron microscope and sample observation method
#1791Apparatus of plural charged particle beams with multi-axis magnetic lenses
#1792Superposition measuring apparatus, superposition measuring method, and superposition measuring system
#1793Sample holder for scanning electron microscope, scanning electron microscope image observation system, and scanning electron microscope image observation method
#1794Aberration correction apparatus, device having the same, and method for correcting aberration of charged particles
#1795ACHROMATIC DUAL-FIB INSTRUMENT FOR MICROFABRICATION AND MICROANALYSIS
#1796Reducing the impact of charged particle beams in critical dimension analysis
#1797Pattern shape evaluation method, semiconductor device manufacturing method, and pattern shape evaluation device
#1798Charged particle beam specimen inspection system and method for operation thereof
#1799Energy filter for charged particle beam apparatus
#1800Apparatus for preparing a sample for microscopy