Charged particle beam device, sample observation method, sample platform, observation system, and light emitting member

Radiation analyzer including a support for tilting an energy-dispersive radiation detector

Device and method for computing angular range for measurement of aberrations and electron microscope

Apparatus for focusing and for storage of ions and for separation of pressure areas

Device and method for computing amount of drift and charged particle beam system

Method of calibrating a scanning transmission charged-particle microscope

Computational scanning microscopy with improved resolution

Pattern-measuring apparatus and semiconductor-measuring system

Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope

Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample

Scanning electron microscope

Through process flow intra-chip and inter-chip electrical analysis and process control using in-line nanoprobing

Charged particle beam apparatus

Measurement and inspection device

Characterization method for a reservoir micro pore structure and a system thereof

Device for dust emitting of foreign matter and dust emission cause analysis device

Sample observation device having a selectable acceleration voltage

Mathematical image assembly in a scanning-type microscope

Charged particle radiation apparatus

System and method for simultaneous detection of secondary electrons and light in a charged particle beam system

Composite charged particle detector, charged particle beam device, and charged particle detector

Identification of Trace Constituent Phases in Nuclear Power Plant Deposits Using Electron Backscatter Diffraction (EBSD)

Charged particle beam application device

Determining a state of a high aspect ratio hole using measurement results from an electrostatic measurement device

Method for pattern measurement, method for setting device parameters of charged particle radiation device, and charged particle radiation device

Particle beam system and method for operating a particle optical unit

Charged-particle beam device for irradiating a charged particle beam on a sample

Charged particle beam apparatus and trajectory correction method in charged particle beam apparatus

Charged particle beam device

Charged particle beam device

Charged particle beam device and method for analyzing defect therein

Multi-beam particle microscope and method for operating same

Charged particle beam apparatus

Charged-particle beam device

Charged particle optical apparatus having a selectively positionable differential pressure module

Electron beam imaging with dual Wien-filter monochromator

Apparatus and method for processing sample, and charged particle radiation apparatus

User interface for an electron microscope

TEM sample preparation

Charged particle beam apparatus and program

Method and system for inspecting and grounding an EUV mask

Method for detecting an electrical defect of contact/via plugs

Method for creating S/TEM sample and sample structure

Spectroscopic element and charged particle beam device using the same

Sample base, charged particle beam device and sample observation method

Method and apparatus for sample extraction and handling

Charged particle beam device, sample stage unit, and sample observation method

Semiconductor inspection device including a counter electrode with adjustable potentials used to obtain images for detection of defects, and inspection method using charged particle beam

METHOD FOR CHARACTERISING PARTICLES BY IMAGE ANALYSIS

Charged particle beam apparatus

Inspection apparatus

Charged particle beam device and overlay misalignment measurement method

Focusing a charged particle system

Image evaluation apparatus and pattern shape evaluation apparatus

Control unit for generating timing signal for imaging unit in inspection system and method for sending out timing signal to imaging unit

Raman microscope and electron microscope analytical system

Charged-particle radiation apparatus

Notched magnetic lens for improved sample access in an SEM

Method for removing foreign substances in charged particle beam device, and charged particle beam device

Charged particle beam apparatus

Apparatus and method for inspecting a surface of a sample

Energy dispersive X-ray analyzer and method for energy dispersive X-ray analysis

Electrostatic chuck mechanism and charged particle beam apparatus

Cross-section processing and observation method and cross-section processing and observation apparatus

Integrated optical and charged particle inspection apparatus

Charged particle beam device and sample preparation method

Analysis apparatus and analysis method

Sample storage container, charged particle beam apparatus, and image acquiring method

Confocal Incident-Light Scanning Microsope For Multipoint Scanning

High aspect ratio structure analysis

Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment

Method of examining a sample in a charged-particle microscope

Alignment marking for rock sample analysis

CHARGED PARTICLE BEAM APPARATUS, IMAGE ACQUIRING METHOD AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

SECONDARY ELECTRON OPTICS AND DETECTION DEVICE

Charged particle beam apparatus having needle probe that tracks target position changes

Observation apparatus and optical axis adjustment method

Charged particle beam device and sample observation method

Charged particle beam apparatus and image forming method

Charged particle beam apparatus and sample observation method

Scanning electron microscope

Particle analysis instrument and computer program

METHOD FOR PREPARING AND ANALYZING AN OBJECT AS WELL AS PARTICLE BEAM DEVICE FOR PERFORMING THE METHOD

Electron microscope and electron beam detector

Defect observation system and defect observation method

Charged particle beam device with dynamic focus and method of operating thereof

Ion sources, systems and methods

High-voltage energy-dispersive spectroscopy using a low-voltage scanning electron microscope

Method for measuring and analyzing surface structure of chip or wafer

Using wafer geometry to improve scanner correction effectiveness for overlay control

Pattern inspection device and pattern inspection method

Method and system of measuring semiconductor device and method of fabricating semiconductor device using the same

Charged particle beam apparatus and processing method

Method for S/TEM sample analysis

Charged particle beam apparatus and sample observation method

MEMBER FOR CHARGED PARTICLE BEAM DEVICE, CHARGED PARTICLE BEAM DEVICE AND DIAPHRAGM MEMBER

Stage apparatus and sample observation apparatus

Apparatus and method for inspecting a surface of a sample

Method of investigating the wavefront of a charged-particle beam

Multi-beam system for high throughput EBI

Charged particle beam apparatus

Charged particle beam apparatus

Charged particle beam apparatus

Sample holder and method for fixing observation sample

Charged particle beam device

Focused ion beam system and method of making focal adjustment of ion beam

Overlay error measuring device and computer program

Three-dimensional mapping using scanning electron microscope images

Charged particle beam device

Method and system for correlating optical images with scanning electron microscopy images

CHARGED PARTICLE BEAM ADJUSTMENT ASSISTANCE DEVICE AND METHOD

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

Cross section processing method and cross section processing apparatus

Scanning transmission electron microscope system, image processing method, and image processing apparatus

Scanning electron microscope system capable of measuring in-cell overlay offset using high-energy electron beam and method thereof

Measurement method, image processing device, and charged particle beam apparatus

Systems and Methods for Material Texture Analysis

Scanning electron microscope

Integrated optical and charged particle inspection apparatus

Charged particle beam device having an energy filter

Charged particle beam apparatus

INSPECTION APPARATUS

Charged particle multi-beam inspection system and method of operating the same

Enhanced defect detection in electron beam inspection and review

Charged particle microscope

Notched magnetic lens for improved sample access in an SEM

Charged particle beam apparatus

Method of detecting electrons, an electron-detector and an inspection system

Inspection or observation apparatus and sample inspection or observation method

Electron emitter device with integrated multi-pole electrode structure

Adjustable cathodoluminescence detection system and microscope employing such a system

Charged particle beam apparatus

Non-invasive charged particle beam monitor

Charged particle beam apparatus, specimen observation system and operation program

Charged particle beam apparatus

Specimen holder for observing top section of specimen and method for controlling the same

Specimen holder for observing cross section of specimen and method for controlling the same

SMS probe and SEM imaging system and methods of use

Charged particle beam apparatus, specimen observation system and operation program

CHARGED-PARTICLE MULTI-BEAM APPARATUS HAVING CORRECTION PLATE

Particle optical system

Asymmetrical detector design and methodology

Sparse sampling and reconstruction for electron and scanning probe microscope imaging

Hot spot identification, inspection, and review

Method for electron tomography

Charged particle beam device

System and method for controlling charge-up in an electron beam apparatus

Three-dimensional semiconductor image reconstruction apparatus and method

Charged particle beam apparatus

Charged particle beam apparatus

Specimen observation method and device using secondary emission electron and mirror electron detection

System and method for controlling charge-up in an electron beam apparatus

Cross-section processing-and-observation method and cross-section processing-and-observation apparatus

Apparatus of plural charged particle beams with multi-axis magnetic lens

Semiconductor circuit

Charged particle beam device and arithmetic device

Method and system for obtaining optical proximity correction model calibration data

Stage apparatus, and charged particle beam apparatus using same

Charged particle beam apparatus and method of correcting landing angle of charged particle beam

Wafer grounding and biasing method, apparatus, and application

Method for processing and/or for observing an object, and particle beam device for carrying out the method

Scanning ion microscope and secondary particle control method

Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus

Method and data analysis system for semi-automated particle analysis using a charged particle beam

Pattern dimension measuring device, charged particle beam apparatus, and computer program

Pattern critical dimension measurement equipment and method for measuring pattern critical dimension

Electronic microscope, setting method of observation condition of electronic microscope, and observation method using electronic microscope

Processing apparatus and method using a scanning electron microscope

Method of manufacturing a component

Electron beam equipment

Charged particle beam apparatus

Scanning electron microscope

Position sensitive STEM detector

Spherical aberration corrector, method of spherical aberration correction, and charged particle beam instrument

Inspection of a lithographic mask that is protected by a pellicle

Automated slice milling for viewing a feature

High accuracy beam placement for local area navigation

Scanning electron microscope

Charged particle beam apparatus

Charged particle beam device

Method of operating a particle beam microscope and a particle beam microscope

Scanning charged particle microscope, image acquisition method, and electron detection method

Charged-particle microscope with Raman spectroscopy capability

Scanning electron microscope

Image-forming device, and dimension measurement device

Scanning-electron-microscope image processing device and scanning method

Charged particle beam device and inclined observation image display method

Detection method for use in charged-particle microscopy

SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD

Sample holder for electron microscopy for low-current, low-noise analysis

Electron beam apparatus

Scanning electron microscope

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

Method for imaging a sample in a charged particle apparatus

Using wafer geometry to improve scanner correction effectiveness for overlay control

Sample holder for electron microscope

System and method of SEM overlay metrology

Electron microscope

Sample supporting member for observing scanning electron microscopic image and method for observing scanning electron microscopic image

Orientation imaging using wide angle convergent beam diffraction in transmission electron microscopy

Multi-column electron beam inspection that uses custom printing methods

Microscope system

Back scattered electron detector

Scanning electron beam device with focus adjustment based on acceleration voltage and dimension measurement method using same

Charged particle beam apparatus permitting high-resolution and high-contrast observation

PRINTED CIRCUIT BOARD MULTIPOLE UNITS USED FOR ION TRANSPORTATION

Pattern evaluation method and pattern evaluation device

Ion beam device

Mounting structures for multi-detector electron microscopes

Inspection system by charged particle beam and method of manufacturing devices using the system

Inspection apparatus

Method and system for adaptively scanning a sample during electron beam inspection

Charged particle microscope apparatus and image acquisition method of charged particle microscope apparatus utilizing image correction based on estimated diffusion of charged particles

Method and apparatus for detecting buried defects

Charged-particle microscope providing depth-resolved imagery

PATTERN INSPECTION METHOD AND PATTERN INSPECTION APPARATUS

Ion sources, systems and methods

Scanning particle microscope having an energy selective detector system

Scanning electron microscope

Ion source and ion beam device using same

Charged particle beam device and measuring method using the same

Automatic filtering of SEM images

Dynamic focus adjustment with optical height detection apparatus in electron beam system

Automatic filtering of SEM images

Charged particle beam apparatus

Focused ion beam apparatus, method for observing cross-section of sample by using the same, and storage medium

Focused ion beam system

Observation specimen for use in electron microscopy, electron microscopy, electron microscope, and device for producing observation specimen

Measuring method, data processing apparatus and electron microscope using same

Inspection or observation apparatus and sample inspection or observation method

Microscopy imaging method and system

Electrostatic lens and charged particle beam apparatus using the same

Focusing a charged particle imaging system

Particle beam system and method for operating the same

Ion beam device having gas introduction port disposed on structure maintained at ground potential

Ion beam system and method of operating an ion beam system

Multi-spot collection optics

Charged-particle microscope

Contamination reduction electrode for particle detector

CHARGED PARTICLE BEAM APPARATUS

Charged particle beam apparatus

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

Method for operating a particle beam device and/or for analyzing an object in a particle beam device

Characterization of nanoscale structures using an ultrafast electron microscope

Electron microscope

Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample

Tilt-imaging scanning electron microscope

Method of sampling a sample and displaying obtained information

Apparatus having a magnetic lens configured to diverge an electron beam

Scanning electron microscope and a method for imaging a specimen using the same

Scanning electron microscope and scanning transmission electron microscope

Charged particle beam apparatus

Cross-section processing and observation method and cross-section processing and observation apparatus

System and method for simultaneous detection of secondary electrons and light in a charged particle beam system

Substrate measurement apparatus with electron distortion unit

System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope

Charged particle beam device having an energy filter

Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment

Automated mineral classification

Particle beam system and method of processing a TEM-sample

Electron beam apparatus for inspecting a pattern on a sample using multiple electron beams

Beam pulsing device for use in charged-particle microscopy

Electron microscope and image capturing method using electron beam

In-column detector for particle-optical column

Charged particle microscope device and image capturing method

Method for avoiding artefacts during serial block face imaging

Charged particle beam apparatus and electrostatic chuck apparatus

Photon induced near field electron microscope and biological imaging system

SCANNING ELECTRON MICROSCOPE AND METHOD FOR PREPARING SPECIMEN

Electron beam irradiation apparatus

Three-dimensional mapping using scanning electron microscope images

Method of using a compound particle-optical lens

Particle beam device and method for operating a particle beam device

Method of performing tomographic imaging of a sample in a charged-particle microscope

Methods and apparatuses for inspecting semiconductor devices using electron beams

Image quality adjusting method, non-transitory computer-readable recording medium, and electron microscope

Composite charged particle beam apparatus and thin sample processing method

Pattern dimension measurement method and charged particle beam apparatus

Parallel radial mirror analyser with an angled zero-volt equipotential exit grid for scanning electron microscopes

X-ray detector including integrated electron detector

Sequencer for combining automated and manual-assistance jobs in a charged particle beam device

Environmental scanning electron microscope (ESEM/SEM) gas injection apparatus with anode integrated with gas concentrating structure

Charged particle beam apparatus for removing charges developed on a region of a sample

Apparatus and method for investigating an object

Charged particle beam apparatus

Electron microscope sample holder and sample observation method

Method of preparing and imaging a lamella in a particle-optical apparatus

Charged particle ray apparatus and pattern measurement method

On-axis detector for charged particle beam system

Charged particle beam device and image display method for stereoscopic observation and stereoscopic display

High efficiency scintillator detector for charged particle detection

Electron microscope and method of operating the same

Particle detection system

Measurement or inspecting apparatus

Electron microscope and method of adjusting the same

Method of axial alignment of charged particle beam and charged particle beam system

Multi charged particle beam writing method and multi charged particle beam writing apparatus

CONTAMINATION REDUCTION ELECTRODE FOR PARTICLE DETECTOR

Inspection system using scanning electron microscope