205251 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Charged particle beam device
#2102Circuit and method for controlling a microscope
#2103Scanning microscope having an adaptive scan
#2104Scanning electron microscope with charge density control
#2105Scanning electron microscope
#2106Charged particle beam device, and image analysis device
#2107Charged particle beam device
#2108Electron microscope with integrated detector(s)
#2109Charged particle beam applied apparatus, and irradiation method
#2110Method of determining an applicable threshold for determining the critical dimension of at least one category of patterns imaged by atomic force scanning electron microscopy
#2111Device for analyzing film on surface of electrode for rechargeable lithium battery and method of analyzing film on surface of electrode for rechargeable lithium battery using same
#2112Image processing apparatus
#2113Charged particle beam device and method for correcting detected signal thereof
#2114METHOD FOR PRODUCING A REPRESENTATION OF AN OBJECT BY MEANS OF A PARTICLE BEAM, AS WELL AS A PARTICLE BEAM DEVICE FOR CARRYING OUT THE METHOD
#2115Pattern determination device and computer program
#2116Charged particle beam apparatus
#2117Ion sources, systems and methods
#2118Charged particle optical equipment and method for measuring lens aberration
#2119Apparatus and methods for high-resolution electron beam imaging
#2120Method and apparatus for detecting buried defects
#2121Sample observation method, sample preparation method, and charged particle beam apparatus
#2122Sample analyzing apparatus and sample analyzing method
#2123High throughput TEM preparation processes and hardware for backside thinning of cross-sectional view lamella
#2124Signal processing method and signal processing apparatus
#2125X-ray detector for electron microscope
#2126Method and system for improving characteristic peak signals in analytical electron microscopy
#2127Defect inspection method and device therefor
#2128High efficiency secondary and back scattered electron detector
#2129Electron gun emitting under high voltage, in particular for electron microscopy
#2130Pattern inspection apparatus and method
#2131Charged particle beam apparatus having noise absorbing arrangements
#2132Pattern measuring apparatus, and pattern measuring method and program
#2133Pattern matching method, image processing device, and computer program
#2134Pattern measuring method, pattern measuring apparatus, and program using same
#2135Charged particle detector
#2136CHARGED PARTICLE BEAM DEVICE WITH DYNAMIC FOCUS AND METHOD OF OPERATING THEREOF
#2137Positioning system and method for precise stage and pattern used therof
#2138Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus
#2139Three-dimensional mapping using scanning electron microscope images
#2140Method and apparatus for monitoring cross-sectional shape of a pattern formed on a semiconductor device
#2141Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
#2142Electron beam irradiation method and scanning electronic microscope
#2143Scanning electron microscope
#2144Method for preparing lamella
#2145Pattern dimension measurement method using electron microscope, pattern dimension measurement system, and method for monitoring changes in electron microscope equipment over time
#2146Sample observing device and sample observing method
#2147Method and apparatus for sample extraction and handling
#2148Image processing device and computer program
#2149Electron beam apparatus for visualizing a displacement of an electric field
#2150Image processing device, charged particle beam device, charged particle beam device adjustment sample, and manufacturing method thereof
#2151Image forming device and computer program
#2152SYSTEM AND METHOD FOR SAMPLE ANALYSIS BY THREE DIMENSIONAL CATHODOLUMINESCENCE
#2153Systems and methods for preparation of samples for sub-surface defect review
#2154SAMPLE OBSERVATION APPARATUS AND METHOD OF MARKING
#2155Device for setting image acquisition conditions, and computer program
#2156Charged particle beam microscope
#2157Method for determining the performance of a photolithographic mask
#2158Pattern dimension measurement method, pattern dimension measurement device, program for causing computer to execute pattern dimension measurement method, and recording medium having same recorded thereon
#2159Defect inspection method, and device thereof
#2160Scanning transmission electron microscope and axial adjustment method thereof
#2161Aberration correction device and charged particle beam device employing same
#2162Method for adjusting a stem equipped with an aberration corrector
#2163Method for detecting cancer cells using vertically aligned carbon nanotubes
#2164Manipulator carrier for electron microscopes
#2165Scanning transmission type electron microscope
#2166Silicon drift diode detector configured to switch between pulse height measurement mode and current measurement mode
#2167Dual image method and system for generating a multi-dimensional image of a sample
#2168Compound microscope device
#2169Charged particle radiation device and soundproof cover
#2170Particle beam system and method for operating the same
#2171CIRCUIT PATTERN INSPECTION APPARATUS AND CIRCUIT PATTERN INSPECTION METHOD
#2172Composite charged particle beam apparatus
#2173COMBINE APPARATUS OF SCANNING ELECTRON MICROSCOPE AND ENERGY DISPERSIVE X-RAY SPECTROSCOPY
#2174Adjustable cathodoluminescence detection system and microscope employing such a system
#2175CHARGED PARTICLE BEAM DEVICE PROVIDED WITH AUTOMATIC ABERRATION CORRECTION METHOD
#2176Pattern inspection apparatus and pattern inspection method
#2177Localized, in-vacuum modification of small structures
#2178SCANNING ELECTRON MICROSCOPE
#2179Electron beam apparatus for inspecting a pattern on a sample using multiple electron beams
#2180Charged particle detector system comprising a conversion electrode
#2181METHOD AND APPARATUS FOR MATERIAL ANALYSIS BY A FOCUSED ELECTRON BEAM USING CHARACTERISTIC X-RAYS AND BACK-SCATTERED ELECTRONS
#2182Scanning electron microscope with a table being guided by rolling friction elements
#2183Charged particle radiation device with bandpass detection
#2184Image processing apparatus, an image generating method, and a system
#2185Scanning electron microscope and sample observation method
#2186Charged-particle microscope providing depth-resolved imagery
#2187Charged particle microscopy imaging method
#2188Charged particle radiation device
#2189Inductive modulation of focusing voltage in charged beam system
#2190Pattern evaluation method, device therefor, and electron beam device
#2191Clustering of multi-modal data
#2192IMAGE GENERATING METHOD AND DEVICE USING SCANNING CHARGED PARTICLE MICROSCOPE, SAMPLE OBSERVATION METHOD, AND OBSERVING DEVICE
#2193Electron beam irradiation method and scanning electron microscope
#2194Composite charged-particle-beam apparatus
#2195System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope
#2196High accuracy beam placement for local area navigation
#2197Charged particle beam microscope
#2198SEM TYPE DEFECT OBSERVATION DEVICE AND DEFECT IMAGE ACQUIRING METHOD
#2199METHOD FOR SUPERIMPOSING AND DISPLAYING ELECTRON MICROSCOPE IMAGE AND OPTICAL IMAGE
#2200Particle beam microscope
#2201Particle Beam Microscope
#2202Charged particle beam apparatus, and sample processing and observation method
#2203Monochromator for charged particle beam apparatus
#2204Scanning electron microscope optical condition setting method and scanning electron microscope
#2205PATTERN MEASUREMENT APPARATUS AND PATTERN MEASUREMENT METHOD
#2206Characterization of nanoscale structures using an ultrafast electron microscope
#2207Charged particle beam apparatus
#2208METHOD AND PARTICLE BEAM DEVICE FOR FOCUSING A PARTICLE BEAM
#2209Circuit-pattern inspection device
#2210Pattern inspection method, pattern inspection program, and electronic device inspection system
#2211Linear motor, movable stage and electron microscope
#2212METHOD OF DETERMINING THE CONCAVITY AND CONVEXITY ON SAMPLE SURFACE, AND CHARGED PARTICLE BEAM APPARATUS
#2213System and method for compensating for magnetic noise
#2214Image processing method for mass spectrum image, program, and apparatus
#2215Observation method and observation device
#2216Method of extracting contour lines of image data obtained by means of charged particle beam device, and contour line extraction device
#2217Ion Milling Device, Sample Processing Method, Processing Device, and Sample Drive Mechanism
#2218Flow cells for electron microscope imaging with multiple flow streams
#2219Scanning electron microscope
#2220Method for detecting information of an electronic potential on a sample and charged particle beam apparatus
#2221Contour-based defect detection using an inspection apparatus
#2222Charged particle beam device and sample observation method
#2223SAMPLE OBSERVATION METHOD USING ELECTRON BEAMS AND ELECTRON MICROSCOPE
#2224Charged-particle microscopy with occlusion detection
#2225Electric charged particle beam microscope and electric charged particle beam microscopy
#2226NON-COHERENT LIGHT MICROSCOPY
#2227Charged particle instrument
#2228Particle beam device having a detector arrangement
#2229Scanning electron microscope and inspection method using same
#2230Charged particle beam apparatus permitting high resolution and high-contrast observation
#2231Charged particle system for reticle/wafer defects inspection and review
#2232Charged particle beam device and a method of improving image quality of the same
#2233Method for examining a sample by using a charged particle beam
#2234IN-COLUMN DETECTOR FOR PARTICLE-OPTICAL COLUMN
#2235Semiconductor inspecting apparatus
#2236Electron beam apparatus and electron beam inspection method
#2237Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimen
#2238Charged particle beam analyzer and analysis method
#2239METHOD FOR DEFECT INSPECTION AND APPARATUS FOR DEFECT INSPECTION
#2240Ion beam system and method of operating ion beam system
#2241Ion sources, systems and methods
#2242Electron detecting mechanism and charged particle beam system equipped therewith
#2243Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
#2244Multiple-beam system for high-speed electron-beam inspection
#2245METHOD AND SYSTEM FOR ENHANCING RESOLUTION OF A SCANNING ELECTRON MICROSCOPE
#2246Inspection device
#2247Method for inspecting EUV reticle and apparatus thereof
#2248Electron microscope
#2249Pattern-height measuring apparatus and pattern-height measuring method
#2250CHARGED PARTICLE MICROSCOPE
#2251Pattern dimension measurement method and charged particle beam microscope used in same
#2252Scanning electron microscope
#2253Pattern measuring method and pattern measuring device
#2254Detector for use in charged-particle microscopy
#2255Multiple-pole electrostatic deflector for improving throughput of focused electron beam instruments
#2256Particle beam system
#2257Scanning charged particle beam device and method for correcting chromatic spherical combination aberration
#2258IN-CHAMBER ELECTRON DETECTOR
#2259Charged particle radiation device
#2260System and method for localization of large numbers of fluorescent markers in biological samples
#2261SEM repair for sub-optimal features
#2262SEM repair for sub-optimal features
#2263Charged particle beam apparatus and film thickness measurement method
#2264High-vacuum variable aperture mechanism and method of using same
#2265Scanning electron microscope and a method for imaging a specimen using the same
#2266Charged particle source with multiple selectable particle emitters
#2267Secondary-electron detector and charged particle beam apparatus
#2268Charged particle beam apparatus including aberration corrector
#2269Scanning electron microscope and sample observation method
#2270System and method for producing and using multiple electron beams with quantized orbital angular momentum in an electron microscope
#2271Method for creating S/TEM sample and sample structure
#2272Apparatus of plural charged particle beams with multi-axis magnetic lens
#2273Particle detection system
#2274Gas delivery system with voltage gradient for an ion microscope
#2275Ion sources, systems and methods
#2276Particle beam device with deflection system
#2277Signal Processing Method for Charged Particle Beam Device, and Signal Processing Device
#2278Specimen observation method
#2279Method of making axial alignment of charged particle beam and charged particle beam system
#2280Low-interference sensor head for a radiation detector, as well as a radiation detector which contains this low-interference sensor head
#2281CHARGED PARTICLE BEAM DEVICE AND IMAGE DISPLAY METHOD
#2282GAS FIELD IONIZATION ION SOURCE APPARATUS AND SCANNING CHARGED PARTICLE MICROSCOPE EQUIPPED WITH SAME
#2283Method and an apparatus of an inspection system using an electron beam
#2284Scanning electron microscope
#2285Charged-Particle-Beam Device
#2286Charged particle beam apparatus and method for stably obtaining charged particle beam image
#2287Method of creating template for matching, as well as device for creating template
#2288CHARGED-PARTICLE MICROSCOPE
#2289Specimen potential measuring method, and charged particle beam device
#2290Charged particle source with integrated electrostatic energy filter
#2291Aperture unit for a particle beam device
#2292Charged particle beam device
#2293METHOD AND APPARATUS FOR GENERATING THREE-DIMENSIONAL IMAGE DATA
#2294Charged particle beam device
#2295Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
#2296Scanning electron microscope device, evaluation point generating method, and program
#2297Semiconductor inspection device and semiconductor inspection method using the same
#2298Scanning electron microscope device and pattern dimension measuring method using same
#2299Charged-particle microscope device and method for inspecting sample using same
#2300Ion microscope
#2301Ion beam stabilization
#2302Scanning incremental focus microscopy
#2303System and method of image processing, and scanning electron microscope
#2304CHARGED-PARTICLE MICROSCOPE DEVICE, AND METHOD OF CONTROLLING CHARGED-PARTICLE BEAMS
#2305Environmental cell for a particle-optical apparatus
#2306Charged particle beam devices
#2307Blade deployment mechanisms for surgical forceps
#2308Apparatus and method to inspect defect of semiconductor device
#2309SYSTEM AND METHOD FOR REMOVING ORGANIC RESIDUE FROM A CHARGED PARTICLE BEAM SYSTEM
#2310X-ray detector for electron microscope
#2311Particle beam device having a sample holder
#2312Method and apparatus for reviewing defects
#2313Particle beam microscope and method for operating the particle beam microscope
#2314Charged particle beam device and evaluation method using the charged particle beam device
#2315Gas field ion microscopes having multiple operation modes
#2316Pattern defect inspection using data based on secondary electron from pattern
#2317Scanning electron microscope
#2318Charged particle beam device and sample observation method
#2319Apparatus and methods for vacuum-compatible substrate thermal management
#2320Scan method
#2321Charged particle apparatus
#2322High accuracy beam placement for local area navigation
#2323Method and apparatus for charged particle beam inspection
#2324Distributed potential charged particle detector
#2325Inspection system by charged particle beam and method of manufacturing devices using the system
#2326Pattern measuring apparatus and pattern measuring method
#2327Particle beam system
#2328Particle beam system
#2329Method and apparatus for acquiring simultaneous and overlapping optical and charged particle beam images
#2330Electron detector including an intimately-coupled scintillator-photomultiplier combination, and electron microscope and X-ray detector employing same
#2331Orientation imaging using wide angle convergent beam diffraction in transmission electron microscopy
#2332Contrast for scanning confocal electron microscope
#2333Electron beam device with tilting and dispersion compensation, and method of operating same
#2334CHARGED PARTICLE APPARATUS, SCANNING ELECTRON MICROSCOPE, AND SAMPLE INSPECTION METHOD
#2335Magnifying observation apparatus
#2336Magnifying observation apparatus
#2337GAS ION SOURCE WITH HIGH MECHANICAL STABILITY
#2338Electron microscope device
#2339Physical properties measuring method and apparatus
#2340Electron microscope, and specimen holding method
#2341Sample observing method and scanning electron microscope
#2342Charged particle beam device
#2343Charged particle beam device and method for correcting position with respect to charged particle beam
#2344Producing images of a specimen
#2345Charged particle radiation device
#2346Semiconductor inspection method and device that consider the effects of electron beams
#2347Movable detector for charged particle beam inspection or review
#2348IMAGE FORMATION METHOD AND IMAGE FORMATION DEVICE
#2349Defect observation method and device using SEM
#2350Method for adjusting optical axis of charged particle radiation and charged particle radiation device
#2351Method and system for 4D tomography and ultrafast scanning electron microscopy
#2352Scanning electron microscope
#2353Tool-to-tool matching control method and its system for scanning electron microscope
#2354Pattern check device and pattern check method
#2355Simultaneous electron detection
#2356Charged beam device
#2357Charged particle radiation device provided with aberration corrector
#2358Electron beam device with dispersion compensation, and method of operating same
#2359SEM imaging method
#2360Pattern matching method and image processing device
#2361Scan device for microscope measurement instrument
#2362DEFECT OBSERVATION DEVICE AND DEFECT OBSERVATION METHOD
#2363Charged particle radiation device and image capturing condition determining method using charged particle radiation device
#2364Charged particle beam apparatus
#2365Dynamic focus adjustment with optical height detection apparatus in electron beam system
#2366SCANNING CHARGED PARTICLE MICROSCOPE
#2367Charged particle beam device and a method of operating a charged particle beam device
#2368Defect analyzer
#2369Mask inspection apparatus and image generation method
#2370Scanning electron microscope
#2371Mask inspection apparatus and mask inspection method
#2372Combination laser and charged particle beam system
#2373Electron beam device and electron beam application device using the same
#2374Ion sources, systems and methods
#2375Automated slice milling for viewing a feature
#2376Pattern measurement apparatus and pattern measurement method
#2377Charged particle beam device
#2378Inspection system
#2379Sample processing and observing method
#2380Composite charged particle beam apparatus and sample processing and observing method
#2381Methods and devices for high throughput crystal structure analysis by electron diffraction
#2382Twin beam charged particle column and method of operating thereof
#2383Photon induced near field electron microscope and biological imaging system
#2384Method for inspecting and measuring sample and scanning electron microscope
#2385Particle beam device and method for operation of a particle beam device
#2386Calibration standard member, method for manufacturing the member and scanning electronic microscope using the member
#2387CHARGED PARTICLE BEAM INSTRUMENT COMPRISING AN ABERRATION CORRECTOR
#2388Vacuumed device and a scanning electron microscope
#2389MEASURING METHOD OF PATTERN DIMENSION AND SCANNING ELECTRON MICROSCOPE USING SAME
#2390Pattern measurement apparatus and pattern measurement method
#2391Method for observing sample and electronic microscope
#2392Pattern definition device with multiple multibeam array
#2393Electron microscope with integrated detector(s)
#2394Charged particle beam apparatus
#2395CHARGED CORPUSCULAR BEAM APPARATUS
#2396Method for producing a representation of an object by means of a particle beam, as well as a particle beam device for carrying out the method
#2397Pattern-searching condition determining method, and pattern-searching condition setting device
#2398Selectable coulomb aperture in E-beam system
#2399Apparatus for transmission of energy and/or for transportation of an ion as well as a particle beam device having an apparatus such as this
#2400SCANNING TYPE CHARGED PARTICLE MICROSCOPE DEVICE AND METHOD FOR PROCESSING IMAGE ACQUIRED WITH SCANNING TYPE CHARGED PARTICLE MICROSCOPE DEVICE