Charged particle beam apparatus and film thickness measurement method

Method of Depositing Protective Structures

Measurement and endpointing of sample thickness

SEMICONDUCTOR DEVICE

Apparatus for cooling samples during ion beam preparation

Method for creating S/TEM sample and sample structure

Method of processing of an object

Ion sources, systems and methods

Apparatus and method for controlled particle beam manufacturing

Charged particle beam device

METHOD AND APPARATUS FOR GENERATING THREE-DIMENSIONAL IMAGE DATA

Processing system

Environmental cell for a particle-optical apparatus

Method and apparatus for specimen fabrication

Method and system for modifying patterned photoresist using multi-step ion implantation

Multi-source plasma focused ion beam system

METHOD AND SYSTEM FOR PREPARING A LAMELA

METHOD AND APPARATUS FOR PRODUCING THREE DIMENSIONAL NANO AND MICRO SCALE STRUCTURES

Navigation and sample processing using an ion source containing both low-mass and high-mass species

Composite charged particle beams apparatus

Charged particle beam processing system with visual and infrared imaging

METHOD AND SYSTEM FOR PREPARING A SAMPLE

Charged particle beam apparatus and sample processing method

System and method for precision fabrication of micro- and nano-devices and structures

Charged particle beam device and method for correcting position with respect to charged particle beam

Particle-Beam Induced Processing Using Liquid Reactants

Apparatus and method for modifying physical properties of nanostructure using focused electron beam, and nano-barcode and serial-junction nanowire fabricated thereby

Defect analyzer

Ion source with independent power supplies

Combination laser and charged particle beam system

Ion sources, systems and methods

Automated slice milling for viewing a feature

Sample processing and observing method

Composite charged particle beam apparatus and sample processing and observing method

Distributed ion source acceleration column

Apparatus and method for investigating and/or modifying a sample

USE OF HIGH ENERGY HEAVY ION BEAM FOR DIRECT SPUTTERING

ION Beam System and Machining Method

Slide part and surface processing methods of the same

Charged particle beam apparatus using an electrostatic lens gun

Method for electron beam induced etching of layers contaminated with gallium

Method and apparatus for processing a microsample

Multibeam System

Analysis method for semiconductor device

Method and apparatus for specimen fabrication

APPARATUS AND SYSTEMS FOR INTEGRATED CIRCUIT DIAGNOSIS

Micro-sample processing method, observation method and apparatus

Selective nanotube growth inside vias using an ion beam

MANUFACTURING METHOD OF ELECTRON SOURCE

High pressure charged particle beam system

Variable-tilt specimen holder and method and for monitoring milling in a charged-particle instrument

Method for S/TEM sample analysis

Beam quality in FIB systems

Method for creating S/TEM sample and sample structure

Dual beam system

Method for creating S/tem sample and sample structure

System and method for backside circuit editing on full thickness silicon device

METHOD FOR PROCESSING AN OBJECT WITH MINIATURIZED STRUCTURES

High-density FIB-SEM tomography via real-time imaging

Composite focused ion beam device, process observation method using the same, and processing method

Methods and systems for removing a material from a sample

Method of depositing protective structures

Method for forming microscopic 3D structures

Forming an image while milling a work piece

Charged particle beam processing

Apparatus

Focused ion beam system and sample processing method using the same

Cross section processing method and method of manufacturing cross section observation sample

Photomask defect correcting method and device

Composite focused ion beam device, and processing observation method and processing method using the same

Focused ion beam apparatus, sample processing method using the same, and computer program for focused ion beam processing

Graphical automated machine control and metrology

ICE LAYERS IN CHARGED PARTICLE SYSTEMS AND METHODS

Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof

Charged particle beam apparatus and method of adjusting charged particle optics

Measurement and endpointing of sample thickness

Dual mode gas field ion source

Method and device for examining a surface of an object

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

Reducing Line Edge Roughness by Particle Beam Exposure

Method and system for counting secondary particles

Device and method for analyzing a sample

Processing system

Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner

Method to direct pattern metals on a substrate

GRID HOLDER FOR STEM ANALYSIS IN A CHARGED PARTICLE INSTRUMENT

Processing system

Section processing method and its apparatus

Method and Apparatus for Treating Workpieces

Particle optical arrangement

Multi-source plasma focused ion beam system

CHARGED PARTICLE BEAM APPARATUS

Method to create three-dimensional images of semiconductor structures using a focused ion beam device and a scanning electron microscope

Method of forming TEM sample holder

Deflection signal compensation for charged particle beam

Ultra high precision measurement tool with control loop

Environmental cell for a particle-optical apparatus

Charged particle beam apparatus and method adjusting axis of aperture

Defect analyzer

Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample

Beam positioning for beam processing

Charged particle beam apparatus

Composite charged particle beam apparatus, method of processing a sample and method of preparing a sample for a transmission electron microscope using the same

Electron beam writing method, fine pattern writing system, and manufacturing method of uneven pattern carrying substrate

Ion sources, systems and methods

Exposure data preparation method and exposure method

System for processing an object

System and method for processing an object

ATOM PROBE COMPONENT TREATMENTS

System and method for focused ion beam data analysis

Defect recognizing method, defect observing method, and charged particle beam apparatus

Methods for sample preparation and observation, charged particle apparatus

Method for sample preparation

Apparatus and method for specimen fabrication

Material processing system and method

Method of preparing a transmission electron microscope sample and a sample piece for a transmission electron microscope

Sample preparing device and sample posture shifting method

Atomically sharp iridium tip

CHARGED PARTICLE APPLICATION APPARATUS

Method and system for adjusting beam dimension for high-gradient location specific processing

Charged particle beam apparatus

Method and system for increasing throughput during location specific processing of a plurality of substrates

CHARGED PARTICLE BEAM APPARATUS, AND SAMPLE PROCESSING AND OBSERVATION METHOD

Particle beam device and method for use in a particle beam device

Method and apparatus for specimen fabrication

Focused ion beam processing system and method

Charged particle beam system and method for evacuation of the system

Composite charged-particle beam system

Sample relocation method in charged particle beam apparatus and charged particle beam apparatus as well as sample for transmission electron microscope

Focused ion beam defining process enhancement

METHOD AND APPARATUS FOR SPECIMEN FABRICATION

In-situ STEM sample preparation

Method and apparatus for specimen fabrication

Apparatus for ion beam fabrication

In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques

Micro-sample processing method, observation method and apparatus

CHARGED PARTICLE BEAM APPARATUS

Charged particle system

Sample holding mechanism and sample working/observing apparatus

Apparatus for working and observing samples and method of working and observing cross sections

Charged Particle Beam Apparatus

Method and apparatus for in-situ sample preparation

Method for thinning a sample and sample carrier for performing said method

Focused Ion Beam Apparatus

Method of fabricating grabbing face of sample grabbing portion

Charged particle beam device probe operation

Charged particle-beam processing using a cluster source

Gas field ION source for multiple applications

Ion beam system and machining method

Probe-holding apparatus, sample-obtaining apparatus, sample-processing apparatus, sample-processing method and sample-evaluating method

Planar etching of dissimilar materials

Column simultaneously focusing a particle beam and an optical beam

Sample preparation system

Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof

Graphical automated machine control and metrology

Charged particle beam system and its specimen holder

Multivalent ion generating source and charged particle beam apparatus using such ion generating source

High-density FIB-SEM tomography via real-time imaging

Directed Multi-Deflected Ion Beam Milling of a Work Piece and Determining and Controlling Extent Thereof

Sputtering coating of protective layer for charged particle beam processing

Focused ion beam apparatus and method of preparing/observing sample

Method and system for identifying events in FIB

MACHINING OF MICROSTRUCTURES

Charged beam processing apparatus

Electron Beam Etching Apparatus and Method for the same

Method and apparatus for processing a micro sample

Multi-part specimen holder with conductive patterns

High-resolution optical channel for non-destructive navigation and processing of integrated circuits

Focused ion beam apparatus and sample section forming and thin-piece sample preparing methods

Charge particle beam system, sample processing method, and semiconductor inspection system

Stage for working, focused beam working apparatus and focused beam working method

Focused ION beam apparatus

Method for marking a crystalline material using cathodoluminescence

Manufacturing equipment using ION beam or electron beam

Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface

Electron induced chemical etching for device level diagnosis

Apparatus and method for optical interference fringe based integrated circuit processing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Atomically sharp edged cutting blades and methods for making same

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Adjusting device of an apparatus for generating a beam of charged particles

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Working method utilizing irradiation of charged particle beam onto sample through passage in gas blowing nozzle

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Method, System and Device for Microscopic Examination Employing Fib-Prepared Sample Grasping Element

Charged particle beam apparatus, defect correcting method, etching method, deposition method, and charge preventing method

Ion sources, systems and methods

Focused ion beam system and a method of sample preparation and observation

Method and apparatus for processing a micro sample

Particle optical apparatus with a predetermined final vacuum pressure

Method and apparatus for processing a micro sample

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Method for creating observational sample

Method and apparatus for processing a micro sample

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Method and apparatus for specimen fabrication

Method and apparatus for specimen fabrication

Method and apparatus for specimen fabrication

Focused ion beam apparatus for specimen fabrication

Ion sources, systems and methods

Stage assembly, particle-optical apparatus comprising such a stage assembly, and method of treating a sample in such an apparatus

Charged particle beam processing method and charged particle beam apparatus

Charged particle beam scan and irradiation method, charged particle beam apparatus, workpiece observation method and workpiece processing method

Method and apparatus for the improvement of material/voltage contrast

Charged particle beam apparatus

Defect analyzer

Apparatus and method for inspecting a sample of a specimen by means of an electron beam

Simultaneous ion milling and sputter deposition

Apparatus and method for controlled particle beam manufacturing

Methods for sample preparation and observation, charged particle apparatus

Apparatus and method for selected site backside unlayering of si, GaAs, GaAlAsof SOI technologies for scanning probe microscopy and atomic force probing characterization

Method for fabricatiing three-dimensional microstructure by fib-cvd and drawing system for three-dimensional microstruture

Focused ion beam system

Apparatus and method for specimen fabrication

Material processing system and method

Method for preparing a sample for electron microscopic examinations, and sample supports and transport holders used therefor

Method and apparatus for preparing specimen

Deflection signal compensation for charged particle beam

Semiconductor processing method and system

Method, apparatus and system for specimen fabrication by using an ion beam

Method and apparatus for specimen fabrication

Sample milling/observing apparatus and method of observing sample

Method and apparatus for quantitative three-dimensional reconstruction in scanning electron microscopy

TEM sample holder and method of forming same

Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method, and cross section working apparatus

Sample height regulating method, sample observing method, sample processing method and charged particle beam apparatus

Charged particle beam device probe operation

Method and apparatus for specimen fabrication

Ion beam device and ion beam processing method

Method of making lamina specimen

Method and apparatus for specifying working position on a sample and method of working the sample

Object-moving method, object-moving apparatus, production process and produced apparatus

Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shaped object

Lithographic projection apparatus and actuator

Method and apparatus for the improvement of material/voltage contrast

Method and equipment for specimen preparation

Probe-holding apparatus, sample-obtaining apparatus, sample-processing apparatus, sample-processing method and sample-evaluating method

Column simultaneously focusing a particle beam and an optical beam

Method and apparatus for the automated process of in-situ lift-out

Apparatus and method of detecting probe tip contact with a surface

Method and apparatus for arc suppression in scanned ion beam processing equipment

Apparatus and method of forming silicide in a localized manner

Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner

Ion beam system and machining method

APPARATUS AND METHOD FOR MANIPULATING SAMPLE TEMPERATURE FOR FOCUSED ION BEAM PROCESSING

Method of preventing charging, and apparatus for charged particle beam using the same

Charged particle beam apparatus and method of forming electrodes having narrow gap therebetween by using the same

Method and apparatus for the improvement of material/voltage contrast

Device for controlling an apparatus generating a charged particle beam

Focused ion beam apparatus and focused ion beam irradiation method

Multiple gas injection system for charged particle beam instruments

Method for the removal of a microscopic sample from a substrate

Method and apparatus for rapid sample preparation in a focused ion beam microscope

Method and apparatus for sample formation and microanalysis in a vacuum chamber

Apparatus for sample formation and microanalysis in a vacuum chamber

Method and apparatus for the improvement of material/voltage contrast

Method for the removal of a microscopic sample from a substrate

Polynuclear metal molecular beam apparatus

Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same

Diagnostic system for profiling micro-beams

Ion beam device and ion beam processing method, and holder member

Method and apparatus for determining thickness of a semiconductor substrate at the floor of a trench

Apparatus and method for investigating or modifying a surface with a beam of charged particles

Method and apparatus for processing a micro sample

Minute three dimensional structure producing apparatus and method

Atomically sharp edged cutting blades and methods for making same

Method and apparatus for improved processing with a gas-cluster ion beam

Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system

Method and apparatus for processing a micro sample

Apparatus and method for directing gas towards a specimen

Graphical automated machine control and metrology

Composite system of scanning electron microscope and focused ion beam

Probe current imaging

Probe tip processing

Method, system and device for microscopic examination employing fib-prepared sample grasping element

Gas blowing nozzle of charged particle beam apparatus and charged particle beam apparatus as well as working method

Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shaped object

Method and apparatus for the characterization of a depth structure in a substrate

Thin-film magnetic recording head manufacture using selective imaging

Particle beam device

Precise, in-situ endpoint detection for charged particle beam processing

Material processing system and method

Manipulator needle portion repairing method

Specimen cooling system of focused ion beam apparatus

Procedure for etching of materials at the surface with focussed electron beam induced chemical reaction at said surface

Method and apparatus for specimen fabrication