ClassID:

205285

H01J37/32055 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Gas-filled discharge tubes; Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources Arc discharge

Sub-classes:
Recent Application in this class:
#1
20260155341
2026-06-04

DEVICE AND METHOD FOR PLASMA ATMOSPHERE CONTROL

#2
20260112574
2026-04-23

EDGE SHAPING USING MATERIAL PROCESSING SYSTEMS

#3
20260066223
2026-03-05

PLASMA GENERATION APPARATUS, SYSTEM, AND METHOD

#4
20250340976
2025-11-06

CATHODIC ARC SOURCE

#5
20250285902
2025-09-11

ARC CURRENT REDUCTION FROM AN ELECTROSTATIC CHUCK

#6
20250273437
2025-08-28

VAPORIZER AND ION SOURCE

#7
20250218723
2025-07-03

SUBSTRATE SUPPORT DEVICE AND METHOD OF PREVENTING OCCURRENCE OF ARCING

#8
20250210320
2025-06-26

FILM-FORMING DEVICE

#9
20240371608
2024-11-07

SYSTEM AND METHOD FOR ION SOURCE TEMPERATURE CONTROL USING SYMMETRIC OR ASYMMETRIC APPLICATION OF FORCE

#10
20240312762
2024-09-19

PLASMA GENERATION APPARATUS, SYSTEM, AND METHOD

#11
20240304425
2024-09-12

ARC-BEAM SCANNING FOR SUPPRESSING ANODE OVERGROWTH IN PICVD SYSTEM

#12
20240234110
2024-07-11

PLASMA CHAMBER FOR AN OPTICAL EMISSION SPECTROSCOPY INSTRUMENT

#13
20240158922
2024-05-16

EROSION RESISTANT COATINGS APPLIED BY VARIABLE BIAS CATHODIC ARC DEPOSITION

#14
20240136163
2024-04-25

Plasma chamber for an optical emission spectroscopy instrument

#15
20240096601
2024-03-21

TARGET PROCESSING DEVICE AND TARGET PROCESSING METHOD

#16
20240062995
2024-02-22

HOLLOW CATHODE SYSTEM FOR GENERATING A PLASMA AND METHOD FOR OPERATING SUCH A HOLLOW CATHODE SYSTEM

#17
20240052477
2024-02-15

DEPOSITION APPARATUS

#18
20240021402
2024-01-18

SURFACE PREPARATION

#19
20230369008
2023-11-16

Hybrid ion source for aluminum ion generation using a target holder and a solid target

#20
20230369006
2023-11-16

HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING A TARGET HOLDER AND ORGANOALUMINIUM COMPOUNDS

#21
20230317429
2023-10-05

Device and method for sputtering and depositing metal on surface of magnetic powder materials

#22
20230271155
2023-08-31

PLASMA SYSTEM FOR PRODUCING SOLID-STATE ELECTROLYTE MATERIAL

#23
20230223234
2023-07-13

APPARATUS AND METHOD FOR DEPOSITING HARD CARBON LAYERS

#24
20230137012
2023-05-04

Cathode arc source, filters thereof and method of filtering macroparticles

#25
20220307125
2022-09-29

CATHODIC ARC SOURCE

#26
20220145444
2022-05-12

Cathode arc source

#27
20220145440
2022-05-12

Mask structure and FCVA apparatus

#28
20220112591
2022-04-14

Pulsed cathodic arc deposition

#29
20220065769
2022-03-03

Determining formation porosity and permeability

#30
20220051882
2022-02-17

Magnet arrangement for a plasma source for performing plasma treatments

#31
20220051879
2022-02-17

ELECTRODE ARRANGEMENT FOR A PLASMA SOURCE FOR PERFORMING PLASMA TREATMENTS

#32
20210327687
2021-10-21

Plasma generating apparatus and gas treating apparatus

#33
20210317567
2021-10-14

Cathodic arc ignition device

#34
20210308513
2021-10-07

Vortex water flow generator, water plasma generator, decomposition processor, decomposition processor mounted vehicle, and decomposition method

#35
20210308512
2021-10-07

Decomposition processor and decomposition processor mounted vehicle

#36
20210257190
2021-08-19

Arc source system for a cathode

#37
20210257186
2021-08-19

Vacuum arc source

#38
20210246542
2021-08-12

COATING APPARATUS AND METHOD FOR USE THEREOF

#39
20210175053
2021-06-10

Magnetic filter tube

#40
20210172053
2021-06-10

Enhanced cathodic ARC source for ARC plasma deposition

#41
20210098245
2021-04-01

Atmospheric-pressure ionization and fragmentation of molecules for structural elucidation

#42
20210074512
2021-03-11

Method and device for hydrogen sulfide dissociation in electric arc

#43
20200411284
2020-12-31

Current switch device including first and second electrodes and first and second grids

#44
20200402781
2020-12-24

Cathodic arc evaporation with predetermined cathode material removal

#45
20200365370
2020-11-19

Process chamber with reduced plasma arc

#46
20200328062
2020-10-15

Deposition method and deposition apparatus

#47
20200299824
2020-09-24

Arc source with confined magnetic field

#48
20200273672
2020-08-27

Plasma processing apparatus and plasma processing method

#49
20200255933
2020-08-13

Deposition apparatus

#50
20200255932
2020-08-13

ARC source

#51
20200240002
2020-07-30

Arrangement for coating substrate surfaces by means of electric arc discharge

#52
20200194265
2020-06-18

Fluorine ion implantation system with non-tungsten materials and methods of using

#53
20200194264
2020-06-18

Fluorine ion implantation method and system

#54
20200181760
2020-06-11

Systems and methods for optimal source material deposition along hole edges

#55
20200176220
2020-06-04

Modifiable magnet configuration for arc vaporization sources

#56
20200131621
2020-04-30

Plasma corridor for high volume PE-CVD processing

#57
20200131620
2020-04-30

PVD system with remote arc discharge plasma assisted process

#58
20200017956
2020-01-16

Coating device and method for manufacturing coated article

#59
20190378694
2019-12-12

Plasma generating apparatus

#60
20190259579
2019-08-22

PLASMA ACTUATOR AND SURFACE CLEANING DEVICE

#61
20190241447
2019-08-08

System and method for plasma discharge in liquid

#62
20190180971
2019-06-13

Ion source crucible for solid feed materials

#63
20190131109
2019-05-02

Plasma generator

#64
20190106795
2019-04-11

Low stress hard coatings and applications thereof

#65
20190040518
2019-02-07

Method of deposition of a wear resistant DLC layer

#66
20190024228
2019-01-24

Arc evaporation device

#67
20180371605
2018-12-27

Arc evaporation source

#68
20180290208
2018-10-11

Production apparatus and production method for fine particles

#69
20180247797
2018-08-30

Reactors for plasma-assisted processes and associated methods

#70
20180204709
2018-07-19

Method for forming perovskite layers using atmospheric pressure plasma

#71
20180120662
2018-05-03

Method for fabricating electrochromic device

#72
20180066353
2018-03-08

Vacuum arc deposition apparatus and deposition method

#73
20180044777
2018-02-15

Film forming apparatus

#74
20180002805
2018-01-04

Macroparticle filter device and method for use in cathodic arc deposition

#75
20170372871
2017-12-28

Cathodic arc deposition apparatus and method

#76
20170365445
2017-12-21

Plasma processing apparatus and waveform correction method

#77
20170274344
2017-09-28

Production apparatus and production method for fine particles

#78
20170256385
2017-09-07

Three-dimensional plasma printer

#79
20170243727
2017-08-24

Atmospheric pressure pulsed arc plasma source and methods of coating therewith

#80
20170236692
2017-08-17

Coaxial Hollow Cathode Plasma Assisted Directed Vapor Deposition and Related Method Thereof

#81
20170229294
2017-08-10

Filter apparatus for arc ion evaporator used in cathodic arc plasma deposition system

#82
20170204507
2017-07-20

Arc evaporation source

#83
20170202077
2017-07-13

Deposition apparatus

#84
20170191759
2017-07-06

Gas flow control for millisecond anneal system

#85
20170178879
2017-06-22

Sputtering system and method including an arc detection

#86
20170178870
2017-06-22

Method of extracting and accelerating ions

#87
20170121222
2017-05-04

ELECTRIC ARC APPARATUS FOR PROCESSING AN OPTICAL FIBER, AND RELATED SYSTEMS AND METHODS

#88
20170076918
2017-03-16

Method to filter macro particles in a cathodic arc physical vapor deposition (PVD), in vacuum

#89
20170053801
2017-02-23

Method for manufacturing p-type zinc oxide film

#90
20170040150
2017-02-09

Roll-to-roll hybrid plasma modular coating system

#91
20160362791
2016-12-15

METHOD FOR METALLIZING DIELECTRIC SUBSTRATE SURFACE, AND DIELECTRIC SUBSTRATE PROVIDED WITH METAL FILM

#92
20160358751
2016-12-08

ARC DISCHARGE APPARATUS AND PLASMA PROCESSING SYSTEM INCLUDING THE SAME

#93
20160351379
2016-12-01

Plasma generator and thermal electron emitter

#94
20160332278
2016-11-17

Polishing apparatus for a work with mechanical polishing function and chemical polishing function

#95
20160326630
2016-11-10

Deposition apparatus

#96
20160319439
2016-11-03

Low stress hard coatings and applications thereof

#97
20160314938
2016-10-27

Plasma generating device comprising a rotating body

#98
20160260583
2016-09-08

Cathodic arc deposition apparatus and method

#99
20160251753
2016-09-01

Systems and methods for optimal source material deposition along hole edges

#100
20160230267
2016-08-11

Apparatus and a method for plating an Nd—Fe—B magnet

#101
20160208375
2016-07-21

Hard coating film and method for producing same

#102
20160194757
2016-07-07

Film deposition method

#103
20160153083
2016-06-02

Method of producing an anti-wear layer and anti-wear layer produced by means of said method

#104
20160137529
2016-05-19

Plasma spark discharge reactor and durable electrode

#105
20160130700
2016-05-12

Deposition apparatus

#106
20160115048
2016-04-28

Water/wastewater recycle and reuse with plasma, activated carbon and energy system

#107
20160086770
2016-03-24

Arc evaporation source

#108
20160071702
2016-03-10

ARC-PLASMA FILM FORMATION DEVICE

#109
20160071697
2016-03-10

Adjustable non-dissipative voltage boosting snubber network for achieving large boost voltages

#110
20160064191
2016-03-03

ION CONTROL FOR A PLASMA SOURCE

#111
20160060750
2016-03-03

Deposition apparatus

#112
20160059205
2016-03-03

Fullerene arc source and fullerene production apparatus comprising the same

#113
20160013027
2016-01-14

Film forming device

#114
20150371833
2015-12-24

PLASMA DEVICE, CARBON THIN FILM MANUFACTURING METHOD AND COATING METHOD USING PLASMA DEVICE

#115
20150325416
2015-11-12

Plasma processing chamber with a grounded electrode assembly

#116
20150303034
2015-10-22

Plasma device

#117
20150300878
2015-10-22

Pulse generator and systems and methods for using same

#118
20150294866
2015-10-15

Plasma processing device, and plasma processing method

#119
20150279622
2015-10-01

Plasma electrode device and method for manufacturing the same

#120
20150262833
2015-09-17

Method for polishing work and work polishing apparatus

#121
20150243484
2015-08-27

Plasma Source

#122
20150179404
2015-06-25

PLASMA PROCESSING APPARATUS

#123
20150125357
2015-05-07

Gas reactor devices with microplasma arrays encapsulated in defect free oxide

#124
20150122644
2015-05-07

Arc evaporation source

#125
20150118410
2015-04-30

Deposition device and deposition method

#126
20150107987
2015-04-23

Plasma generation apparatus, deposition apparatus, and plasma generation method

#127
20150101925
2015-04-16

Systems and method of coating an interior surface of an object

#128
20150099069
2015-04-09

LOW-COST PLASMA REACTOR

#129
20150080877
2015-03-19

Spark ablation device

#130
20150050490
2015-02-19

Low stress hard coatings and applications thereof

#131
20150001064
2015-01-01

Low temperature arc ion plating coating

#132
20140377023
2014-12-25

Coated cutting tool

#133
20140354149
2014-12-04

Apparatus for generating a hollow cathode arc discharge plasma

#134
20140332370
2014-11-13

Filtered cathodic arc deposition apparatus and method

#135
20140318318
2014-10-30

NON-PLUGGING D.C. PLASMA GUN

#136
20140238852
2014-08-28

Cylindrical evaporation source

#137
20140232266
2014-08-21

Adjustable non-dissipative voltage boosting snubber network for achieving large boost voltages

#138
20140210344
2014-07-31

Water/wastewater recycle and reuse with plasma, activated carbon and energy system

#139
20140174920
2014-06-26

Evaporation source

#140
20140117861
2014-05-01

Differing boost voltages applied to two or more anodeless electrodes for plasma processing

#141
20140076718
2014-03-20

Remote arc discharge plasma assisted processes

#142
20140076716
2014-03-20

Low pressure arc plasma immersion coating vapor deposition and ion treatment

#143
20140076715
2014-03-20

Low pressure arc plasma immersion coating vapor deposition and ion treatment

#144
20140061034
2014-03-06

Method for pretreating substrates for PVD methods

#145
20140054165
2014-02-27

Carbon spark evaporation

#146
20140048209
2014-02-20

Ignition apparatus for arc sources

#147
20140034484
2014-02-06

DEVICE FOR THE ELIMINATION OF LIQUID DROPLETS FROM A CATHODIC ARC PLASMA SOURCE

#148
20130342105
2013-12-26

Laser sustained plasma light source with electrically induced gas flow

#149
20130309419
2013-11-21

Ceramic coating deposition

#150
20130214684
2013-08-22

Method and device for transporting vacuum arc plasma

#151
20130164173
2013-06-27

PLASMA EMITTER

#152
20130136896
2013-05-30

METHOD FOR PRODUCING COATING LAYER WITH LOW-FRICTION

#153
20130134036
2013-05-30

Equipment for Making IC Shielding Coating Layer and Metal Shielding Layer of IC

#154
20130126347
2013-05-23

Arc deposition source having a defined electric field

#155
20130098881
2013-04-25

Arc evaporation source having fast film-forming speed, coating film manufacturing method and film formation apparatus using the arc evaporation source

#156
20130071297
2013-03-21

Arrays of metal and metal oxide microplasma devices with defect free oxide

#157
20130034668
2013-02-07

Method for producing plasma flow, method for plasma processing, apparatus for producing plasma, and apparatus for plasma processing

#158
20130032469
2013-02-07

Arc PVD plasma source and method of deposition of nanoimplanted coatings

#159
20130020195
2013-01-24

Vacuum deposition apparatus

#160
20120252195
2012-10-04

Ion implantation system and method

#161
20120205662
2012-08-16

SEMICONDUCTOR DEVICE, POWER SUPPLY DEVICE, AMPLIFIER, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

#162
20120199070
2012-08-09

FILTER FOR ARC SOURCE

#163
20120193227
2012-08-02

MAGNET ARRAY FOR A PHYSICAL VAPOR DEPOSITION SYSTEM

#164
20120193217
2012-08-02

SEGMENTED POST CATHODE

#165
20120037493
2012-02-16

Arc evaporation source and film forming method using the same

#166
20120012057
2012-01-19

PUCK FOR CATHODIC ARC COATING WITH CONTINUOUS GROOVE TO CONTROL ARC

#167
20110318498
2011-12-29

Coaxial hollow cathode plasma assisted directed vapor deposition and related method thereof

#168
20110315544
2011-12-29

ARC EVAPORATOR AND METHOD FOR OPERATING THE EVAPORATOR

#169
20110308941
2011-12-22

Modifiable magnet configuration for arc vaporization sources

#170
20110278157
2011-11-17

METHOD FOR PRETREATING SUBSTRATES FOR PVD METHODS

#171
20110268889
2011-11-03

Preparation of mist, process and apparatus for forming new materials by mist gas discharge

#172
20110256426
2011-10-20

Vacuum arc evaporation apparatus and method, and magnetic recording medium formed thereby

#173
20110220495
2011-09-15

IGNITION APPARATUS FOR ARC SOURCES

#174
20110180403
2011-07-28

Insulator interposed type plasma processing apparatus

#175
20110143041
2011-06-16

Non-plugging D.C. plasma gun

#176
20110109227
2011-05-12

Target Exchange Type Plasma Generating Apparatus

#177
20110100800
2011-05-05

Rectangular filtered vapor plasma source and method of controlling vapor plasma flow

#178
20110067631
2011-03-24

Arc ion plating apparatus

#179
20110053355
2011-03-03

Plasma apparatus and method of fabricating nano-crystalline silicon thin film

#180
20100316814
2010-12-16

Film deposition apparatus and film deposition method

#181
20100314247
2010-12-16

Filtered cathodic arc device and carbon protective film deposited using the device

#182
20100291320
2010-11-18

Method for manufacturing a treated surface and vacuum plasma sources

#183
20100276283
2010-11-04

Vacuum coating unit for homogeneous PVD coating

#184
20100263592
2010-10-21

Plasma processing chamber with a grounded electrode assembly

#185
20100230276
2010-09-16

DEVICE AND METHOD FOR THIN FILM DEPOSITION USING A VACUUM ARC IN AN ENCLOSED CATHODE-ANODE ASSEMBLY

#186
20100213055
2010-08-26

Vacuum arc vaporisation source and also a vacuum arc vaporisation chamber with a vacuum arc vaporisation source

#187
20100190036
2010-07-29

Systems and Methods for Surface Modification by Filtered Cathodic Vacuum Arc

#188
20100181192
2010-07-22

ANODE FOR PRODUCING A PLASMA BY WAY OF ELECTRIC ARC DISCHARGES

#189
20100170787
2010-07-08

Filtered cathodic arc deposition method and apparatus

#190
20100170781
2010-07-08

Filtered cathodic arc deposition method and apparatus

#191
20100143232
2010-06-10

METAL BINARY AND TERNARY COMPOUNDS PRODUCED BY CATHODIC ARC DEPOSITION

#192
20100131023
2010-05-27

IMPLANTABLE MEDICAL DEVICES COMPRISING CATHODIC ARC PRODUCED STRUCTURES

#193
20100129615
2010-05-27

PROCESS AND APPARATUS FOR THE MODIFICATION OF SURFACES

#194
20100083901
2010-04-08

Arrangement for Producing Coatings on Substrates in Vacuo

#195
20100059369
2010-03-11

PLASMA GENERATING APPARATUS RENDERED ELECTRICALLY NEUTRAL ON THE PERIPHERY OF PLASMA GUN

#196
20100051445
2010-03-04

Coating Apparatus For The Coating Of A Substrate, As Well As A Method For The Coating Of A Substrate

#197
20100044214
2010-02-25

Physical vapour deposition coating device as well as a physical vapour deposition method

#198
20100018859
2010-01-28

Radially enlarged type plasma generating apparatus

#199
20100018464
2010-01-28

DLC COATING SYSTEM AND PROCESS AND APPARATUS FOR MAKING COATING SYSTEM

#200
20100012482
2010-01-21

Sputtering system and method including an arc detection

#201
20100003827
2010-01-07

METHOD AND DEVICE FOR ETCHING A SUBSTRATE BY MEANS OF PLASMA

#202
20100003422
2010-01-07

DEPOSITION APPARATUS, FILM MANUFACTURING METHOD, AND MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD

#203
20090257013
2009-10-15

LIQUID CRYSTAL DEVICE AND METHOD OF MANUFACTURING THE SAME

#204
20090246407
2009-10-01

Method for forming amorphous carbon film

#205
20090242397
2009-10-01

SYSTEMS FOR CONTROLLING CATHODIC ARC DISCHARGE

#206
20090166188
2009-07-02

Method for depositing electrically insulating layers

#207
20090078565
2009-03-26

Method and apparatus for depositing a coating onto a substrate

#208
20090065350
2009-03-12

FILTERED CATHODIC ARC DEPOSITION WITH ION-SPECIES-SELECTIVE BIAS

#209
20090065348
2009-03-12

Method of arc ion plating and target for use therein

#210
20090050059
2009-02-26

CATHODE EVAPORATION MACHINE

#211
20090045045
2009-02-19

Puck for cathodic arc coating with continuous groove to control arc

#212
20080311310
2008-12-18

DLC coating system and process and apparatus for making coating system

#213
20080292812
2008-11-27

Vacuum treatment installation and vacuum treatment method

#214
20080286496
2008-11-20

Method for depositing electrically insulating layers

#215
20080271998
2008-11-06

Device for carbon deposition

#216
20080264341
2008-10-30

Apparatus for cathodic vacuum-arc coating deposition

#217
20080251017
2008-10-16

Fastening Unit for Ignition Units and Device for Carbon Deposition

#218
20080193782
2008-08-14

Hard Material Layer

#219
20080173536
2008-07-24

Method for operating a pulsed arc evaporation source and vacuum process system comprising said pulsed arc evaporation source

#220
20080116058
2008-05-22

Filtered cathodic arc deposition method and apparatus

#221
20080110749
2008-05-15

Arc source and magnet configuration

#222
20080105657
2008-05-08

Macroparticle-filtered coating plasma source device

#223
20080095952
2008-04-24

Apparatus and method for nano plasma deposition

#224
20080020138
2008-01-24

Method for manufacturing poorly conductive layers

#225
20070259130
2007-11-08

System for Low-Energy Plasma-Enhanced Chemical Vapor Deposition

#226
20070251816
2007-11-01

Bi-directional filtered arc plasma source

#227
20070240982
2007-10-18

ARC ION PLATING APPARATUS

#228
20070209934
2007-09-13

Arrangement for the separation of particles from a plasma

#229
20070193518
2007-08-23

Plasma generator

#230
20070187229
2007-08-16

Filtered cathodic-arc plasma source

#231
20070144901
2007-06-28

Pulsed cathodic arc plasma

#232
20070137573
2007-06-21

Apparatus for an optimized plasma chamber grounded electrode assembly

#233
20070137566
2007-06-21

Modular device for coating surfaces

#234
20070092740
2007-04-26

Metal coatings

#235
20070071993
2007-03-29

Carbon film-coated article and method of producing the same

#236
20070034501
2007-02-15

Cathode-arc source of metal/carbon plasma with filtration

#237
20070029188
2007-02-08

Rectangular filtered vapor plasma source and method of controlling vapor plasma flow

#238
20070023282
2007-02-01

Deflection magnetic field type vacuum arc vapor deposition device

#239
20070000772
2007-01-04

Method for operating a pulsed arc source

#240
20070000770
2007-01-04

METHOD FOR FORMING AMORPHOUS CARBON FILM

#241
20060237309
2006-10-26

Arc evaporator with a powerful magnetic guide for targets having a large surface area

#242
20060175190
2006-08-10

Vacuum arc source comprising a device for generating a magnetic field

#243
20060137978
2006-06-29

Arc evaporation device

#244
20060124450
2006-06-15

Method and apparatus for cathodic arc deposition of materials on a substrate

#245
20060076316
2006-04-13

Atmospheric process and system for controlled and rapid removal of polymers from high aspect ratio holes

#246
20050189218
2005-09-01

Cathodic arc coating apparatus

#247
20050186424
2005-08-25

Carbon film-coated article and method of producing the same

#248
20050122050
2005-06-09

Multi-phase alternating current plasma generator

#249
20050121321
2005-06-09

Ignition device

#250
20050045472
2005-03-03

Vacuum arc evaporation apparatus and method, and magnetic recording medium formed thereby

#251
20050034668
2005-02-17

Multi-component substances and apparatus for preparation thereof

#252
20050005860
2005-01-13

Vacuum evaporator

#253
20050000950
2005-01-06

Radial pulsed arc discharge gun for synthesizing nanopowders

#254
18043487
2026-02-10

Doped DLC for bipolar plate (BPP)

#255
16185358
2019-11-05

Indirectly heated cathode ion source assembly

#256
15680159
2020-06-09

Reactors and methods for making diamond coatings