205285 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Gas-filled discharge tubes; Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources Arc discharge
Sub-classes:DEVICE AND METHOD FOR PLASMA ATMOSPHERE CONTROL
#2EDGE SHAPING USING MATERIAL PROCESSING SYSTEMS
#3PLASMA GENERATION APPARATUS, SYSTEM, AND METHOD
#4CATHODIC ARC SOURCE
#5ARC CURRENT REDUCTION FROM AN ELECTROSTATIC CHUCK
#6VAPORIZER AND ION SOURCE
#7SUBSTRATE SUPPORT DEVICE AND METHOD OF PREVENTING OCCURRENCE OF ARCING
#8FILM-FORMING DEVICE
#9SYSTEM AND METHOD FOR ION SOURCE TEMPERATURE CONTROL USING SYMMETRIC OR ASYMMETRIC APPLICATION OF FORCE
#10PLASMA GENERATION APPARATUS, SYSTEM, AND METHOD
#11ARC-BEAM SCANNING FOR SUPPRESSING ANODE OVERGROWTH IN PICVD SYSTEM
#12PLASMA CHAMBER FOR AN OPTICAL EMISSION SPECTROSCOPY INSTRUMENT
#13EROSION RESISTANT COATINGS APPLIED BY VARIABLE BIAS CATHODIC ARC DEPOSITION
#14Plasma chamber for an optical emission spectroscopy instrument
#15TARGET PROCESSING DEVICE AND TARGET PROCESSING METHOD
#16HOLLOW CATHODE SYSTEM FOR GENERATING A PLASMA AND METHOD FOR OPERATING SUCH A HOLLOW CATHODE SYSTEM
#17DEPOSITION APPARATUS
#18SURFACE PREPARATION
#19Hybrid ion source for aluminum ion generation using a target holder and a solid target
#20HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING A TARGET HOLDER AND ORGANOALUMINIUM COMPOUNDS
#21Device and method for sputtering and depositing metal on surface of magnetic powder materials
#22PLASMA SYSTEM FOR PRODUCING SOLID-STATE ELECTROLYTE MATERIAL
#23APPARATUS AND METHOD FOR DEPOSITING HARD CARBON LAYERS
#24Cathode arc source, filters thereof and method of filtering macroparticles
#25CATHODIC ARC SOURCE
#26Cathode arc source
#27Mask structure and FCVA apparatus
#28Pulsed cathodic arc deposition
#29Determining formation porosity and permeability
#30Magnet arrangement for a plasma source for performing plasma treatments
#31ELECTRODE ARRANGEMENT FOR A PLASMA SOURCE FOR PERFORMING PLASMA TREATMENTS
#32Plasma generating apparatus and gas treating apparatus
#33Cathodic arc ignition device
#34Vortex water flow generator, water plasma generator, decomposition processor, decomposition processor mounted vehicle, and decomposition method
#35Decomposition processor and decomposition processor mounted vehicle
#36Arc source system for a cathode
#37Vacuum arc source
#38COATING APPARATUS AND METHOD FOR USE THEREOF
#39Magnetic filter tube
#40Enhanced cathodic ARC source for ARC plasma deposition
#41Atmospheric-pressure ionization and fragmentation of molecules for structural elucidation
#42Method and device for hydrogen sulfide dissociation in electric arc
#43Current switch device including first and second electrodes and first and second grids
#44Cathodic arc evaporation with predetermined cathode material removal
#45Process chamber with reduced plasma arc
#46Deposition method and deposition apparatus
#47Arc source with confined magnetic field
#48Plasma processing apparatus and plasma processing method
#49Deposition apparatus
#50ARC source
#51Arrangement for coating substrate surfaces by means of electric arc discharge
#52Fluorine ion implantation system with non-tungsten materials and methods of using
#53Fluorine ion implantation method and system
#54Systems and methods for optimal source material deposition along hole edges
#55Modifiable magnet configuration for arc vaporization sources
#56Plasma corridor for high volume PE-CVD processing
#57PVD system with remote arc discharge plasma assisted process
#58Coating device and method for manufacturing coated article
#59Plasma generating apparatus
#60PLASMA ACTUATOR AND SURFACE CLEANING DEVICE
#61System and method for plasma discharge in liquid
#62Ion source crucible for solid feed materials
#63Plasma generator
#64Low stress hard coatings and applications thereof
#65Method of deposition of a wear resistant DLC layer
#66Arc evaporation device
#67Arc evaporation source
#68Production apparatus and production method for fine particles
#69Reactors for plasma-assisted processes and associated methods
#70Method for forming perovskite layers using atmospheric pressure plasma
#71Method for fabricating electrochromic device
#72Vacuum arc deposition apparatus and deposition method
#73Film forming apparatus
#74Macroparticle filter device and method for use in cathodic arc deposition
#75Cathodic arc deposition apparatus and method
#76Plasma processing apparatus and waveform correction method
#77Production apparatus and production method for fine particles
#78Three-dimensional plasma printer
#79Atmospheric pressure pulsed arc plasma source and methods of coating therewith
#80Coaxial Hollow Cathode Plasma Assisted Directed Vapor Deposition and Related Method Thereof
#81Filter apparatus for arc ion evaporator used in cathodic arc plasma deposition system
#82Arc evaporation source
#83Deposition apparatus
#84Gas flow control for millisecond anneal system
#85Sputtering system and method including an arc detection
#86Method of extracting and accelerating ions
#87ELECTRIC ARC APPARATUS FOR PROCESSING AN OPTICAL FIBER, AND RELATED SYSTEMS AND METHODS
#88Method to filter macro particles in a cathodic arc physical vapor deposition (PVD), in vacuum
#89Method for manufacturing p-type zinc oxide film
#90Roll-to-roll hybrid plasma modular coating system
#91METHOD FOR METALLIZING DIELECTRIC SUBSTRATE SURFACE, AND DIELECTRIC SUBSTRATE PROVIDED WITH METAL FILM
#92ARC DISCHARGE APPARATUS AND PLASMA PROCESSING SYSTEM INCLUDING THE SAME
#93Plasma generator and thermal electron emitter
#94Polishing apparatus for a work with mechanical polishing function and chemical polishing function
#95Deposition apparatus
#96Low stress hard coatings and applications thereof
#97Plasma generating device comprising a rotating body
#98Cathodic arc deposition apparatus and method
#99Systems and methods for optimal source material deposition along hole edges
#100Apparatus and a method for plating an Nd—Fe—B magnet
#101Hard coating film and method for producing same
#102Film deposition method
#103Method of producing an anti-wear layer and anti-wear layer produced by means of said method
#104Plasma spark discharge reactor and durable electrode
#105Deposition apparatus
#106Water/wastewater recycle and reuse with plasma, activated carbon and energy system
#107Arc evaporation source
#108ARC-PLASMA FILM FORMATION DEVICE
#109Adjustable non-dissipative voltage boosting snubber network for achieving large boost voltages
#110ION CONTROL FOR A PLASMA SOURCE
#111Deposition apparatus
#112Fullerene arc source and fullerene production apparatus comprising the same
#113Film forming device
#114PLASMA DEVICE, CARBON THIN FILM MANUFACTURING METHOD AND COATING METHOD USING PLASMA DEVICE
#115Plasma processing chamber with a grounded electrode assembly
#116Plasma device
#117Pulse generator and systems and methods for using same
#118Plasma processing device, and plasma processing method
#119Plasma electrode device and method for manufacturing the same
#120Method for polishing work and work polishing apparatus
#121Plasma Source
#122PLASMA PROCESSING APPARATUS
#123Gas reactor devices with microplasma arrays encapsulated in defect free oxide
#124Arc evaporation source
#125Deposition device and deposition method
#126Plasma generation apparatus, deposition apparatus, and plasma generation method
#127Systems and method of coating an interior surface of an object
#128LOW-COST PLASMA REACTOR
#129Spark ablation device
#130Low stress hard coatings and applications thereof
#131Low temperature arc ion plating coating
#132Coated cutting tool
#133Apparatus for generating a hollow cathode arc discharge plasma
#134Filtered cathodic arc deposition apparatus and method
#135NON-PLUGGING D.C. PLASMA GUN
#136Cylindrical evaporation source
#137Adjustable non-dissipative voltage boosting snubber network for achieving large boost voltages
#138Water/wastewater recycle and reuse with plasma, activated carbon and energy system
#139Evaporation source
#140Differing boost voltages applied to two or more anodeless electrodes for plasma processing
#141Remote arc discharge plasma assisted processes
#142Low pressure arc plasma immersion coating vapor deposition and ion treatment
#143Low pressure arc plasma immersion coating vapor deposition and ion treatment
#144Method for pretreating substrates for PVD methods
#145Carbon spark evaporation
#146Ignition apparatus for arc sources
#147DEVICE FOR THE ELIMINATION OF LIQUID DROPLETS FROM A CATHODIC ARC PLASMA SOURCE
#148Laser sustained plasma light source with electrically induced gas flow
#149Ceramic coating deposition
#150Method and device for transporting vacuum arc plasma
#151PLASMA EMITTER
#152METHOD FOR PRODUCING COATING LAYER WITH LOW-FRICTION
#153Equipment for Making IC Shielding Coating Layer and Metal Shielding Layer of IC
#154Arc deposition source having a defined electric field
#155Arc evaporation source having fast film-forming speed, coating film manufacturing method and film formation apparatus using the arc evaporation source
#156Arrays of metal and metal oxide microplasma devices with defect free oxide
#157Method for producing plasma flow, method for plasma processing, apparatus for producing plasma, and apparatus for plasma processing
#158Arc PVD plasma source and method of deposition of nanoimplanted coatings
#159Vacuum deposition apparatus
#160Ion implantation system and method
#161SEMICONDUCTOR DEVICE, POWER SUPPLY DEVICE, AMPLIFIER, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#162FILTER FOR ARC SOURCE
#163MAGNET ARRAY FOR A PHYSICAL VAPOR DEPOSITION SYSTEM
#164SEGMENTED POST CATHODE
#165Arc evaporation source and film forming method using the same
#166PUCK FOR CATHODIC ARC COATING WITH CONTINUOUS GROOVE TO CONTROL ARC
#167Coaxial hollow cathode plasma assisted directed vapor deposition and related method thereof
#168ARC EVAPORATOR AND METHOD FOR OPERATING THE EVAPORATOR
#169Modifiable magnet configuration for arc vaporization sources
#170METHOD FOR PRETREATING SUBSTRATES FOR PVD METHODS
#171Preparation of mist, process and apparatus for forming new materials by mist gas discharge
#172Vacuum arc evaporation apparatus and method, and magnetic recording medium formed thereby
#173IGNITION APPARATUS FOR ARC SOURCES
#174Insulator interposed type plasma processing apparatus
#175Non-plugging D.C. plasma gun
#176Target Exchange Type Plasma Generating Apparatus
#177Rectangular filtered vapor plasma source and method of controlling vapor plasma flow
#178Arc ion plating apparatus
#179Plasma apparatus and method of fabricating nano-crystalline silicon thin film
#180Film deposition apparatus and film deposition method
#181Filtered cathodic arc device and carbon protective film deposited using the device
#182Method for manufacturing a treated surface and vacuum plasma sources
#183Vacuum coating unit for homogeneous PVD coating
#184Plasma processing chamber with a grounded electrode assembly
#185DEVICE AND METHOD FOR THIN FILM DEPOSITION USING A VACUUM ARC IN AN ENCLOSED CATHODE-ANODE ASSEMBLY
#186Vacuum arc vaporisation source and also a vacuum arc vaporisation chamber with a vacuum arc vaporisation source
#187Systems and Methods for Surface Modification by Filtered Cathodic Vacuum Arc
#188ANODE FOR PRODUCING A PLASMA BY WAY OF ELECTRIC ARC DISCHARGES
#189Filtered cathodic arc deposition method and apparatus
#190Filtered cathodic arc deposition method and apparatus
#191METAL BINARY AND TERNARY COMPOUNDS PRODUCED BY CATHODIC ARC DEPOSITION
#192IMPLANTABLE MEDICAL DEVICES COMPRISING CATHODIC ARC PRODUCED STRUCTURES
#193PROCESS AND APPARATUS FOR THE MODIFICATION OF SURFACES
#194Arrangement for Producing Coatings on Substrates in Vacuo
#195PLASMA GENERATING APPARATUS RENDERED ELECTRICALLY NEUTRAL ON THE PERIPHERY OF PLASMA GUN
#196Coating Apparatus For The Coating Of A Substrate, As Well As A Method For The Coating Of A Substrate
#197Physical vapour deposition coating device as well as a physical vapour deposition method
#198Radially enlarged type plasma generating apparatus
#199DLC COATING SYSTEM AND PROCESS AND APPARATUS FOR MAKING COATING SYSTEM
#200Sputtering system and method including an arc detection
#201METHOD AND DEVICE FOR ETCHING A SUBSTRATE BY MEANS OF PLASMA
#202DEPOSITION APPARATUS, FILM MANUFACTURING METHOD, AND MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD
#203LIQUID CRYSTAL DEVICE AND METHOD OF MANUFACTURING THE SAME
#204Method for forming amorphous carbon film
#205SYSTEMS FOR CONTROLLING CATHODIC ARC DISCHARGE
#206Method for depositing electrically insulating layers
#207Method and apparatus for depositing a coating onto a substrate
#208FILTERED CATHODIC ARC DEPOSITION WITH ION-SPECIES-SELECTIVE BIAS
#209Method of arc ion plating and target for use therein
#210CATHODE EVAPORATION MACHINE
#211Puck for cathodic arc coating with continuous groove to control arc
#212DLC coating system and process and apparatus for making coating system
#213Vacuum treatment installation and vacuum treatment method
#214Method for depositing electrically insulating layers
#215Device for carbon deposition
#216Apparatus for cathodic vacuum-arc coating deposition
#217Fastening Unit for Ignition Units and Device for Carbon Deposition
#218Hard Material Layer
#219Method for operating a pulsed arc evaporation source and vacuum process system comprising said pulsed arc evaporation source
#220Filtered cathodic arc deposition method and apparatus
#221Arc source and magnet configuration
#222Macroparticle-filtered coating plasma source device
#223Apparatus and method for nano plasma deposition
#224Method for manufacturing poorly conductive layers
#225System for Low-Energy Plasma-Enhanced Chemical Vapor Deposition
#226Bi-directional filtered arc plasma source
#227ARC ION PLATING APPARATUS
#228Arrangement for the separation of particles from a plasma
#229Plasma generator
#230Filtered cathodic-arc plasma source
#231Pulsed cathodic arc plasma
#232Apparatus for an optimized plasma chamber grounded electrode assembly
#233Modular device for coating surfaces
#234Metal coatings
#235Carbon film-coated article and method of producing the same
#236Cathode-arc source of metal/carbon plasma with filtration
#237Rectangular filtered vapor plasma source and method of controlling vapor plasma flow
#238Deflection magnetic field type vacuum arc vapor deposition device
#239Method for operating a pulsed arc source
#240METHOD FOR FORMING AMORPHOUS CARBON FILM
#241Arc evaporator with a powerful magnetic guide for targets having a large surface area
#242Vacuum arc source comprising a device for generating a magnetic field
#243Arc evaporation device
#244Method and apparatus for cathodic arc deposition of materials on a substrate
#245Atmospheric process and system for controlled and rapid removal of polymers from high aspect ratio holes
#246Cathodic arc coating apparatus
#247Carbon film-coated article and method of producing the same
#248Multi-phase alternating current plasma generator
#249Ignition device
#250Vacuum arc evaporation apparatus and method, and magnetic recording medium formed thereby
#251Multi-component substances and apparatus for preparation thereof
#252Vacuum evaporator
#253Radial pulsed arc discharge gun for synthesizing nanopowders
#254Doped DLC for bipolar plate (BPP)
#255Indirectly heated cathode ion source assembly
#256Reactors and methods for making diamond coatings