205320 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Gas-filled discharge tubes; Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources; Localised processing Scanning across large workpieces
INTEGRATED ATMOSPHERIC PLASMA TREATMENT STATION IN PROCESSING TOOL
#2Drop-on-demand identification document printing with surface pre-treatment
#3Techniques, system and apparatus for selective deposition of a layer using angled ions
#4Drop-on-demand identification document printing with surface pre-treatment
#5Methods for processing substrates using small plasma chambers
#6THERMAL SPRAYING METHOD AND DEVICE THEREFOR
#7Dynamic electrode plasma system
#8Small plasma chamber systems and methods
#9Plasma processing apparatus
#10Plasma processing apparatus
#11Plasma processing apparatus and plasma processing method
#12E-beam enhanced decoupled source for semiconductor processing
#13Apparatus and method for maskless patterned implantation
#14Extended Reactor Assembly with Multiple Sections for Performing Atomic Layer Deposition on Large Substrate
#15Methods for depositing bevel protective film
#16SURFACE TREATMENT APPARATUS
#17Insulator interposed type plasma processing apparatus
#18Process and installation for surface preparation by dielectric barrier discharge
#19Small plasma chamber systems and methods
#20Method of forming thin film and apparatus for forming thin film
#21Plasma processing apparatus and plasma processing method
#22METHOD AND APPARATUS FOR PRODUCING A FEATURE HAVING A SURFACE ROUGHNESS IN A SUBSTRATE
#23METHOD FOR SURFACE TREATING SUBSTRATE AND PLASMA TREATMENT APPARATUS
#24Apparatus and method for plasma arc coating
#25Plasma Processing Apparatus with Scanning Injector and Plasma Processing Method
#26Apparatus and method for reactive atom plasma processing for material deposition
#27Medium pressure plasma system for removal of surface layers without substrate loss
#28Method and apparatus for treating a substrate
#29Plasma processing method and apparatus
#30Plasma etching apparatus and method of fabricating photomask using the same