ClassID:

205369

H01J37/32825 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Gas-filled discharge tubes; Constructional details of the reactor; Further details of plasma apparatus not provided for in groups - ; special provisions for cleaning or maintenance of the apparatus; Pressure Working under atmospheric pressure or higher

Recent Application in this class:
#1
20260148938
2026-05-28

SYSTEMS FOR FLUXLESS BONDING USING AN ATMOSPHERIC PRESSURE PLASMA AND METHODS FOR PERFORMING THE SAME

#2
20260094791
2026-04-02

REMOVING METAL OXIDE FROM METALLIC CONTACTS ON SUBSTRATES, DIES AND WAFERS WITH ATMOSPHERIC PRESSURE PLASMA

#3
20260051467
2026-02-19

MIXED GAS ATMOSPHERIC PRESSURE PLASMA

#4
20260018395
2026-01-15

Atmospheric Plasma Activation for Hybrid Bonding

#5
20250349791
2025-11-13

SYSTEMS FOR FLUXLESS BONDING USING AN ATMOSPHERIC PRESSURE PLASMA AND METHODS FOR PERFORMING THE SAME

#6
20250299933
2025-09-25

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM

#7
20250285846
2025-09-11

PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL

#8
20250285841
2025-09-11

SYSTEMS, METHODS, AND APPARATUSES FOR ATMOSPHERIC PRESSURE PLASMA JET NOZZLES

#9
20250277301
2025-09-04

COATING SYSTEM AND METHOD FOR SEMICONDUCTOR EQUIPMENT COMPONENTS

#10
20250259819
2025-08-14

APPARATUS FOR PLASMA PROCESSING

#11
20250066913
2025-02-27

SEAM PERFORMANCE IMPROVEMENT USING HYDROXYLATION FOR GAPFILL

#12
20250046571
2025-02-06

PLASMA GENERATING APPARATUS AND METHOD FOR OPERATING SAME

#13
20250037979
2025-01-30

RESILIENT RELEASE LAYER FOR LITHIUM FILM TRANSFER AND ATMOSPHERIC PLASMA ASSISTED REMOVAL OF RESIDUAL RELEASE LAYER

#14
20250006475
2025-01-02

SURFACE PROCESSING EQUIPMENT

#15
20240213089
2024-06-27

INTEGRATED ATMOSPHERIC PLASMA TREATMENT STATION IN PROCESSING TOOL

#16
20240177979
2024-05-30

DEVICE AND METHOD FOR PLASMA GENERATION IN A WIDE PRESSURE RANGE AND SYSTEM AND METHOD FOR OPTICAL GAS ANALYSIS/DETECTION BY MEANS OF SUCH A DEVICE

#17
20240162018
2024-05-16

SURFACE MODIFICATION METHOD

#18
20240066161
2024-02-29

METHODS AND APPARATUS FOR GENERATING ATMOSPHERIC PRESSURE, LOW TEMPERATURE PLASMA

#19
20240062999
2024-02-22

Remote plasma cleaning of chambers for electronics manufacturing systems

#20
20240027894
2024-01-25

METHODS AND APPARATUS FOR PHOTOMASK PROCESSING

#21
20240026515
2024-01-25

YTTRIUM-FLUORIDE-BASED SPRAYED COATING, SPRAYED MEMBER, AND METHOD FOR PRODUCING YTTRIUM-FLUORIDE-BASED SPRAYED COATING

#22
20240006150
2024-01-04

Plasma generating apparatus and method for operating same

#23
20230402268
2023-12-14

PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL

#24
20230378123
2023-11-23

SYSTEMS FOR FLUXLESS BONDING USING AN ATMOSPHERIC PRESSURE PLASMA AND METHODS FOR PERFORMING THE SAME

#25
20230377847
2023-11-23

SPOT TYPE ATMOSPHERIC PRESSURE PLASMA DEVICE

#26
20230377846
2023-11-23

WIDE AREA ATMOSPHERIC PRESSURE PLASMA DEVICE

#27
20230335398
2023-10-19

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM

#28
20230317412
2023-10-05

PULSED PLASMA CHAMBER IN DUAL CHAMBER CONFIGURATION

#29
20230307214
2023-09-28

METHOD FOR ETCHING LITHIUM NIOBATE AND METHOD FOR FORMING LITHIUM NIOBATE PATTERN USING THE SAME

#30
20230298858
2023-09-21

PLASMA DEVICE FOR GAS-BASED SURFACE TREATMENT AND WATER ACTIVATION

#31
20230253194
2023-08-10

ATMOSPHERIC PLASMA PROCESSING METHOD AND ATMOSPHERIC PLASMA PROCESSING APPARATUS

#32
20230207290
2023-06-29

METHOD OF TREATING SUBSTRATE

#33
20230187180
2023-06-15

Substrate Processing Apparatus, Substrate Processing Method, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium

#34
20230110364
2023-04-13

ATMOSPHERIC PRESSURE REMOTE PLASMA CVD DEVICE, FILM FORMATION METHOD, AND PLASTIC BOTTLE MANUFACTURING METHOD

#35
20230083958
2023-03-16

Plasma generating apparatus and method for operating same

#36
20230049702
2023-02-16

DEVICE FOR PLASMA TREATMENT OF ELECTRONIC MATERIALS

#37
20230046192
2023-02-16

Device For Generating A Dielectric Barrier Discharge And Method For Treating An Object To Be Activated

#38
20230045456
2023-02-09

METHODS AND APPARATUS FOR REDIRECTING IONS GENERATED FROM ATMOSPHERIC PRESSURE LOW TEMPERATURE PLASMA

#39
20220340416
2022-10-27

A PROCESS AND APPARATUS FOR THE PREPARATION OF A BONDED SUBSTRATE

#40
20220326607
2022-10-13

Methods and apparatus for photomask processing

#41
20220316064
2022-10-06

Antimicrobial and/or antiviral polymer surfaces and methods for the preparation thereof

#42
20220208533
2022-06-30

Surface processing equipment and surface processing method

#43
20220195585
2022-06-23

Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films

#44
20220081774
2022-03-17

Vacuum processing apparatus and method of cleaning vacuum processing apparatus

#45
20220068618
2022-03-03

Methods of treating a surface of a polymer material by atmospheric pressure plasma

#46
20220042168
2022-02-10

Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films

#47
20220013367
2022-01-13

PLASMA TREATMENT APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

#48
20210384016
2021-12-09

PLASMA SOURCE AND METHOD FOR PREPARING AND COATING SURFACES USING ATMOSPHERIC PLASMA PRESSURE WAVES

#49
20210375596
2021-12-02

APPARATUS FOR TREATING SUBSTRATE

#50
20210358720
2021-11-18

SUBSTRATE TREATING APPARATUS

#51
20210319979
2021-10-14

Plasma generating apparatus and method for operating same

#52
20210317569
2021-10-14

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition Plasma Source For Depositing Diamond and Diamond-Like Films

#53
20210305028
2021-09-30

Remote plasma cleaning of chambers for electronics manufacturing systems

#54
20210257193
2021-08-19

Method and apparatus for parts cleaning

#55
20210257192
2021-08-19

Method for handling an implant

#56
20210225621
2021-07-22

Two-phased atmospheric plasma generator

#57
20210222300
2021-07-22

Substrate processing apparatus, material layer deposition apparatus, and atmospheric pressure chemical vapor deposition apparatus

#58
20210213297
2021-07-15

METHOD AND SYSTEM OF SENSITIZING CANCER CELLS TO CHEMICAL TREATMENT BY PLASMA BASED ACTIVATION

#59
20210193442
2021-06-24

System and method for plasma head helium measurement

#60
20210175103
2021-06-10

IN SITU FAILURE DETECTION IN SEMICONDUCTOR PROCESSING CHAMBERS

#61
20210166919
2021-06-03

Plasma generation device and plasma head cooling method

#62
20210115553
2021-04-22

Sputtering a layer on a substrate using a high-energy density plasma magnetron

#63
20210115552
2021-04-22

Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films

#64
20210111006
2021-04-15

Plasma-generating device

#65
20210102284
2021-04-08

Magnetically enhanced low temperature-high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films

#66
20200411342
2020-12-31

BEAMLINE ARCHITECTURE WITH INTEGRATED PLASMA PROCESSING

#67
20200381262
2020-12-03

Atmospheric plasma in wafer processing system optimization

#68
20200343079
2020-10-29

Methods of treating a surface of a polymer material by atmospheric pressure plasma

#69
20200258721
2020-08-13

Atmospheric pressure plasma device

#70
20200227237
2020-07-16

Pulsed plasma chamber in dual chamber configuration

#71
20200205277
2020-06-25

Atmospheric plasma device

#72
20200179709
2020-06-11

Composition for atopy or psoriasis treatment comprising liquid type plasma

#73
20200152430
2020-05-14

DEVICE AND METHOD FOR PLASMA TREATMENT OF ELECTRONIC MATERIALS

#74
20200118801
2020-04-16

Atmospheric pressure plasma device

#75
20190385826
2019-12-19

PLASMA PROCESSING DEVICE

#76
20190378694
2019-12-12

Plasma generating apparatus

#77
20190374327
2019-12-12

Container, apparatus and method for handling an implant

#78
20190279849
2019-09-12

Plasma-activated saline solutions and method of making plasma activated saline solutions

#79
20190271070
2019-09-05

Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source

#80
20190259583
2019-08-22

DEVICE FOR PERFORMING ATMOSPHERIC PRESSURE PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION AT LOW TEMPERATURE

#81
20190256969
2019-08-22

Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films

#82
20190249293
2019-08-15

Magnetically enhanced low temperature-high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond like films

#83
20190221402
2019-07-18

Plasma beam penetration of millimeter scale holes with high aspect ratios

#84
20190206657
2019-07-04

A MACHINE AND A PROCESS FOR THE ATMOSPHERIC PLASMA TREATMENT OF DIFFERENT MATERIALS USING GASEOUS MIXTURES COMPRISING CHEMICALS AND/OR MONOMERS

#85
20190189405
2019-06-20

Two-phased atmospheric plasma generator

#86
20190108987
2019-04-11

Particle generation preventing method and vacuum apparatus

#87
20190088451
2019-03-21

Integrated Thermal Management for Surface Treatment with Atmospheric Plasma

#88
20190062944
2019-02-28

Epitaxial Growth Using Atmospheric Plasma Preparation Steps

#89
20190057846
2019-02-21

Plasma processing apparatus and sample stage thereof

#90
20190035636
2019-01-31

PLASMA TREATMENT APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

#91
20180204709
2018-07-19

Method for forming perovskite layers using atmospheric pressure plasma

#92
20180195164
2018-07-12

Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films

#93
20180146537
2018-05-24

Plasma generating device

#94
20180144910
2018-05-24

METHOD FOR TREATING THE SURFACE OF A MOVING FILM, AND FACILITY FOR IMPLEMENTING SAID METHOD

#95
20180138022
2018-05-17

Apparatus and method for handling an implant

#96
20180130662
2018-05-10

System and method for mitigating oxide growth in a gate dielectric

#97
20180122624
2018-05-03

System and method for plasma head thermal control

#98
20180096827
2018-04-05

Atmospheric plasma processing systems and methods for manufacture of microelectronic workpieces

#99
20180033657
2018-02-01

Pressure purge etch method for etching complex 3-D structures

#100
20180019106
2018-01-18

Non-thermal soft plasma cleaning

#101
20170354024
2017-12-07

PLASMA LIQUID GENERATING DEVICE

#102
20170348447
2017-12-07

Plasma liquid generating device

#103
20170294291
2017-10-12

APPLICATION OF eBIP TO INSPECTION, TEST, DEBUG AND SURFACE MODIFICATIONS

#104
20170274344
2017-09-28

Production apparatus and production method for fine particles

#105
20170243727
2017-08-24

Atmospheric pressure pulsed arc plasma source and methods of coating therewith

#106
20170178912
2017-06-22

Capacitive coupled plasma source for sputtering and resputtering

#107
20170178878
2017-06-22

Electrically and Magnetically Enhanced Ionized Physical Vapor Deposition Unbalanced Sputtering Source

#108
20170175248
2017-06-22

Magnetically enhanced low temperature-high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond like films

#109
20170170022
2017-06-15

System and method for mitigating oxide growth in a gate dielectric

#110
20170137939
2017-05-18

Plasma source and surface treatment method

#111
20170133208
2017-05-11

Method of cooling a composition using a hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system

#112
20170133205
2017-05-11

Device, system and method for treatment of an object with plasma

#113
20170062191
2017-03-02

Plasma-enhanced atomic layer deposition system with rotary reactor tube

#114
20170051431
2017-02-23

Epitaxial growth using atmospheric plasma preparation steps

#115
20170011888
2017-01-12

Low-pressure plasma system with sequential control process

#116
20160358752
2016-12-08

Plasma generation device

#117
20160347641
2016-12-01

Methods and apparatus for material processing using atmospheric thermal plasma reactor

#118
20160339129
2016-11-24

Generation of microbiocide inside a package utilizing a controlled gas composition

#119
20160329192
2016-11-10

RADIAL-FLOW PLASMA TREATMENT SYSTEM

#120
20160329191
2016-11-10

Non-planar radial-flow plasma treatment system

#121
20160329067
2016-11-10

Plasma treatments for flexures of hard disk drives

#122
20160302906
2016-10-20

Container, apparatus and method for handling an implant

#123
20160299103
2016-10-13

APPLICATION OF ELECTRON-BEAM INDUCED PLASMA PROBES TO INSPECTION, TEST, DEBUG AND SURFACE MODIFICATIONS

#124
20160268120
2016-09-15

Continuous-wave laser-sustained plasma illumination source

#125
20160240355
2016-08-18

System and method for differential etching

#126
20160233061
2016-08-11

Heated air plasma treatment

#127
20160155617
2016-06-02

Plasma processing apparatus and sample stage thereof

#128
20160155616
2016-06-02

SUBSTRATE PROCESSING APPARATUS

#129
20160148786
2016-05-26

Pulsed plasma chamber in dual chamber configuration

#130
20160133442
2016-05-12

Abatement system having a plasma source

#131
20160106993
2016-04-21

Harmonic cold plasma devices and associated methods

#132
20160053369
2016-02-25

Open air plasma deposition method

#133
20160024657
2016-01-28

PLASMA CVD DEVICE AND PLASMA CVD METHOD

#134
20150380219
2015-12-31

Mounting Stage and Plasma Processing Apparatus

#135
20150274566
2015-10-01

Methods and apparatus for material processing using atmospheric thermal plasma reactor

#136
20150273094
2015-10-01

Generation of microbiocide inside a package utilizing a controlled gas composition

#137
20150255256
2015-09-10

Hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system

#138
20150251453
2015-09-10

Plasma processing device, printing apparatus, printing system, computer program product, and method for manufacturing printed material

#139
20150214015
2015-07-30

FILM FORMING APPARATUS, METHOD OF FORMING LOW-PERMITTIVITY FILM, SiCO FILM, AND DAMASCENE INTERCONNECT STRUCTURE

#140
20150184300
2015-07-02

Method and device for manufacturing a barrier layer on a flexible substrate

#141
20150132505
2015-05-14

Plasma processing apparatus and plasma processing method

#142
20150122420
2015-05-07

Plasma processing apparatus

#143
20150050750
2015-02-19

Plasma processing method and plasma processing apparatus

#144
20150047785
2015-02-19

Plasma Processing Devices Having Multi-Port Valve Assemblies

#145
20150031213
2015-01-29

Plasma processing apparatus and plasma processing method

#146
20150020970
2015-01-22

Plasma processing method and apparatus

#147
20140370205
2014-12-18

Film deposition method

#148
20140217881
2014-08-07

Plasma generator, manufacturing method of rotating electrode for plasma generator, method for performing plasma treatment of substrate, and method for forming thin film having mixed structure by using plasma

#149
20140110059
2014-04-24

Atmospheric-pressure plasma processing apparatus for substrates

#150
20140061033
2014-03-06

System and method for differential etching

#151
20140044595
2014-02-13

Generation of microbiocide inside a package utilizing a controlled gas composition

#152
20130319324
2013-12-05

Discharge surface treatment apparatus

#153
20130280539
2013-10-24

Method for connecting substrates, and composite structure obtainable thereby

#154
20130108803
2013-05-02

Open air plasma deposition system

#155
20130084409
2013-04-04

Method and device for atmospheric pressure plasma treatment

#156
20130059448
2013-03-07

Pulsed Plasma Chamber in Dual Chamber Configuration

#157
20120325777
2012-12-27

Plasma processing apparatus and plasma processing method

#158
20120325146
2012-12-27

Plasma Processing Apparatus

#159
20120319579
2012-12-20

Atmospheric plasma apparatus and manufacturing method thereof

#160
20120295036
2012-11-22

Machine and method for atmospheric plasma treatment of continuous substrates

#161
20120255492
2012-10-11

Large Area Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition Apparatus

#162
20120145673
2012-06-14

Dielectric plasma chamber apparatus and method with exterior electrodes

#163
20120129318
2012-05-24

ATMOSPHERIC PRESSURE PLASMA ETCHING APPARATUS AND METHOD FOR MANUFACTURING SOI SUBSTRATE

#164
20120097647
2012-04-26

Methods and apparatus for igniting and sustaining plasma

#165
20120045863
2012-02-23

Microplasma generator and methods therefor

#166
20110120374
2011-05-26

System and method for mitigating oxide growth in a gate dielectric

#167
20110089142
2011-04-21

Method and apparatus for plasma surface treatment of moving substrate

#168
20110052924
2011-03-03

THIN FILM FORMING METHOD AND THIN FILM STACK

#169
20110042347
2011-02-24

Method and apparatus for plasma surface treatment of a moving substrate

#170
20110042007
2011-02-24

Etching apparatus and etching method for substrate bevel

#171
20110014424
2011-01-20

PLASMA TREATMENT APPARATUS AND METHOD FOR TREATMENT OF A SUBSTRATE WITH ATMOSPHERIC PRESSURE GLOW DISCHARGE ELECTRODE CONFIGURATION

#172
20100300620
2010-12-02

Atmospheric inductively coupled plasma generator

#173
20100292757
2010-11-18

Method and device for plasma-supported surface treatment

#174
20100258247
2010-10-14

Atmospheric pressure plasma generator

#175
20100255216
2010-10-07

PROCESS AND APPARATUS FOR ATMOSPHERIC PRESSURE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION COATING OF A SUBSTRATE

#176
20100218896
2010-09-02

Atmospheric pressure plasma reactor

#177
20100207528
2010-08-19

Portable power supply apparatus for generating microwave-excited microplasmas

#178
20100186670
2010-07-29

Plasma formation region control apparatus and plasma processing apparatus

#179
20100154558
2010-06-24

Method and installation for exposing the surface of an integrated circuit

#180
20100149326
2010-06-17

Plasma monitoring device and method

#181
20100033096
2010-02-11

Atmospheric pressure plasma apparatus

#182
20100032285
2010-02-11

METHOD OF PLASMA TREATMENT OF A SURFACE

#183
20100021655
2010-01-28

PLASMA ELECTRODE

#184
20100021654
2010-01-28

Plasma-enhanced functionalization of inorganic oxide surfaces

#185
20100015358
2010-01-21

APPARATUS AND METHOD FOR SURFACE FINISHING OF METALS AND METALLOIDS, METAL OXIDES AND METALLOID OXIDES, AND METAL NITRIDES AND METALLOID NITRIDES

#186
20100009098
2010-01-14

ATMOSPHERIC PRESSURE PLASMA ELECTRODE

#187
20090304949
2009-12-10

SHORT PULSE ATMOSPHERIC PRESSURE GLOW DISCHARGE METHOD AND APPARATUS

#188
20090282817
2009-11-19

PLASMA PROCESSING APPARATUS

#189
20090229972
2009-09-17

METHOD AND APPARATUS FOR PRODUCING A FEATURE HAVING A SURFACE ROUGHNESS IN A SUBSTRATE

#190
20090200948
2009-08-13

Large area, atmospheric pressure plasma for downstream processing

#191
20090194507
2009-08-06

APPARATUS AND METHOD FOR CLEANING, ETCHING, ACTIVATION AND SUBSEQUENT TREATMENT OF GLASS SURFACES, GLASS SURFACES COATED BY METAL OXIDES, AND SURFACES OF OTHER SI02-COATED MATERIALS

#192
20090191655
2009-07-30

METHOD OF ETCHING AMORPHOUS SILICON LAYER AND METHOD OF MANUFACTURING LIQUID CRYSTAL DISPLAY USING THE SAME

#193
20090186167
2009-07-23

Atmospheric pressure plasma, generating method, plasma processing method and component mounting method using same, and device using these methods

#194
20090162263
2009-06-25

ATMOSPHERIC-PRESSURE PLASMA REACTOR

#195
20090142511
2009-06-04

Process and apparatus for atmospheric pressure plasma enhanced chemical vapor deposition coating of a substrate

#196
20090097165
2009-04-16

METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDING MEDIUM AND SURFACE TREATMENT APPARATUS

#197
20090064933
2009-03-12

Film coating system and isolating device thereof

#198
20090039772
2009-02-12

Patterning apparatus, method for making organic electroluminescent element, organic electroluminescent element, and organic electroluminescent display

#199
20080308121
2008-12-18

Portable Die Cleaning Apparatus and Method Thereof

#200
20080296268
2008-12-04

Plasma generator and workpiece processing apparatus using the same

#201
20080207008
2008-08-28

Microwave hybrid and plasma rapid thermal processing of semiconductor wafers

#202
20080185017
2008-08-07

Film removal method and apparatus

#203
20080179286
2008-07-31

DIELECTRIC PLASMA CHAMBER APPARATUS AND METHOD WITH EXTERIOR ELECTRODES

#204
20080156266
2008-07-03

Plasma processing apparatus

#205
20080142057
2008-06-19

Cleaning device using atmospheric gas discharge plasma

#206
20080105379
2008-05-08

Plasma processing apparatus

#207
20080061035
2008-03-13

Plasma generator, substrate treating apparatus including the same and substrate treating method

#208
20080060579
2008-03-13

Apparatus of triple-electrode dielectric barrier discharge at atmospheric pressure

#209
20080053988
2008-03-06

Plasma generation apparatus and workpiece processing apparatus using the same

#210
20080050882
2008-02-28

System and method for mitigating oxide growth in a gate dielectric

#211
20080048565
2008-02-28

Method for Generating a Cold Plasma for Sterilizing a Gaseous Medium and Device Therefor

#212
20070262052
2007-11-15

Film removal method and apparatus

#213
20070251919
2007-11-01

Etching apparatus and etching method for substrate bevel

#214
20070235427
2007-10-11

Apparatus and method for treating a workpiece with ionizing gas plasma

#215
20070170996
2007-07-26

Plasma generating devices having alternative ground geometry and methods for using the same

#216
20070154650
2007-07-05

Method and apparatus for glow discharge plasma treatment of flexible material at atmospheric pressure

#217
20070093076
2007-04-26

Electromagnetic treatment in atmospheric-plasma coating process

#218
20070037408
2007-02-15

Method and apparatus for plasma processing

#219
20060272675
2006-12-07

Method and apparatus for cleaning and surface conditioning objects using plasma

#220
20060272674
2006-12-07

Method and apparatus for cleaning and surface conditioning objects using plasma

#221
20060240648
2006-10-26

Atmospheric glow discharge with concurrent coating deposition

#222
20060147648
2006-07-06

Method and arrangement for generating an atmospheric pressure glow discharge plasma (APG)

#223
20060102196
2006-05-18

Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads

#224
20060081336
2006-04-20

Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads

#225
20060076316
2006-04-13

Atmospheric process and system for controlled and rapid removal of polymers from high aspect ratio holes

#226
20060048893
2006-03-09

Atmospheric pressure plasma processing reactor

#227
20050139229
2005-06-30

Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads

#228
20050020038
2005-01-27

Atmospheric glow discharge with concurrent coating deposition

#229
20050005948
2005-01-13

Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads

#230
16369733
2019-09-03

Field emission enhanced handheld atmospheric pressure plasma generator

#231
15196292
2018-07-24

Low temperature atmospheric pressure plasma applications

#232
14576106
2016-08-02

Argon and helium plasma apparatus and methods