205369 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Gas-filled discharge tubes; Constructional details of the reactor; Further details of plasma apparatus not provided for in groups - ; special provisions for cleaning or maintenance of the apparatus; Pressure Working under atmospheric pressure or higher
SYSTEMS FOR FLUXLESS BONDING USING AN ATMOSPHERIC PRESSURE PLASMA AND METHODS FOR PERFORMING THE SAME
#2REMOVING METAL OXIDE FROM METALLIC CONTACTS ON SUBSTRATES, DIES AND WAFERS WITH ATMOSPHERIC PRESSURE PLASMA
#3MIXED GAS ATMOSPHERIC PRESSURE PLASMA
#4Atmospheric Plasma Activation for Hybrid Bonding
#5SYSTEMS FOR FLUXLESS BONDING USING AN ATMOSPHERIC PRESSURE PLASMA AND METHODS FOR PERFORMING THE SAME
#6SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
#7PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL
#8SYSTEMS, METHODS, AND APPARATUSES FOR ATMOSPHERIC PRESSURE PLASMA JET NOZZLES
#9COATING SYSTEM AND METHOD FOR SEMICONDUCTOR EQUIPMENT COMPONENTS
#10APPARATUS FOR PLASMA PROCESSING
#11SEAM PERFORMANCE IMPROVEMENT USING HYDROXYLATION FOR GAPFILL
#12PLASMA GENERATING APPARATUS AND METHOD FOR OPERATING SAME
#13RESILIENT RELEASE LAYER FOR LITHIUM FILM TRANSFER AND ATMOSPHERIC PLASMA ASSISTED REMOVAL OF RESIDUAL RELEASE LAYER
#14SURFACE PROCESSING EQUIPMENT
#15INTEGRATED ATMOSPHERIC PLASMA TREATMENT STATION IN PROCESSING TOOL
#16DEVICE AND METHOD FOR PLASMA GENERATION IN A WIDE PRESSURE RANGE AND SYSTEM AND METHOD FOR OPTICAL GAS ANALYSIS/DETECTION BY MEANS OF SUCH A DEVICE
#17SURFACE MODIFICATION METHOD
#18METHODS AND APPARATUS FOR GENERATING ATMOSPHERIC PRESSURE, LOW TEMPERATURE PLASMA
#19Remote plasma cleaning of chambers for electronics manufacturing systems
#20METHODS AND APPARATUS FOR PHOTOMASK PROCESSING
#21YTTRIUM-FLUORIDE-BASED SPRAYED COATING, SPRAYED MEMBER, AND METHOD FOR PRODUCING YTTRIUM-FLUORIDE-BASED SPRAYED COATING
#22Plasma generating apparatus and method for operating same
#23PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL
#24SYSTEMS FOR FLUXLESS BONDING USING AN ATMOSPHERIC PRESSURE PLASMA AND METHODS FOR PERFORMING THE SAME
#25SPOT TYPE ATMOSPHERIC PRESSURE PLASMA DEVICE
#26WIDE AREA ATMOSPHERIC PRESSURE PLASMA DEVICE
#27SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
#28PULSED PLASMA CHAMBER IN DUAL CHAMBER CONFIGURATION
#29METHOD FOR ETCHING LITHIUM NIOBATE AND METHOD FOR FORMING LITHIUM NIOBATE PATTERN USING THE SAME
#30PLASMA DEVICE FOR GAS-BASED SURFACE TREATMENT AND WATER ACTIVATION
#31ATMOSPHERIC PLASMA PROCESSING METHOD AND ATMOSPHERIC PLASMA PROCESSING APPARATUS
#32METHOD OF TREATING SUBSTRATE
#33Substrate Processing Apparatus, Substrate Processing Method, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium
#34ATMOSPHERIC PRESSURE REMOTE PLASMA CVD DEVICE, FILM FORMATION METHOD, AND PLASTIC BOTTLE MANUFACTURING METHOD
#35Plasma generating apparatus and method for operating same
#36DEVICE FOR PLASMA TREATMENT OF ELECTRONIC MATERIALS
#37Device For Generating A Dielectric Barrier Discharge And Method For Treating An Object To Be Activated
#38METHODS AND APPARATUS FOR REDIRECTING IONS GENERATED FROM ATMOSPHERIC PRESSURE LOW TEMPERATURE PLASMA
#39A PROCESS AND APPARATUS FOR THE PREPARATION OF A BONDED SUBSTRATE
#40Methods and apparatus for photomask processing
#41Antimicrobial and/or antiviral polymer surfaces and methods for the preparation thereof
#42Surface processing equipment and surface processing method
#43Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films
#44Vacuum processing apparatus and method of cleaning vacuum processing apparatus
#45Methods of treating a surface of a polymer material by atmospheric pressure plasma
#46Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films
#47PLASMA TREATMENT APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
#48PLASMA SOURCE AND METHOD FOR PREPARING AND COATING SURFACES USING ATMOSPHERIC PLASMA PRESSURE WAVES
#49APPARATUS FOR TREATING SUBSTRATE
#50SUBSTRATE TREATING APPARATUS
#51Plasma generating apparatus and method for operating same
#52Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition Plasma Source For Depositing Diamond and Diamond-Like Films
#53Remote plasma cleaning of chambers for electronics manufacturing systems
#54Method and apparatus for parts cleaning
#55Method for handling an implant
#56Two-phased atmospheric plasma generator
#57Substrate processing apparatus, material layer deposition apparatus, and atmospheric pressure chemical vapor deposition apparatus
#58METHOD AND SYSTEM OF SENSITIZING CANCER CELLS TO CHEMICAL TREATMENT BY PLASMA BASED ACTIVATION
#59System and method for plasma head helium measurement
#60IN SITU FAILURE DETECTION IN SEMICONDUCTOR PROCESSING CHAMBERS
#61Plasma generation device and plasma head cooling method
#62Sputtering a layer on a substrate using a high-energy density plasma magnetron
#63Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films
#64Plasma-generating device
#65Magnetically enhanced low temperature-high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films
#66BEAMLINE ARCHITECTURE WITH INTEGRATED PLASMA PROCESSING
#67Atmospheric plasma in wafer processing system optimization
#68Methods of treating a surface of a polymer material by atmospheric pressure plasma
#69Atmospheric pressure plasma device
#70Pulsed plasma chamber in dual chamber configuration
#71Atmospheric plasma device
#72Composition for atopy or psoriasis treatment comprising liquid type plasma
#73DEVICE AND METHOD FOR PLASMA TREATMENT OF ELECTRONIC MATERIALS
#74Atmospheric pressure plasma device
#75PLASMA PROCESSING DEVICE
#76Plasma generating apparatus
#77Container, apparatus and method for handling an implant
#78Plasma-activated saline solutions and method of making plasma activated saline solutions
#79Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source
#80DEVICE FOR PERFORMING ATMOSPHERIC PRESSURE PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION AT LOW TEMPERATURE
#81Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films
#82Magnetically enhanced low temperature-high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond like films
#83Plasma beam penetration of millimeter scale holes with high aspect ratios
#84A MACHINE AND A PROCESS FOR THE ATMOSPHERIC PLASMA TREATMENT OF DIFFERENT MATERIALS USING GASEOUS MIXTURES COMPRISING CHEMICALS AND/OR MONOMERS
#85Two-phased atmospheric plasma generator
#86Particle generation preventing method and vacuum apparatus
#87Integrated Thermal Management for Surface Treatment with Atmospheric Plasma
#88Epitaxial Growth Using Atmospheric Plasma Preparation Steps
#89Plasma processing apparatus and sample stage thereof
#90PLASMA TREATMENT APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
#91Method for forming perovskite layers using atmospheric pressure plasma
#92Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films
#93Plasma generating device
#94METHOD FOR TREATING THE SURFACE OF A MOVING FILM, AND FACILITY FOR IMPLEMENTING SAID METHOD
#95Apparatus and method for handling an implant
#96System and method for mitigating oxide growth in a gate dielectric
#97System and method for plasma head thermal control
#98Atmospheric plasma processing systems and methods for manufacture of microelectronic workpieces
#99Pressure purge etch method for etching complex 3-D structures
#100Non-thermal soft plasma cleaning
#101PLASMA LIQUID GENERATING DEVICE
#102Plasma liquid generating device
#103APPLICATION OF eBIP TO INSPECTION, TEST, DEBUG AND SURFACE MODIFICATIONS
#104Production apparatus and production method for fine particles
#105Atmospheric pressure pulsed arc plasma source and methods of coating therewith
#106Capacitive coupled plasma source for sputtering and resputtering
#107Electrically and Magnetically Enhanced Ionized Physical Vapor Deposition Unbalanced Sputtering Source
#108Magnetically enhanced low temperature-high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond like films
#109System and method for mitigating oxide growth in a gate dielectric
#110Plasma source and surface treatment method
#111Method of cooling a composition using a hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system
#112Device, system and method for treatment of an object with plasma
#113Plasma-enhanced atomic layer deposition system with rotary reactor tube
#114Epitaxial growth using atmospheric plasma preparation steps
#115Low-pressure plasma system with sequential control process
#116Plasma generation device
#117Methods and apparatus for material processing using atmospheric thermal plasma reactor
#118Generation of microbiocide inside a package utilizing a controlled gas composition
#119RADIAL-FLOW PLASMA TREATMENT SYSTEM
#120Non-planar radial-flow plasma treatment system
#121Plasma treatments for flexures of hard disk drives
#122Container, apparatus and method for handling an implant
#123APPLICATION OF ELECTRON-BEAM INDUCED PLASMA PROBES TO INSPECTION, TEST, DEBUG AND SURFACE MODIFICATIONS
#124Continuous-wave laser-sustained plasma illumination source
#125System and method for differential etching
#126Heated air plasma treatment
#127Plasma processing apparatus and sample stage thereof
#128SUBSTRATE PROCESSING APPARATUS
#129Pulsed plasma chamber in dual chamber configuration
#130Abatement system having a plasma source
#131Harmonic cold plasma devices and associated methods
#132Open air plasma deposition method
#133PLASMA CVD DEVICE AND PLASMA CVD METHOD
#134Mounting Stage and Plasma Processing Apparatus
#135Methods and apparatus for material processing using atmospheric thermal plasma reactor
#136Generation of microbiocide inside a package utilizing a controlled gas composition
#137Hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system
#138Plasma processing device, printing apparatus, printing system, computer program product, and method for manufacturing printed material
#139FILM FORMING APPARATUS, METHOD OF FORMING LOW-PERMITTIVITY FILM, SiCO FILM, AND DAMASCENE INTERCONNECT STRUCTURE
#140Method and device for manufacturing a barrier layer on a flexible substrate
#141Plasma processing apparatus and plasma processing method
#142Plasma processing apparatus
#143Plasma processing method and plasma processing apparatus
#144Plasma Processing Devices Having Multi-Port Valve Assemblies
#145Plasma processing apparatus and plasma processing method
#146Plasma processing method and apparatus
#147Film deposition method
#148Plasma generator, manufacturing method of rotating electrode for plasma generator, method for performing plasma treatment of substrate, and method for forming thin film having mixed structure by using plasma
#149Atmospheric-pressure plasma processing apparatus for substrates
#150System and method for differential etching
#151Generation of microbiocide inside a package utilizing a controlled gas composition
#152Discharge surface treatment apparatus
#153Method for connecting substrates, and composite structure obtainable thereby
#154Open air plasma deposition system
#155Method and device for atmospheric pressure plasma treatment
#156Pulsed Plasma Chamber in Dual Chamber Configuration
#157Plasma processing apparatus and plasma processing method
#158Plasma Processing Apparatus
#159Atmospheric plasma apparatus and manufacturing method thereof
#160Machine and method for atmospheric plasma treatment of continuous substrates
#161Large Area Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition Apparatus
#162Dielectric plasma chamber apparatus and method with exterior electrodes
#163ATMOSPHERIC PRESSURE PLASMA ETCHING APPARATUS AND METHOD FOR MANUFACTURING SOI SUBSTRATE
#164Methods and apparatus for igniting and sustaining plasma
#165Microplasma generator and methods therefor
#166System and method for mitigating oxide growth in a gate dielectric
#167Method and apparatus for plasma surface treatment of moving substrate
#168THIN FILM FORMING METHOD AND THIN FILM STACK
#169Method and apparatus for plasma surface treatment of a moving substrate
#170Etching apparatus and etching method for substrate bevel
#171PLASMA TREATMENT APPARATUS AND METHOD FOR TREATMENT OF A SUBSTRATE WITH ATMOSPHERIC PRESSURE GLOW DISCHARGE ELECTRODE CONFIGURATION
#172Atmospheric inductively coupled plasma generator
#173Method and device for plasma-supported surface treatment
#174Atmospheric pressure plasma generator
#175PROCESS AND APPARATUS FOR ATMOSPHERIC PRESSURE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION COATING OF A SUBSTRATE
#176Atmospheric pressure plasma reactor
#177Portable power supply apparatus for generating microwave-excited microplasmas
#178Plasma formation region control apparatus and plasma processing apparatus
#179Method and installation for exposing the surface of an integrated circuit
#180Plasma monitoring device and method
#181Atmospheric pressure plasma apparatus
#182METHOD OF PLASMA TREATMENT OF A SURFACE
#183PLASMA ELECTRODE
#184Plasma-enhanced functionalization of inorganic oxide surfaces
#185APPARATUS AND METHOD FOR SURFACE FINISHING OF METALS AND METALLOIDS, METAL OXIDES AND METALLOID OXIDES, AND METAL NITRIDES AND METALLOID NITRIDES
#186ATMOSPHERIC PRESSURE PLASMA ELECTRODE
#187SHORT PULSE ATMOSPHERIC PRESSURE GLOW DISCHARGE METHOD AND APPARATUS
#188PLASMA PROCESSING APPARATUS
#189METHOD AND APPARATUS FOR PRODUCING A FEATURE HAVING A SURFACE ROUGHNESS IN A SUBSTRATE
#190Large area, atmospheric pressure plasma for downstream processing
#191APPARATUS AND METHOD FOR CLEANING, ETCHING, ACTIVATION AND SUBSEQUENT TREATMENT OF GLASS SURFACES, GLASS SURFACES COATED BY METAL OXIDES, AND SURFACES OF OTHER SI02-COATED MATERIALS
#192METHOD OF ETCHING AMORPHOUS SILICON LAYER AND METHOD OF MANUFACTURING LIQUID CRYSTAL DISPLAY USING THE SAME
#193Atmospheric pressure plasma, generating method, plasma processing method and component mounting method using same, and device using these methods
#194ATMOSPHERIC-PRESSURE PLASMA REACTOR
#195Process and apparatus for atmospheric pressure plasma enhanced chemical vapor deposition coating of a substrate
#196METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDING MEDIUM AND SURFACE TREATMENT APPARATUS
#197Film coating system and isolating device thereof
#198Patterning apparatus, method for making organic electroluminescent element, organic electroluminescent element, and organic electroluminescent display
#199Portable Die Cleaning Apparatus and Method Thereof
#200Plasma generator and workpiece processing apparatus using the same
#201Microwave hybrid and plasma rapid thermal processing of semiconductor wafers
#202Film removal method and apparatus
#203DIELECTRIC PLASMA CHAMBER APPARATUS AND METHOD WITH EXTERIOR ELECTRODES
#204Plasma processing apparatus
#205Cleaning device using atmospheric gas discharge plasma
#206Plasma processing apparatus
#207Plasma generator, substrate treating apparatus including the same and substrate treating method
#208Apparatus of triple-electrode dielectric barrier discharge at atmospheric pressure
#209Plasma generation apparatus and workpiece processing apparatus using the same
#210System and method for mitigating oxide growth in a gate dielectric
#211Method for Generating a Cold Plasma for Sterilizing a Gaseous Medium and Device Therefor
#212Film removal method and apparatus
#213Etching apparatus and etching method for substrate bevel
#214Apparatus and method for treating a workpiece with ionizing gas plasma
#215Plasma generating devices having alternative ground geometry and methods for using the same
#216Method and apparatus for glow discharge plasma treatment of flexible material at atmospheric pressure
#217Electromagnetic treatment in atmospheric-plasma coating process
#218Method and apparatus for plasma processing
#219Method and apparatus for cleaning and surface conditioning objects using plasma
#220Method and apparatus for cleaning and surface conditioning objects using plasma
#221Atmospheric glow discharge with concurrent coating deposition
#222Method and arrangement for generating an atmospheric pressure glow discharge plasma (APG)
#223Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads
#224Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads
#225Atmospheric process and system for controlled and rapid removal of polymers from high aspect ratio holes
#226Atmospheric pressure plasma processing reactor
#227Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads
#228Atmospheric glow discharge with concurrent coating deposition
#229Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads
#230Field emission enhanced handheld atmospheric pressure plasma generator
#231Low temperature atmospheric pressure plasma applications
#232Argon and helium plasma apparatus and methods