207046 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof; Forming layers; Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
Method and apparatus for selectively altering dielectric properties of localized semiconductor device regions
#302Materials suitable for shallow trench isolation
#303Method of fabricating high-k dielectric layer having reduced impurity
#304Low-K dielectric material system for IC application
#305Silicon germanium surface layer for high-k dielectric integration
#306Heat treatment apparatus and substrate processing apparatus
#307Method for forming semiconductor device
#308Manufacture of semiconductor device having nitridized insulating film
#309Method for forming metal oxide layer by nitric acid oxidation
#310He treatment to improve low-k adhesion property
#311Method for formation of an ultra-thin film and semiconductor device containing such a film
#312Method for forming interlayer insulation film
#313Semiconductor device, and method and apparatus for manufacturing the same
#314Method for controlling defects in gate dielectrics
#315Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device
#316Anneal of high-k dielectric using NH3 and an oxidizer
#317Method of forming sidewall spacer elements for a circuit element by increasing an etch selectivity
#318Method of forming low-dielectrics using a rapid curing process
#319Method for manufacturing semiconductor integrated circuit device
#320Method of forming gates in semiconductor devices
#321Process for fabricating one or more ultra-large area nanoscale polymer films
#322Manufacturing method for forming a semiconductor structure
#323Graphene heat dissipating structure
#324Formation of metal oxide layer
#325Siloxanes, doped siloxanes, methods for their synthesis, compositions containing the same, and films formed therefrom
#326Methods for forming patterns in honeycomb array
#327Method of patterning a film layer
#328Method of forming patterns
#329Graphene heat dissipating structure
#330Method of manufacturing semiconductor device
#331Progressive UV cure