ClassID:

207091

H01L21/02584 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof; Forming layers; Forming inorganic semiconducting materials on a substrate; Deposited layers; Doping during depositing Delta-doping

Recent Application in this class:
#1
20240274671
2024-08-15

SiC EPITAXIAL WAFER AND METHOD FOR MANUFACTURING SIC EPITAXIAL WAFER

#2
20230121332
2023-04-20

RADIO FREQUENCY DEVICES, SILICON CARBIDE HOMOEPITAXIAL SUBSTRATES AND MANUFACTURING METHODS THEREOF

#3
20220336671
2022-10-20

Transistors with enhanced dopant profile and methods for forming the same

#4
20220149160
2022-05-12

SiC epitaxial wafer and method for manufacturing SIC epitaxial wafer

#5
20200313009
2020-10-01

Solar cell and solar cell module

#6
20200303498
2020-09-24

Method of forming oxygen inserted Si-layers in power semiconductor devices

#7
20200219723
2020-07-09

Silicon carbide semiconductor substrate

#8
20200161436
2020-05-21

P-N junction based devices with single species impurity for P-type and N-type doping

#9
20200135468
2020-04-30

Methods and systems for dopant activation using microwave radiation

#10
20200127101
2020-04-23

Nitride semiconductor substrate, semiconductor device, and method for manufacturing nitride semiconductor substrate

#11
20200052066
2020-02-13

Oxygen inserted Si-layers for reduced substrate dopant outdiffusion in power devices

#12
20200035793
2020-01-30

P-N junction based devices with single species impurity for P-type and N-type doping

#13
20190096991
2019-03-28

Method for manufacturing semiconductor device

#14
20180374699
2018-12-27

III-nitride tunnel junction with modified P-N interface

#15
20180258549
2018-09-13

LOW-TEMPERATURE SELECTIVE EPITAXIAL GROWTH OF SILICON FOR DEVICE INTEGRATION

#16
20180197751
2018-07-12

Epitaxial silicon wafer

#17
20180174842
2018-06-21

Quantum doping method and use in fabrication of nanoscale electronic devices

#18
20180174834
2018-06-21

Method of preparing diamond substrates for CVD nanometric delta doping

#19
20180097072
2018-04-05

Group III-V device structure with variable impurity concentration

#20
20180068850
2018-03-08

CVD reactor and method for nanometric delta doping of diamond

#21
20180040480
2018-02-08

Silicon carbide semiconductor substrate and method of manufacturing silicon carbide semiconductor substrate

#22
20180012805
2018-01-11

Semiconductor structure with self-aligned wells and multiple channel materials

#23
20170352542
2017-12-07

NANOSCALE WIRES WITH TIP-LOCALIZED JUNCTIONS

#24
20170350037
2017-12-07

GaO-based crystal film, and crystal multilayer structure

#25
20170288019
2017-10-05

Semiconductor devices with germanium-rich active layers and doped transition layers

#26
20170271524
2017-09-21

TFT substrate structure and manufacturing method thereof

#27
20170271154
2017-09-21

Hardmask composition and method of forming patterning by using the hardmask composition

#28
20170221713
2017-08-03

Methods and systems for dopant activation using microwave radiation

#29
20170186870
2017-06-29

Semiconductor device and method for fabricating the same

#30
20170186859
2017-06-29

Method of fabricating non-etch gas cooled epitaxial stack for group IIIA-N devices

#31
20170179233
2017-06-22

High mobility transport layer structures for rhombohedral Si/Ge/SiGe devices

#32
20170141236
2017-05-18

TFT substrate structure and manufacturing method thereof

#33
20170141192
2017-05-18

Group III-V device structure having a selectively reduced impurity concentration

#34
20170092493
2017-03-30

Method of manufacturing nitride semiconductor device

#35
20170081781
2017-03-23

LOW-TEMPERATURE SELECTIVE EPITAXIAL GROWTH OF SILICON FOR DEVICE INTEGRATION

#36
20170047401
2017-02-16

Semiconductor devices with germanium-rich active layers and doped transition layers

#37
20170037532
2017-02-09

Conversion of carbon into n-type and p-type doped diamond and structures

#38
20160358933
2016-12-08

Method of making a three-dimensional memory device having a heterostructure quantum well channel

#39
20160343878
2016-11-24

Thin film transistor substrate having high reliability metal oxide semiconductor material

#40
20160343842
2016-11-24

METHOD OF GROWING AN EPITAXIAL SUBSTRATE AND FORMING A SEMICONDUCTOR DEVICE ON THE EPITAXIAL SUBSTRATE

#41
20160329212
2016-11-10

Methods and systems for dopant activation using microwave radiation

#42
20160293415
2016-10-06

Electronic device using group III nitride semiconductor and its fabrication method and an epitaxial multi-layer wafer for making it

#43
20160225622
2016-08-04

System and method for substrate wafer back side and edge cross section seals

#44
20160133737
2016-05-12

CARBON DOPING SEMICONDUCTOR DEVICES

#45
20160126342
2016-05-05

Carbon doping semiconductor devices

#46
20160118305
2016-04-28

Process for integrated circuit fabrication including a liner silicide with low contact resistance

#47
20160111335
2016-04-21

Semiconductor structure with self-aligned wells and multiple channel materials

#48
20160086800
2016-03-24

Tunneling field effect transistors and transistor circuitry employing same

#49
20160049476
2016-02-18

Semiconductor devices with germanium-rich active layers and doped transition layers

#50
20160043275
2016-02-11

P-type doping layers for use with light emitting devices

#51
20160027645
2016-01-28

Hardmask composition and method of forming patterning by using the hardmask composition

#52
20150380497
2015-12-31

Group III-V device with a selectively modified impurity concentration

#53
20150318441
2015-11-05

P-type doping layers for use with light emitting devices

#54
20150279679
2015-10-01

Multiple-threshold voltage devices and method of forming same

#55
20150200287
2015-07-16

Doped gallium nitride high-electron mobility transistor

#56
20150200255
2015-07-16

Nitride semiconductor element and nitride semiconductor wafer

#57
20150054120
2015-02-26

Multiple-threshold voltage devices and method of forming same

#58
20140339686
2014-11-20

Group III-V device with a selectively modified impurity concentration

#59
20140339605
2014-11-20

Group III-V device with a selectively reduced impurity concentration

#60
20140209979
2014-07-31

Metamorphic growth of III-V semiconductor on silicon substrate by MOCVD for high speed III-V transistors

#61
20140191190
2014-07-10

Semiconductor light emitting device and method for manufacturing the same

#62
20140077339
2014-03-20

DELTA DOPING AT Si-Ge INTERFACE

#63
20130082273
2013-04-04

P-type doping layers for use with light emitting devices

#64
20130069208
2013-03-21

Group III-V device structure having a selectively reduced impurity concentration

#65
20120292593
2012-11-22

Nitride semiconductor device, nitride semiconductor wafer, and method for manufacturing nitride semiconductor layer

#66
20120210932
2012-08-23

Low-temperature selective epitaxial growth of silicon for device integration

#67
20120205664
2012-08-16

Semiconductor light emitting device and method for manufacturing the same

#68
20120199814
2012-08-09

Silicon-based tunneling field effect transistors and transistor circuitry employing same

#69
20110101415
2011-05-05

Semiconductor light emitting device and method for manufacturing the same

#70
20110049682
2011-03-03

System and method for substrate wafer back side and edge cross section seals

#71
20100155772
2010-06-24

Semiconductor light emitting device and method for manufacturing the same

#72
20090298266
2009-12-03

Dopant confinement in the delta doped layer using a dopant segregration barrier in quantum well structures

#73
20090146187
2009-06-11

Nitride semiconductor element and process for producing the same

#74
20090057647
2009-03-05

Semiconductor light emitting device and method for manufacturing the same

#75
20090042345
2009-02-12

Methods of passivating surfaces of wide bandgap semiconductor devices

#76
20090020748
2009-01-22

Si/SiGe interband tunneling diodes with tensile strain

#77
20090001350
2009-01-01

High hole mobility semiconductor device

#78
20080157058
2008-07-03

Dopant confinement in the delta doped layer using a dopant segregation barrier in quantum well structures

#79
20080113497
2008-05-15

Method for manufacturing a semiconductor device on GAN substrate having surface bidirectionally inclined toward <1-100> and <11-20> directions relative to {0001} crystal planes

#80
20070090384
2007-04-26

Nitride based semiconductor device having multiple layer buffer structure and fabrication method thereof

#81
20060286782
2006-12-21

Layer growth using metal film and/or islands

#82
20060108606
2006-05-25

Transistors having buried n-type and p-type regions beneath the source region

#83
20060043419
2006-03-02

Semiconductor device having bidirectionally inclined toward <1-100> and <11-20> relative to {0001} crystal planes

#84
20050006639
2005-01-13

Semiconductor electronic devices and methods

#85
16049027
2019-09-10

P-N junction based devices with single species impurity for P-type and N-type doping

#86
14757875
2017-01-31

Method and apparatus for making p-channel thin film transistors for OLED and LED active matrix flat panel displays

#87
13964192
2018-01-16

Quantum doping method and use in fabrication of nanoscale electronic devices