ClassID:

207102

H01L21/02636 - page 4 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof; Forming layers; Forming inorganic semiconducting materials on a substrate; Formation types; Deposition types Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials

Recent Application in this class:
#901
20090104740
2009-04-23

Semiconductor device producing method with selective epitaxial growth

#902
20090102019
2009-04-23

Controlled doping of semiconductor nanowires

#903
20090093094
2009-04-09

Selective formation of silicon carbon epitaxial layer

#904
20090092166
2009-04-09

Nitride semiconductor light-emitting device

#905
20090087967
2009-04-02

PRECURSORS AND PROCESSES FOR LOW TEMPERATURE SELECTIVE EPITAXIAL GROWTH

#906
20090053536
2009-02-26

Methods for forming passivated semiconductor nanoparticles

#907
20090026496
2009-01-29

Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor deposition

#908
20090011579
2009-01-08

Quantum dot array and production method therefor, and dot array element and production method therefor

#909
20090011578
2009-01-08

Methods to fabricate MOSFET devices using a selective deposition process

#910
20090011565
2009-01-08

Field effect transistor structure with abrupt source/drain junctions

#911
20080315254
2008-12-25

Semiconductor device fabrication method, semiconductor device, and semiconductor layer formation method

#912
20080311393
2008-12-18

Substrate for epitaxy and method of preparing the same

#913
20080308907
2008-12-18

Planar nonpolar m-plane group III nitride films grown on miscut substrates

#914
20080286957
2008-11-20

METHOD FORMING EPITAXIAL SILICON STRUCTURE

#915
20080272391
2008-11-06

Silicon compatible integrated light communicator

#916
20080246121
2008-10-09

Method of fabricating a device with a concentration gradient and the corresponding device

#917
20080233722
2008-09-25

METHOD OF FORMING SELECTIVE AREA COMPOUND SEMICONDUCTOR EPITAXIAL LAYER

#918
20080182397
2008-07-31

Selective epitaxy process control

#919
20080164493
2008-07-10

Structures containing electrodeposited germanium and methods for their fabrication

#920
20080163814
2008-07-10

CRYSTAL GROWTH OF M-PLANE AND SEMIPOLAR PLANES OF (Al, In, Ga, B)N ON VARIOUS SUBSTRATES

#921
20080160726
2008-07-03

Methods of fabricating semiconductor devices including channel layers having improved defect density and surface roughness characteristics

#922
20080150086
2008-06-26

Nitride based semiconductor device and process for preparing the same

#923
20080138939
2008-06-12

Formation of in-situ phosphorus doped epitaxial layer containing silicon and carbon

#924
20080124899
2008-05-29

Method of improving a surface of a semiconductor substrate

#925
20080113186
2008-05-15

Method for growing Si-Ge semiconductor materials and devices on substrates

#926
20080073641
2008-03-27

Quantum tunneling devices and circuits with lattice-mismatched semiconductor structures

#927
20080044932
2008-02-21

Carbon precursors for use during silicon epitaxial film formation

#928
20080036038
2008-02-14

Pulsed growth of catalyst-free growth of GaN nanowires and application in group III nitride semiconductor bulk material

#929
20080023770
2008-01-31

Stacked semiconductor devices and methods of manufacturing the same

#930
20080017896
2008-01-24

Embedded semiconductor component

#931
20070287272
2007-12-13

Selective epitaxial formation of semiconductor films

#932
20070287268
2007-12-13

Vapor-phase growth method, semiconductor manufacturing method and semiconductor device manufacturing method

#933
20070278610
2007-12-06

Semiconductor device with SEG film active region

#934
20070252136
2007-11-01

Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors and fabricating such devices

#935
20070249114
2007-10-25

Method of making strained semiconductor transistors having lattice-mismatched semiconductor regions underlying source and drain regions

#936
20070217460
2007-09-20

Nitride semiconductor device and process for producing the same

#937
20070207596
2007-09-06

Selective epitaxy process with alternating gas supply

#938
20070202635
2007-08-30

Multi-orientation semiconductor-on-insulator (SOI) substrate, and method of fabricating same

#939
20070170148
2007-07-26

Methods for in-situ generation of reactive etch and growth specie in film formation processes

#940
20070152236
2007-07-05

Semiconductor nanocrystal heterostructures

#941
20070134880
2007-06-14

Methods of manufacturing field effect transistors having elevated source/drain regions

#942
20070082455
2007-04-12

Manufacturing method of semiconductor substrate

#943
20070082451
2007-04-12

Methods to fabricate MOSFET devices using a selective deposition process

#944
20070051961
2007-03-08

Nitride semiconductor light-emitting device

#945
20070048956
2007-03-01

Interrupted deposition process for selective deposition of Si-containing films

#946
20070048492
2007-03-01

Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors, and fabricating such devices

#947
20070045610
2007-03-01

Transistor device with strained germanium (Ge) layer by selectively growth and fabricating method thereof

#948
20070042569
2007-02-22

Low temperature formation of patterned epitaxial Si containing films

#949
20070032052
2007-02-08

Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors, and fabricating such devices

#950
20070032051
2007-02-08

Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors, and fabricating such devices

#951
20070032023
2007-02-08

Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors, and fabricating such devices

#952
20070026645
2007-02-01

Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors, and fabricating such devices

#953
20060286775
2006-12-21

Method for forming silicon-containing materials during a photoexcitation deposition process

#954
20060269688
2006-11-30

Electrochemical method for the direct nanostructured deposition of material onto a substrate, and semiconductor component produced according to said method

#955
20060240630
2006-10-26

Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor deposition

#956
20060236937
2006-10-26

System and method for depositing a material on a substrate

#957
20060234504
2006-10-19

Selective deposition of silicon-containing films

#958
20060234488
2006-10-19

Methods of selective deposition of heavily doped epitaxial SiGe

#959
20060220153
2006-10-05

Method of fabricating a field effect transistor structure with abrupt source/drain junctions

#960
20060216876
2006-09-28

Selective epitaxy process with alternating gas supply

#961
20060205194
2006-09-14

Methods of depositing electrically active doped crystalline Si-containing films

#962
20060198966
2006-09-07

Method for forming a silicon-containing film

#963
20060163646
2006-07-27

Method of forming a nonvolatile memory device using semiconductor nanoparticles

#964
20060157677
2006-07-20

Compositions for forming a semiconducting and/or silicon-containing film, and structures formed therefrom

#965
20060154036
2006-07-13

Compositions and methods for forming a semiconducting and/or silicon-containing film, and structures formed therefrom

#966
20060115934
2006-06-01

Selective epitaxy process with alternating gas supply

#967
20060113596
2006-06-01

Single crystal substrate and method of fabricating the same

#968
20060091500
2006-05-04

Nitride based semiconductor device and process for preparing the same

#969
20060057749
2006-03-16

Template type substrate and a method of preparing the same

#970
20060056472
2006-03-16

Quantum nano-structure semiconductor laser

#971
20060054075
2006-03-16

Substrate for epitaxy and method of preparing the same

#972
20060008956
2006-01-12

Method for manufacturing thin film transistor, electro-optical device and electronic apparatus

#973
20050279997
2005-12-22

Methods of selectively forming epitaxial semiconductor layer on single crystalline semiconductor and semiconductor devices fabricated using the same

#974
20050253220
2005-11-17

Localized synthesis and self-assembly of nanostructures

#975
20050250298
2005-11-10

In situ doped epitaxial films

#976
20050164432
2005-07-28

Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors and fabricating such devices

#977
20050158931
2005-07-21

Method of making strained semiconductor transistors having lattice-mismatched semiconductor regions underlying source and drain regions

#978
20050136584
2005-06-23

Strained transistor integration for CMOS

#979
20050079692
2005-04-14

Methods to fabricate MOSFET devices using selective deposition process

#980
20050079691
2005-04-14

Methods of selective deposition of heavily doped epitaxial SiGe

#981
20050037526
2005-02-17

Nitride semiconductor substrate production method thereof and semiconductor optical device using the same

#982
20050029601
2005-02-10

Structure and method of making strained semiconductor CMOS transistors having lattice-mismatched semiconductor regions underlying source and drain regions

#983
20050026398
2005-02-03

Method of making group III nitride-based compound semiconductor

#984
20050012146
2005-01-20

Method of fabricating a field effect transistor structure with abrupt source/drain junctions

#985
20050008880
2005-01-13

Compositions and methods for forming a semiconducting and/or silicon-containing film, and structures formed therefrom

#986
16457694
2020-11-03

Non-volatile memory with storage nodes having a radius of curvature

#987
16453960
2020-04-28

Three-dimensional memory devices having transferred interconnect layer and methods for forming the same

#988
16407319
2020-07-28

Three dimensional memory device fabricating method and applications thereof

#989
16196026
2020-04-21

Three-dimensional memory device having vertical semiconductor channels including source-side boron-doped pockets and methods of making the same

#990
16184984
2019-07-30

Methods for forming a germanium island using selective epitaxial growth and a sacrificial filling layer

#991
16035330
2019-11-12

Method of characterizing the anisotropic, complex dielectric constant for materials with small dimensions

#992
15882031
2019-06-25

Uniformity tuning of variable-height features formed in trenches

#993
15840090
2019-04-09

Three-dimensional memory device containing structurally reinforced pedestal channel portions and methods of making the same

#994
15838427
2019-01-29

Semiconductor device and method for manufacturing same

#995
15832696
2019-04-02

Method for fabricating metal replacement gate semiconductor device using dummy gate and composite spacer structure

#996
15821344
2019-02-26

Semiconductor structure and manufacturing method thereof

#997
15717972
2018-12-11

Fin-type field effect transistor structure and manufacturing method thereof

#998
15676300
2018-08-14

Vertical-transport field-effect transistors with an etched-through source/drain cavity

#999
15664032
2018-11-27

Epitaxy source/drain regions of FinFETs and method forming same

#1000
15641236
2018-08-07

Semiconductor device and method of forming the same

#1001
15619923
2018-10-09

FinFET with sigma recessed source/drain and un-doped buffer layer epitaxy for uniform junction formation

#1002
15483256
2018-03-20

Doping channels of edge cells to provide uniform programming speed and reduce read disturb

#1003
15352528
2017-04-25

Method for manufacturing semiconductor device with epitaxial structure

#1004
15251435
2017-08-08

Almost defect-free active channel region

#1005
15226929
2017-06-20

Method of fabricating semiconductor device

#1006
15214467
2017-08-29

Method of fabricating epitaxial layer

#1007
15212682
2017-06-06

Method of forming memory cell film

#1008
15130527
2017-07-18

One-dimensional nanostructure growth on graphene and devices thereof

#1009
15095477
2017-08-15

Method of forming a III-V compound semiconductor channel post replacement gate

#1010
15078789
2016-11-22

Integration method for a vertical nanowire transistor

#1011
15042211
2016-11-22

Elimination of defects in long aspect ratio trapping trench structures

#1012
15012968
2017-04-04

Strained silicon germanium fin with block source/drain epitaxy and improved overlay capacitance

#1013
14977602
2016-12-27

Semiconductor device with epitaxial structure and manufacturing method thereof

#1014
14974123
2017-02-14

Capacitor in strain relaxed buffer

#1015
14964989
2016-06-07

Nanowire semiconductor device

#1016
14964968
2016-08-30

Nanowire field effect transistor (FET) and method for fabricating the same

#1017
14963740
2016-11-15

Tall strained high percentage silicon germanium fins for CMOS

#1018
14963283
2017-02-14

Elimination of defects in long aspect ratio trapping trench structures

#1019
14949964
2017-01-17

Asymmetric multi-gate FinFET

#1020
14947444
2016-08-02

Perfectly shaped controlled nanowires

#1021
14944770
2017-02-07

Enhanced defect reduction for heteroepitaxy by seed shape engineering

#1022
14942980
2017-01-24

Fin field effect transistor and method for fabricating the same

#1023
14941885
2017-03-21

FinFET fabrication by forming isolation trenches prior to fin formation

#1024
14930107
2017-04-04

Epitaxial semiconductor fuse for FinFET structure

#1025
14859644
2016-06-14

Punch through stopper for semiconductor device

#1026
14840960
2017-01-17

Structure and method for compressively strained silicon germanium fins for pFET devices and tensily strained silicon fins for nFET devices

#1027
14813292
2016-08-23

Compact FDSOI device with Bulex contact extending through buried insulating layer adjacent gate structure for back-bias

#1028
14745999
2016-05-31

Integrated circuit having dual material CMOS integration and method to fabricate same

#1029
14744078
2016-05-24

Silicon-on-insulator substrates having selectively formed strained and relaxed device regions

#1030
14692912
2016-08-30

Semiconductor structure and method for manufacturing the same

#1031
14666520
2016-07-12

III-V compound and germanium compound nanowire suspension with germanium-containing release layer

#1032
14645503
2016-07-12

Asymmetric FET

#1033
14465365
2016-01-19

finFETs containing improved strain benefit and self aligned trench isolation structures