207203 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AB compounds with or without impurities, e.g. doping materials; Bombardment with radiation using natural radiation, e.g. alpha, beta or gamma radiation
Method of manufacturing a semiconductor device in which a lifetime of carriers is controlled
#2Method for removing crystal originated particles from a crystalline silicon body using an etch process
#3Depositing material into high aspect ratio structures
#4Semiconductor device and semiconductor device manufacturing method
#5Method for removing crystal originated particles from a crystalline silicon body
#6Increasing the doping efficiency during proton irradiation
#7Processing a wafer for an electronic circuit
#8SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME
#9Manufacturing method of silicon wafer