207229 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AB compounds with or without impurities, e.g. doping materials; Treatment of semiconductor bodies using processes or apparatus not provided for in groups - to form insulating layers thereon, e.g. for masking or by using photolithographic techniques ; After treatment of these layers; Selection of materials for these layers Organic layers, e.g. photoresist
Enhanced thin film deposition
#2Upper-layer film forming composition and method for producing a phase-separated pattern
#3Enhanced thin film deposition
#4Enhanced thin film deposition
#5Process for manufacturing a combination anti-theft and tracking tag
#6Silicone structure-bearing polymer, negative resist composition, photo-curable dry film, patterning process, and electric/electronic part-protecting film
#7Method of forming substrate pattern
#8Optoelectronic component comprising a transparent coupling-out element
#9Manufacturing method for pattern multilayer body and mask set
#10Method of producing solar cell
#11Method and equipment for removing photoresist residue after dry etch
#12Photoresist composition and method of manufacturing display device using same
#13Gas switching section including valves having different flow coefficients for gas distribution system
#14Method of forming a pattern
#15METHOD FOR FORMING A PATTERN
#16Positive photosensitive resin composition for spray coating and method for producing through electrode using the same
#17Method for forming Cu wiring
#18Inhibiting propagation of imperfections in semiconductor devices
#19Methods of patterning substrates
#20Enhanced thin film deposition
#21APPARATUS TO CONDUCT SPIN-ON FILM PROCESSING
#22Thermally imageable dielectric layers, thermal transfer donors and receivers
#23STABILIZATION OF BICYCLOHEPTADIENE
#24Formulations for voltage switchable dielectric materials having a stepped voltage response and methods for making the same
#25Selective polymer growth on a semiconductor substrate
#26Polybenzoxazole precursor, photosensitive resin composition using the same, and manufacturing method of semiconductor device
#27Metal capacitor and method of making the same including dielectric layer of different mechanical strength and dielectric constant regions
#28Metal capacitor and method of making the same including dielectric layer of different mechanical strength regions
#29Gas switching section including valves having different flow coefficients for gas distribution system
#30RESIN COMPOSITION FOR INSULATING LAYER
#31Electrodeposition of dielectric coatings on semiconductive substrates
#32INSULATING LAYER, ORGANIC THIN FILM TRANSISTOR USING THE INSULATING LAYER, AND METHOD OF FABRICATING THE ORGANIC THIN FILM TRANSISTOR
#33Method of fine patterning semiconductor device
#34Insulation material for integrated circuits and use of said integrated circuits
#35Methods of forming patterned photoresist layers over semiconductor substrates
#36Positive-type photosensitive resin composition, method for producing resist pattern, semiconductor device, and electronic device
#37Forming agent for gate insulating film of thin film transistor
#38On-track process for patterning hardmask by multiple dark field exposures
#39Semiconductor constructions
#40POSITIVE PHOTOSENSITIVE RESIN COMPOSITION FOR SPRAY COATING AND METHOD FOR PRODUCING THROUGH ELECTRODE USING THE SAME
#41Organic insulating material, varnish for resin film using the same, resin film and semiconductor device
#42Polymerized film forming method and polymerized film forming apparatus
#43Forming thick metal interconnect structures for integrated circuits
#44Ink composition for forming insulating film and insulating film formed from the ink composition
#45TREATED SUBSTRATE HAVING HYDROPHILIC REGION AND WATER REPELLENT REGION, AND PROCESS FOR PRODUCING IT
#46Epoxy-containing polymer, photo-curable resin composition, patterning process, and electric/electronic part protective film
#47Formulations for voltage switchable dielectric materials having a stepped voltage response and methods for making the same
#48Method of forming a trench isolation
#49Materials and methods for stress reduction in semiconductor wafer passivation layers
#50Sacrificial inorganic polymer intermetal dielectric damascene wire and via liner
#51RESIST PATTERN AND REFLOW TECHNOLOGY
#52Film forming apparatus and film forming method
#53APPARATUS FOR TREATING SURFACE AND METHOD OF TREATING SURFACE
#54Method for reducing amine based contaminants
#55Photosensitive insulating resin composition, hardening product thereof, and circuit board equipped therewith
#56Formulations for voltage switchable dielectric material having a stepped voltage response and methods for making the same
#57High rate selective polymer growth on a substrate
#58Thermally imageable dielectric layers, thermal transfer donors and receivers
#59Circuit device including a nano-composite dielectric film
#60ORGANIC TRANSISTOR AND MANUFACTURING METHOD THEREOF
#61FERROELECTRIC MATERIAL AND METHOD OF FORMING FERROELECTRIC LAYER USING THE SAME
#62Magnetic random access memory
#63TREATED SUBSTRATE HAVING HYDROPHILIC REGION AND WATER REPELLENT REGION, AND PROCESS FOR PRODUCING IT
#64Process for producing semiconductor device
#65MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, INSULATING FILM FOR SEMICONDUCTOR DEVICE, AND MANUFACTURING APPARATUS OF THE SAME
#66Method for forming a pattern on a semiconductor device using an organic hard mask
#67Electrical passivation of silicon-containing surfaces using organic layers
#68Reducing defects in electronic switching devices
#69Stabilization of Bicycloheptadiene
#70Gate insulating film forming agent for thin-film transistor
#71Polymer for forming insulating film, composition for forming insulating film, insulating film, and electronic device having same
#72INTERLAYER INSULATION FILM, INTERCONNECT STRUCTURE, AND METHODS OF MANUFACTURING THEM
#73Metal capacitor and method of making the same
#74Photosensitive resin composition, process for producing patterned hardened film with use thereof and electronic part
#75Selective high-k dielectric film deposition for semiconductor device
#76Sidewall forming processes
#77PHOTOSENSITIVE RESIN COMPOSITION, CURED FILM, PROTECTIVE FILM, INSULATING FILM, SEMICONDUCTOR DEVICE AND DISPLAY DEVICE USING THE SAME
#78Nanoporous media with lamellar structures
#79METHOD FOR FORMING A PATTERN
#80DUAL DAMASCENE VIA FILLING COMPOSITION
#81Source material for preparing low dielectric constant material
#82ORGANIC INSULATING MATERIAL, VARNISH FOR RESIN FILM USING THE SAME, RESIN FILM AND SEMICONDUCTOR DEVICE
#83Method of preparing an electrically insulating film and application for the metallization of vias
#84System and method to fabricate magnetic random access memory
#85ORGANIC INSULATING MATERIALS, VARNISHES FOR ORGANIC INSULATING FILM EMPLOYING THEM, ORGANIC INSULATING FILMS AND SEMICONDUCTOR DEVICES
#86Semiconductor device and manufacturing method therefor
#87Mesa type semiconductor device and manufacturing method thereof
#88Selective high-k dielectric film deposition for semiconductor device
#89Functionalized, hydrogen-passivated silicon surfaces
#90Spin-on film processing using acoustic radiation pressure
#91Method of fine patterning semiconductor device
#92Forming thick metal interconnect structures for integrated circuits
#93Electrodeposition of dielectric coatings on semiconductive substrates
#94Pattern forming method and method of manufacturing semiconductor device by using the same
#95Resin composition, varnish, resin film and semiconductor device
#96Polymer interlayer dielectric and passivation materials for a microelectronic device
#97Semiconductor device
#98Coating process and equipment for reduced resist consumption
#99METHOD OF FORMING FINE PATTERN USING BLOCK COPOLYMER
#100On-track process for patterning hardmask by multiple dark field exposures
#101Method of fine patterning semiconductor device
#102OPTIMIZED SiCN CAPPING LAYER
#103Dielectric nanostructure and method for its manufacture
#104Organic transistor and manufacturing method thereof
#105Silicon-containing resist underlayer coating forming composition for forming photo-crosslinking cured resist underlayer coating
#106MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE AND MANUFACTURING APPARATUS FOR SEMICONDUCTOR DEVICE
#107METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#108Method of manufacturing semiconductor device
#109Insulating film-forming composition
#110Resin composition, varnish, resin film and semiconductor device using the same
#111Over-passivation process of forming polymer layer over IC chip
#112METHOD OF FORMING A DUAL-DAMASCENE STRUCTURE USING AN UNDERLAYER
#113Self-assembled sidewall spacer
#114Composition for low dielectric material, low dielectric material and method for production thereof
#115METHOD OF PREPARING CROSS-LINKED ORGANIC GLASSES FOR AIR-GAP SACRIFICIAL LAYERS
#116Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD)
#117Manufacturing method for wiring
#118Microelectronic device
#119METHOD AND APPARATUS FOR BATCH PROCESSING IN A VERTICAL REACTOR
#120Use of a plasma source to form a layer during the formation of a semiconductor device
#121Disposable organic spacers
#122Treated substrate having hydrophilic region and water repellent region, and process for producing it
#123Thin-film materials, thin films and producing method thereof
#124Methods of patterning photoresist, and methods of forming semiconductor constructions
#125Device having high aspect-ratio via structure in low-dielectric material and method for manufacturing the same
#126Semiconductor substrates including vias of nonuniform cross-section and associated structures
#127Resist pattern and reflow technology
#128Photoresist composition and method of manufacturing a thin-film transistor substrate using the same
#129Insulating film for semiconductor integrated circuit
#130Heat-resistant photosensitive resin composition, method for forming pattern using the composition, and electronic part
#131Photosensitive composition, and cured relief pattern production method and semiconductor device using the same
#132Chemical oxide removal of plasma damaged SiCOH low k dielectrics
#133Method of manufacturing semiconductor device
#134Benzoxazole resin precursor, polybenzoxazole resin, resin film and semiconductor device
#135Composite photoresist structure
#136Low-Dielectric Constant Cryptocrystal Layers And Nanostructures
#137Polymers with high internal free volume
#138Silphenylene-bearing polymer, photo-curable resin composition, patterning process, and substrate circuit protective film
#139Semiconductor wafer with improved crack protection
#140COATING TREATMENT APPARATUS, SUBSTRATE TREATMENT SYSTEM, COATING TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM
#141COMPOSITION FOR FORMING LOW-DIELECTRIC-CONSTANT FILM, INSULATING FILM, AND ELECTRONIC DEVICE
#142Multilayered interconnect structure and method for fabricating the same
#143Glue layer for hydrofluorocarbon etch
#144METHOD FOR MAKING ELECTRONIC DEVICES HAVING A DIELECTRIC LAYER SURFACE TREATMENT
#145POROUS COMPOSITION OF MATTER, AND METHOD OF MAKING SAME
#146POLYMER FOR HARD MASK OF SEMICONDUCTOR DEVICE AND COMPOSITION CONTAINING THE SAME
#147UV CURABLE COMPOSITION FOR FORMING DIELECTRIC COATINGS AND RELATED METHOD
#148Linked periodic networks of alternating carbon and inorganic clusters for use as low dielectric constant materials
#149Organic semiconductor device, process for producing the same, and organic semiconductor apparatus
#150ELECTRON BEAM MODIFICATION OF CVD DEPOSITED LOW DIELECTRIC CONSTANT MATERIALS
#151Line end shortening reduction during etch
#152Film forming composition, insulating film, and electronic device
#153PRODUCTION METHOD OF INSULATING FILM, INSULATING FILM, STACKED PRODUCT AND ELECTRONIC DEVICE
#154Polybenzoxazole precursor, photosensitive resin composition using the same, and manufacturing method of semiconductor device
#155Method of creating photolithographic structures with developer-trimmed hard mask
#156Patterned deposition using compressed carbon dioxide
#157Insulating layer, organic thin film transistor using the insulating layer, and method of fabricating the organic thin film transistor
#158Method of forming an insulative film
#159Laminated body and semiconductor device
#160Low dielectric constant materials prepared from soluble fullerene clusters
#161Method for high resolution patterning using soft X-ray, process for preparing nano device using the method
#162Coatings, and methods and devices for the manufacture thereof
#163Sacrificial inorganic polymer intermetal dielectric damascene wire and via liner
#164Porous inorganic solids for use as low dielectric constant materials
#165Semiconductor device and manufacturing method for the same
#166Multilayer device with organic and inorganic dielectric material
#167PROCESSING METHOD
#168Underlayer coating forming composition for lithography containing cyclodextrin compound
#169Method of forming a component having dielectric sub-layers
#170LIKE INTEGRATED CIRCUIT DEVICES WITH DIFFERENT DEPTH
#171Deposition of Polymeric Materials and Precursors Therefor
#172Coating Film Forming Apparatus and Coating Film Forming Method
#173Method of making a molecule-surface interface
#174Chemical oxide removal of plasma damaged SiCOH low k dielectrics
#175Dielectric, display equipped with dielectric, and method for manufacturing said dielectric
#176Substrate for electronic device capable of suppressing fluorine atoms exposed at the surface of insulating film from reacting with water and method for processing same
#177Method of forming carbon polymer film using plasma CVD
#178Material for forming insulating film with low dielectric constant, low dielectric insulating film, method for forming low dielectric insulating film and semiconductor device
#179Method of selective removal of organophosphonic acid molecules from their self-assembled monolayer on Si substrates
#180Methods of patterning photoresist, and methods of forming semiconductor constructions
#181Manufacturing method for wiring
#182Gas switching section including valves having different flow coefficients for gas distribution system
#183Enhanced thin film deposition
#184Polymer for hard mask of semiconductor device and composition containing the same
#185Structure and method to prevent charge damage from e-beam curing process
#186Semiconductor substrate surface protection method
#187Use of a plasma source to form a layer during the formation of a semiconductor device
#188Method for producing reactive intermediates for transport polymerization
#189Dielectric media including surface-treated metal oxide particles
#190Post exposure resist bake
#191Method for manufacturing insulating resin layer, substrate for electro-optical devices, method for manufacturing electro-optical device, and electro-optical device
#192Electromagnetic treatment in atmospheric-plasma coating process
#193Dry etching method
#194Gas jet reduction of iso-dense field thickness bias for gapfill process
#195Sacrificial inorganic polymer intermetal dielectric damascene wire and via liner
#196Composition of polyimide and sterically-hindered hydrophobic epoxy
#197Photosensitive polyimide compositions
#198Etching technique to planarize a multi-layer structure
#199Deposition technique to planarize a multi-layer structure
#200Like integrated circuit devices with different depth
#201METHODS OF FABRICATING A SEMICONDUCTOR DEVICE USING A PHOTOSENSITIVE POLYIMIDE LAYER AND SEMICONDUCTOR DEVICES FABRICATED THEREBY
#202After deposition method of thinning film to reduce pinhole defects
#203Photosensitive insulating resin composition and cured product thereof
#204Method for reducing amine based contaminants
#205Repairing method for low-k dielectric materials
#206Semiconductor device and method of processing a semiconductor substrate
#207Sacrificial benzocyclobutene copolymers for making air gap semiconductor devices
#208Semiconductor substrates including vias of nonuniform cross section, methods of forming and associated structures
#209Method of fabricating a semiconductor device
#210Method of manufacturing a semiconductor device
#211Method of fabricating semiconductor integrated circuits
#212Method for forming high-resolution pattern and substrate having prepattern formed thereby
#213Method for forming high-resolution pattern with direct writing means
#214Method and apparatus for treating a substrate with dense fluid and plasma
#215Semiconductor device and the manufacturing method for the same
#216Multifunctional unsymmetrically substituted monomers and polyarylene compositions therefrom
#217Sacrificial styrene benzocyclobutene copolymers for making air gap semiconductor devices
#218Electronic apparatus having polynorbornene foam insulation
#219Method of structuring of a subtrate
#220Forming semiconductor structures
#221Method for decreasing chemical diffusion in parylene and trapping at parylene-to-parylene interfaces
#222Methods of forming patterned photoresist layers over semiconductor substrates
#223Method of manufacturing mask blank
#224Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD)
#225Sacrificial benzocyclobutene/norbornene polymers for making air gap semiconductor devices
#226Micropattern forming material and method for forming micropattern
#227Atmospheric glow discharge with concurrent coating deposition
#228Nanoporous media with lamellar structures
#229Organic polymers, electronic devices, and methods
#230Method of forming fine pitch photoresist patterns using double patterning technique
#231Method for forming a resist film on a substrate having non-uniform topography
#232Methods for producing a dielectric, dielectric having self-generating pores, monomer for porous dielectrics, process for preparing poly-o-hydroxyamides, process for preparing ploybenzoxazoles, and processes for producing an electronic component
#233Method of enhancing adhesion between dielectric layers
#234Film-forming composition, insulating film obtained from the composition and electronic device having the same
#235Method of eliminating photoresist poisoning in damascene applications
#236Insulating film, process for producing the same and electronic device using the same
#237Material for forming insulating film with low dielectric constant, low dielectric insulating film, method for forming low dielectric insulating film and semiconductor device
#238Composition for an organic hard mask and method for forming a pattern on a semiconductor device using the same
#239Integrated high voltage capacitor having a top-level dielectric layer and a method of manufacture therefor
#240METHOD OF FORMING CHIP-TYPE LOW-K DIELECTRIC LAYER
#241Dielectric material
#242Resin composition, heat-resistant resin paste and semiconductor device using these and method of preparing the same
#243Composition for forming low-dielectric constant film comprising fullerene, low-dielectric constant film formed from the composition and method for forming the low-dielectric constant film
#244CHsacrificial layer for cu/low-k interconnects
#245Resist application method and device
#246Organic insulator, organic thin film transistor array panel including organic insulator, and manufacturing method therefor
#247Sacrificial layers comprising water-soluble compounds, uses and methods of production thereof
#248After deposition method of thinning film to reduce pinhole defects
#249Water-soluble composition for coating photoresist pattern and method for forming fine patterns using the same
#250Apparatus and process for treating dielectric materials
#251Mechanically robust dielectric film and stack
#252Organic-inorganic composite insulating material for electronic element, method of producing same and field-effect transistor comprising same
#253Method for fabricating semiconductor device
#254Device for supplying a solution onto a substrate and method for supplying the solution onto the substrate by using the same
#255Selectively growing a polymeric material on a semiconductor substrate
#256Method of improving via filling uniformity in isolated and dense via-pattern regions
#257Planarization films for advanced microelectronic applications and devices and methods of production thereof
#258Photoresist application over hydrophobic surfaces
#259SEMICONDUCTOR PROCESS AND PHOTORESIST COATING PROCESS
#260Cyclic olefin polymers and catalyst for semiconductor applications
#261Organic electroluminescent device and method of manufacturing the same
#262Method of forming a component having dielectric sub-layers
#263Display and method for fabricating the same
#264Method for forming a pattern
#265Method for making electronic devices having a dielectric layer surface treatment
#266Method of compensating for a volumetric shrinkage of a material disposed upon a substrate to form a substantially planar structure therefrom
#267Method of patterning surfaces while providing greater control of recess anisotropy
#268Patterning substrates employing multi-film layers defining etch-differential interfaces
#269Method of forming a solution processed device
#270Reverse tone patterning on surfaces having planarity perturbations
#271Method for making hybrid dielectric film
#272Top anti-reflective coating composition and method for pattern formation of semiconductor device using the same
#273Porous composite polymer dielectric film
#274Alkali-soluble gap fill material forming composition for lithography
#275Film
#276Low dielectric constant film material, film and semiconductor device using such material
#277Method and apparatus for providing shear-induced alignment of nanostructure in thin films
#278Organic thin film transistor with polymeric interface
#279Boron-doped amorphous carbon film for use as a hard etch mask during the formation of a semiconductor device
#280Electrical passivation of silicon-containing surfaces using organic layers
#281Organic thin film transistor with polymeric interface
#282Method for polishing organic film on semiconductor substrate by use of resin particles, and slurry
#283Organic semicounductor device, process for producing the same, and organic semiconductor apparatus
#284Method of preventing photoresist poisoning of a low-dielectric-constant insulator
#285Composition for low dielectric material, low dielectric material and method for production thereof
#286Method for forming a plane structure
#287Reactor for producing reactive intermediates for low dielectric constant polymer thin films
#288Material for forming insulating film with low dielectric constant, low dielectric insulating film, method for forming low dielectric insulating film and semiconductor device
#289Final passivation scheme for integrated circuits
#290Surface modification of a porous organic material through the use of a supercritical fluid
#291Porous materials
#292Over-passivation process of forming polymer layer over IC chip
#293Substrate treatment method, substrate treatment apparatus, and method of manufacturing semiconductor device
#294Resist pattern and reflow technology
#295Selective provision of a diblock copolymer material
#296Organic semiconductor element, production method therefor and organic semiconductor device
#297Method for synthesizing polymeric material, method for forming polymer thin film and method for forming interlayer insulating film
#298Method to reduce photoresist pattern collapse by controlled surface microroughening
#299Chemical treatment of material surfaces
#300Selectively converted inter-layer dielectric