207345 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere; Apparatus not specifically provided for elsewhere; Apparatus for manufacture or treatment; Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one ion or electron beam chamber
HIGH-THROUGHPUT LOAD LOCK CHAMBER
#2Semiconductor Processing System with Horizontal Scan
#3SELECTIVE PASSIVATION AND SELECTIVE DEPOSITION
#4ION IMPLANTATION APPARATUS
#5GROWTH OF THIN OXIDE LAYER IN VERTICAL CHANNEL STRUCTURE
#6WAFER ALIGNMENT, CLEANLINESS, AND SURFACE QUALITY VERIFICATION USING LASER LIGHT SCATTERING
#7LOW ENERGY TREATMENT TO PASSIVATE SiC SUBSTRATE DEFECTS
#8VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
#9SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING AN EMBEDDED CHAMBER
#10SUBSTRATE TRANSFER DEVICE
#11ION IMPLANTATION FOR REDUCED ROUGHNESS OF SILICON NITRIDE
#12SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD
#13CONTROL OF ENVIRONMENT WITHIN PROCESSING MODULES
#14Selective passivation and selective deposition
#15Warm Wafer After Ion Cryo-Implantation
#16VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
#17VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
#18Yttrium oxide based coating composition
#19Semiconductor processing tool and method of using an embedded chamber
#20Correcting component failures in ion implant semiconductor manufacturing tool
#21Method of processing dram
#22Processing of Semiconductors Using Vaporized Solvents
#23METHODS FOR IMPLANTING SEMICONDUCTOR SUBSTRATES
#24Selective passivation and selective deposition
#25VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
#26Ion implantation method and device
#27FLUORINATED COMPOSITIONS FOR ION SOURCE PERFORMANCE IMPROVEMENTS IN NITROGEN ION IMPLANTATION
#28Silicide film nucleation
#29WARM WAFER AFTER ION CRYO-IMPLANTATION
#30ACTIVE WORKPIECE HEATING OR COOLING FOR AN ION IMPLANTATION SYSTEM
#31Vacuum deposition system and method thereof
#32Yttrium oxide based coating composition
#33Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device
#34Method and apparatus for anisotropic pattern etching and treatment
#35Methods for the treatment of workpieces
#36Inspection system, lithographic apparatus, and inspection method
#37Method of processing DRAM
#38Pre-processing method, method for forming metal silicide and semiconductor processing apparatus
#39BEAMLINE ARCHITECTURE WITH INTEGRATED PLASMA PROCESSING
#40Correcting component failures in ion implant semiconductor manufacturing tool
#41Method of forming film stacks with reduced defects
#42Techniques and apparatus for unidirectional hole elongation using angled ion beams
#43Cryogenic electrostatic chuck
#44Physical vapor deposition (PVD) electrostatic chuck with improved thermal coupling for temperature sensitive processes
#45Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device
#46Plasma processing method and plasma processing apparatus
#47Selective passivation and selective deposition
#48Vacuum-integrated hardmask processes and apparatus
#49Vaccum deposition system and method thereof
#50Ion implantation method
#51Ion-ion plasma atomic layer etch process
#52Silicide film nucleation
#53Embedded features for interlocks using additive manufacturing
#54System for dynamically compensating position errors of a sample
#55Processing of semiconductors using vaporized solvents
#56Transparent halo for reduced particle generation
#57Localized electron beam induced deposition of silicon carbide
#58APPARATUS FOR FORMING A LAYER ON A SUBSTRATE AND METHOD OF FORMING AN AMORPHOUS SILICON LAYER ON A SUBSTRATE USING THE SAME
#59Vacuum-integrated hardmask processes and apparatus
#60Fixed position mask for workpiece edge treatment
#61Side opening unified pod
#62Semiconductor device manufacturing method, substrate processing apparatus and vacuum processing apparatus
#63DAMAGE FREE ENHANCEMENT OF DOPANT DIFFUSION INTO A SUBSTRATE
#64Wafer cooling system and method
#65Radiant heating presoak
#66ENGINEERING THE OPTICAL PROPERTIES OF AN INTEGRATED COMPUTATIONAL ELEMENT BY ION IMPLANTATION
#67Method for cooling semiconductor manufacturing apparatus and substrate support apparatus
#68Heating device and semiconductor manufacturing apparatus
#69Adjustable circumference electrostatic clamp
#70Cluster tool and manufacuturing method of semiconductor structure using the same
#71Vacuum-integrated hardmask processes and apparatus
#72Ion beam etching utilizing cryogenic wafer temperatures
#73Fluorinated compositions for ion source performance improvements in nitrogen ion implantation
#74INTEGRATED METROLOGY AND PROCESS TOOL TO ENABLE LOCAL STRESS/OVERLAY CORRECTION
#75Ion beam etching utilizing cryogenic wafer temperatures
#76High-throughput system and method for post-implantation single wafer warm-up
#77Deposition apparatus
#78High throughput serial wafer handling end station
#79Damage free enhancement of dopant diffusion into a substrate
#80Method for forming TiON film
#81Method and system for three-dimensional (3D) structure fill
#82Ion implantation apparatus and method for processing plurality of wafers using the same
#83Substrate treatment system, substrate transfer method and computer storage medium
#84Substrate treatment system, substrate transfer method and computer storage medium
#85Cable drive robot mechanism for exchanging samples
#86Ion Source for Metal Implantation and Methods Thereof
#87Transfer chamber and method for preventing adhesion of particle
#88Engineering the optical properties of an integrated computational element by ion implantation
#89MULTI-PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
#90ION BEAM ETCHING SYSTEM
#91System and method for moving workpieces between multiple vacuum environments
#92Integrated etch/clean for dielectric etch applications
#93Processing system containing an isolation region separating a deposition chamber from a treatment chamber
#94Side opening unified pod
#95High throughput heated ion implantation system and method
#96Method and apparatus for cooling wafer in ion implantation process
#97Ion beam etching system
#98Ion beam irradiation device
#99PATTERN FORMATION AND TRANSFER DIRECTLY ON SILICON BASED FILMS
#100Pinched plasma bridge flood gun for substrate charge neutralization
#101Method and system for three-dimensional (3D) structure fill
#102Litho cluster and modulization to enhance productivity
#103Optical heat source with restricted wavelengths for process heating
#104Ion beam etching system
#105Inspection system by charged particle beam and method of manufacturing devices using the system
#106Techniques to mitigate straggle damage to sensitive structures
#107High-throughput system and method for post-implantation single wafer warm-up
#108System and process to remove film from semiconductor devices
#109Ion Implantation Apparatus, Ion Implantation Method, and Semiconductor Device
#110In-vacuum high speed pre-chill and post-heat stations
#111Ion implantation apparatus and control method thereof
#112Ion supply device and workpiece processing system provided with the same
#113Wafer temperature correction system for ion implantation device
#114Substrate treatment system, substrate transfer method and computer storage medium
#115Substrate treatment system, substrate transfer method, and a non-transitory computer storage medium
#116High-throughput ion implanter
#117HIGH-THROUGHPUT WORKPIECE HANDLING
#118Workpiece handling system and methods of workpiece handling
#119System for magnetic shielding
#120System and method for treating substrate
#121Method and system for large scale manufacture of thin film photovoltaic devices using single-chamber configuration
#122Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration
#123Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration
#124Coating methods and apparatus
#125Method for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration
#126Apparatus for fabricating a flat panel display device and method thereof
#127Ion implantation system and ion implantation method using the same
#128Using vacuum ultra-violet (VUV) data in microwave sources
#129Using vacuum ultra-violet (VUV) data in radio frequency (RF) sources
#130Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions
#131Inspection system by charged particle beam and method of manufacturing devices using the system
#132Ion supply device
#133Post Implant Wafer Heating Using Light
#134Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration
#135Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration
#136Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration
#137ION IMPLANTATION APPARATUS, ION IMPLANTATION METHOD, AND SEMICONDUCTOR DEVICE
#138Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for implementing the method
#139Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions
#140Technique for low-temperature ion implantation
#141PROCESS AND DEVICE FOR SOLDERING IN THE VAPOR PHASE
#142Charged particle beam system
#143In vacuum optical wafer heater for cryogenic processing
#144Ion beam processing apparatus
#145Plasma processing method
#146Active particle trapping for process control
#147WORKPIECE HANDLING SYSTEM
#148Wafer temperature correction system for ion implantation device
#149Techniques for forming thin films by implantation with reduced channeling
#150Ion implanter
#151Method and system for moving wafer during scanning the wafer
#152METHODS OF THERMAL PROCESSING A SOLAR CELL
#153Substrate receiving method and controller
#154Charged particle beam apparatus
#155Transfer chamber and method for preventing adhesion of particle
#156MULTI-SEQUENCE FILM DEPOSITION AND GROWTH USING GAS CLUSTER ION BEAM PROCESSING
#157System and method for treating substrate
#158LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING DEVICE USING SAME
#159Advanced platform for processing crystalline silicon solar cells
#160Fluid delivery mechanism for vacuum wafer processing system
#161Race track configuration and method for wafering silicon solar substrates
#162Method and apparatus for charged particle beam inspection
#163ION-IMPLANTING APPARATUS
#164Plasma processing method
#165High-temperature ion implantation apparatus and methods of fabricating semiconductor devices using high-temperature ion implantation
#166Side opening unified pod
#167Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions
#168Inspection system by charged particle beam and method of manufacturing devices using the system
#169IN-LINE SYSTEM AND METHOD FOR MANUFACTURING A SEMICONDUCTOR PACKAGE
#170Airflow management for particle abatement in semiconductor manufacturing equipment
#171Plasma Processing Method
#172Active particle trapping for process control
#173High throughput serial wafer handling end station
#174TECHNIQUES FOR LOW-TEMPERATURE ION IMPLANTATION
#175Ion implanter with function of compensating wafer cut angle and ion implantation method using the same
#176Laser scanning apparatus and method using diffractive optical elements
#177Implanting with improved uniformity and angle control on tilted wafers
#178Substrate holding apparatus
#179Deposition reduction system for an ion implanter
#180Device for cleaning electrostatic chuck of ion implanter
#181Wafer holder and sample producing apparatus using it
#182High-temperature ion implantation apparatus and methods of fabricating semiconductor devices using high-temperature ion implantation
#183STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF MANUFACTURING SUBSTRATE
#184Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate
#185Method for fabricating semiconductor integrated circuit device
#186Technique for low-temperature ion implantation
#187Techniques for temperature-controlled ion implantation
#188Techniques for temperature-controlled ion implantation
#189Ribbon beam ion implanter cluster tool
#190Work-piece processing system
#191Inspection system by charged particle beam and method of manufacturing devices using the system
#192Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate
#193Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate
#194Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for implementing the method
#195HYBRID WAFER-HOLDER
#196Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions
#197Disk assembly of ion implanter
#198Charged particle beam apparatus
#199Doping device
#200Photoreactive removal of ion implanted resist
#201Substrate processing method
#202Methods and apparatus for enabling multiple process steps on a single substrate
#203Laser annealing method and laser annealing device
#204Wafer processing system, wafer processing method, and ion implantation system
#205Heating treatment device, heating treatment method and fabrication method of semiconductor device
#206Manufacturing method of semiconductor laser devices and manufacturing apparatus of the same
#207Charged particle beam processing apparatus
#208Ion implantation apparatus
#209Workpiece support structure for an ion beam implanter featuring spherical sliding seal vacuum feedthrough
#210Method of manufacturing a semiconductor device and semiconductor manufacturing apparatus
#211Scanning mechanism of an ion implanter
#212Work-piece processing system
#213Method for fabricating semiconductor integrated circuit device
#214Method for fabricating semiconductor integrated circuit device
#215Method of monitoring introduction of interfacial species
#216Automatic exchange of degraders in accelerated testing of computer chips
#217Ion implanting apparatus
#218Method of monitoring introduction on interfacial species
#219Damage free enhancement of dopant diffusion into a substrate