Patents-Review.com
ClassID:

207347 ⎘

H01L21/67225 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere; Apparatus not specifically provided for elsewhere; Apparatus for manufacture or treatment; Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one lithography chamber

Recent Application in this class:
#1
20250364284
2025-11-27

BUFFER CHAMBER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE CHAMBER

 #2
20250323051
2025-10-16

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING SYSTEM

 #3
20250246460
2025-07-31

INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTERNING

 #4
20250244676
2025-07-31

PHOTORESIST NOZZLE ULTRASONIC MONITORING SYSTEM AND METHOD OF OPERATING THE SAME

 #5
20250237944
2025-07-24

ANTI-SLIP COMPOSITIONS AND COMPONENTS FOR SEMICONDUCTOR WAFER HANDLING SYSTEMS

 #6
20250231490
2025-07-17

WAFER HOLDER APPARATUS, SYSTEM AND METHOD OF FORMING SAME

 #7
20250201586
2025-06-19

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD

 #8
20250140584
2025-05-01

SUBSTRATE TREATING APPARATUS WITH PARALLEL FIRST AND SECOND PARTS OF SUBSTRATE TREATMENT LINES ON MULTIPLE STORIES FOR SIMULTANEOUSLY TREATING A PLURALITY OF SUBSTRATES

 #9
20250130511
2025-04-24

COATING AND DEVELOPING DEVICE

 #10
20240395581
2024-11-28

SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING AN EMBEDDED CHAMBER

 #11
20240393705
2024-11-28

SUBSTRATE PROCESSING APPARATUS

 #12
20240385512
2024-11-21

CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYSTEM THEREOF

 #13
20240355644
2024-10-24

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD

 #14
20240347345
2024-10-17

SEMICONDUCTOR FABRICATION SYSTEM EMBEDDED WITH EFFECTIVE BAKING MODULE

 #15
20240312811
2024-09-19

TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES

 #16
20240249964
2024-07-25

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

 #17
20240242994
2024-07-18

CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

 #18
20240242985
2024-07-18

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #19
20240222165
2024-07-04

SUBSTRATE TREATING APPARATUS

 #20
20240222163
2024-07-04

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPMENT INCLUDING THE SAME

 #21
20240222155
2024-07-04

SUBSTRATE TREATING APPARATUS

 #22
20240213059
2024-06-27

SUBSTRATE PROCESSING APPARATUS AND METHOD

 #23
20240213055
2024-06-27

PHOTORESIST COATING APPARATUS

 #24
20240213048
2024-06-27

SUBSTRATE PROCESSING APPARATUS

 #25
20240203773
2024-06-20

SUBSTRATE TREATING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPMENT INCLUDING THE SAME

 #26
20240145272
2024-05-02

Integrated dry processes for patterning radiation photoresist patterning

 #27
20240112933
2024-04-04

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD USING THE SAME

 #28
20240047277
2024-02-08

FEED-FORWARD DEVICE FABRICATION

 #29
20240012325
2024-01-11

METHOD TO OPTIMIZE POST DEPOSITION BAKING CONDITION OF PHOTO RESISTIVE MATERIALS

 #30
20240006205
2024-01-04

SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

 #31
20230367206
2023-11-16

Cleaning method, method for forming semiconductor structure and system thereof

 #32
20230333531
2023-10-19

Treatment condition setting method, storage medium, and substrate treatment system

 #33
20230326814
2023-10-12

HYBRID PATTERNING-BONDING SEMICONDUCTOR TOOL

 #34
20230326767
2023-10-12

WAFER SHAPE CONTROL FOR W2W BONDING

 #35
20230290657
2023-09-14

Integrated dry processes for patterning radiation photoresist patterning

 #36
20230229133
2023-07-20

SEMICONDUCTOR MACHINE SYSTEM AND MANUFACTURING METHOD USING THEREOF

 #37
20230197481
2023-06-22

Apparatus and method for treating substrate including process chambers and transfer chamber

 #38
20230045336
2023-02-09

INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTERNING

 #39
20230024754
2023-01-26

PHOTOLITHOGRAPHY APPARATUS AND METHOD FOR FORMING PHOTORESIST PATTERN

 #40
20230007843
2023-01-12

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE

 #41
20220415680
2022-12-29

Substrate processing apparatus and substrate processing method

 #42
20220406629
2022-12-22

Semiconductor processing tool and method of using an embedded chamber

 #43
20220291580
2022-09-15

Cleaning method, method for forming semiconductor structure and system thereof

 #44
20220163834
2022-05-26

Structure and method of bi-layer pixel isolation in advanced LCOS back-plane

 #45
20220130693
2022-04-28

Semiconductor fabrication system embedded with effective baking module

 #46
20220093436
2022-03-24

MOVABLE ELECTRODE FOR PROCESS CHAMBER

 #47
20210358783
2021-11-18

Techniques for thermal treatment of electronic devices

 #48
20210272826
2021-09-02

Development processing apparatus and development processing method

 #49
20210232050
2021-07-29

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #50
20210200096
2021-07-01

Semiconductor apparatus and method for baking coating layer

 #51
20210134626
2021-05-06

Substrate treating apparatus with parallel first and second parts of substrate treatment lines on multiple stories for simultaneously treating a plurality of substrates

 #52
20210125863
2021-04-29

Platform and method of operating for integrated end-to-end fully self-aligned interconnect process

 #53
20210118730
2021-04-22

Platform and method of operating for integrated end-to-end fully self-aligned interconnect process

 #54
20210118711
2021-04-22

Substrate processing apparatus, substrate processing method and recording medium

 #55
20210103225
2021-04-08

Coating and developing apparatus and coating and developing method

 #56
20210096460
2021-04-01

Cleaning method, method for forming semiconductor structure and system thereof

 #57
20210072644
2021-03-11

Substrate treating apparatus and substrate treating method

 #58
20210039221
2021-02-11

SUBSTRATE WARPAGE CORRECTION METHOD, COMPUTER STORAGE MEDIUM, AND SUBSTRATE WARPAGE CORRECTION APPARATUS

 #59
20210028049
2021-01-28

Article transporter in semiconductor fabrication

 #60
20200393803
2020-12-17

Treatment condition setting method, storage medium, and substrate treatment system

 #61
20200357666
2020-11-12

Reducing line edge roughness and mitigating defects by wafer freezing

 #62
20200211880
2020-07-02

Substrate treating apparatus and substrate transporting method

 #63
20200203202
2020-06-25

Substrate processing apparatus, substrate processing method and recording medium

 #64
20200152475
2020-05-14

Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus

 #65
20200105563
2020-04-02

Reticle transfer system and method

 #66
20200098611
2020-03-26

Substrate treating apparatus and method for controlling substrate treating apparatus

 #67
20200098602
2020-03-26

Substrate treating apparatus and substrate treating method

 #68
20200096966
2020-03-26

Substrate processing capable of suppressing a decrease in throughput while reducing the impact on exposure treatment caused by warping of a substrate

 #69
20200090967
2020-03-19

Substrate processing apparatus, substrate processing method, and recording medium

 #70
20200089120
2020-03-19

Edge-exposure tool with an ultraviolet (UV) light emitting diode (LED)

 #71
20200083074
2020-03-12

Self-aware and correcting heterogenous platform incorporating integrated semiconductor processing modules and method for using same

 #72
20200081423
2020-03-12

Self-aware and correcting heterogenous platform incorporating integrated semiconductor processing modules and method for using same

 #73
20200064737
2020-02-27

SUBSTRATE PROCESSING APPARATUS AND METHOD

 #74
20200013649
2020-01-09

Techniques for thermal treatment of electronic devices

 #75
20190391499
2019-12-26

Lithographic apparatus, method of transferring a substrate and device manufacturing method

 #76
20190333790
2019-10-31

Apparatus for UV flowable dielectric

 #77
20190304812
2019-10-03

Semiconductor fabrication system embedded with effective baking module

 #78
20190295891
2019-09-26

Platform and method of operating for integrated end-to-end fully self-aligned interconnect process

 #79
20190295890
2019-09-26

Platform and method of operating for integrated end-to-end fully self-aligned interconnect process

 #80
20190295887
2019-09-26

Platform and method of operating for integrated end-to-end CMP-less interconnect process

 #81
20190295863
2019-09-26

Substrate treating apparatus

 #82
20190250513
2019-08-15

Edge-exposure tool with an ultraviolet (UV) light emitting diode (LED)

 #83
20190221455
2019-07-18

Apparatus for treating substrate

 #84
20190157129
2019-05-23

Article transferring method in semiconductor fabrication

 #85
20190115239
2019-04-18

Substrate alignment apparatus, substrate processing apparatus, and substrate processing method

 #86
20190109028
2019-04-11

Substrate transfer device, transfer method and photolithography apparatus

 #87
20190094697
2019-03-28

Edge-exposure tool with an ultraviolet (UV) light emitting diode (LED)

 #88
20190067132
2019-02-28

Method for lithographic process and lithographic system

 #89
20190067065
2019-02-28

Reticle transfer system and method

 #90
20190013221
2019-01-10

Method for conditioning a processing chamber for steady etching rate control

 #91
20180373154
2018-12-27

Substrate treating apparatus and substrate treating method

 #92
20180366356
2018-12-20

Substrate processing apparatus, substrate processing method and recording medium

 #93
20180364596
2018-12-20

Method for creating vacuum in load lock chamber

 #94
20180330977
2018-11-15

Method and system for balancing the electrostatic chucking force on a substrate

 #95
20180269094
2018-09-20

Side opening unified pod

 #96
20180269088
2018-09-20

Wafer processing apparatus, recording medium and wafer conveying method

 #97
20180269072
2018-09-20

Substrate processing method and computer storage medium

 #98
20180203359
2018-07-19

Mobile dispense device for chemicals used in micro-processing

 #99
20180182611
2018-06-28

Thermal treatment apparatus, thermal treatment method, and non-transitory computer storage medium

 #100
20180151343
2018-05-31

Substrate processing apparatus, substrate processing method and storage medium

 #101
20180143540
2018-05-24

Exposure apparatus, exposure method and storage medium

 #102
20180138650
2018-05-17

Laser chamber with metal damper member

 #103
20180095370
2018-04-05

Auxiliary exposure apparatus and exposure amount distribution acquisition method

 #104
20180076066
2018-03-15

Substrate processing method, substrate processing system and substrate processing apparatus

 #105
20180076056
2018-03-15

Etching device, substrate processing apparatus, etching method and substrate processing method

 #106
20180061690
2018-03-01

Substrate Processing Apparatus, Substrate Processing Method, and Recording Medium

 #107
20180025917
2018-01-25

Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus

 #108
20170316967
2017-11-02

APPARATUS AND METHODS FOR A MASK INVERTER

 #109
20170278714
2017-09-28

Control device, substrate processing system, substrate processing method, and program

 #110
20170263466
2017-09-14

Bottom processing

 #111
20170194174
2017-07-06

QUAD CHAMBER AND PLATFORM HAVING MULTIPLE QUAD CHAMBERS

 #112
20170140962
2017-05-18

Substrate treating apparatus

 #113
20170139399
2017-05-18

Substrate processing apparatus, substrate processing method and memory medium

 #114
20170137943
2017-05-18

Apparatus for UV flowable dielectric

 #115
20170110475
2017-04-20

HIGH ASPECT RATIO 3-D FLASH MEMORY DEVICE

 #116
20170108781
2017-04-20

Lithographic apparatus, method of transferring a substrate and device manufacturing method

 #117
20170073978
2017-03-16

Processing facility for manufacturing integrated circuits from semiconductor wafers as well as perforated panel for a processing facility

 #118
20170031245
2017-02-02

Substrate treatment system

 #119
20170025292
2017-01-26

LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

 #120
20170004983
2017-01-05

Apparatus and techniques for thermal treatment of electronic devices

 #121
20160372346
2016-12-22

Substrate treatment system, substrate transfer method and computer storage medium

 #122
20160372345
2016-12-22

Substrate treatment system, substrate transfer method and computer storage medium

 #123
20160358941
2016-12-08

Semiconductor device and manufacturing method thereof

 #124
20160282725
2016-09-29

Exposure device, substrate processing apparatus, exposure method for substrate and substrate processing method

 #125
20160279651
2016-09-29

Exposure device and substrate processing apparatus

 #126
20160203979
2016-07-14

Metal deposition on substrates

 #127
20160196994
2016-07-07

Reticle transfer system and method

 #128
20160163573
2016-06-09

SUBSTRATE TREATING APPARATUS WITH PARALLEL SUBSTRATE TREATMENT LINES

 #129
20160137427
2016-05-19

Load lock system and method for transferring substrates in a lithography system

 #130
20160079099
2016-03-17

Substrate treating apparatus with parallel gas supply pipes and a gas exhaust pipe

 #131
20160035608
2016-02-04

Side opening unified pod

 #132
20160004173
2016-01-07

Apparatus for transferring a substrate in a lithography system

 #133
20150357352
2015-12-10

Semiconductor device and manufacturing method thereof

 #134
20150321356
2015-11-12

Enclosure for a target processing machine

 #135
20150228512
2015-08-13

SUBSTRATE TREATMENT METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND SUBSTRATE TREATMENT SYSTEM

 #136
20150227047
2015-08-13

Semiconductor device manufacturing method and semiconductor device manufacturing apparatus

 #137
20150138525
2015-05-21

Object exchange method, exposure method, carrier system, exposure apparatus, and device manufacturing method

 #138
20150125968
2015-05-07

Optical system and method of use

 #139
20150090295
2015-04-02

APPARATUS AND METHODS FOR A MASK INVERTER

 #140
20150090294
2015-04-02

Methods and systems for improved mask processing

 #141
20150086923
2015-03-26

Substrate processing method

 #142
20150076371
2015-03-19

Litho cluster and modulization to enhance productivity

 #143
20140327890
2014-11-06

Coating and developing apparatus and method, and storage medium

 #144
20140218652
2014-08-07

Semiconductor device and manufacturing method thereof

 #145
20140120477
2014-05-01

Substrate processing apparatus

 #146
20140106281
2014-04-17

Substrate processing method

 #147
20140098354
2014-04-10

Reticle transfer system and method

 #148
20140004667
2014-01-02

Method for processing substrate and method for fabricating apparatus

 #149
20130252175
2013-09-26

Litho cluster and modulization to enhance productivity

 #150
20130112224
2013-05-09

Substrate treatment system, substrate transfer method and computer storage medium

 #151
20130044305
2013-02-21

Apparatus for transferring a substrate in a lithography system

 #152
20130042810
2013-02-21

Method and system for mask handling in high productivity chamber

 #153
20130034421
2013-02-07

Method of processing a substrate in a lithography system

 #154
20130026155
2013-01-31

Furnace system with case integrated cooling system

 #155
20130005056
2013-01-03

METHOD AND APPARATUS FOR PROCESSING WAFER EDGE PORTION

 #156
20120320361
2012-12-20

Cluster tool architecture for processing a substrate

 #157
20120307217
2012-12-06

System and method for treating substrate

 #158
20120299001
2012-11-29

Semiconductor device and manufacturing method thereof

 #159
20120268722
2012-10-25

Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector

 #160
20120251957
2012-10-04

Substrate transfer method for performing processes including photolithography sequence

 #161
20120231166
2012-09-13

Organic thin film deposition device, organic EL element manufacturing device, and organic thin film deposition method

 #162
20120219725
2012-08-30

Substrate Processing Apparatus And Method

 #163
20120180983
2012-07-19

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

 #164
20120156380
2012-06-21

Substrate treating apparatus

 #165
20120145074
2012-06-14

Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust units

 #166
20120145073
2012-06-14

Substrate treating apparatus using horizontal treatment cell arrangements with parallel treatment lines

 #167
20120141237
2012-06-07

Substrate processing sequence in a cartesian robot cluster tool

 #168
20120109355
2012-05-03

SUBSTRATE PROCESSING SYSTEM

 #169
20120094025
2012-04-19

Substrate Depositing System and Method

 #170
20120084059
2012-04-05

DATA ACQUISITION METHOD OF SUBSTRATE TREATMENT APPARATUS AND SENSOR SUBSTRATE

 #171
20120073461
2012-03-29

Imprint system, imprint method, and non-transitory computer storage medium

 #172
20120058253
2012-03-08

Substrate processing method

 #173
20120015307
2012-01-19

Coating and developing apparatus and method, and storage medium

 #174
20110318908
2011-12-29

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS

 #175
20110262644
2011-10-27

Method and system for mask handling in high productivity chamber

 #176
20110242513
2011-10-06

Substrate processing method, computer-readable storage medium and substrate processing system

 #177
20110240597
2011-10-06

Substrate treatment method, coating film removing apparatus, and substrate treatment system

 #178
20110229831
2011-09-22

APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF DOING THE SAME

 #179
20110206486
2011-08-25

Substrate processing apparatus and substrate processing method

 #180
20110200741
2011-08-18

Organic thin film deposition device, organic EL element manufacturing device, and organic thin film deposition method

 #181
20110155693
2011-06-30

Substrate treatment method, coating treatment apparatus, and substrate treatment system

 #182
20110151630
2011-06-23

Display element manufacturing method and manufacturing apparatus, thin film transistor manufacturing method and manufacturing apparatus, and circuit forming apparatus

 #183
20110143645
2011-06-16

Liquid processing apparatus, liquid processing method and storage medium

 #184
20110076120
2011-03-31

Substrate processing apparatus and substrate transfer method

 #185
20110063588
2011-03-17

Substrate processing apparatus, substrate processing system and inspection/periphery exposure apparatus

 #186
20110052791
2011-03-03

Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same

 #187
20110049393
2011-03-03

Lithography Machine and Substrate Handling Arrangement

 #188
20110032505
2011-02-10

Robot for in-vacuum use

 #189
20110032494
2011-02-10

Apparatus and method of application and development

 #190
20110027727
2011-02-03

Substrate developing method, substrate processing method and developing solution supply nozzle

 #191
20100307683
2010-12-09

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS

 #192
20100297562
2010-11-25

Object exchange method, exposure method, carrier system, exposure apparatus, and device manufacturing method

 #193
20100285225
2010-11-11

Substrate processing method

 #194
20100280654
2010-11-04

Substrate processing sequence in a Cartesian robot cluster tool

 #195
20100238393
2010-09-23

Semiconductor device and manufacturing method thereof

 #196
20100236587
2010-09-23

Substrate processing apparatus

 #197
20100202867
2010-08-12

SUBSTRATE PROCESSING APPARATUS

 #198
20100195066
2010-08-05

System and method for treating substrate

 #199
20100192844
2010-08-05

Apparatus and method for treating substrate

 #200
20100136257
2010-06-03

SUBSTRATE PROCESSING APPARATUS

 #201
20100098862
2010-04-22

Method and apparatus for precision surface modification in nano-imprint lithography

 #202
20100081097
2010-04-01

SUBSTRATE PROCESSING APPARATUS

 #203
20100075054
2010-03-25

Substrate processing apparatus

 #204
20100061718
2010-03-11

Coating and developing apparatus, coating and developing method, and storage medium

 #205
20090286399
2009-11-19

Substrate Processing Method and Storage Medium

 #206
20090269686
2009-10-29

Substrate processing method, computer-readable storage medium and substrate processing system

 #207
20090253078
2009-10-08

DOUBLE EXPOSURE LITHOGRAPHY USING LOW TEMPERATURE OXIDE AND UV CURE PROCESS

 #208
20090248192
2009-10-01

Substrate processing system and substrate transfer method

 #209
20090219504
2009-09-03

SUBSTRATE CONVEYOR APPARATUS, SUBSTRATE CONVEYANCE METHOD AND EXPOSURE APPARATUS

 #210
20090213347
2009-08-27

Article loading/unloading method and article loading/unloading device, exposure method and exposure apparatus, and method of manufacturing device

 #211
20090185151
2009-07-23

Substrate processing system and substrate transfer method

 #212
20090180849
2009-07-16

Photo spinner apparatus and wafer carrier loading/unloading method using the same

 #213
20090178751
2009-07-16

INTEGRATED MINIATURE MICROFLUIDICS DEVICE FACTORY AND METHOD FOR USE

 #214
20090173364
2009-07-09

Substrate processing apparatus and substrate processing method using the same

 #215
20090165712
2009-07-02

Substrate treating apparatus with parallel substrate treatment lines simultaneously treating a plurality of substrates

 #216
20090162759
2009-06-25

Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program

 #217
20090156019
2009-06-18

Substrate processing apparatus and method

 #218
20090142713
2009-06-04

Substrate processing system and substrate processing method for double patterning with carrier block, process section, and interface block

 #219
20090142162
2009-06-04

Substrate treating apparatus with inter-unit buffers

 #220
20090129897
2009-05-21

Side opening unified pod

 #221
20090110532
2009-04-30

METHOD AND APPARATUS FOR PROVIDING WAFER CENTERING ON A TRACK LITHOGRAPHY TOOL

 #222
20090073394
2009-03-19

Substrate processing apparatus with multi-speed drying having rinse liquid supplier that moves from center of rotated substrate to its periphery and stops temporarily so that a drying core can form

 #223
20090067956
2009-03-12

Cluster tool architecture for processing a substrate

 #224
20090064929
2009-03-12

Cluster tool architecture for processing a substrate

 #225
20090064928
2009-03-12

Cluster tool architecture for processing a substrate

 #226
20090059187
2009-03-05

Coating and developing apparatus, coating and developing method, and storage medium

 #227
20090051370
2009-02-26

Method of adjusting moving position of transfer arm and position detecting jig

 #228
20090027634
2009-01-29

Bevel inspection apparatus for substrate processing

 #229
20090026464
2009-01-29

Semiconductor device and manufacturing method thereof

 #230
20090023284
2009-01-22

Integrated wafer processing system for integration of patternable dielectric materials

 #231
20090021717
2009-01-22

Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector

 #232
20090001071
2009-01-01

Method and System for Cooling a Bake Plate in a Track Lithography Tool

 #233
20090000543
2009-01-01

Parallel substrate treatment for a plurality of substrate treatment lines

 #234
20080315208
2008-12-25

Semiconductor device and manufacturing method thereof

 #235
20080299502
2008-12-04

Coating and developing apparatus, operating method for same, and storage medium for the method

 #236
20080299500
2008-12-04

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

 #237
20080296316
2008-12-04

COAT/DEVELOP MODULE WITH SHARED DISPENSE

 #238
20080295962
2008-12-04

Method and system for mask handling in high productivity chamber

 #239
20080286697
2008-11-20

Method and apparatus for processing a wafer

 #240
20080279674
2008-11-13

OPERATIVE METHOD OF A MANUFACTURING SYSTEM

 #241
20080269937
2008-10-30

Substrate processing method, substrate processing system, and computer-readable storage medium

 #242
20080241971
2008-10-02

Method and apparatus for performing a site-dependent dual patterning procedure

 #243
20080241760
2008-10-02

PEB embedded exposure apparatus

 #244
20080236787
2008-10-02

METHOD TO COOL BAKE PLATES IN A TRACK LITHOGRAPHY TOOL

 #245
20080230534
2008-09-25

Bake plate lid cleaner and cleaning method

 #246
20080225261
2008-09-18

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

 #247
20080223293
2008-09-18

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

 #248
20080220621
2008-09-11

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

 #249
20080217563
2008-09-11

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS

 #250
20080212049
2008-09-04

SUBSTRATE PROCESSING APPARATUS WITH HIGH THROUGHPUT DEVELOPMENT UNITS

 #251
20080199282
2008-08-21

Cluster tool architecture for processing a substrate

 #252
20080198342
2008-08-21

Substrate processing apparatus with integrated top and edge cleaning unit

 #253
20080198341
2008-08-21

Substrate processing apparatus with integrated cleaning unit

 #254
20080176003
2008-07-24

Substrate treatment method, coating treatment apparatus, and substrate treatment system

 #255
20080176002
2008-07-24

SUBSTRATE TREATMENT METHOD, COATING FILM REMOVING APPARATUS, AND SUBSTRATE TREATMENT SYSTEM

 #256
20080160462
2008-07-03

METHOD AND SYSTEM FOR BAKE PLATE HEAT TRANSFER CONTROL IN TRACK LITHOGRAPHY TOOLS

 #257
20080153182
2008-06-26

METHOD AND SYSTEM TO MEASURE AND COMPENSATE FOR SUBSTRATE WARPAGE DURING THERMAL PROCESSING

 #258
20080145799
2008-06-19

Substrate developing method, substrate processing method and developing solution supply nozzle

 #259
20080145791
2008-06-19

Lithographic apparatus, combination of lithographic apparatus and processing module, and device manufacturing method

 #260
20080133045
2008-06-05

Cleaning apparatus and method for immersion light exposure

 #261
20080129968
2008-06-05

Coating and developing system, coating and developing method and storage medium

 #262
20080125903
2008-05-29

Semiconductor production system

 #263
20080117390
2008-05-22

Coating/developing apparatus and substrate transfer method

 #264
20080099181
2008-05-01

METHOD TO COOL A BAKE PLATE USING AN ACTIVELY CHILLED TRANSFER SHUTTLE

 #265
20080092805
2008-04-24

Substrate treating apparatus

 #266
20080070164
2008-03-20

Wet-processing apparatus, wet-processing method and storage medium

 #267
20080069954
2008-03-20

METHOD AND APPARATUS FOR DISPENSE OF CHEMICAL VAPOR IN A TRACK LITHOGRAPHY TOOL

 #268
20080060516
2008-03-13

Liquid processing apparatus, liquid processing method and storage medium

 #269
20080057221
2008-03-06

Controlled ambient system for interface engineering

 #270
20080020315
2008-01-24

Substrate collection method and substrate treatment apparatus

 #271
20080016714
2008-01-24

SUBSTRATE PROCESSING APPARATUS

 #272
20070297794
2007-12-27

PHOTOLITHOGRAPHY SYSTEM AND METHOD

 #273
20070295276
2007-12-27

BAKE PLATE HAVING ENGAGEABLE THERMAL MASS

 #274
20070295268
2007-12-27

Multi-stage flow control apparatus

 #275
20070294870
2007-12-27

Multi-stage flow control apparatus and method of use

 #276
20070280680
2007-12-06

Photo apparatus and method

 #277
20070274711
2007-11-29

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #278
20070272355
2007-11-29

APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF DOING THE SAME

 #279
20070254494
2007-11-01

Faceplate with rapid temperature change

 #280
20070252966
2007-11-01

Exposure apparatus, operation decision method, substrate processing system, maintenance management method, and device manufacturing method

 #281
20070251939
2007-11-01

Control scheme for cold wafer compensation on a lithography track

 #282
20070251921
2007-11-01

Method and system to measure flow velocity and volume

 #283
20070243711
2007-10-18

Substrate treatment method for etching a base film using a resist pattern

 #284
20070238054
2007-10-11

In-line process for making thin film electronic devices

 #285
20070231477
2007-10-04

System and method for manufacturing liquid crystal display panel, and liquid crystal display panel using the same

 #286
20070224818
2007-09-27

Substrate processing method and storage medium

 #287
20070190437
2007-08-16

SUBSTRATE PROCESSING APPARATUS

 #288
20070172234
2007-07-26

APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE

 #289
20070172233
2007-07-26

Substrate processing apparatus

 #290
20070166945
2007-07-19

SEMICONDUCTOR THIN FILM FORMING SYSTEM

 #291
20070166134
2007-07-19

Substrate transfer method, substrate transfer apparatus and exposure apparatus

 #292
20070166031
2007-07-19

Substrate processing apparatus

 #293
20070166030
2007-07-19

Semiconductor device fabrication equipment and method of using the same

 #294
20070157414
2007-07-12

Laser cleaning of backside of wafer for photolithographic processing

 #295
20070147976
2007-06-28

Substrate processing sequence in a cartesian robot cluster tool

 #296
20070147832
2007-06-28

METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING APPARATUS

 #297
20070147831
2007-06-28

SUBSTRATE PROCESSING APPARATUS FOR PERFORMING EXPOSURE PROCESS

 #298
20070144439
2007-06-28

Cartesian cluster tool configuration for lithography type processes

 #299
20070134600
2007-06-14

Coating and developing apparatus, coating and developing method and storage medium in which a computer-readable program is stored

 #300
20070128529
2007-06-07

Exposure method and apparatus, coating apparatus for applying resist to plural substrates, and device manufacturing method