207364 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
Sub-classes:SYSTEMS AND METHODS FOR WAFER OVERVIEW IMAGE SCAN AND PRE-ALIGNMENT OF FILM FRAME CARRIER
#2LOADING AND UNLOADING SYSTEM, CARRYING BOAT, SUCTION CUP ASSEMBLY, AND METHOD FOR LOADING WAFERS
#3WAFER CLEANING APPARATUS AND WAFER CLEANING SYSTEM INCLUDING THE SAME
#4SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USING THE SAME
#5PROCESSING APPARATUS, DISPLAY METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
#6SUBSTRATE TREATING APPARATUS
#7WAFER BOAT AND PLATE FOR WAFER BOAT
#8WAFER FILM FRAME CARRIER
#9Method of heat-treating silicon wafer using lateral heat treatment furnace
#10CARRIER BOAT FOR DIE PACKAGE FLUX CLEANING
#11SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER READABLE RECORDING MEDIUM
#12Substrate processing apparatus, substrate processing method and a semiconductor device manufacturing method
#13TURNAROUND MECHANISM OF SILICON WAFERS
#14Device for degumming and inserting silicon wafers and method for processing silicon wafers
#15SUBSTRATE PROCESSING APPARATUS, INNER TUBE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#16Cassette for substrates of display devices
#17Processing apparatus, display method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
#18Wafer boat
#19Substrate processing apparatus and substrate processing method
#20Automated Batch Production Thin Film Deposition Systems and Methods of Using the Same
#21Substrate support assemblies and components
#22Plasma boat for receiving wafers with regulated plasma deposition
#23Development processing apparatus and development processing method
#24Cassette for substrates of display devices
#25Substrate processing apparatus and method of manufacturing semiconductor device
#26Film-forming device
#27Semi-conductor wafers longer than industry standard square
#28SUBSTRATE TRANSFER DEVICE
#29Substrate processing apparatus and method of manufacturing semiconductor device
#30Method for forming films on wafers separated by different distances
#31Semiconductor processing boat design with pressure sensor
#32Plasma Spreading Apparatus And System, And Method Of Spreading Plasma In Process Ovens
#33REACTION DEVICE FOR HORIZONTAL BOAT PRODUCTION METHOD
#34Heating element, substrate processing apparatus and method of manufacturing semiconductor device
#35Wafer conveying apparatus and wafer conveying method
#36Substrate heating apparatus including heater under substrate support and substrate processing apparatus using the same
#37Horizontal substrate boat
#38Semiconductor processing device
#39Substrate processing apparatus and substrate processing meihod
#40Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
#41Semiconductor manufacturing apparatus with supporting columns and tables
#42Bowing semiconductor wafers
#43Semiconductor wafer carriers
#44WAFER BOAT AND PLASMA TREATMENT DEVICE FOR WAFERS
#45Substrate processing system and control device
#46Substrate liquid treatment apparatus
#47Bowing semiconductor wafers
#48Semiconductor wafer carriers
#49Semiconductor processing boat design with pressure sensor
#50Substrate processing apparatus and method of manufacturing semiconductor device
#51Substrate arrangement apparatus and substrate arrangement method
#52Wafer boat and treatment apparatus for wafers
#53PLASMA-TREATMENT DEVICE FOR WAFERS
#54Method of manufacturing semiconductor device, substrate processing apparatus comprising exhaust port and multiple nozzles, and recording medium
#55Substrate liquid processing apparatus, substrate liquid processing method, and storage medium
#56Load lock solar cell transfer system
#57PLASMA TREATMENT DEVICE AND WAFER TRANSFER TRAY
#58Micro-environment container for photovoltaic cells
#59Ambidextrous cassette and methods of using same
#60Substrate Carrier System for Moving Substrates in a Vertical Oven and Method for Processing Substrates
#61Substrate processing apparatus
#62Semiconductor processing boat design with pressure sensor
#63Method of detaching semiconductor material from a carrier and device for performing the method
#64SUBSTRATE PROCESSING APPARATUS, PROGRAM AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#65Apparatus for processing two or more substrates in a batch process
#66SUBSTRATE LIFT ASSEMBLIES
#67WORKPIECE TRANSPORT DEVICE
#68Cassette fixture for holding film frames with affixed thin substrates during liquid chemical batch removal of carriers
#69Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
#70Mounting system and charging method for disc-shaped objects
#71Magnetic annealing apparatus
#72Substrate carrier system for moving substrates in a vertical oven and method for processing substrates
#73Substrate carrier having drip edge configurations
#74Semiconductor processing boat design with pressure sensor
#75Substrate processing apparatus and substrate conveying apparatus for use in the same
#76Etching apparatus for substrate and method of etching using the same
#77Substrate carrier having drip edge configurations
#78Plate-shaped member storage rack, plate-shaped member transfer facility, and plate-shaped member storing method
#79Method for processing solar cell substrates
#80SUBSTRATE-SPLITTING DEVICE WITH DETECTION OF OBSTACLES
#81SUBSTRATE SUPPORT JIG
#82Movable jig for silicon-based thin film solar cell
#83Device for cleaning substrates on a carrier
#84Method and device for cleaning substrates on a carrier
#85COMPOSITE SUBSTRATE CARRIER
#86Quartz boat method and apparatus for thin film thermal treatment
#87Substrate processing apparatus, processing tube, substrate holder, fixing part of the substrate holder, substrate processing method, and substrate manufacturing method
#88Method for processing solar cell substrates
#89Stackable substrate carriers
#90SUBSTRATE NEST WITH DRIP REMOVER
#91Substrate holder mounting device and substrate holder container chamber
#92Adhesive injection device
#93Mounting device for disk-shaped substrates such as solar wafers
#94LAMINAR FLOW TANK
#95Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method
#96Chimerized Wafer Boat for Use in Semiconductor Chip Processing and Related Methods
#97Cleaning apparatus, substrate processing system, cleaning method, program and storage medium
#98COMPOSITE SUBSTRATE CARRIER
#99SUPPORT STRUCTURE FOR MULTIPLE WORKPIECE SUPPORT ROLLERS
#100SUBSTRATE HOLDER MOUNTING DEVICE AND SUBSTRATE HOLDER CONTAINER CHAMBER
#101Substrate processing apparatus
#102Substrate processing apparatus and substrate conveying apparatus for use in the same
#103System and method for substrate transport
#104Method for forming a back-to-back wafer batch to be positioned in a process boot, and handling system for forming the BTB wafer batch
#105Methods for etching the edge of a silicon wafer
#106Edge etched silicon wafers
#107EDGE ETCHING APPARATUS FOR ETCHING THE EDGE OF A SILICON WAFER
#108TWO-PIECE MAGNETICALLY COUPLED SUBSTRATE ROLLER USED IN MEGASONIC CLEANING PROCESS
#109Substrate supporting unit and apparatus for treating substrate using the substrate supporting unit
#110Apparatus and method for treating substrate
#111APPARATUS AND METHOD FOR CLEANING AND DRYING SOLID OBJECTS
#112Wafer guide for preventing wafer breakage in semiconductor cleaning apparatus
#113Apparatus and Method for Cleaning of Objects, in Particular of Thin Discs
#114WAFER SUPPORTER
#115Wafer manufacturing method and device
#116Substrate processing apparatus and substrate processing method
#117Holding and rotary driving mechanism for flat objects
#118Substrate holder and substrate treatment apparatus
#119Composite substrate carrier
#120SUPPORTER AND APPARATUS FOR CLEANING SUBSTRATES WITH THE SUPPORTER, AND METHOD FOR CLEANING SUBSTRATES
#121DISK CLEANING APPARATUS, DISK IMMERSING AND EXTRACTING MECHANISM AND DISK CLEANING METHOD
#122Systems and methods for processing microfeature workpieces
#123Wafer guide in wafer cleaning apparatus
#124Covertible pad support for receiving at least two pads of different dimensions
#125Method and apparatus for etching disk-like member
#126Transportation fixture and package for substrate rack
#127Wafer carrier for minimizing contacting area with wafers
#128Wafer guide and semiconductor wafer drying apparatus using the same
#129Process chamber and system for thinning a semiconductor workpiece
#130Support jig of quartz glass for receiving wafer-like substrates of semiconductor material
#131Reformed wafer boat
#132Composite substrate carrier
#133Liquid processing apparatus
#134Automated semiconductor processing systems
#135Cassette configurations to support platters having different diameters
#136Mandrel for substrate transport system with notch
#137Cassette configurations to support platters having different diameters