Patents-Review.com
ClassID:

207366 ⎘

H01L21/6732 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls

Sub-classes:
Recent Application in this class:
#1
20260047388
2026-02-12

WAFER CARRIER WITH AUTOMATION POSITIONING SYSTEM

 #2
20260026299
2026-01-22

SUBSTRATE STORING CONTAINER AND LID-BODY-SIDE SUBSTRATE SUPPORT PART

 #3
20250364292
2025-11-27

METHOD FOR DELIVERING WAFER SUBSTRATE

 #4
20250360582
2025-11-27

SYSTEMS FOR INSERTING A FASTENER INTO A WAFER CARRIER

 #5
20250273495
2025-08-28

Industrial Magazine Rack

 #6
20250174480
2025-05-29

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

 #7
20250157837
2025-05-15

SEMICONDUCTOR WAFER STORAGE DEVICE

 #8
20250149362
2025-05-08

WAFER PROCESSING SYSTEMS, WAFER TRANSPORT DEVICES, AND RELATED METHODS

 #9
20250132181
2025-04-24

SEMICONDUCTOR PROCESSING ASSEMBLY AND METHOD FOR TRANSFERRING WAFERS

 #10
20250125182
2025-04-17

SUBSTRATE ROTATING APPARATUS, SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME

 #11
20250125174
2025-04-17

COOLING STATION

 #12
20250116332
2025-04-10

SEALING RING

 #13
20250105040
2025-03-27

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS

 #14
20250105038
2025-03-27

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM

 #15
20250069925
2025-02-27

FUME-REMOVING DEVICE

 #16
20250069911
2025-02-27

APPARATUS CONSTRUCTED AND ARRANGED TO PROCESS A PLURALITY OF SUBSTRATES

 #17
20250038028
2025-01-30

SUBSTRATE PROCESSING SYSTEM

 #18
20250029848
2025-01-23

HIGH-TEMPERATURE TUBE FURNACE

 #19
20240395586
2024-11-28

WAFER HANDLING ASSEMBLY

 #20
20240387215
2024-11-21

SEMICONDUCTOR APPARATUS AND METHOD OF COLLECTING RESIDUES

 #21
20240383082
2024-11-21

SYSTEMS FOR INSERTING A FASTENER INTO A WAFER CARRIER

 #22
20240332036
2024-10-03

DRY ICE CLEANING APPARATUS FOR SEMICONDUCTOR WAFERS AND METHOD FOR CLEANING SEMICONDUCTOR WAFERS

 #23
20240304482
2024-09-12

WAFER BOATS FOR SUPPORTING SEMICONDUCTOR WAFERS IN A FURNACE

 #24
20240290642
2024-08-29

Substrate Mapping Apparatus And Method Therefor

 #25
20240258145
2024-08-01

Semiconductor wafer processing system and method

 #26
20240242992
2024-07-18

Wafer storage container

 #27
20240234187
2024-07-11

SUBSTRATE SUPPORTER, SUBSTRATE PROCESSING APPARATUS, METHOD OF MEASURING TEMPERATURE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND RECORDING MEDIUM

 #28
20240213059
2024-06-27

SUBSTRATE PROCESSING APPARATUS AND METHOD

 #29
20240162069
2024-05-16

SUBSTRATE STORING CONTAINER

 #30
20240162068
2024-05-16

SEMICONDUCTOR SUBSTRATE CARRYING CONTAINER WITH SUPPORT WALL FORMED WITH CORRUGATION PORTIONS

 #31
20240145282
2024-05-02

Wafer support member and method of manufacturing a wafer support member

 #32
20240141484
2024-05-02

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM

 #33
20240079263
2024-03-07

WAFER TRANSPORT METHOD AND APPARATUS

 #34
20240011154
2024-01-11

SUBSTRATE PROCESSING TUBE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE APPARATUS

 #35
20230377925
2023-11-23

PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD FOR PERFORMING THE SAME

 #36
20230377922
2023-11-23

Semiconductor wafer storage device

 #37
20230343615
2023-10-26

IN-SITU LOW TEMPERATURE MEASUREMENT OF LOW EMISSIVITY SUBSTRATES

 #38
20230326774
2023-10-12

CASSETTE MAGAZINE FOR THIN WAFERS

 #39
20230307276
2023-09-28

Container for storing wafer

 #40
20230302589
2023-09-28

Methods for inserting a fastener into a wafer carrier

 #41
20230290660
2023-09-14

CONTAINER, CONTAINER PARTITION PLATE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE TRANSFER METHOD

 #42
20230256549
2023-08-17

Methods for removing a fastener from a wafer carrier

 #43
20230187245
2023-06-15

Substrate treating apparatus

 #44
20230163008
2023-05-25

Load port adapter

 #45
20230140283
2023-05-04

SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS

 #46
20230128154
2023-04-27

PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD FOR PERFORMING THE SAME

 #47
20230038785
2023-02-09

Semiconductor apparatus and method of collecting residues

 #48
20230033715
2023-02-02

SUBSTRATE PROCESSING APPARATUS

 #49
20230018842
2023-01-19

WORKPIECE SUPPORT SYSTEM FOR PLASMA TREATMENT AND METHOD OF USING THE SAME

 #50
20220406639
2022-12-22

Semiconductor wafer processing system and method

 #51
20220359250
2022-11-10

Wafer storage container

 #52
20220310420
2022-09-29

COOLING METHOD, A METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM

 #53
20220277967
2022-09-01

Wafer cassette

 #54
20220277963
2022-09-01

SUBSTRATE POLISHING SYSTEM

 #55
20220228262
2022-07-21

VAPOR DEPOSITION DEVICE AND CARRIER USED IN SAME

 #56
20220165554
2022-05-26

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #57
20220102169
2022-03-31

TREATING VESSEL AND LIQUID PROCESSING APPARATUS

 #58
20220084854
2022-03-17

WAFER TRANSFERRING DEVICE

 #59
20220076968
2022-03-10

Substrate processing method and substrate processing apparatus

 #60
20220051920
2022-02-17

Fume-removing device

 #61
20220051911
2022-02-17

Adjustable device and an adjustable storage box

 #62
20220048699
2022-02-17

Loading cassette for substrate including glass and substrate loading method to which same is applied

 #63
20210407831
2021-12-30

Substrate mapping apparatus and method therefor

 #64
20210407823
2021-12-30

Wafer boats for supporting semiconductor wafers in a furnace

 #65
20210391199
2021-12-16

Magazine supporting equipment and semiconductor manufacturing apparatus including the same

 #66
20210391191
2021-12-16

Wafer storage box, wafer transfer device and wafer storage and transfer assembly having the same

 #67
20210384055
2021-12-09

Open-ended type substrate receiving cassette and system thereof

 #68
20210324518
2021-10-21

INJECTOR CONFIGURED FOR ARRANGEMENT WITHIN A REACTOR OF A VERTICAL FURNACE AND VERTICAL FURNACE

 #69
20210296146
2021-09-23

Load lock with integrated features

 #70
20210257240
2021-08-19

Container for storing wafer

 #71
20210257229
2021-08-19

Semiconductor wafer storage device

 #72
20210225676
2021-07-22

Wafer storage container

 #73
20210175097
2021-06-10

Carrier positioning member and carrier placement platform

 #74
20210151338
2021-05-20

Wafer storage devices configured to measure physical properties of wafers stored therein

 #75
20210143027
2021-05-13

Wafer rack and vertical wafer boat having the same

 #76
20210118712
2021-04-22

Semiconductor wafer container

 #77
20210098270
2021-04-01

Substrate treating apparatus

 #78
20210082720
2021-03-18

Substrate treating apparatus

 #79
20210066112
2021-03-04

Die pickup module and die bonding apparatus including the same

 #80
20210066106
2021-03-04

Plating chuck

 #81
20210028045
2021-01-28

Stacking apparatus and stacking method

 #82
20200395234
2020-12-17

MULTI-COMPONENT TRAYS FOR TRANSPORTING INTEGRATED CIRCUIT DICE

 #83
20200365435
2020-11-19

Substrate container valve assemblies

 #84
20200350184
2020-11-05

Epitaxial III-N nanoribbon structures for device fabrication

 #85
20200303226
2020-09-24

Wafer storage container

 #86
20200286763
2020-09-10

Substrate accommodation device

 #87
20200286761
2020-09-10

Substrate storage container

 #88
20200286759
2020-09-10

Substrate storing container

 #89
20200286752
2020-09-10

Container, container partition plate, substrate processing system, and substrate transfer method

 #90
20200258722
2020-08-13

Semiconductor manufacturing apparatus and method of manufacturing semiconductor device

 #91
20200194282
2020-06-18

Substrate cassette

 #92
20200176280
2020-06-04

Substrate treating apparatus

 #93
20200135500
2020-04-30

Semiconductor wafer storage device

 #94
20200130106
2020-04-30

Wafer producing apparatus

 #95
20200066562
2020-02-27

Buffer unit, and apparatus for treating substrate with the unit

 #96
20200051844
2020-02-13

Device and method for controlling the tightness of a transport enclosure for the conveyance and atmospheric storage of semiconductor substrates

 #97
20200043755
2020-02-06

Substrate storage container

 #98
20200020560
2020-01-16

Substrate transfer unit, and substrate processing apparatus

 #99
20200020549
2020-01-16

Substrate storage container

 #100
20190385868
2019-12-19

Substrate housing container

 #101
20190311929
2019-10-10

Container for storing wafer

 #102
20190287829
2019-09-19

Substrate processing apparatus and method of manufacturing semiconductor device

 #103
20190259638
2019-08-22

Batch heating and cooling chamber or loadlock

 #104
20190252515
2019-08-15

Methods of forming integrated circuits with solutions to interlayer dielectric void formation between gate structures

 #105
20190206708
2019-07-04

Wafer storage container

 #106
20190186014
2019-06-20

Vertical heat treatment apparatus

 #107
20190148186
2019-05-16

High pressure steam anneal processing apparatus

 #108
20190148180
2019-05-16

Self-contained metrology wafer carrier systems

 #109
20190122915
2019-04-25

Stacking apparatus and stacking method

 #110
20190106249
2019-04-11

Wafer container with latching mechanism for large diameter wafers

 #111
20190093219
2019-03-28

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

 #112
20190071777
2019-03-07

SUBSTRATE PROCESSING APPARATUS

 #113
20190067044
2019-02-28

Wafer shipping box and a lower retaining member thereof

 #114
20180374731
2018-12-27

Wafer storage container

 #115
20180350637
2018-12-06

Carrier adapter insert apparatus and carrier adapter insert detection methods

 #116
20180277410
2018-09-27

Fume-removing device

 #117
20180269093
2018-09-20

Fume-removing device

 #118
20180269092
2018-09-20

Fume-removing device

 #119
20180143077
2018-05-24

Self-contained metrology wafer carrier systems

 #120
20180114706
2018-04-26

WAFER BOAT ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

 #121
20180090358
2018-03-29

Posture changing device

 #122
20180090344
2018-03-29

Ring assembly and chuck assembly having the same

 #123
20180068879
2018-03-08

Front Opening Ring Pod

 #124
20180068876
2018-03-08

Substrate processing apparatus and substrate processing method

 #125
20180040492
2018-02-08

Front opening ring pod

 #126
20180019142
2018-01-18

Front opening ring pod

 #127
20170372924
2017-12-28

Self-contained metrology wafer carrier systems

 #128
20170358471
2017-12-14

Wafer container having damping device

 #129
20170335452
2017-11-23

Substrate treatment apparatus including reaction tube with opened lower end, furnace opening member, and flange configured to cover upper surface of the furnace opening member

 #130
20170323856
2017-11-09

Method for suppressing material warpage by means of pressure difference

 #131
20170301570
2017-10-19

Wafer cassette and placement method thereof

 #132
20170287682
2017-10-05

Systems and methods for performing edge ring characterization

 #133
20170275083
2017-09-28

Substrate Cassette

 #134
20170271188
2017-09-21

SUBSTRATE CONTAINER VALVE ASSEMBLIES

 #135
20170194180
2017-07-06

Wafer container and method for holding wafer

 #136
20170125273
2017-05-04

WAFER STORAGE AND TRANSPORT DEVICE

 #137
20170117170
2017-04-27

Front opening ring pod

 #138
20170110354
2017-04-20

Wafer transport assembly with integrated buffers

 #139
20170110351
2017-04-20

Load lock interface and integrated post-processing module

 #140
20170092522
2017-03-30

Transfer unit, apparatus for treating substrate, and method for treating substrate

 #141
20170011942
2017-01-12

Fume-removing device

 #142
20160379855
2016-12-29

Storage unit, transfer apparatus, and substrate processing system

 #143
20160280443
2016-09-29

Packaging structure for packing substrate storing container

 #144
20160268148
2016-09-15

Purge gas spraying plate and fume removing apparatus having the same

 #145
20160218028
2016-07-28

Batch LED heating and cooling chamber or loadlock

 #146
20160211162
2016-07-21

Substrate carrier with integrated electrostatic chuck

 #147
20160211159
2016-07-21

Stopper for substrate cassette and substrate cassette assembly

 #148
20160196997
2016-07-07

Substrate carrier with integrated electrostatic chuck

 #149
20160091306
2016-03-31

Substrate treating apparatus and substrate treating methods

 #150
20160086828
2016-03-24

MAGAZINE AND PROCESS EQUIPMENT INCLUDING THE SAME

 #151
20160071750
2016-03-10

Assembly of liner and flange for vertical furnace as well as a vertical process furnace

 #152
20160049319
2016-02-18

PACKAGING INSERT

 #153
20160020124
2016-01-21

Bendable carrier mount, device and method for releasing a carrier substrate

 #154
20150311103
2015-10-29

Substrate conveying system

 #155
20150303084
2015-10-22

Die supply apparatus

 #156
20150294882
2015-10-15

Substrate storing container

 #157
20150279711
2015-10-01

Substrate storing container

 #158
20150262855
2015-09-17

Container transport facility

 #159
20150206780
2015-07-23

Wafer storage apparatus having gas charging portions and semiconductor manufacturing apparatus using the same

 #160
20150147852
2015-05-28

Vacuum carrier module, method of using and process of making the same

 #161
20150140798
2015-05-21

SEMICONDUCTOR MANUFACTURING METHOD AND EQUIPMENT THEREOF

 #162
20150083640
2015-03-26

Methods and apparatus for large diameter wafer handling

 #163
20150068948
2015-03-12

Wafer loaders having buffer zones

 #164
20150027971
2015-01-29

Accommodation cassette

 #165
20150022821
2015-01-22

Carrier adapter insert apparatus and carrier adapter insert detection methods

 #166
20140348617
2014-11-27

Substrate processing apparatus including heat-shield plate

 #167
20140319020
2014-10-30

Wafer container with latching mechanism for large diameter wafers

 #168
20140231305
2014-08-21

Assemblies of stacked cassettes

 #169
20140190936
2014-07-10

Etching apparatus for substrate and method of etching using the same

 #170
20140182631
2014-07-03

Cleaning jig and cleaning method for cleaning substrate processing apparatus, and substrate processing system

 #171
20140151264
2014-06-05

WAFER CARRIER AND APPLICATIONS THEREOF

 #172
20140037406
2014-02-06

Glass substrate cassette and pick-and-place system for glass substrate

 #173
20130287528
2013-10-31

Methods and apparatus for large diameter wafer handling

 #174
20130256186
2013-10-03

Magazine for loading a lead frame

 #175
20130180953
2013-07-18

Plasma processing apparatus and plasma processing method

 #176
20130001846
2013-01-03

CASSETTE JIG FOR WAFER CLEANING APPARATUS AND CASSETTE ASSEMBLY HAVING THE SAME

 #177
20120285624
2012-11-15

Room temperature bonding apparatus

 #178
20120080354
2012-04-05

Cassette for loading substrate

 #179
20120061288
2012-03-15

COMPOSITE SUBSTRATE CARRIER

 #180
20120000425
2012-01-05

Apparatus for processing substrate

 #181
20110290185
2011-12-01

SUBSTRATE COOLING DEVICE AND SUBSTRATE TREATMENT SYSTEM

 #182
20110259840
2011-10-27

SEMICONDUCTOR PACKAGE MAGAZINE

 #183
20110244120
2011-10-06

Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same

 #184
20110141650
2011-06-16

ELECTROSTATIC CHUCK DEVICE AND METHOD FOR DETERMINING ATTRACTED STATE OF WAFER

 #185
20110100937
2011-05-05

Adjustable Width Cassette for Wafer Film Frames

 #186
20110070743
2011-03-24

Apparatus and methods for edge ring implementation for substrate processing

 #187
20110011536
2011-01-20

Room temperature bonding apparatus

 #188
20110005967
2011-01-13

METHODS AND APPARATUSES FOR LARGE DIAMETER WAFER HANDLING

 #189
20100236970
2010-09-23

COMPOSITE SUBSTRATE CARRIER

 #190
20100196126
2010-08-05

Component transfer apparatus and method

 #191
20090309285
2009-12-17

Device for holding disk-shaped objects

 #192
20090308784
2009-12-17

WAFER STORAGE CARRIER

 #193
20090304490
2009-12-10

METHOD FOR HOLDING SILICON WAFER

 #194
20090191043
2009-07-30

Wafer Carrying Apparatus

 #195
20090142176
2009-06-04

Wafer Carrying Apparatus

 #196
20090071918
2009-03-19

VERTICAL SEMICONDUCTOR WAFER CARRIER

 #197
20090060690
2009-03-05

Quick changeover apparatus and methods for wafer handling

 #198
20090047111
2009-02-19

Moving carrier for lead frame and method of moving lead frame using the moving carrier

 #199
20090000744
2009-01-01

Edge ring arrangements for substrate processing

 #200
20080238702
2008-10-02

Electrostatic discharge protection device with phosphors and method of fabricating the same

 #201
20080230438
2008-09-25

Semiconductor wafer storage case and semiconductor wafer storing method

 #202
20080101896
2008-05-01

SYSTEM AND METHOD FOR VERTICAL WAFER HANDLING IN A PROCESS LINE

 #203
20080092769
2008-04-24

Overhead traveling vehicle having safety member

 #204
20080080963
2008-04-03

Reduced capacity carrier, transport, load port, buffer system

 #205
20070227941
2007-10-04

Receiver for component feed plates and component feeder

 #206
20070193921
2007-08-23

Thin wafer insert

 #207
20070193907
2007-08-23

Composite substrate carrier

 #208
20070141280
2007-06-21

SUBSTRATE CARRIER HAVING AN INTERIOR LINING

 #209
20070139854
2007-06-21

Monitoring device for transport pods

 #210
20070062889
2007-03-22

Universal cassette

 #211
20070062446
2007-03-22

Substrate transfer system, substrate transfer apparatus and storage medium

 #212
20070046284
2007-03-01

Integrated process condition sensing wafer and data analysis system

 #213
20060288936
2006-12-28

CASSETTE FOR A LOAD-LOCK

 #214
20060182618
2006-08-17

Methods and apparatus for processing the backsides of wafers

 #215
20060102287
2006-05-18

Systems and methods for achieving isothermal batch processing of substrates used for the production of micro-electro-mechanical-systems

 #216
20060099058
2006-05-11

Wafer carrying apparatus

 #217
20050282101
2005-12-22

Heat treatment jig for silicon semiconductor substrate

 #218
20050245093
2005-11-03

Atomic layer deposition methods and atomic layer deposition tools

 #219
20050203664
2005-09-15

Method and apparatus for aligning a cassette

 #220
20050167312
2005-08-04

Composite substrate carrier

 #221
20050105997
2005-05-19

Methods and apparatus for carriers suitable for use in high-speed/high-acceleration transport systems

 #222
20050006325
2005-01-13

Wafer protective cassette

 #223
17151556
2021-10-26

Materials rack