207367 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders; Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls characterized by a material, a roughness, a coating or the like
SUBSTRATE STORAGE RACKS FOR SEMICONDUCTOR PROCESSING SYSTEMS
#2Substrate Transfer Module and Method for Manufacturing Substrate Transfer Module
#3SEMICONDUCTOR SUBSTRATE BOAT AND METHODS OF USING THE SAME
#4Semiconductor Device and Methods of Making and Using an Enhanced Carrier to Reduce Electrostatic Discharge
#5ADVANCED METHOD FOR CREATING ELECTROSTATIC CHUCK (ESC) MESA PATTERNS
#6Processing chamber with annealing mini-environment
#7SUBSTRATE STORAGE RACKS FOR SEMICONDUCTOR PROCESSING SYSTEMS
#8Semiconductor substrate boat and methods of using the same
#9SUBSTRATE PROCESSING APPARATUS, SUBSTRATE RETAINER AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#10Processing chamber with annealing mini-environment
#11APPARATUS FOR THERMAL TREATMENT OF A SUBSTRATE, CARRIER AND SUBSTRATE SUPPORT ELEMENT
#12SEMICONDUCTOR ELECTROPLATING SYSTEM
#13Stopper for substrate cassette and substrate cassette assembly
#14Wafer loaders having buffer zones
#15SEMICONDUCTOR PACKAGE MAGAZINE
#16SUBSTRATE CARRIER HAVING AN INTERIOR LINING
#17Systems and methods for achieving isothermal batch processing of substrates used for the production of micro-electro-mechanical-systems
#18Carbon film coated member
#19Heat treatment jig for silicon semiconductor substrate
#20Semiconductor component handling device having a performance film
#21Semiconductor component handling device having an electrostatic dissipating film