207368 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
Sub-classes:APPARATUS FOR MANUFACTURING DISPLAY DEVICE AND METHOD OF MANUFACTURING DISPLAY DEVICE
#2THERMAL PROCESSING SUSCEPTOR
#3WAFER SHIFT DETECTION
#4WET PROCESSING SYSTEM AND NOZZLE FOR DISPENSING A LIQUID LATERALLY ACROSS A SEMICONDUCTOR WAFER
#5SEPARATORS FOR HANDLING, TRANSPORTING, OR STORING SEMICONDUCTOR WAFERS
#6APPARATUS FOR MANUFACTURING THIN FILM DEVICES
#7DEVICE OF MASS TRANSFERRING CHIPS
#8Bearing assembly for accommodating device for semiconductor apparatus
#9SEMICONDUCTOR SUBSTRATE CARRYING CONTAINER WITH SUPPORT WALL FORMED WITH CORRUGATION PORTIONS
#10THERMAL PROCESSING SUSCEPTOR
#11SUBSTRATE TREATING APPARATUS
#12WAFER SHIFT DETECTION
#13WAFER FILM FRAME CARRIER
#14SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#15WAFER CARRIER DISC INSTALLATION/UNINSTALLATION DEVICE AND INSTALLATION/UNINSTALLATION METHOD THEREOF
#16Separators for handling, transporting, or storing semiconductor wafers
#17Cassette for substrates of display devices
#18Device of mass transferring chips
#19Device and method for moving an object into a processing station, conveying system and processing apparatus
#20SYSTEMS AND METHODS FOR DIE CONTAINER WAREHOUSING
#21Substrate processing apparatus and substrate processing method
#22Apparatus for transferring substrate, and apparatus and method for treating substrate
#23Cassette for substrates of display devices
#24Chip carrier device
#25Thermal processing susceptor
#26Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency
#27Substrate processing device
#28Plating chuck
#29Apparatus for conducting plasma surface treatment, board treatment system having the same
#30Wafer cleaning device
#31Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency
#32Wafer container and method for holding wafer
#33Film-forming device
#34In-line system for mass production of organic optoelectronic device and manufacturing method using the same system
#35SEMICONDUCTOR WAFER PROCESSING CHAMBER
#36Systems and methods for die container warehousing
#37Substrate storage container and gas replacement unit
#38Horizontal substrate boat
#39VAPOR REDUCTION DEVICE FOR A SEMICONDUCTOR WAFER
#40Substrate processing apparatus and substrate processing meihod
#41SOLAR CELL SILICON WAFER CARRYING DEVICE AND TRANSMISSION SYSTEM
#42Wafer container and method for holding wafer
#43Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
#44Separators for handling, transporting, or storing semiconductor wafers
#45Bowing semiconductor wafers
#46Thermal processing susceptor
#47Semiconductor wafer carriers
#48Substrate processing apparatus and method for assembling tube assembly
#49Bowing semiconductor wafers
#50Semiconductor wafer carriers
#51Posture changing device
#52PLASMA-TREATMENT DEVICE FOR WAFERS
#53Substrate processing system and substrate processing method
#54Substrate storing container
#55PARALLEL PLATE INLINE SUBSTRATE PROCESSING TOOL
#56METHOD AND APPARATUS FOR FORMING POROUS SILICON LAYERS
#57Multi-station tool with wafer transfer microclimate systems
#58Wafer rotating apparatus
#59Substrate carrying device and substrate regularity detecting method
#60Mounting system and charging method for disc-shaped objects
#61Apparatus and method for transporting wafers between wafer carrier and process tool under vacuum
#62Substrate transferring arm and substrate transferring apparatus including the same
#63Thermal processing susceptor
#64Wafer transport system and method for operating the same
#65WAFER HOLDER AND DEPOSITION APPARATUS
#66Structure for fastening together resin members in substrate storing container
#67Wafer storage container
#68Substrate processing apparatus, method of operating substrate processing apparatus, and storage medium
#69Article supporting device
#70Coating film forming apparatus, coating film forming method, and storage medium
#71Reduced capacity carrier and method of use
#72Substrate storage rack
#73Wafer loaders having buffer zones
#74VAPOR DRYER MODULE WITH REDUCED PARTICLE GENERATION
#75Thermal processing method and thermal processing apparatus for heating substrate, and susceptor
#76METHOD OF MANUFACTURING SEMICONDUCTOR LIGHT EMITTING DEVICE AND CHEMICAL VAPOR DEPOSITION APPARATUS
#77Apparatus for storing substrates
#78Etching apparatus for substrate and method of etching using the same
#79Drying holder for solar cell and method for producing solar cell
#80Heat treatment apparatus and method of manufacturing semiconductor device
#81Plate-shaped member storage rack, plate-shaped member transfer facility, and plate-shaped member storing method
#82CASSETTE JIG FOR WAFER CLEANING APPARATUS AND CASSETTE ASSEMBLY HAVING THE SAME
#83Movable jig for silicon-based thin film solar cell
#84COMPOSITE SUBSTRATE CARRIER
#85MODULAR CARRIER
#86Stackable substrate carriers
#87COMPOSITE SUBSTRATE CARRIER
#88Heat treatment apparatus and method of manufacturing semiconductor device
#89Substrate cassette having electrode array
#90WAFER CASSETTE
#91Container
#92Apparatus and Method for Cleaning of Objects, in Particular of Thin Discs
#93WAFER CARRIER AND BUFFER SUPPORT MEMBER THEREOF
#94Apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers
#95WAFER TRANSPORT SYSTEM
#96COMPLIANT SUBSTRATE HOLDING ASSEMBLY
#97SYSTEM AND METHOD FOR VERTICAL WAFER HANDLING IN A PROCESS LINE
#98Composite substrate carrier
#99SUPPORTER AND APPARATUS FOR CLEANING SUBSTRATES WITH THE SUPPORTER, AND METHOD FOR CLEANING SUBSTRATES
#100Wafer guide in wafer cleaning apparatus
#101Wafer cassette used in high temperature baking process
#102Examination method and examination assistant device for quartz product of semiconductor processing apparatus
#103Wafer guides for processing semiconductor substrates
#104Wafer carrier checker and method of using same
#105Wafer carrier for minimizing contacting area with wafers
#106Reduced capacity carrier and method of use
#107Wafer guides for processing semiconductor substrates
#108Disk cassette system
#109Composite substrate carrier
#110Automated semiconductor processing systems
#111Wafer protective cassette
#112Cassette handle
#113Substrate carriers with isolation membrane
#114Cassette configurations to support platters having different diameters