ClassID:

207380

H01L21/67366 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders; Closed carriers characterised by materials, roughness, coatings or the like

Recent Application in this class:
#1
20250379080
2025-12-11

MAGNETIC SENSOR ASSEMBLY FOR A SUBSTRATE PROCESS STATION

#2
20250285897
2025-09-11

SEMICONDUCTOR DIE CARRIER STRUCTURE

#3
20250253177
2025-08-07

SEMICONDUCTOR WAFER TRANSPORT CONTAINER AND METHOD FOR MANUFACTURING SAME

#4
20240429080
2024-12-26

SEPARATORS FOR HANDLING, TRANSPORTING, OR STORING SEMICONDUCTOR WAFERS

#5
20240387216
2024-11-21

CONTAINER FOR RECEIVING SEMICONDUCTOR DEVICE

#6
20240384881
2024-11-21

MAKEUP AIR HANDLING UNIT IN SEMICONDUCTOR FABRICATION BUILDING AND METHOD FOR CLEANING AIR USING THE SAME

#7
20240178026
2024-05-30

Apparatus for transporting semiconductor wafers

#8
20240087932
2024-03-14

Semiconductor die carrier structure

#9
20240004427
2024-01-04

ELECTRONIC APPARATUS AND METHOD OF MANUFACTURING THE SAME

#10
20230369087
2023-11-16

SUBSTRATE CONTAINER WITH DOOR GASKET

#11
20230290661
2023-09-14

SINGULATED DIE SHIPPING TRAY ASSEMBLY

#12
20230245907
2023-08-03

A STORAGE CONTAINER AND MANUFACTURING METHOD OF THE SAME

#13
20230197491
2023-06-22

METHODS AND SYSTEMS HAVING CONDUCTIVE POLYMER COATING FOR ELECTROSTATIC DISCHARGE APPLICATIONS

#14
20230141959
2023-05-11

SUBSTRATE-ACCOMMODATING CONTAINER

#15
20230032454
2023-02-02

Makeup air handling unit in semiconductor fabrication building and method for cleaning air using the same

#16
20230005771
2023-01-05

Separators for handling, transporting, or storing semiconductor wafers

#17
20220404696
2022-12-22

BONDED LAYER ON EXTREME ULTRAVIOLET PLATE

#18
20220357650
2022-11-10

METAL PLATING WITH LUBRICANT

#19
20220230901
2022-07-21

CONTAINERS FOR PROTECTING SEMICONDUCTOR DEVICES AND RELATED METHODS

#20
20220037179
2022-02-03

PACKAGING UNIT FOR SUBSTRATES

#21
20220013391
2022-01-13

Substrate carrier latching structure

#22
20210358787
2021-11-18

RETICLE POD PROVIDED WITH HOLDING PINS AND METHOD FOR HOLDING RETICLE

#23
20210357601
2021-11-18

Reticle pod provided with optically identifiable marks and method for identifying the same

#24
20210356858
2021-11-18

CONTAINER FOR ACCOMMODATING SUBSTRATE WITH EFFECTIVE HERMETIC SEALING

#25
20210327734
2021-10-21

RETICLE POD HAVING COATED SENSOR ZONES

#26
20210282253
2021-09-09

Manufacturing method of ESD protection device

#27
20210255667
2021-08-19

Electronic apparatus and method of manufacturing the same

#28
20210217642
2021-07-15

Semiconductor die carrier structure

#29
20210111047
2021-04-15

Drying block structure and storage device

#30
20210005491
2021-01-07

SiC film structure

#31
20200095671
2020-03-26

Carrying device and semiconductor processing apparatus

#32
20200006105
2020-01-02

Semiconductor die carrier structure

#33
20190385878
2019-12-19

LIQUID CRYSTAL PANEL PACKAGE WITH WATER ABSORPTION ABILITY

#34
20190364653
2019-11-28

ESD protection composite structure, ESD protection device, and manufacturing method thereof

#35
20190131125
2019-05-02

Method of manufacturing semiconductor device and substrate processing apparatus

#36
20190067064
2019-02-28

Separators for handling, transporting, or storing semiconductor wafers

#37
20190067063
2019-02-28

Wafer container with a seal

#38
20180358251
2018-12-13

Substrate housing container

#39
20180210334
2018-07-26

Reticle pod

#40
20180204751
2018-07-19

Substrate container with enhanced containment

#41
20180122676
2018-05-03

Substrate transfer apparatus

#42
20170365496
2017-12-21

Wafer container with shock condition protection

#43
20170330778
2017-11-16

Ring spacer

#44
20170294327
2017-10-12

SUBSTRATE CONTAINER

#45
20170287758
2017-10-05

Substrate storing container

#46
20170236737
2017-08-17

WAFER CONTAINER WITH DOOR GUIDE AND SEAL

#47
20170137589
2017-05-18

METHODS OF MODIFYING SURFACES OF STRUCTURES USED IN THE MANUFACTURE OF A SEMICONDUCTOR DEVICE VIA FLUORINATION

#48
20160218027
2016-07-28

SINGLE AND DUAL STAGE WAFER CUSHION AND WAFER SEPARATOR

#49
20160178998
2016-06-23

Container for storing a pellicle for lithography

#50
20160126123
2016-05-05

Method for improving performance of a substrate carrier

#51
20150014191
2015-01-15

Substrate storage container

#52
20140124820
2014-05-08

Light emitting device, adhesive having surface roughness, and lighting system having the same

#53
20120205282
2012-08-16

Single and dual stage wafer cushion and wafer separator

#54
20120196038
2012-08-02

Jig for semiconductor production and method for producing same

#55
20120187024
2012-07-26

Wafer container

#56
20120132561
2012-05-31

Wafer container

#57
20120103860
2012-05-03

SUBSTRATE-STORING CONTAINER

#58
20120073655
2012-03-29

PACKAGE BODY FOR STORING OR TRANSPORTING SOLAR CELL SEALING FILM AND METHOD FOR STORING OR TRANSPORTING SOLAR CELL SEALING FILM

#59
20120061288
2012-03-15

COMPOSITE SUBSTRATE CARRIER

#60
20120043254
2012-02-23

Semiconductor wafer container

#61
20110129947
2011-06-02

Method for improving performance of a substrate carrier

#62
20110079539
2011-04-07

Wafer storage container

#63
20100294781
2010-11-25

RESIN COMPOSITION AND MOLDED PRODUCT OBTAINED FROM THE COMPOSITION

#64
20100236976
2010-09-23

Wafer container with overlapping wall structure

#65
20100236970
2010-09-23

COMPOSITE SUBSTRATE CARRIER

#66
20100222506
2010-09-02

MEMBER ARRANGED IN WAFER STORING CONTAINER AND METHOD FOR MANUFACTURING THE MEMBER

#67
20090200250
2009-08-13

Cleanliness-improved wafer container

#68
20090001032
2009-01-01

Higher performance barrier materials for containers of environmentally sensitive semiconductor fabrication devices

#69
20080257779
2008-10-23

Supporting Member For Thin-Film-Coated Boards, Storage Container For Thin-Film-Coated Boards, Mask-Blank-Storing Body, Transfer-Mask-Storing Body, and Method For Transporting Thin-Film-Coated Boards

#70
20080217291
2008-09-11

Substrate mounting stage and surface treatment method therefor

#71
20080041758
2008-02-21

Wafer carrier

#72
20070275468
2007-11-29

Storage container for detecting presence of checmical elements

#73
20070193907
2007-08-23

Composite substrate carrier

#74
20060292749
2006-12-28

Photochromic substrate container

#75
20060120840
2006-06-08

[SEMICONDUCTOR CONTAINER THAT PREVENTS CRYSTALIZATION ON STORAGE WAFERS/MASKS]

#76
20060073633
2006-04-06

Protective interleaf for stacked wafer shipping

#77
20060032784
2006-02-16

Foam laminate system for semiconductor wafers

#78
20050236298
2005-10-27

Ready-for-dispatch package for semiconductor wafers, and method for the ready-for-dispatch packaging of semiconductor wafers

#79
20050236110
2005-10-27

Semiconductor component handling device having a performance film

#80
20050167312
2005-08-04

Composite substrate carrier

#81
20050139511
2005-06-30

Photochromic substrate container

#82
20050110919
2005-05-26

Liquid crystal cell carrying case

#83
20050056601
2005-03-17

Semiconductor component handling device having an electrostatic dissipating film

#84
20050023178
2005-02-03

Bag

#85
15245395
2019-08-06

Clean storage packaging article and method for making and using