207375 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders Closed carriers
Sub-classes:SMART WAFER TRANSPORT CASE WITH SENSOR SYSTEM
#2CLEANING APPARATUS FOR WAFER STORAGE CONTAINER
#3CLEANING APPARATUS FOR WAFER STORAGE CONTAINER
#4CUSHIONING MATERIAL, PACKING BODY, AND PACKING METHOD
#5CALIBRATION SYSTEM
#6COVER FOR MODULE TRAY AND MODULE TRAY FOR SEMICONDUCTOR DEVICE INCLUDING THE SAME
#7DEVICE FOR MEASURING PHYSICAL PROPERTY OF WAFER
#8Processing apparatus for electronic component
#9Article Transport Facility
#10SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
#11Substrate analysis apparatus and substrate analysis method
#12Autoteach system
#13SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#14Autoteach enclosure system
#15APPARATUS AND METHOD TO PROCESS WAFERS
#16Wafer container and method for holding wafer
#17Substrate processing apparatus and control system
#18Robot arm for holding cassette and automatic cassette transfer device
#19Wafer container and method for holding wafer
#20Wafer container with latching mechanism for large diameter wafers
#21Wafer carrier
#22Supporting device and supporting method for articles
#23Apparatus and method for cleaning wafer handling equipment
#24Article transport facility
#25Wafer transfer method and system
#26Equipment front end module for transferring wafers and method of transferring wafers
#27Modular vertical furnace processing system
#28Conveying method and substrate processing apparatus
#29WET STATION
#30Overhead hoist transport system
#31Wafer container with latching mechanism for large diameter wafers
#32Magazine for loading a lead frame
#33Wafer container cleaning device
#34Method for treating a transport support for the conveyance and atmospheric storage of semiconductor substrates, and treatment station for the implementation of such a method
#35SEMICONDUCTOR CONTAINER OPENING/CLOSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
#36Drain device and method
#37WAFER CONVEYANCE METHOD AND WAFER CONVEYANCE DEVICE
#38SEMICONDUCTOR CONTAINER OPENING/CLOSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
#39Inspection device for inspecting thin plate container and method of inspecting thin plate container
#40PACKAGE WARPAGE CONTROL
#41PACKAGE WARPAGE CONTROL
#42Carrier with anisotropic wetting surfaces
#43Manufacturing method of semiconductor integrated circuit device
#44Method for reducing mask precipitation defects
#45Semiconductor container opening/closing apparatus and semiconductor device manufacturing method
#46Reticle-carrying container
#47Reticle carrier
#48Package warpage control
#49Method of manufacturing a semiconductor device
#50Controlling device for monitoring the spatial or mechanical delimitation of producer goods or materials in the production cycle by using of transponder technology
#51Method of manufacturing a semiconductor integrated circuit device which prevents foreign particles from being drawn into a semiconductor container containing semiconductor wafers
#52Stackable container with removable holders
#53Facility and method for manufacturing semiconductor device and stocker used in the facility
#54Three-dimensional memory devices having transferred interconnect layer and methods for forming the same