ClassID:

207381

H01L21/67369 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders; Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions

Recent Application in this class:
#1
20260047384
2026-02-12

CASSETTE SPRING SIZE ADAPTING SYSTEM

#2
20250308963
2025-10-02

WAFER CONTAINER, TOP COVER THEREOF, AND METHOD FOR MANAGING WAFER CONTAINERS

#3
20250285897
2025-09-11

SEMICONDUCTOR DIE CARRIER STRUCTURE

#4
20250066099
2025-02-27

CUSHIONING MATERIAL, PACKING BODY, AND PACKING METHOD

#5
20240420984
2024-12-19

ELECTROSTATIC SUBSTRATE SUPPORT

#6
20240420978
2024-12-19

RETAINING RING FOR CHEMICAL-MECHANICAL POLISHING

#7
20240371670
2024-11-07

PROTECTION DEVICE FOR SUBSTRATE CONTAINER

#8
20240105481
2024-03-28

Latching guide structure

#9
20240087932
2024-03-14

Semiconductor die carrier structure

#10
20240006211
2024-01-04

PROTECTIVE PACKAGE ASSEMBLY

#11
20230411192
2023-12-21

FILTER MODULE

#12
20230360941
2023-11-09

WAFER CONTAINER AND SIZE ADAPTION SYSTEM THEREFOR

#13
20230317485
2023-10-05

Container for transporting semiconductor wafer

#14
20230317484
2023-10-05

Wafer storage container and cap assembly used therefor

#15
20230290661
2023-09-14

SINGULATED DIE SHIPPING TRAY ASSEMBLY

#16
20230260812
2023-08-17

CASSETTE HOLD DOWN

#17
20230197488
2023-06-22

Substrate storage container

#18
20230187246
2023-06-15

Reticle pod having side containment of reticle

#19
20230072884
2023-03-09

Wafer transport box

#20
20230038768
2023-02-09

RETICLE POD HAVING RETENTION THROUGH RETICLE COMPARTMENT WALL

#21
20230014864
2023-01-19

RETICLE POD HAVING RETENTION THROUGH BASEPLATE

#22
20220406645
2022-12-22

COIN-SLOT AND BALL-LOCK CERAMIC LIFT PIN HOLDERS

#23
20220392795
2022-12-08

Semiconductor manufacturing device to securely hold semiconductor panels for transport and manufacturing processes

#24
20220277977
2022-09-01

Substrate storage container

#25
20220104365
2022-03-31

Substrate storage apparatus provided with storage environment detection

#26
20220102178
2022-03-31

RETICLE POD HAVING ANTI-COLLISION GAP STRUCTURE

#27
20220102177
2022-03-31

Reticle pod with antistatic capability

#28
20220100080
2022-03-31

Workpiece container system

#29
20210351054
2021-11-11

Method for containing a reticle in a pod

#30
20210217642
2021-07-15

Semiconductor die carrier structure

#31
20210202287
2021-07-01

Structure and method of reticle pod having inspection window

#32
20210118712
2021-04-22

Semiconductor wafer container

#33
20210057248
2021-02-25

Reticle pod having side containment of reticle

#34
20210020482
2021-01-21

Wafer cushion

#35
20200286761
2020-09-10

Substrate storage container

#36
20200286759
2020-09-10

Substrate storing container

#37
20200258765
2020-08-13

Substrate storage container

#38
20200243361
2020-07-30

Pod and method for containing a reticle using the same

#39
20200211876
2020-07-02

RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE

#40
20200191224
2020-06-18

DAMPER

#41
20200168492
2020-05-28

Substrate cushion brace retainer

#42
20200152496
2020-05-14

MICROENVIRONMENT FOR FLEXIBLE SUBSTRATES

#43
20200083076
2020-03-12

Transport packaging and method for expanded wafers

#44
20200043755
2020-02-06

Substrate storage container

#45
20200027766
2020-01-23

Package assembly for thin wafer shipping and method of use

#46
20200006105
2020-01-02

Semiconductor die carrier structure

#47
20190326147
2019-10-24

MULTI-CASSETTE CARRYING CASE

#48
20190326146
2019-10-24

Substrate vacuum transport and storage apparatus

#49
20190214287
2019-07-11

Reticle pressing unit and EUV reticle pod using same

#50
20190202618
2019-07-04

Panel fixing device

#51
20190019704
2019-01-17

GLASS SUBSTRATE SHIPPER

#52
20190019703
2019-01-17

FLEXIBLE SUBSTRATE SHIPPER

#53
20190013226
2019-01-10

Separator

#54
20180308734
2018-10-25

Package assembly for thin wafer shipping and method of use

#55
20180277409
2018-09-27

Substrate container with improved substrate retainer and door latch assist mechanism

#56
20180261487
2018-09-13

Wafer arrangement and method for processing a wafer

#57
20180182655
2018-06-28

Substrate storing container

#58
20180072489
2018-03-15

Glass substrate package

#59
20180068882
2018-03-08

Substrate storage container

#60
20180068879
2018-03-08

Front Opening Ring Pod

#61
20180061693
2018-03-01

Transport container and transfer method for stored object

#62
20180040492
2018-02-08

Front opening ring pod

#63
20180019142
2018-01-18

Front opening ring pod

#64
20170372931
2017-12-28

HORIZONTAL SUBSTRATE CONTAINER WITH INTEGRAL CORNER SPRING FOR SUBSTRATE CONTAINMENT

#65
20170365496
2017-12-21

Wafer container with shock condition protection

#66
20170358471
2017-12-14

Wafer container having damping device

#67
20170330778
2017-11-16

Ring spacer

#68
20170294328
2017-10-12

Substrate container, load port apparatus, and substrate treating apparatus

#69
20170294327
2017-10-12

SUBSTRATE CONTAINER

#70
20170263479
2017-09-14

Substrate container, load port apparatus, and substrate treating apparatus

#71
20170243775
2017-08-24

Overhead transport vehicle

#72
20170236737
2017-08-17

WAFER CONTAINER WITH DOOR GUIDE AND SEAL

#73
20170178937
2017-06-22

Interlocking nest wafer protector

#74
20170117170
2017-04-27

Front opening ring pod

#75
20170062253
2017-03-02

Thin wafer shipper

#76
20170032993
2017-02-02

Package assembly for thin wafer shipping and method of use

#77
20170025295
2017-01-26

Package assembly for thin wafer shipping and method of use

#78
20170025294
2017-01-26

Substrate storing container

#79
20160365265
2016-12-15

Wafer shipper with stacked support rings

#80
20160280443
2016-09-29

Packaging structure for packing substrate storing container

#81
20160254172
2016-09-01

Wafer carrier

#82
20160233119
2016-08-11

Structure for fastening together resin members in substrate storing container

#83
20160225647
2016-08-04

Substrate storage container

#84
20160218027
2016-07-28

SINGLE AND DUAL STAGE WAFER CUSHION AND WAFER SEPARATOR

#85
20160196993
2016-07-07

Packing structure for packing substrate storing container

#86
20160141194
2016-05-19

Front opening wafer container with weight ballast

#87
20160133494
2016-05-12

Substrate transfer chamber

#88
20160133490
2016-05-12

Methods and apparatus for transferring a substrate

#89
20160126122
2016-05-05

Substrates storing container

#90
20160114955
2016-04-28

Liquid crystal panel packing box and liquid crystal panel packing method

#91
20160071753
2016-03-10

Substrate container, a load port apparatus, and a substrate treating apparatus

#92
20150294882
2015-10-15

Substrate storing container

#93
20150279711
2015-10-01

Substrate storing container

#94
20150155192
2015-06-04

Reduced capacity carrier and method of use

#95
20150129459
2015-05-14

Replaceable wafer support backstop

#96
20150090630
2015-04-02

Wafer pod and wafer positioning mechanism thereof

#97
20150083640
2015-03-26

Methods and apparatus for large diameter wafer handling

#98
20150083639
2015-03-26

Wafer container with door mounted shipping cushions

#99
20150083638
2015-03-26

Package assembly for thin wafer shipping and method of use

#100
20150068949
2015-03-12

Wafer shipper

#101
20150041353
2015-02-12

Wafer carrier

#102
20150008154
2015-01-08

PACKAGING SYSTEM FOR PROTECTION OF IC WAFERS DURING FABRICATION, TRANSPORT AND STORAGE

#103
20140231306
2014-08-21

Apparatus for storing substrates

#104
20140227469
2014-08-14

Buffer material for packing wafer carrier

#105
20140190857
2014-07-10

LIMIT MEMBER HAVING PROTECTION COVER

#106
20140166533
2014-06-19

Packaging for substrates and packaging unit having such packaging

#107
20140069835
2014-03-13

Packaging structure of liquid crystal glass panel

#108
20140033659
2014-02-06

Packing insert for disc-shaped objects

#109
20130319907
2013-12-05

Wafer container with door guide and seal

#110
20130287528
2013-10-31

Methods and apparatus for large diameter wafer handling

#111
20130146503
2013-06-13

Front opening unified pod with latch structure

#112
20130056389
2013-03-07

Thin wafer shipper

#113
20130056388
2013-03-07

Substrate storage container

#114
20130037444
2013-02-14

Substrate storage container

#115
20120205282
2012-08-16

Single and dual stage wafer cushion and wafer separator

#116
20120187024
2012-07-26

Wafer container

#117
20120181215
2012-07-19

Packaging system for protection of IC wafers during fabrication, transport and storage

#118
20120168346
2012-07-05

WAFER CONTAINER WITH STAGGERED WALL STRUCTURE

#119
20120132561
2012-05-31

Wafer container

#120
20120073655
2012-03-29

PACKAGE BODY FOR STORING OR TRANSPORTING SOLAR CELL SEALING FILM AND METHOD FOR STORING OR TRANSPORTING SOLAR CELL SEALING FILM

#121
20110297579
2011-12-08

Wafer container with elasticity module

#122
20110259772
2011-10-27

Devices and method for handling microelectronics assemblies

#123
20110186475
2011-08-04

TRANSPORT PACKAGE

#124
20110180451
2011-07-28

Single and dual stage wafer cushion

#125
20110139675
2011-06-16

Wafer container with at least one purgeable supporting module having a long slot

#126
20110073521
2011-03-31

Wafer container with at least one oval latch

#127
20110042266
2011-02-24

Wafer container with cushion sheets

#128
20110036748
2011-02-17

Wafer container with staggered wall structure

#129
20110005967
2011-01-13

METHODS AND APPARATUSES FOR LARGE DIAMETER WAFER HANDLING

#130
20110000817
2011-01-06

Retainer and substrate storage container provided with same retainer

#131
20100307957
2010-12-09

Reusable resilient cushion for wafer container

#132
20100282638
2010-11-11

Wafer container

#133
20100276324
2010-11-04

Thin plate container with a stack of removable loading trays

#134
20100258475
2010-10-14

Retainer and substrate storage container

#135
20100236977
2010-09-23

Wafer container with adjustable inside diameter

#136
20100236976
2010-09-23

Wafer container with overlapping wall structure

#137
20100224517
2010-09-09

DISK SEPARATOR DEVICE

#138
20100108565
2010-05-06

Wafer container having the snap-fitting restraint module

#139
20100089851
2010-04-15

DEVICES AND METHODS FOR HANDLING MICROELECTRONIC ASSEMBLIES

#140
20100072107
2010-03-25

Substrate storage container

#141
20100065467
2010-03-18

ANTIVIBRATION MECHANISM FOR ARTICLE RECEIVING CONTAINER

#142
20100051504
2010-03-04

Wafer Container with Integrated Wafer Restraint Module

#143
20100038282
2010-02-18

Front opening unified pod with latch structure

#144
20100032331
2010-02-11

Carrier of reticle pod and the fixing element thereof

#145
20100025288
2010-02-04

Wafer container with constraints

#146
20100025287
2010-02-04

Wafer Container with Constraints

#147
20100019117
2010-01-28

SIX-BAR LINKAGE POSITIONING MECHANISM

#148
20090277816
2009-11-12

Top Flange Protective Cover for Thin Plate Container and Thin Plate Container Provided Therewith

#149
20090266740
2009-10-29

Wafer container with cushion sheet

#150
20090260329
2009-10-22

Packing insert for disc-shaped objects

#151
20090218254
2009-09-03

Shock absorbing substrate container

#152
20090166248
2009-07-02

Packaged body

#153
20090162183
2009-06-25

FULL-CONTACT RING FOR A LARGE WAFER

#154
20090095650
2009-04-16

Wafer container with staggered wall structure

#155
20090090653
2009-04-09

Low cost wafer box improvements

#156
20090081014
2009-03-26

Invertible front opening unified pod

#157
20090050518
2009-02-26

Wafer container with cushion sheets

#158
20090038986
2009-02-12

Lid unit thin plate supporting container

#159
20090032433
2009-02-05

Wafer container with restrainer

#160
20090016862
2009-01-15

METHOD AND APPARATUS FOR PROVIDING FLAT PANEL DISPLAY ENVIRONMENTAL ISOLATION

#161
20080302700
2008-12-11

TRANSPORT MODULE

#162
20080251114
2008-10-16

Method For Packing Solar Battery Elements and Package For Solar Battery Elements

#163
20080185315
2008-08-07

Integrated circuit wafer packaging system and method

#164
20080093256
2008-04-24

PHOTOMASK CONTAINER

#165
20080041759
2008-02-21

Wafer pod and wafer holding device thereof

#166
20080035514
2008-02-14

Metal photomask box

#167
20080017547
2008-01-24

Front opening substrate container with bottom plate

#168
20070295638
2007-12-27

Wafer transportable container

#169
20070272590
2007-11-29

Packaging structure

#170
20070187286
2007-08-16

Wafer storage container and apparatus

#171
20070151897
2007-07-05

Substrate storage container

#172
20070151896
2007-07-05

Packing member for packing wafer container

#173
20070085992
2007-04-19

Photo mask retainer for photo mask delivery box

#174
20070012594
2007-01-18

Shock absorbing horizontal transport wafer box

#175
20060289333
2006-12-28

Wafer container with door actuated wafer restraint

#176
20060283774
2006-12-21

Substrate storage container and method for manufacturing the same

#177
20060283772
2006-12-21

Single thin plate storage container and shock-absorbing support members used therein

#178
20060283770
2006-12-21

Transportation fixture and package for substrate rack

#179
20060260978
2006-11-23

Reticle pod with isolation system

#180
20060237343
2006-10-26

Wafer protective sheet

#181
20060213796
2006-09-28

Airtight container

#182
20060180499
2006-08-17

Wafer box with radially pivoting latch elements

#183
20060108258
2006-05-25

Wafer container with secondary wafer restraint system

#184
20060108250
2006-05-25

Photomask container

#185
20060105498
2006-05-18

Wafer stack separator

#186
20060091039
2006-05-04

Wafer storage box

#187
20060088272
2006-04-27

Reduced capacity carrier and method of use

#188
20060073633
2006-04-06

Protective interleaf for stacked wafer shipping

#189
20060060495
2006-03-23

Six-bar linkage positioning mechanism

#190
20060042998
2006-03-02

Cushion for packing disks such as semiconductor wafers

#191
20060032785
2006-02-16

Storage box for wafer shipping box

#192
20060032784
2006-02-16

Foam laminate system for semiconductor wafers

#193
20060027477
2006-02-09

Thin plate storage container with handled supporting member

#194
20060021904
2006-02-02

Thin plate storage container and lid having at least one thin plate supporting member

#195
20050274645
2005-12-15

Substrate storage container

#196
20050269241
2005-12-08

Integrated circuit wafer packaging system and method

#197
20050247594
2005-11-10

Substrate storage container

#198
20050236298
2005-10-27

Ready-for-dispatch package for semiconductor wafers, and method for the ready-for-dispatch packaging of semiconductor wafers

#199
20050218034
2005-10-06

Lid unit for thin plate supporting container

#200
20050173358
2005-08-11

Receiving container body for object to be processed

#201
20050161367
2005-07-28

Lid unit for thin plate supporting container

#202
20050115866
2005-06-02

Front opening substrate container with bottom plate

#203
20050115865
2005-06-02

Thin-plate supporting container

#204
20050110919
2005-05-26

Liquid crystal cell carrying case

#205
20050109667
2005-05-26

Wafer container with door actuated wafer restraint

#206
20050098473
2005-05-12

Container for containing semiconductor wafers

#207
20050087476
2005-04-28

Workpiece holder for clean container

#208
20050072121
2005-04-07

Method and system for shipping semiconductor wafers

#209
20050011809
2005-01-20

Wafer storage container with wafer positioning posts

#210
20050011808
2005-01-20

Wafer shipper with orientation control