207384 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders; Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
WAFER CONTAINER, TOP COVER THEREOF, AND METHOD FOR MANAGING WAFER CONTAINERS
#2SEMICONDUCTOR DIE CARRIER STRUCTURE
#3SEMICONDUCTOR STORAGE APPARATUS WITH INTEGRATED SORTER
#4MODULE RETAINER
#5ROBOT GRIPPER FOR MOVING WAFER CARRIERS AND PACKING MATERIALS AND METHOD OF OPERATING THE SAME
#6RETICLE POD WITH QUICK-RELEASE SUPPORT MECHANISM
#7FRAME SYSTEM FOR HOLDING A SUBSTRATE
#8Semiconductor die carrier structure
#9DEVICE AND METHOD FOR HANDLING POT-SHAPED HOLLOW BODIES, MORE PARTICULARLY TRANSPORT CONTAINERS FOR SEMICONDUCTOR WAFERS OR EUV LITHOGRAPHY MASKS
#10SYSTEM FOR STORING WAFER AND SYSTEM FOR MONITORING POLLUTION OF WAFER
#11POD HANDLING SYSTEMS AND METHODS FOR A LITHOGRAPHIC DEVICE
#12Robot gripper for moving wafer carriers and packing materials and method of operating the same
#13SUBSTRATE TREATMENT DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
#14Side storage pods, equipment front end modules, and methods for processing substrates
#15Gripper device, conveyance vehicle, and conveyance method
#16SUBSTRATE PROCESSING APPARATUS
#17SEMICONDUCTOR CHIP CONTAINER AND FIXTURE
#18Transfer apparatus having link arms and stockers having the same
#19In-situ temperature controlling sample stage customized for coupled interconnection between in-situ high-pressure reaction cell and ultrahigh vacuum characterization
#20Semiconductor manufacturing device to securely hold semiconductor panels for transport and manufacturing processes
#21Graphite plate
#22RETICLE POD WITH QUICK-RELEASE SUPPORT MECHANISM
#23Handle for wafer carrier
#24Gas purge device and gas purging method
#25Adjustable device and an adjustable storage box
#26Semiconductor storage apparatus with integrated sorter
#27Substrate carrier latching structure
#28Magazine supporting equipment and semiconductor manufacturing apparatus including the same
#29Robot gripper for moving wafer carriers and packing materials and method of operating the same
#30Substrate container system
#31Load port module
#32Load port and control method
#33Reticle transportation container
#34Wafer storage device, carrier plate and wafer cassette
#35Multi-die module with contactless coupler and a coupling loss reduction structure
#36Wafer cassette stocker and wafer cassette drying method using the same
#37Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
#38Semiconductor manufacturing apparatus
#39Multi-object capable loadlock system
#40Substrate storage container and method of manufacturing the same
#41Substrate container valve assemblies
#42Contactless latch and coupling for vacuum wafer transfer cassette
#43Substrate storing container
#44Reticle transportation container
#45Pod opener
#46WAFER TRANSFER BOX AND WAFER AUTOMATIC TRANSFER SYSTEM
#47Latching mechanism for a substrate container
#48Multi-die module with contactless coupler and a coupling loss reduction structure
#49TRACK SYSTEM AND METHOD OF PROCESSING SEMICONDUCTOR WAFERS
#50Substrate cushion brace retainer
#51MICROENVIRONMENT FOR FLEXIBLE SUBSTRATES
#52Device and method for controlling the tightness of a transport enclosure for the conveyance and atmospheric storage of semiconductor substrates
#53Substrate storage container
#54Stocker
#55Package assembly for thin wafer shipping and method of use
#56Substrate storage container
#57Stocker
#58Substrate vacuum transport and storage apparatus
#59Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
#60Method for the transportation and storage of a semiconductor plate in a hermetic container
#61Substrate transfer apparatus and substrate processing system comprising plural connection units arranged side by side in a vertical and lateral directions along one side surface of a transfer chamber
#62Storage rack and article storage facility
#63Transport container automatic clamping mechanism
#64Robot arm for holding cassette and automatic cassette transfer device
#65Reticle transportation container
#66Cassette holder assembly for a substrate cassette and holding member for use in such assembly
#67Substrate treatment apparatus and substrate treatment method
#68Substrate-storing container
#69Wafer container with a seal
#70Cassette holder assembly for a substrate cassette and holding member for use in such assembly
#71FLEXIBLE SUBSTRATE SHIPPER
#72Side storage pods, equipment front end modules, and methods for processing substrates
#73Package assembly for thin wafer shipping and method of use
#74Content moving device
#75Frame cassette for holding tape-frames
#76Side opening unified pod
#77Internal purge diffuser with offset manifold
#78Wafer cassette
#79Substrate container with enhanced containment
#80Semiconductor wafer transportation
#81Vertical fixing transmission box and transmission method using the same
#82Universal load port for ultraviolet radiation semiconductor wafer processing machine
#83Article transport device
#84Electronic component transport apparatus and electronic component inspection apparatus
#85Substrate storage container
#86Front Opening Ring Pod
#87Rechargeable wafer carrier systems
#88Front opening ring pod
#89Front opening ring pod
#90HORIZONTAL SUBSTRATE CONTAINER WITH INTEGRAL CORNER SPRING FOR SUBSTRATE CONTAINMENT
#91Wafer shipper with purge capability
#92Substrate container with window retention spring
#93SUBSTRATE CONTAINER VALVE ASSEMBLIES
#94Adapter tool configured to be attached to a loadport of a wafer handling system and wafer handling system with such an adapter tool
#95Purge Device and Purge Method
#96Overhead transport vehicle
#97Connecting mechanism and connecting method of substrate container
#98Adaptive inset for wafer cassette system
#99Load lock solar cell transfer system
#100Micro-environment container for photovoltaic cells
#101Ambidextrous cassette and methods of using same
#102Front opening ring pod
#103Method for cleaning load port of wafer processing apparatus
#104Package assembly for thin wafer shipping and method of use
#105Package assembly for thin wafer shipping and method of use
#106Purge apparatus and purge method
#107Front opening wafer container with robotic flange
#108Container transport device and container transport facility
#109Clamp apparatus, substrate carry-in/out apparatus using the same, and substrate processing apparatus
#110Wafer carrier
#111Container storage add-on for bare workpiece stocker
#112Structure for fastening together resin members in substrate storing container
#113Substrate storage container
#114Article support device and method for placing two types of articles on support device
#115Substrate storing container
#116Front opening wafer container with weight ballast
#117Frame cassette
#118Substrate transfer chamber
#119Multi-cassette carrying case
#120Methods and apparatus for transferring a substrate
#121Article storage facility
#122Substrates storing container
#123Substrate storage container with handling members
#124Adapter tool and wafer handling system
#125Side opening unified pod
#126Semiconductor wafer stocker apparatus and wafer transferring methods using the same
#127Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
#128Transport device with rotating receiving part
#129Structure for fastening together resin members in substrate storing container
#130Wafer storage container
#131Article transport vehicle with linkage mechanism
#132Container transport facility
#133Conveying method and substrate processing apparatus
#134Article supporting device
#135Substrate processing apparatus and substrate processing method
#136Semiconductor wafer transportation
#137Article transport carriage
#138Coupling transfer system
#139Cassette transfer apparatus and cassette transferring method using the same
#140Wafer carrier
#141Storage container, shutter opening/closing unit of storage container, and wafer stocker using storage container and shutter opening/closing unit
#142Article storage facility and article storage method
#143Load port module
#144Load port device
#145System for separately handling different size FOUPs
#146Method for managing atmosphere in storage container
#147Article storage facility and article transport facility
#148Electron beam welding of large vacuum chamber body having a high emissivity coating
#149Box grip
#150Coupling transfer system
#151Coupling system
#152Front opening unified pod with latch structure
#153Reduced capacity carrier, transport, load port, buffer system
#154Large-sized front opening unified wafer POD
#155Substrate storage container with gravity center adjustment member
#156Load port apparatus and clamping device to be used for the same
#157Substrate storage container
#158SUBSTRATE STORAGE CONTAINER
#159Single and dual stage wafer cushion and wafer separator
#160Wafer container
#161WAFER CONTAINER WITH STAGGERED WALL STRUCTURE
#162Wafer container
#163Transport system and set-up method
#164Mask Conveying System And Mask Conveying Adapter
#165Cassette adapter, adapter main body locking apparatus and seating sensor mechanism
#166Gas charging apparatus, gas discharging apparatus, gas charging method, and gas discharging method
#167Container and liner thereof
#168Substrate storage container
#169Wafer container with at least one oval latch
#170Load port apparatus and dust exhaust method for load port apparatus
#171Wafer container with recessed latch
#172Wafer container with staggered wall structure
#173FOUP and robotic flange thereof
#174Method of object transfer for a heat treatment system
#175METHOD FOR HANDLING AND TRANSFERRING A WAFER CASE, AND HOLDING PART USED THEREFOR
#176Fixture drying apparatus and method
#177Wafer container with overlapping wall structure
#178Lid body for substrate storage container and substrate storage container
#179STORAGE APPARATUS FOR STORING SEMICONDUCTOR ELEMENT OR RETICLE
#180Electron beam welding of large vacuum chamber body having a high emissivity coating
#181TRANSPORTING APPARATUS
#182Reduced capacity carrier, transport, load port, buffer system
#183Wafer container having the latch and inflatable seal element
#184Front opening unified pod with latch structure
#185Front Opening Unified Pod with latch component
#186Reticle storage pod (RSP) transport system utilizing FOUP adapter plate
#187Top Flange Protective Cover for Thin Plate Container and Thin Plate Container Provided Therewith
#188Wafer container with cushion sheet
#189Carrier supporting apparatus
#190Reducing introduction of foreign material to wafers
#191METHOD AND APPARATUS FOR DETECTING A WAFER POD
#192CONTAINER LID OPENING/CLOSING SYSTEM AND SUBSTRATE PROCESSING METHOD USING THE SYSTEM
#193Side opening unified pod
#194STORAGE APPARATUS FOR STORING SEMICONDUCTOR ELEMENT OR RETICLE
#195Wafer container with staggered wall structure
#196Invertible front opening unified pod
#197Foup door positioning device for foup opener
#198Container and liner thereof
#199Loading tray and thin plate container
#200Substrate storage container and method of producing the same
#201Higher performance barrier materials for containers of environmentally sensitive semiconductor fabrication devices
#202TRANSPORT MODULE
#203Methods and apparatus for repositioning support for a substrate carrier
#204Substrate container and handle thereof
#205SMALL LOT LOADPORT CONFIGURATIONS
#206ENVIRONMENTAL ISOLATION SYSTEM FOR FLAT PANEL DISPLAYS
#207Substrate storage container
#208Substrate storage container
#209Relay Station And Substrate Processing System Using Relay Station
#210Substrate container with fluid-sealing flow passageway
#211Reduced capacity carrier, transport, load port, buffer system
#212Reduced capacity carrier, transport, load port, buffer system
#213Reduced capacity carrier, transport, load port, buffer system
#214Wafer carrier positioning structure
#215METHOD AND APPARATUS FOR VERTICAL WAFER TRANSPORT, BUFFER AND STORAGE
#216Front opening substrate container with bottom plate
#217SUBSTRATE CARRIER AND HANDLE
#218Wafer receptacle in semiconductor device fabrication equipment
#219Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load port
#220METHOD FOR HANDLING AND TRANSFERRING A WAFER CASE, AND HOLDING PART USED THEREFOR
#221Substrate storage container and positioning method of the same
#222REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
#223DOCKING STATION FOR A FACTORY INTERFACE
#224Kinematic coupling with textured contact surfaces
#225Heat treatment system and method therefore
#226Reticle storage pod (RSP) transport system utilizing FOUP adapter plate
#227Substrate storage container
#228Apparatus and method for cleaning and drying a container for semiconductor workpieces
#229SUBSTRATE CARRIER HAVING REDUCED HEIGHT
#230Load port module
#231Thin-plate supporting container
#232Thin plate supporting container
#233Thin plate supporting container
#234Thin plate supporting container
#235Thin plate supporting container
#236Thin plate supporting container
#237Supporting shelf for front opening unified pod
#238Precision substrate storage container
#239Protective shipper
#240Methods and apparatus for identifying small lot size substrate carriers
#241Universal reticle transfer system
#242Storage container
#243Substrate carrier having reduced height
#244Storage box for wafer shipping box
#245Thin plate storage container with handled supporting member
#246Thin plate storage container and lid having at least one thin plate supporting member
#247Methods and apparatus for repositioning support for a substrate carrier
#248Substrate container with fluid-sealing flow passageway
#249Load port configurations for small lot size substrate carriers
#250Reactor having a movable shutter
#251Method and apparatus for aligning a cassette
#252Receiving container body for object to be processed
#253Front opening substrate container with bottom plate
#254Substrate carrier
#255Methods and apparatus for carriers suitable for use in high-speed/high-acceleration transport systems
#256Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit
#257Thin film semiconductor device and its substrate sheet as well as the method for production thereof
#258Substrate storage container
#259Heat treatment system and a method for cooling a loading chamber
#260Methods for cleaning wafer containers
#261Cassette handle
#262Mechanisms for wafer pod and pod door