207385 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders; Closed carriers characterised by substrate supports
SUBSTRATE STORING CONTAINER AND LID-BODY-SIDE SUBSTRATE SUPPORT PART
#2CASSETTE CARRIER USED IN WET BENCH PROCESS
#3LOADING AND UNLOADING SYSTEM, CARRYING BOAT, SUCTION CUP ASSEMBLY, AND METHOD FOR LOADING WAFERS
#4SUBSTRATE CONTAINER EQUIPPED WITH STABILIZING SUPPORT AND SMOOTH TRAY CONNECTION
#5TRANSPORT CONTAINER FOR SEMICONDUCTOR WAFER AND METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT
#6METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#7SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#8RETICLE CARRIER AND METHOD FOR MANUFACTURING AUXILIARY STRUCTURE IN RETICLE CARRIER
#9WAFER CONTAINER AND WAFER SUPPORT
#10SUPPORT SLEEVE FOR SUPPORTING A PROCESS VESSEL AND ASSOCIATED SEMICONDUCTOR PROCESSING FURNACES
#11SEMICONDUCTOR WAFER STORAGE DEVICE
#12WAFER PROCESSING SYSTEMS, WAFER TRANSPORT DEVICES, AND RELATED METHODS
#13SEMICONDUCTOR PROCESSING ASSEMBLY AND METHOD FOR TRANSFERRING WAFERS
#14PROCESS KIT ENCLOSURE SYSTEM
#15FUME-REMOVING DEVICE
#16CONTAINER AND SUBSTRATE TREATING APPARATUS
#17SEPARATORS FOR HANDLING, TRANSPORTING, OR STORING SEMICONDUCTOR WAFERS
#18ENCLOSURE SYSTEM SHELF
#19Substrate processing apparatus and substrate processing method
#20WAFER HOUSING CONTAINER AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#21System and Method of Providing FOUP or Cassette Supporting Structure for Handling Various Size or Shape Wafers and Panels
#22METHOD OF OPERATING A PROCESSING APPARATUS
#23LOUVER DESIGN FOR ELIMINATING LINE OF SIGHT
#24SURFACE TREATMENT DEVICE AND METHOD
#25Apparatus for transporting semiconductor wafers
#26SUBSTRATE STORING CONTAINER
#27SUBSTRATE CONTAINER SYSTEMS AND METHODS OF PURGING A SUBSTRATE CONTAINER
#28Substrate Storage Container
#29WAFER STORAGE CONTAINER
#30SUBSTRATE CONTAINER EQUIPPED WITH STABILIZING SUPPORT AND SMOOTH TRAY CONNECTION
#31Substrate container and its door assembly, support assembly, and elastic buffer element
#32Semiconductor wafer storage device
#33Wafer storage container and cap assembly used therefor
#34A STORAGE CONTAINER AND MANUFACTURING METHOD OF THE SAME
#35Substrate storage container
#36Apparatus for the Temperature Control of a Substrate and Corresponding Production Method
#37SUBSTRATE PROCESSING APPARATUS
#38Side storage pods, electronic device processing systems, and methods for operating the same
#39Wafer transport box
#40Separators for handling, transporting, or storing semiconductor wafers
#41APPARATUS AND TECHNIQUES FOR ELECTRONIC DEVICE ENCAPSULATION
#42SUBSTRATE STORAGE CONTAINER
#43Substrate storage container
#44CONTAINERS FOR PROTECTING SEMICONDUCTOR DEVICES AND RELATED METHODS
#45SUBSTRATE STORAGE CONTAINER AND FILTER UNIT
#46Substrate storage apparatus provided with storage environment detection
#47RETICLE POD HAVING ANTI-COLLISION GAP STRUCTURE
#48Reticle pod with antistatic capability
#49Fume-removing device
#50Adjustable device and an adjustable storage box
#51Container and substrate treating apparatus
#52Substrate processing apparatus and substrate processing method
#53Magazine supporting equipment and semiconductor manufacturing apparatus including the same
#54Enclosure system shelf including alignment features
#55Storage shelf, and method for installing storage shelf
#56Semiconductor wafer storage device
#57Reticle transportation container
#58Wafer storage devices configured to measure physical properties of wafers stored therein
#59Environmental control material holder
#60Load port apparatus and method of driving the same
#61Method of performing a substrate detection process
#62Carrier FOUP and a method of placing a carrier
#63Multi-object capable loadlock system
#64Method for molding substrate storing container, mold, and substrate storing container
#65Wafer container and method for holding wafer
#66Anti-ejection apparatus for wafer units
#67Lithographic apparatus and method
#68Process kit enclosure system
#69Apparatus and method for processing substrate
#70Substrate storage container
#71Substrate storing container
#72Reticle transportation container
#73Substrate storage container
#74Latching mechanism for a substrate container
#75Semiconductor device handler with chuck clamp interlock
#76Substrate storage container
#77Substrate cushion brace retainer
#78Systems, apparatus, and methods for an improved load port backplane
#79MICROENVIRONMENT FOR FLEXIBLE SUBSTRATES
#80RETICLE SUPPORT FOR A CONTAINER
#81Side storage pods, electronic device processing systems, and methods for operating the same
#82High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods
#83Semiconductor wafer storage device
#84Substrate processing apparatus and method
#85Wafer purging-type shelf assembly and buffer module having the same
#86Carrying device and semiconductor processing apparatus
#87Transport packaging and method for expanded wafers
#88Buffer unit, and apparatus for treating substrate with the unit
#89Buffer unit, and apparatus and method for treating substrate with the unit
#90Methods for purging a substrate carrier at a factory interface
#91Board storing container
#92Substrate storage container
#93Stocker
#94Substrate storage container
#95Apparatus and techniques for electronic device encapsulation
#96Substrate detecting system in a substrate storage container
#97Jig for evaluating semiconductor processing chamber
#98Mask transmission equipment
#99Wafer storage container
#100Substrate storage container
#101Wafer container and method for holding wafer
#102Transparent halo for reduced particle generation
#103Reticle transportation container
#104Substrate treatment apparatus and substrate treatment method
#105Separators for handling, transporting, or storing semiconductor wafers
#106Wafer container with a seal
#107Wafer shipping box and a lower retaining member thereof
#108ELECTROSTATIC SHIELD FOR SUBSTRATE SUPPORT
#109Wafer storage container
#110Substrate housing container
#111Substrate container, controller, and abnormality detection method
#112Frame cassette for holding tape-frames
#113Method for producing a semiconductor wafer with epitaxial layer in a deposition chamber, apparatus for producing a semiconductor wafer with epitaxial layer, and semiconductor wafer with epitaxial layer
#114Fume-removing device
#115Fume-removing device
#116Fume-removing device
#117Vacuum adsorption unit and vacuum adsorption carrier
#118COOLING SYSTEM FOR RF POWER ELECTRONICS
#119Wafer support column with interlocking features
#120Wafer cassette
#121Substrate container with enhanced containment
#122Substrate storing container
#123Method of manufacturing semiconductor device
#124Next generation warpage measurement system
#125Workpiece support structures and apparatus for accessing same
#126Systems, apparatus, and methods for an improved load port backplane
#127SUBSTRATE CARRIER TRANSPORT, SORTING AND LOADING/UNLOADING
#128High density Tec-Cell carrier
#129Wafer boat and treatment apparatus for wafers
#130Substrate storage container
#131Front Opening Ring Pod
#132Transport container and transfer method for stored object
#133Front opening ring pod
#134Method for processing one semiconductor wafer or a plurality of semiconductor wafers and protective cover for covering the semiconductor wafer
#135Front opening ring pod
#136System and method for substrate support feed-forward temperature control based on RF power
#137Substrate storage and processing
#138Wafer container with shock condition protection
#139Automated replacement of consumable parts using end effectors interfacing with plasma processing system
#140Ring spacer
#141Wafer cassette and placement method thereof
#142Substrate container, load port apparatus, and substrate treating apparatus
#143SUBSTRATE CONTAINER
#144Substrate storing container
#145Method of manufacturing semiconductor device
#146Wafer carrier
#147Adapter tool configured to be attached to a loadport of a wafer handling system and wafer handling system with such an adapter tool
#148Substrate container, load port apparatus, and substrate treating apparatus
#149Wafer container and method for holding wafer
#150Adaptive inset for wafer cassette system
#151Interlocking nest wafer protector
#152Substrates handling in a deposition system
#153Front opening ring pod
#154Automated replacement of consumable parts using end effectors interfacing with plasma processing system
#155Method of using a wafer cassette to charge an electrostatic carrier
#156APPARATUS FOR PRINTING ON A SUBSTRATE FOR THE PRODUCTION OF A SOLAR CELL, AND METHOD FOR TRANSPORTING A SUBSTRATE FOR THE PRODUCTION OF A SOLAR CELL
#157Thin wafer shipper
#158SUBSTRATE CARRIER, A METHOD AND A PROCESSING DEVICE
#159Methods and devices for securing and transporting singulated die in high volume manufacturing
#160Fume-removing device
#161Wafer carrier
#162Batch LED heating and cooling chamber or loadlock
#163Methods and devices for securing and transporting singulated die in high volume manufacturing
#164Substrate storing container
#165Front opening wafer container with weight ballast
#166Frame cassette
#167Multi-cassette carrying case
#168Method for improving performance of a substrate carrier
#169Substrates storing container
#170Systems, apparatus, and methods for purging a substrate carrier at a factory interface
#171Substrate treating apparatus and substrate treating methods
#172Substrate container, a load port apparatus, and a substrate treating apparatus
#173PACKAGING INSERT
#174Wafer cassette with electrostatic carrier charging scheme
#175Multi-layer mask including non-photodefinable laser energy absorbing layer for substrate dicing by laser and plasma etch
#176Substrate processing apparatus and substrate processing method
#177Bendable carrier mount, device and method for releasing a carrier substrate
#178Wafer storage container
#179Processing chamber with features from side wall
#180Substrate storing container
#181Substrate storing container
#182Reticle pod with cover to baseplate alignment system
#183Methods and apparatus for forming semiconductor
#184FRAME CASSETTE
#185Methods and devices for securing and transporting singulated die in high volume manufacturing
#186Reduced capacity carrier and method of use
#187Replaceable wafer support backstop
#188Wafer pod and wafer positioning mechanism thereof
#189Methods and apparatus for large diameter wafer handling
#190Wafer container with door mounted shipping cushions
#191Wafer shipper
#192Wafer carrier
#193Storage container, shutter opening/closing unit of storage container, and wafer stocker using storage container and shutter opening/closing unit
#194PACKAGING SYSTEM FOR PROTECTION OF IC WAFERS DURING FABRICATION, TRANSPORT AND STORAGE
#195Wafer storing container
#196Process box, arrangements and methods for processing coated substrates
#197Workpiece structures and apparatus for accessing same
#198Substrate loading device
#199WAFER HOLDING APPARATUS
#200Apparatus and method for treating substrate
#201Reticle pod
#202Packaging for substrates and packaging unit having such packaging
#203Methods and apparatus for large diameter wafer handling
#204Elastic retention wheels and wafer adapter containing the same wheels
#205Device for forming a reduced chamber space, and method for positioning multilayer bodies
#206Thin wafer shipper
#207Substrate storage container
#208Substrate storage container
#209Arrangement, system, and method for processing multilayer bodies
#210Reticle pod
#211Packaging system for protection of IC wafers during fabrication, transport and storage
#212Workpiece support structures and apparatus for accessing same
#213Substrate carrying mechanism, substrate processing apparatus, and semiconductor device manufacturing method
#214COMPOSITE SUBSTRATE CARRIER
#215Wafer container with elasticity module
#216ENCLOSED VERTICAL RACK FOR STORING AND TRANSPORTING LARGE SUBSTRATES
#217Wafer container with purgeable supporting module
#218Wafer container with at least one purgeable supporting module having a long slot
#219Method for improving performance of a substrate carrier
#220Substrate storage container
#221Multi-color molding article, multicolor molding method and substrate storage container
#222Front opening unified pod disposed with purgeable supporting module
#223METHODS AND APPARATUSES FOR LARGE DIAMETER WAFER HANDLING
#224Injection molding die and injection molding method
#225Thin plate container with a stack of removable loading trays
#226Systems and methods for handling wafers
#227COMPOSITE SUBSTRATE CARRIER
#228Container for housing a mask blank, method of housing a mask blank, and a mask blank package
#229Wafer container with purgeable supporting module
#230Reduction of electric-field-induced damage in field-sensitive articles
#231Reticle pod
#232High cleanliness article transport system
#233Semiconductor wafer container
#234Device for the transport, storage, and transfer of substrates
#235WAFER CASSETTE
#236Wafer Carrying Apparatus
#237Semiconductor device manufacturing apparatus and wafer loading/unloading method thereof
#238Controlled deflection of large area semiconductor substrates for shipping and manufacturing containers
#239METHOD AND APPARATUS FOR DETECTING A WAFER POD
#240FULL-CONTACT RING FOR A LARGE WAFER
#241Wafer Carrying Apparatus
#242STORAGE APPARATUS AND FILTER MODULE THEREIN
#243Invertible front opening unified pod
#244Lid unit thin plate supporting container
#245METHOD AND APPARATUS FOR PROVIDING FLAT PANEL DISPLAY ENVIRONMENTAL ISOLATION
#246Substrate housing container
#247TRANSPORT MODULE
#248Wafer Cassette, Wafer Cassette Pod and Minienvironment Chamber Loadport Arrangement with a Minienvironment Chamber and a Wafer Cassette Pod with a Wafer Cassette
#249Sealed Enclosure for Transporting and Storing Semiconductor Substrates
#250Supporting Member For Thin-Film-Coated Boards, Storage Container For Thin-Film-Coated Boards, Mask-Blank-Storing Body, Transfer-Mask-Storing Body, and Method For Transporting Thin-Film-Coated Boards
#251ENVIRONMENTAL ISOLATION SYSTEM FOR FLAT PANEL DISPLAYS
#252High cleanliness article transport system
#253Metal photomask box
#254Wafer transportable container
#255Conveying system
#256Receiver for component feed plates and component feeder
#257Thin wafer insert
#258Composite substrate carrier
#259Substrate storage container
#260WAFER PACKING
#261Workpiece support structures and apparatus for accessing same
#262Wafer container with door actuated wafer restraint
#263Substrate storage container and method for manufacturing the same
#264Single thin plate storage container and shock-absorbing support members used therein
#265Thin plate supporting container
#266Thin plate supporting container
#267Thin plate supporting container
#268Thin plate supporting container
#269Thin plate supporting container
#270Fixing carrier, fixing carrier manufacturing method, method of using fixing carriers and substrate storage container
#271Single thin plate storage container
#272Substrate containing case
#273Airtight container
#274Universal reticle transfer system
#275Reticle-processing system
#276Reticle-carrying container
#277Wafer stack separator
#278Lid unit for thin-plate supporting container
#279Wafer carrying apparatus
#280Reduced capacity carrier and method of use
#281Protective interleaf for stacked wafer shipping
#282Substrate carrier having door latching and substrate clamping mechanisms
#283Thin plate storage container with handled supporting member
#284Thin plate storage container and lid having at least one thin plate supporting member
#285Substrate storage container
#286Substrate storage container
#287Substrate carrier for parallel wafer processing reactor
#288Composite substrate carrier
#289Lid unit for thin plate supporting container
#290Lid attaching mechanism with camming unit for thin-plate supporting container
#291Thin-plate supporting container
#292Liquid crystal cell carrying case
#293Substrate carrier
#294Wafer container with door actuated wafer restraint
#295Wafer support attachment for a semi-conductor wafer transport container
#296Methods and apparatus for carriers suitable for use in high-speed/high-acceleration transport systems
#297Hermetically sealed container for large-sized precision sheet (semi-) product
#298Reduction of electric-field-induced damage in field-sensitive articles
#299Wafer shipping device