207417 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers Batch transfer of wafers
Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus
#302Compact apparatus and method for storing and loading semiconductor wafer carriers
#303Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus
#304Vertical type of thermal processing apparatus and method of using the same
#305System and method for manufacturing liquid crystal display panel, and liquid crystal display panel using the same
#306Semiconductor manufacturing apparatus
#307Vertical heat treatment system and method of transferring process objects
#308HIGH THROUGHPUT PLASMA TREATMENT SYSTEM
#309Displaced wafer detection systems
#310Semiconductor substrate transfer apparatus and semiconductor substrate processing apparatus equipped with the same
#311CLUSTER TOOL FOR ADVANCED FRONT-END PROCESSING
#312Load-lock and semiconductor device manufacturing equipment comprising the same
#313Batch wafer handling system
#314FOUP loading load lock
#315Apparatus and method for transferring semiconductor wafers
#316Linear semiconductor processing facilities
#317WAFER TRANSFER SYSTEM, WAFER TRANSFER METHOD, CASSETTE EXCHANGE SYSTEM AND CASSETTE EXCHANGE METHOD
#318Substrate processing apparatus and substrate processing method
#319Substrate processing apparatus and substrate processing method
#320Substrate processing apparatus and substrate processing method
#321Methods and apparatus for processing the backsides of wafers
#322Substrate processing apparatus using a batch processing chamber
#323Systems and methods for achieving isothermal batch processing of substrates used for the production of micro-electro-mechanical-systems
#324Substrate processing apparatus
#325Breakaway mandrel for transporting disks
#326Methods and systems for driving robotic components of a semiconductor handling system
#327Adjustable substrate transfer apparatus
#328Glass substrate transporting facility
#329Substrate holding device
#330Methods and systems for handling a workpiece in vacuum-based material handling system
#331Stacked process modules for a semiconductor handling system
#332Software controller for handling system
#333Sensor methods and systems for semiconductor handling
#334Methods and systems for reducing the effect of vibration in a vacuum-based semiconductor handling system
#335Ion implanting apparatus
#336Liquid processing apparatus
#337Loadlock
#338Design for LPT arm cover
#339System and method for conveying flat panel display
#340Substrate processing apparatus and substrate processing method
#341Reduced footprint tool for automated processing of microelectronic substrates
#342Substrate processing system and substrate processing method
#343Automated semiconductor processing systems
#344Substrate transfer device with cassettes
#345High throughput plasma treatment system
#346Wafer transfer equipment and semiconductor device manufacturing apparatus using wafer transfer equipment
#347Modularity of Tec-Cell, FOUP and substrate containers and carriers