207417 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers Batch transfer of wafers
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
#2BATCH PROCESSING OVEN FOR MAGNETIC ANNEAL
#3LOADING AND UNLOADING SYSTEM, CARRYING BOAT, SUCTION CUP ASSEMBLY, AND METHOD FOR LOADING WAFERS
#4SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND RECORDING MEDIUM
#5METHOD OF TREATING SUBSTRATE
#6MODULAR EQUIPMENT MAINFRAME FOR SEMICONDUCTOR PROCESS FLOWS
#7SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
#8SEMICONDUCTOR PROCESSING ASSEMBLY AND METHOD FOR TRANSFERRING WAFERS
#9PROCESS KIT ENCLOSURE SYSTEM
#10SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
#11DISPLAY PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, DISPLAY METHOD, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
#12POSTURE TURNING APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
#13SUBSTRATE TREATMENT SYSTEM
#14NESTING ATMOSPHERIC ROBOT ARMS FOR HIGH THROUGHPUT
#15SUBSTRATE TREATMENT SYSTEM
#16SUBSTRATE PROCESSING SYSTEM
#17SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SEMICONDUCTOR DEVICE
#18SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
#19LIFT ASSEMBLY FOR SEMICONDUCTOR MANUFACTURING PROCESSING CHAMBER
#20APPARATUS AND METHOD FOR CLEANING SEMICONDUCTOR WAFERS
#21WAFER TREATMENT DEVICE
#22SUBSTRATE PROCESSING SYSTEM
#23PRODUCTION LINE FOR PRODUCING SOLAR CELL
#24SUBSTRATE PROCESSING METHOD
#25INTEGRATED CIRCUIT (IC) FABRICATED IN A HIGH MIX ENVIRONMENT
#26PROCESSING ARRANGEMENT AND METHOD FOR ADJUSTING GAS FLOW
#27ROBOT FOR HANDLING FLAT SUBSTRATES AS WELL AS ALIGNMENT FACILITY
#28SUBSTRATE TREATING APPARATUS
#29CARRIER CHUCK AND METHODS OF FORMING AND USING THEREOF
#30OPTICALLY ACTIVATED OBJECT MASS TRANSFER USING MULTIPLE OPTICAL ENERGY SOURCES
#31Apparatuses for executing a direct transfer of a semiconductor device die disposed on a first substrate to a second substrate
#32STORAGE SYSTEM
#33CASSETTE HOUSING, PROBER, SERVER RACK, AND STORAGE SYSTEM
#34SUBSTRATE TREATING APPARATUS
#35Systems and methods for air flow optimization in environment for semiconductor device
#36Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
#37Vertical feeding and wafer inserting integrated machine
#38Substrate processing system, substrate processing method, and recording medium
#39MULTIPLE SUBSTRATE HANDLING SYSTEM AND METHOD
#40SUBSTRATE PROCESSING APPARATUS
#41METHOD OF DISPLAYING SUBSTRATE ARRANGEMENT DATA, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MENDIUM AND SUBSTRATE PROCESSING APPARATUS
#42Transport apparatus with linear bearing
#43Wafer carrier, wafer access device and wafer carrier and access assembly having the same
#44BATCH PROCESSING OVEN FOR MAGNETIC ANNEAL
#45Processing system having a front opening unified pod (FOUP) load lock
#46FRONT OPENING UNIFIED POD, WAFER TRANSFER SYSTEM AND WAFER TRANSFER METHOD
#47Transport system
#48Processing arrangement and method for adjusting gas flow
#49Systems, devices, and methods for air flow optimization including adjacent a FOUP
#50Wafer treatment device
#51Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
#52Substrate transfer apparatus, substrate processing system and substrate processing method
#53Batch processing oven and operating methods
#54Apparatus for transferring LED
#55Intelligent customizable wet processing system
#56Vertical batch furnace assembly
#57Automated Batch Production Thin Film Deposition Systems and Methods of Using the Same
#58Systems for integrating load locks into a factory interface footprint space
#59Adjustable device and an adjustable storage box
#60Enhanced automatic wafer centering system and techniques for same
#61Contactless wafer separator
#62ROBOT APPARATUS AND SYSTEMS, AND METHODS FOR TRANSPORTING SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING
#63Apparatuses for executing a direct transfer of a semiconductor device die disposed on a first substrate to a second substrate
#64Tray Engine and Methods for Transferring Trays to and From Tools and in Sorters
#65Aligner device and method for correcting positional misalignment of workpiece
#66APPARATUS FOR SENSING WAFER LOADING STATE USING SOUND WAVE SENSOR
#67Transfer unit, and apparatus and method for treating substrate
#68Apparatus and method for cleaning semiconductor wafers
#69Automated guided vehicle with multistage loading structure
#70Substrate processing system and substrate processing method
#71Method for manufacturing a semiconductor on insulator type structure by layer transfer
#72Vertical batch furnace assembly
#73WAFER CARRIER FOR HANDLING AND TRANSPORTING A WAFER
#74Transfer method and transfer system for transferring substrate between transfer device and substrate stage
#75Process kit enclosure system
#76Substrate aligning method, substrate receiving method, substrate liquid processing method, substrate aligning apparatus, substrate receiving apparatus, substrate liquid processing apparatus, and substrate processing system
#77Substrate processing apparatus and substrate processing method
#78Methods for loading or unloading substrate with evaporator planet
#79Substrate processing apparatus
#80Substrate transporter and substrate transport method
#81Substrate processing system
#82Integrated chip die carrier exchanger
#83INTELLIGENT CUSTOMIZABLE WET PROCESSING SYSTEM
#84Substrate processing apparatus and recording medium
#85Substrate treating apparatus and substrate transporting method
#86Method and apparatus for cleaning semiconductor wafers
#87Multi-level hand apparatus and conveying robot provided with the same
#88TRACK SYSTEM AND METHOD OF PROCESSING SEMICONDUCTOR WAFERS
#89Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
#90Substrate treating apparatus
#91Substrate processing apparatus
#92Leveling sensor, load port including the same, and method of leveling a load port
#93Transport apparatus with linear bearing
#94Substrate processing apparatus and substrate processing method
#95Substrate processing system
#96Substrate processing apparatus, substrate loading method, and substrate processing method
#97Apparatus to increase transferspeed of semiconductor devices with micro-adjustment
#98Substrate treating apparatus and method for controlling substrate treating apparatus
#99Processing system having a front opening unified pod (FOUP) load lock
#100Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
#101Substrate processing device and substrate conveying method
#102Wafer handling equipment and method thereof
#103Horizontal articulated robot with bevel gears
#104Substrate transfer device and substrate transfer method
#105Substrate processing apparatus and method of manufacturing semiconductor device
#106SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD
#107Positioning device, loading and/or unloading system and method for operating a positioning device
#108Substrate processing apparatus and control system
#109Method and apparatus for cleaning semiconductor wafer
#110Automated guided vehicle with multistage loading structure
#111Substrate processing apparatus and recording medium
#112Systems and methods for automated wafer handling
#113Substrate processing apparatus
#114Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
#115Storage rack
#116Transfer device, substrate processing apparatus, and transfer method
#117Substrate loading in an ALD reactor
#118Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
#119Substrate processing apparatus and temperature measurement unit
#120HORIZONTAL MULTI-JOINT ROBOT AND PRODUCTION METHOD FOR HORIZONTAL MULTI-JOINT ROBOT
#121End effector with slides for transferring trays
#122Substrate Processing Apparatus
#123Vacuum transfer module and substrate processing apparatus
#124High-throughput batch porous silicon manufacturing equipment design and processing methods
#125Substrate transport device, detection position calibration method and substrate processing apparatus
#126Substrate processing apparatus
#127Substrate liquid processing apparatus and substrate liquid processing method
#128Overhead manufacturing, processing and storage system
#129Thermal treatment system with collector device
#130Substrate alignment apparatus, substrate processing apparatus, substrate arrangement apparatus, substrate alignment method, substrate processing method, and substrate arrangement method
#131Substrate arrangement apparatus and substrate arrangement method
#132Posture changing device
#133Substrate transporter and substrate transport method
#134Suction equipment
#135Transferring method, manufacturing method, device and electronic apparatus of micro-LED
#136Substrate conveying robot and substrate processing system
#137Transfer device and transfer method
#138Wafer box, method for arranging wafers in a wafer box, wafer protection plate and method for protecting a wafer
#139Substrate treating system
#140Wafer dryer apparatus and method
#141Integrated chip die carrier exchanger
#142Substrate transfer device and substrate transfer method
#143Substrate-processing apparatus and method of manufacturing semiconductor device
#144Substrate holding device
#145Apparatus and transfer unit which measures weight remaining on a substrate
#146Wafer cassette and placement method thereof
#147HIGH-THROUGHPUT BATCH POROUS SILICON MANUFACTURING EQUIPMENT DESIGN AND PROCESSING METHODS
#148Substrate aligning method, substrate receiving method, substrate liquid processing method, substrate aligning apparatus, substrate receiving apparatus, substrate liquid processing apparatus, and substrate processing system
#149Wafer boat support table and heat treatment apparatus using the same
#150Multi-station tool with wafer transfer microclimate systems
#151Substrate angle alignment device, substrate angle alignment method, and substrate transfer method
#152Wafer tray sorter with door coupled to detector
#153Transfer unit, apparatus for treating substrate, and method for treating substrate
#154Method of manufacturing semiconductor device
#155Substrate conveying robot and substrate processing system with pair of blade members arranged in position out of vertical direction
#156Substrate processing apparatus, substrate transport method, and computer-readable recording medium with stored substrate transport program
#157Apparatus for inspecting robot hands
#158Substrate processing system
#159Substrate storing method and substrate processing apparatus
#160System architecture for vacuum processing
#161Industrial robot with slit through-hole in cover
#162Substrate processing apparatus
#163Substrate conveying system and method
#164End effector and substrate conveying robot
#165End effector and substrate conveying robot
#166End effector device
#167Substrate processing method for transferring a substrate
#168Industrial robot
#169Substrate treatment apparatus
#170Substrate transport apparatus and substrate transport method
#171Equipment platform system and wafer transfer method thereof
#172Horizontal articulated robot and method for manufacturing horizontal articulated robot
#173Industrial robot with elevating mechanism and arm-elevating mechanism
#174Work-in-progress substrate processing methods and systems for use in the fabrication of integrated circuits
#175Mounting system and charging method for disc-shaped objects
#176Substrate conveyance apparatus
#177Wafer treatment device
#178End effector device
#179Method of etching and cleaning wafers
#180Method and apparatus for cleaning semiconductor wafer
#181Substrate loading in an ALD reactor
#182Schedule making device, substrate processing apparatus, schedule making program, schedule making method, and substrate processing method
#183Electrostatic charge removal for solar cell grippers
#184Substrate conveyance method and substrate processing apparatus
#185Cooling mechanism and processing system
#186Substrate processing system
#187Substrate inverting apparatus and substrate processing apparatus
#188Dynamic pitch substrate lift
#189Cassette transfer apparatus and cassette transferring method using the same
#190PRODUCT CARTRIDGE FOR TRANSPORTING PRODUCT
#191Substrate processing apparatus, method of measuring temperature of substrate processing apparatus and non-transitory computer-readable recording medium
#192Substrate retaining device with push back portion
#193Substrate processing apparatus and substrate conveying apparatus for use in the same
#194Workpiece alignment device
#195Magnetic annealing apparatus
#196Apparatus for transferring substrate, substrate processing system, method for transferring substrate and memory medium
#197Tray engine with slide attached to an end effector base
#198End effector device and substrate conveying robot including end effector device
#199Substrate processing apparatus
#200Substrate processing method
#201Substrate processing apparatus and substrate processing method for performing cleaning process and the like on substrate
#202Electrostatic charge removal for solar cell grippers
#203Substrate processing apparatus, substrate supporter and method of manufacturing semiconductor device
#204Transfer robot, its substrate transfer method and substrate transfer relay device
#205Semiconductor manufacturing systems
#206Substrate processing system, substrate transfer method and storage medium
#207Processing system and processing method
#208Techniques for handling media arrays
#209Ancillary apparatus and method for loading glass substrates into a bracket
#210Transfer system
#211Pitch change device and pitch change method
#212Method and apparatus for lifting a horizontally-oriented substrate from a cassette
#213Substrate processing apparatus, substrate processing method and storage medium
#214Temperature control method, storage medium storing a program therefor, temperature control apparatus, and heat treatment apparatus
#215Transfer mechanism with multiple wafer handling capability
#216Heat treatment apparatus and method of transferring substrates to the same
#217Substrate Placement Stage, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
#218THIN-FILM MANUFACTURING EQUIPMENT, METHOD FOR MANUFACTURING THIN FILM, AND METHOD FOR MAINTAINING THIN-FILM MANUFACTURING EQUIPMENT
#219PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM LOADER
#220Parallel single substrate processing system
#221Parallel single substrate processing system with alignment features on a process section frame
#222PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM HOLDER
#223Parallel single substrate processing system
#224PARALLEL SINGLE SUBSTRATE PROCESSING AGITATION MODULE
#225PARALLEL SINGLE SUBSTRATE PROCESSING FLUID JET MODULE
#226Parallel single substrate marangoni module
#227RACK-TO-RACK PACKAGED SEMICONDUCTOR DEVICE EXCHANGER
#228Substrate processing apparatus
#229Thin Wafer Gripper Using High Pressure Air
#230Substrate transport apparatus, substrate transport method, and recording medium
#231Substrate conveying method, recording medium in which program is recorded for causing substrate conveying method to be executed, and substrate conveyor
#232Workpiece alignment device
#233SUBSTRATE PROCESSING APPARATUS USING A BATCH PROCESSING CHAMBER
#234Substrate processing method
#235Linear semiconductor processing facilities
#236Device and method for stacking and/or conveying a plurality of flat substrates
#237Substrate processing apparatus, and substrate transport method
#238Stacked process modules for a semiconductor handling system
#239Method of manufacturing a semiconductor device and substrate processing apparatus
#240Substrate holder stocker device, substrate processing apparatus, and substrate holder moving method using the substrate holder stocker device
#241Gripping device, transfer device, processing device, and manufacturing method for electronic device
#242METHOD AND DEVICE FOR FORMING A PACKET-LIKE BACK-TO-BACK WAFER BATCH
#243SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#244Substrate-processing apparatus and method of transferring substrate in the same
#245Robot edge contact gripper
#246THIN-FILM SOLAR CELL MANUFACTURING APPARATUS
#247System for batch processing of magnetic media
#248Apparatus and method for simultaneous treatment of multiple workpieces
#249Two-chamber system and method for serial bonding and exfoliation of multiple workpieces
#250Substrate-processing apparatus and method of transferring substrate in the same
#251THIN-FILM SOLAR CELL MANUFACTURING APPARATUS
#252SUBSTRATE ALIGNMENT APPARATUS
#253Mounting device for disk-shaped substrates such as solar wafers
#254APPARATUS FOR MANUFACTURING THIN-FILM SOLAR CELL
#255THIN-FILM SOLAR CELL MANUFACTURING APPARATUS
#256APPARATUS FOR MANUFACTURING THIN-FILM SOLAR CELL
#257Substrate transporting apparatus, substrate platform shelf and substrate processing apparatus
#258Systems and methods for handling wafers
#259Substrate processing system and substrate processing method
#260Substrate transfer device and substrate transfer method
#261SUBSTRATE PROCESSING APPARATUS
#262TRANSFER DEVICE FOR AN OVERHEAD CONVEYING SYSTEM
#263SUBSTRATE PROCESSING APPARATUS USING A BATCH PROCESSING CHAMBER
#264Substrate processing apparatus
#265Substrate processing system
#266Substrate processing apparatus and substrate conveying apparatus for use in the same
#267Thermal processing apparatus, thermal processing method, and storage medium
#268WAFER CARRIER HANDLING METHODS, SYSTEMS AND APPARATUS FOR SEMICONDUCTOR WAFER FABRICATION
#269System and method for substrate transport
#270Method for forming a back-to-back wafer batch to be positioned in a process boot, and handling system for forming the BTB wafer batch
#271METHOD AND SYSTEM FOR PERFORMING MULTIPLE TREATMENTS IN A DUAL-CHAMBER BATCH PROCESSING SYSTEM
#272Wafer transfer device and wafer transfer method
#273Substrate treating apparatus, and a substrate transporting method therefor
#274Loadport
#275Workpiece transfer mechanism, workpiece transfer method and workpiece processing system
#276Method for creating wafer batches in an automated batch process tool
#277Substrate processing system and substrate transfer method
#278Transfer mechanism with multiple wafer handling capability
#279Stacked process modules for a semiconductor handling system
#280Substrate transfer module and substrate processing system
#281High throughput semiconductor wafer processing
#282Batch forming apparatus, substrate processing system, batch forming method, and storage medium
#283SYSTEM AND METHOD FOR USE IN A LITHOGRAPHY TOOL
#284Batch wafer handling system
#285CASSETTE EXCHANGE SYSTEM
#286Substrate transfer apparatus, substrate transfer method, and storage medium
#287Substrate treatment apparatus
#288Substrate Processing Apparatus and Substrate Processing System
#289Substrate processing apparatus
#290SUBSTRATE TRANSPORTING APPARATUS, SUBSTRATE PLATFORM SHELF AND SUBSTRATE PROCESSING APPARATUS
#291SUBSTRATE PROCESSING APPARATUS
#292SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#293WAFER TRANSFER APPARATUS
#294Wafer handling system for a loadlock
#295Linear semiconductor processing facilities
#296APPARATUS FOR VACUUM TREATING TWO DIMENSIONALLY EXTENDED SUBSTRATES AND METHOD FOR MANUFACTURING SUCH SUBSTRATES
#297Apparatus and method for transferring substrate
#298Conveying system
#299Conveying system
#300Vertical heat treatment system and automatic teaching method for transfer mechanism