220397 ⎘
Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezo-electric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient Temperature coefficient
METAL RIBS IN ELECTROMECHANICAL DEVICES
#2BULK ACOUSTIC WAVE RESONATOR, MANUFACTURING METHOD THEREOF AND ELECTRONIC DEVICE
#3METHOD FOR FORMING AN ALUMINUM NITRIDE LAYER
#4ACOUSTIC WAVE DEVICE WITH MULTIPLE PIEZOELECTRIC LAYERS
#5Decoupled transversely-excited film bulk acoustic resonators
#6Metal ribs in electromechanical devices
#7Substrate for a temperature-compensated surface acoustic wave device or volume acoustic wave device
#8BULK-ACOUSTIC WAVE RESONATOR
#9Decoupled transversely-excited film bulk acoustic resonators
#10Strain compensated rare earth group III-nitride heterostructures
#11BULK ACOUSTIC WAVE DEVICE WITH INTEGRATED TEMPERATURE SENSOR AND HEATER
#12ACOUSTIC WAVE DEVICE, AND PREPARATION METHOD THEREFOR AND TEMPERATURE CONTROL METHOD THEREOF
#13Metal ribs in electromechanical devices
#14Vibration element and oscillator
#15Acoustic wave resonator, filter, multiplexer, and wafer
#16Substrate for a temperature-compensated surface acoustic wave device or volume acoustic wave device
#17Method for forming an aluminum nitride layer
#18Substrate for a temperature-compensated surface acoustic wave device or volume acoustic wave device
#19Acoustic resonator
#20Method of producing composite substrate for surface acoustic wave device
#21Acoustic wave element and method for manufacturing same
#22Temperature compensated acoustic wave devices
#23Substrate for a temperature-compensated surface acoustic wave device or volume acoustic wave device
#24Piezoelectric vibrator and sensor
#25COMPOSITE STRUCTURE AND ASSOCIATED PRODUCTION METHOD
#26Crystal resonator
#27Piezoelectric thin film and piezoelectric vibrator
#28Crystal resonator
#29Resonator element, resonator, electronic device, electronic apparatus, and moving object
#30Acoustic wave filter and duplexer
#31Duplexer
#32FREQUENCY ADJUSTMENT METHOD OF PIEZOELECTRIC RESONATOR AND THE PIEZOELECTRIC RESONATOR
#33Method for producing piezoelectric device
#34Surface elastic wave device comprising a single-crystal piezoelectric film and a crystalline substrate with low visoelastic coefficients
#35Piezoelectric resonator and method for manufacturing the same
#36Bulk acoustic resonator device including temperature compensation structure comprising low acoustic impedance layer
#37Electrical resonator
#38Piezoelectric thin film resonator, filter and duplexer
#39Resonator, oscillator, electronic apparatus, physical quantity sensor, and mobile object
#40Acoustic wave filter and duplexer
#41Resonator element, resonator, oscillator, electronic device, and mobile object
#42Resonator element, resonator, oscillator, electronic device and mobile object
#43Resonator element, resonator, electronic device, electronic apparatus, and moving object
#44Bulk acoustic wave resonator comprising a boron nitride piezoelectric layer
#45Temperature drift compensation of MEMS resonators
#46Radio frequency filter and manufacturing method thereof
#47Piezoelectric device and method for producing piezoelectric device
#48Acoustic wave device
#49Piezoelectric thin-film resonator and method for manufacturing the same
#50Micromechanical Resonator
#51Piezoelectric resonator element, piezoelectric resonator, piezoelectric oscillator, resonator gyro element, resonator gyro sensor, and electronic apparatus
#52First and second orders temperature-compensated resonator
#53Method of manufacturing an electrical resonator
#54Temperature compensation of film bulk acoustic resonator devices
#55Quartz oscillator manufacturing method and quartz oscillator
#56Film bulk acoustic resonator (FBAR) devices with temperature compensation
#57Adjusted frequency temperature coefficient resonator
#58Methods for manufacturing high intensity ultrasound transducers
#59Crystal unit
#60Decoupled transversely-excited film bulk acoustic resonators