220396 ⎘
Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezo-electric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
Sub-classes:RESONATOR AND PREPARATION METHOD THEREFOR
#2ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME
#3PLATE MODE MICROACOUSTIC FILTERS INCLUDING BILATERAL TEMPERATURE COEFFICIENT OF FREQUENCY (TCF) LAYERS
#4OSCILLATOR MASTER BOARD, OSCILLATORS AND METHOD FOR MAKING THE SAME
#5TUNING ACOUSTIC RESONATORS WITH BACK-SIDE COATING
#6TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH ELECTRODES HAVING IRREGULAR HEXAGON CROSS-SECTIONAL SHAPES
#7SELF-REFERENCING MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATOR WITH DUAL MECHANICAL MODES FOR TEMPERATURE-INDEPENDENT ENVIRONMENTAL SENSING
#8MULTIPLE ELECTROMECHANICAL COUPLING COEFFICIENTS ON SAME WAFER
#9BULK ACOUSTIC WAVE DEVICE INCLUDING DIELECTRIC LAYER FOR FRAME MODE SUPPRESSION
#10BULK ACOUSTIC WAVE DEVICE INCLUDING FRAME OUTSIDE OF ACTIVE REGION AND FLAT BOTTOM PIEZOELECTRIC LAYER
#11FUNDAMENTAL TONE MITIGATION FOR SECOND OVERTONE BULK ACOUSTIC WAVE RESONATOR
#12METHODS OF MANUFACTURING BULK ACOUSTIC WAVE DEVICE HAVING PIEZOELECTRIC LAYER WITH ENGINEERED REGION
#13BULK ACOUSTIC WAVE DEVICE WITH BONDING LAYER FOR FREQUENCY ADJUSTMENT LAYER
#14SOLIDLY-MOUNTED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC FILTERS WITH MULTIPLE PIEZOELECTRIC PLATE THICKNESSES
#15TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH TWO-LAYER ELECTRODES HAVING A NARROWER TOP LAYER
#16Vibration Element, Manufacturing Method Of Vibration Element, Physical Quantity Sensor, Inertial Measurement Device, Electronic Apparatus, And Vehicle
#17ACOUSTIC WAVE DEVICE INCLUDING ION IMPLANTED PIEZOELECTRIC LAYER
#18METHOD OF FABRICATING ACOUSTIC WAVE DEVICE INCLUDING ION IMPLANTED PIEZOELECTRIC LAYER
#19METHOD FOR ADJUSTING FREQUENCY OF PIEZOELECTRIC RESONATOR DEVICE AND PIEZOELECTRIC RESONATOR DEVICE
#20SILVER-BONDED QUARTZ CRYSTAL
#21METAL RIBS IN ELECTROMECHANICAL DEVICES
#22TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH A CAVITY HAVING ROUND END ZONES
#23BULK ACOUSTIC WAVE RESONATOR, MANUFACTURING METHOD THEREOF AND ELECTRONIC DEVICE
#24PIEZOELECTRIC RESONATOR DEVICE AND METHOD FOR ADJUSTING FREQUENCY OF PIEZOELECTRIC RESONATOR DEVICE
#25METHOD FOR ADJUSTING FREQUENCY OF PIEZOELECTRIC RESONATOR DEVICE AND PIEZOELECTRIC RESONATOR DEVICE
#26FILTER USING TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH DIVIDED FREQUENCY-SETTING DIELECTRIC LAYERS
#27METHOD FOR FORMING AN ALUMINUM NITRIDE LAYER
#28ACOUSTIC WAVE DEVICE HAVING PIEZOELECTRIC LAYER STRUCTURE WITH SLOPED REGION
#29TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR PACKAGE
#30HETEROSTRUCTURE AND METHOD OF FABRICATION
#31TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR
#32METHOD FOR FABRICATING FILM BULK ACOUSTIC RESONATOR (FBAR), FBAR, AND FILTER
#33DESIGN AND FABRICATION OF A NOVEL SENSOR BASED ON THE QUARTZ CRYSTAL RESONATOR TECHNIQUE TO DETECT BIOLOGICAL AND NON-BIOLOGICAL SYSTEMS
#34BULK ACOUSTIC WAVE RESONATORS WITH PATTERNED MASS LOADING LAYERS
#35ACOUSTIC WAVE FILTER AND METHOD OF IMPROVING FREQUENCY DISTRIBUTION IN RESONATORS FOR SAME
#36TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS
#37CRYSTAL RESONATOR AND METHOD FOR MANUFACTURING THE SAME
#38ACOUSTIC WAVE DEVICE AND METHOD FOR MANUFACTURING ACOUSTIC WAVE DEVICE
#39Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer
#40PIEZOELECTRIC BULK LAYERS WITH TILTED C-AXIS ORIENTATION AND METHODS FOR MAKING THE SAME
#41PIEZOELECTRIC BULK WAVE DEVICE AND MANUFACTURING METHOD THEREOF
#42ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME
#43RADIO FREQUENCY ACOUSTIC DEVICES AND METHODS WITH INTERDIGITAL TRANSDUCER FORMED IN MULTILAYER PIEZOELECTRIC SUBSTRATE
#44Two dimensional rod resonator for RF filtering
#45Decoupled transversely-excited film bulk acoustic resonators
#46PACKAGED ACOUSTIC WAVE DEVICES WITH MULTILAYER PIEZOELECTRIC SUBSTRATE
#47Metal ribs in electromechanical devices
#48Vibration element, manufacturing method of vibration element, physical quantity sensor, inertial measurement device, electronic apparatus, and vehicle
#49Substrate for a temperature-compensated surface acoustic wave device or volume acoustic wave device
#50Electronic device and formation method therefor
#51Method for fabricating an acoustic resonator device with perimeter structures
#52RESONATOR DEVICE, RESONATOR MODULE, ELECTRONIC APPARATUS, AND VEHICLE
#53TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH REDUCED SPURIOUS MODES
#54LATERAL FIELD EXCITATION ACOUSTIC RESONATOR
#55Heterostructure and method of fabrication
#56RECESSED FRAMES IN THICKNESS MODE PIEZOELECTRIC RESONATORS
#57TUNING ACOUSTIC RESONATORS WITH BACK-SIDE COATING
#58ACOUSTIC WAVE DEVICE AND ACOUSTIC-WAVE-DEVICE MANUFACTURING METHOD
#59BULK ACOUSTIC WAVE RESONATOR AND CAPACITOR WITH SILICON SUPPORT
#60Transversely-excited film bulk acoustic resonator package and method
#61SOLIDLY MOUNTED RESONATOR AND MANUFACTURING METHOD THEREOF
#62Vibration element, physical quantity sensor, inertial measurement unit, electronic apparatus, and vehicle
#63BULK ACOUSTIC WAVE DEVICE WITH STACKED PIEZOELECTRIC LAYERS
#64METHOD OF MANUFACTURING BULK ACOUSTIC WAVE DEVICE WITH ATOMIC LAYER DEPOSITION OF PIEZOELECTRIC LAYER
#65BULK ACOUSTIC WAVE DEVICE WITH PIEZOELECTRIC LAYER FORMED BY ATOMIC LAYER DEPOSITION
#66BULK ACOUSTIC WAVE RESONATOR WITH MODIFIED OUTER REGION
#67BULK ACOUSTIC WAVE RESONATOR WITH REDUCED PERIMETER LEAKAGE
#68Resonator, filter and duplexer
#69BULK-ACOUSTIC WAVE RESONATOR
#70Elastic wave device and method for manufacturing the same
#71VIBRATOR ELEMENT, VIBRATOR DEVICE, AND METHOD OF MANUFACTURING VIBRATOR ELEMENT
#72CRYSTAL UNIT, SEMIMANUFACTURED CRYSTAL UNIT, AND METHOD FOR MANUFACTURING CRYSTAL UNIT
#73TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR FABRICATION USING A PIEZOELECTRIC PLATE, SILICON SUBSTRATE AND HANDLE WAFER SANDWICH
#74RAISED AND RECESSED FRAMES ON BOTTOM AND TOP PLATES OF A BAW RESONATOR
#75Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same
#76Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
#77Tuning fork-type vibrating reed, tuning fork-type vibrator and manufacturing method therefor
#78Symmetric transversely-excited film bulk acoustic resonators with reduced spurious modes
#79PISTON MODE GENERATION IN THIN PLATE LAMB WAVE DEVICE
#80RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME
#81Decoupled transversely-excited film bulk acoustic resonators
#82Strain compensated rare earth group III-nitride heterostructures
#83Piezoelectric vibrator element, piezoelectric vibrator, oscillator, and method of manufacturing piezoelectric vibrator element
#84METHOD FOR MANUFACTURING FILM BULK ACOUSTIC RESONANCE DEVICE HAVING SPECIFIC RESONANT FREQUENCY
#85Solidly-mounted transversely-excited film bulk acoustic filters with multiple piezoelectric plate thicknesses
#86BULK ACOUSTIC WAVE DEVICE WITH INTEGRATED TEMPERATURE SENSOR AND HEATER
#87METHODS OF MANUFACTURING BULK ACOUSTIC WAVE RESONATORS WITH PATTERNED MASS LOADING LAYERS
#88Substrate processing and membrane release of transversely-excited film bulk acoustic resonator using a sacrificial tub
#89Bulk acoustic wave resonator with patterned mass loading layer and recessed frame
#90Bulk acoustic wave resonator with mass loading layer
#91Bulk acoustic wave resonators with patterned mass loading layers
#92Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
#93ACOUSTIC WAVE DEVICE, AND PREPARATION METHOD THEREFOR AND TEMPERATURE CONTROL METHOD THEREOF
#94Silver-bonded quartz crystal
#95Metal ribs in electromechanical devices
#96Transversely-excited film bulk acoustic resonator package and method
#97Method of fabricating transversely-excited film bulk acoustic resonator
#98Method for fabricating an acoustic resonator device with perimeter structures
#99Transversely-excited film bulk acoustic resonator
#100Electronic device and manufacturing method therefor
#101Acoustic wave device and fabrication method thereof
#102Piezo Magnetic Resonator/Amplifier
#103Film bulk acoustic resonator fabrication method
#104Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
#105Vibration element, manufacturing method of vibration element, physical quantity sensor, inertial measurement device, electronic apparatus, and vehicle
#106Piezoelectric resonator unit and method of manufacturing the same
#107Transversely-excited film bulk acoustic resonator with reduced spurious modes
#108Transversely-excited film bulk acoustic resonator with reduced spurious modes
#109Transversely-excited film bulk acoustic resonator with reduced spurious modes
#110Transversely-excited film bulk acoustic resonator with a cavity having round end zones
#111Bulk acoustic wave filter and a method of frequency tuning for bulk acoustic wave resonator of bulk acoustic wave filter
#112Transversely-excited film bulk acoustic resonators
#113Transversely-excited film bulk acoustic resonator with reduced spurious modes
#114Vibration element and oscillator
#115Vibrator element, vibrator device, and method of manufacturing vibrator element
#116Transversely-excited film bulk acoustic resonators with electrodes having irregular hexagon cross-sectional shapes
#117Vibrator element and vibrator device
#118PIEZOELECTRIC RESONATOR AND MANUFACTURING METHOD OF PIEZOELECTRIC RESONATOR
#119Acoustic resonator
#120Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
#121Acoustic wave resonator, filter, multiplexer, and wafer
#122Two dimensional rod resonator for RF filtering
#123Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer
#124Transversely-excited film bulk acoustic resonators with two-layer electrodes with a wider top layer
#125Substrate for a temperature-compensated surface acoustic wave device or volume acoustic wave device
#126Method for fabricating an acoustic resonator device
#127Transversely-excited film bulk acoustic filter using pitch to establish frequency separation between resonators
#128Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same
#129Symmetric transversely-excited film bulk acoustic resonators with reduced spurious modes
#130Heterostructure and method of fabrication
#131Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
#132Transversely-excited film bulk acoustic resonator package and method
#133Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
#134Transversely-excited film bulk acoustic resonator with reduced spurious modes
#135Transversely-excited film bulk acoustic resonator and filter with a uniform-thickness dielectric overlayer
#136TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH ETCHED CONDUCTOR PATTERNS
#137Transversely-excited film bulk acoustic resonator with a cavity having a curved perimeter
#138TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH ETCHED CONDUCTOR PATTERNS
#139Method for forming an aluminum nitride layer
#140Method for manufacturing resonator
#141Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
#142Film bulk acoustic resonator fabrication method
#143Transversely-excited film bulk acoustic resonators with molybdenum conductors
#144Transversely-excited film bulk acoustic resonator
#145Heterostructure and method of fabrication
#146Oscillator, electronic apparatus and vehicle
#147RESONATOR DEVICE, RESONATOR MODULE, ELECTRONIC APPARATUS, AND VEHICLE
#148Substrate for a temperature-compensated surface acoustic wave device or volume acoustic wave device
#149Resonator and resonance device
#150Acoustic resonator
#151Method for manufacturing piezoelectric vibration element and method for manufacturing piezoelectric vibrator
#152Method for fabricating bulk acoustic wave resonator with mass adjustment structure
#153Transversely-excited film bulk acoustic resonators with molybdenum conductors
#154Bulk acoustic wave filter and a method of frequency tuning for bulk acoustic wave resonator of bulk acoustic wave filter
#155Tuning fork-type vibrator and manufacturing method for the same
#1564.5G 3.55-3.7 GHz band bulk acoustic wave resonator RF filter circuit
#157Elastic wave device and method for manufacturing the same
#158Tuning fork-type vibrating reed, tuning fork-type vibrator and manufacturing method therefor
#159Vibrator device, manufacturing method of vibrator device, electronic device, and vehicle
#160Acoustic resonator
#161Technique for designing acoustic microwave filters using LCR-based resonator models
#162Transversely-excited film bulk acoustic resonator
#163Method of forming an integrated resonator with a mass bias
#164Effective coupling coefficients for strained single crystal epitaxial film bulk acoustic resonators
#165Fine dust concentration sensor
#166Acoustic wave filter formed on a V-groove topography and method for producing the same
#167Saw device manufacturing method
#168Silver-bonded quartz crystal
#169Microelectronic devices having vertical piezoelectric membranes for integrated RF filters
#170Acoustic wave element and method for manufacturing same
#171Frequency adjustment method for piezoelectric resonator device
#172Vibration element, manufacturing method of vibration element, physical quantity sensor, inertial measurement device, electronic apparatus, and vehicle
#173Vibrator device, circuit device, method of manufacturing vibrator device, electronic apparatus, and vehicle
#174Vibrator device including reduced mounting stress and frequency variation
#175Film bulk acoustic resonator (FBAR) devices for high frequency RF filters
#176Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
#177Vibrator device, method of manufacturing vibrator device, electronic apparatus, and vehicle
#178Bulk acoustic wave resonator with piezoelectric layer comprising lithium niobate or lithium tantalate
#179Resonance device manufacturing method
#180Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
#181Filter circuit
#182Method for fabricating an acoustic resonator device with perimeter structures
#183Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
#184Substrate for a temperature-compensated surface acoustic wave device or volume acoustic wave device
#185Frequency adjustment method of vibrator element
#1865.9 GHz c-V2X and DSRC acoustic wave resonator RF filter circuit
#187Acoustic resonator
#188Bulk acoustic wave resonator
#189Piezoelectric vibrator and sensor
#190COMPOSITE STRUCTURE AND ASSOCIATED PRODUCTION METHOD
#191Method for manufacturing piezoelectric thin-film element
#192Resonance device and manufacturing method therefor
#193Method for frequency trimming a microelectromechanical resonator
#194Technique for designing acoustic microwave filters using LCR-based resonator models
#195Quartz crystal blank and quartz crystal resonator unit
#196Quartz crystal blank and quartz crystal resonator unit
#197Bulk acoustic wave resonator comprising a ring
#198Acoustic wave resonator and method for manufacturing the same
#199Bulk acoustic wave filter and a method of frequency tuning for bulk acoustic wave resonator of bulk acoustic wave filter
#200Method for fabricating bulk acoustic wave resonator with mass adjustment structure
#201Piezoelectric vibrating piece and piezoelectric device
#202Heterostructure and method of fabrication
#203Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
#204Bulk-acoustic wave resonator and method for manufacturing the same
#205Wafer, piezoelectric vibrator element, and piezoelectric vibrator
#206Two-dimensional mode resonators
#207Method of manufacturing piezoelectric resonator unit
#208Single-chip multi-frequency film bulk acoustic-wave resonators
#209Piezoelectric resonator device
#210Elastic wave device and method for manufacturing the same
#211Piezoelectric thin film resonator, filter, and multiplexer
#212Temperature compensated oscillation circuit, oscillator, electronic apparatus, vehicle, and method of manufacturing oscillator
#213Elastic wave device and method for manufacturing the same
#214Crystal resonator
#215Piezoelectric vibration member and method of manufacturing the same
#216Acoustic wave resonator, filter, multiplexer, and method of fabricating acoustic wave resonator
#217Acoustic wave filter and duplexer
#218Method for producing a batch of acoustic wave filters
#219Duplexer
#220Acoustic wave filter and method for manufacturing the same
#221Acoustic wave filter and method for manufacturing the same
#222Bulk acoustic wave resonator with piezoelectric layer comprising lithium niobate or lithium tantalate
#223Technique for designing acoustic microwave filters using LCR-based resonator models
#224Method to reduce frequency distribution of bulk acoustic wave resonators during manufacturing
#225FREQUENCY ADJUSTMENT METHOD OF PIEZOELECTRIC RESONATOR AND THE PIEZOELECTRIC RESONATOR
#226Technique for designing acoustic microwave filters using LCR-based resonator models
#227High intensity ultrasound transducers and methods and devices for manufacturing high intensity ultrasound transducers
#228Surface acoustic wave filter with a cap layer for improved reliability
#229Method for producing piezoelectric device
#230Stealth-dicing compatible devices and methods to prevent acoustic backside reflections on acoustic wave devices
#231Method of manufacturing piezoelectric vibrator element, piezoelectric vibrator element, and piezoelectric vibrator
#232Elastic wave device and method for manufacturing the same
#233Piezoelectric vibrator and piezoelectric vibrating apparatus
#234Piezoelectric vibrator and frequency adjustment method for piezoelectric vibrator
#235Surface elastic wave device comprising a single-crystal piezoelectric film and a crystalline substrate with low visoelastic coefficients
#236Bulk acoustic wave resonator comprising a ring
#237Acoustic resonator and method of manufacturing the same
#238Switchable filters and design structures
#239Filter and duplexer with resonators having insertion films of different widths
#240Bulk acoustic resonator comprising aluminum scandium nitride
#241Method for forming a layered structural member
#242Electrical resonator
#243MEMS component having AlN and Sc and method for manufacturing a MEMS component
#244BAW component, lamination for a BAW component, and method for manufacturing a BAW component
#245Method of fabricating acoustic resonator with planarization layer
#246Acoustic wave filter and duplexer
#247Resonator element, resonator, oscillator, electronic device and mobile object
#248Resonator element, resonator, oscillator, electronic apparatus, and mobile object
#249Vibrating reed, angular velocity sensor, electronic device, moving object, and method for manufacturing vibrating reed
#250Process of manufacturing a piezopolymer transducer with matching layer
#251Method of manufacturing elastic wave device
#252Method for manufacturing an ultrasonic transducer, biological sensor
#253Method of manufacturing stacked thin film piezoelectric filter
#254Bulk acoustic wave resonator comprising a boron nitride piezoelectric layer
#255Method of manufacturing an encapsulation device
#256Electro-acoustic transducer with periodic ferroelectric polarization produced on a micromachined vertical structure
#257Temperature drift compensation of MEMS resonators
#258Temperature compensated acoustic resonator device
#259Volume wave resonators on micromachined vertical structures
#260Radio frequency filter and manufacturing method thereof
#261Acoustic resonator device with at least one air-ring and frame
#262Piezoelectric device and method for producing piezoelectric device
#263Mesa-shaped piezoelectric resonator element
#264TEMPERATURE COMPENSATED RESONATOR DEVICE HAVING LOW TRIM SENSITIVY AND METHOD OF FABRICATING THE SAME
#265Acoustic structure comprising at least one resonator and at least one cointegrated capacitor in one and the same piezoelectric or ferroelectric layer
#266Method for manufacturing a device on a substrate
#267Method for manufacturing BAW resonators on a semiconductor wafer
#268Resonator element, resonator, electronic device, electronic apparatus, and method of manufacturing resonator element
#269Method for producing an electrical contact
#270HBAR resonator comprising a structure for amplifying the amplitude of at least one resonance of said resonator and methods for producing such a resonator
#271Method of manufacturing a boundary acoustic wave device
#272Method of manufacturing switchable filters
#273Method of manufacturing a film bulk acoustic resonator with a loading element
#274Piezoelectric thin-film resonator and method for producing piezoelectric thin film
#275Tuning-fork type piezoelectric vibrating piece with enhanced frequency adjustment and piezoelectric device incorporating same
#276Method of manufacturing piezoelectric vibration reed, piezoelectric vibration reed, piezoelectric vibrator, oscillator, electronic instrument, and radio time piece
#277Acoustic resonator formed on a pedestal
#278Resonator device including electrodes with buried temperature compensating layers
#279Acoustic wave device
#280Piezoelectric thin-film resonator and method for manufacturing the same
#281Piezoelectric vibrating piece, piezoelectric device, and method for manufacturing piezoelectric device
#282RESONATOR DEVICE INCLUDING ELECTRODE WITH BURIED TEMPERATURE COMPENSATING LAYER
#283Method of manufacturing a piezoelectric vibrator
#284PIEZOELECTRIC VIBRATING DEVICE AND METHOD FOR MANUFACTURING SAME
#285Film bulk acoustic wave resonator-based high energy radiation detectors and methods using the same
#286Ultrasonic transducer, biological sensor, and method for manufacturing an ultrasonic transducer
#287Boundary acoustic wave device and method of manufacturing same
#288MINERAL ELECTRET-BASED ELECTROMECHANICAL DEVICE AND METHOD FOR MANUFACTURING SAME
#289GLASS BODY CUTTING METHOD, PACKAGE MANUFACTURING METHOD, PACKAGE, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO-CONTROLLED TIME PIECE
#290PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS AND RADIO-CONTROLLED TIMEPIECE
#291WAFER AND METHOD OF MANUFACTURING PACKAGE PRODUCT
#292Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
#293Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
#294Coupled resonator filter comprising a bridge and frame elements
#295Film bulk acoustic resonator comprising a bridge
#296Vibrating piece manufacturing method and vibrator manufacturing method
#297Acoustic wave device and filter
#298Piezoelectric thin-film resonator
#299Acoustic wave device with frequency control film
#300Acoustic wave device having a frequency control film