220401 ⎘
Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezo-electric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient; Resonance frequency; Modification of the thickness of an element of a piezoelectric layer
OSCILLATOR MASTER BOARD, OSCILLATORS AND METHOD FOR MAKING THE SAME
#2MULTIPLE ELECTROMECHANICAL COUPLING COEFFICIENTS ON SAME WAFER
#3FUNDAMENTAL TONE MITIGATION FOR SECOND OVERTONE BULK ACOUSTIC WAVE RESONATOR
#4ACOUSTIC WAVE DEVICE HAVING PIEZOELECTRIC LAYER STRUCTURE WITH SLOPED REGION
#5METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE WITH MULTI-LAYER PIEZOELECTRIC SUBSTRATE
#6CRYSTAL RESONATOR AND METHOD FOR MANUFACTURING THE SAME
#7ACOUSTIC WAVE DEVICE AND METHOD FOR MANUFACTURING ACOUSTIC WAVE DEVICE
#8Two dimensional rod resonator for RF filtering
#9RECESSED FRAMES IN THICKNESS MODE PIEZOELECTRIC RESONATORS
#10BULK ACOUSTIC WAVE RESONATOR AND CAPACITOR WITH SILICON SUPPORT
#11BULK ACOUSTIC WAVE DEVICE WITH STACKED PIEZOELECTRIC LAYERS
#12METHOD OF MANUFACTURING BULK ACOUSTIC WAVE DEVICE WITH ATOMIC LAYER DEPOSITION OF PIEZOELECTRIC LAYER
#13BULK ACOUSTIC WAVE DEVICE WITH PIEZOELECTRIC LAYER FORMED BY ATOMIC LAYER DEPOSITION
#14BULK ACOUSTIC WAVE RESONATOR WITH MODIFIED OUTER REGION
#15BULK ACOUSTIC WAVE RESONATOR WITH REDUCED PERIMETER LEAKAGE
#16BAW RESONATOR ARRANGEMENT WITH RESONATORS HAVING DIFFERENT RESONANCE FREQUENCIES AND MANUFACTURING METHOD
#17PISTON MODE GENERATION IN THIN PLATE LAMB WAVE DEVICE
#18Vibration element and oscillator
#19Two dimensional rod resonator for RF filtering
#20Method of manufacturing acoustic wave device with multi-layer piezoelectric substrate
#21Method for manufacturing resonator
#22Resonator and resonance device
#23Resonator and resonance device
#24Bulk-acoustic resonator and elastic wave filter device
#254.5G 3.55-3.7 GHz band bulk acoustic wave resonator RF filter circuit
#26Effective coupling coefficients for strained single crystal epitaxial film bulk acoustic resonators
#27Acoustic wave filter formed on a V-groove topography and method for producing the same
#28Saw device manufacturing method
#29Film bulk acoustic resonator (FBAR) devices for high frequency RF filters
#30Method of producing a composite substrate
#31Method for manufacturing piezoelectric thin-film element
#32Resonance device and manufacturing method therefor
#33Quartz crystal blank and quartz crystal resonator unit
#34Quartz crystal blank and quartz crystal resonator unit
#35Bulk acoustic wave resonator and method for manufacturing the same
#36Single-chip multi-frequency film bulk acoustic-wave resonators
#37At-cut crystal element and crystal resonator
#38Guided acoustic wave device
#39Resonator and resonance device
#40Piezoelectric thin film resonator, filter, and multiplexer
#41Piezoelectric vibration member and method of manufacturing the same
#42Piezoelectric thin film and piezoelectric vibrator
#43Resonator and resonance device
#44FREQUENCY ADJUSTMENT METHOD OF PIEZOELECTRIC RESONATOR AND THE PIEZOELECTRIC RESONATOR
#45Method of manufacturing piezoelectric vibrator element, piezoelectric vibrator element, and piezoelectric vibrator
#46MEMS component having AlN and Sc and method for manufacturing a MEMS component
#47BAW component, lamination for a BAW component, and method for manufacturing a BAW component
#48Method of manufacturing stacked thin film piezoelectric filter
#49Mesa-shaped piezoelectric resonator element
#50Mesa-type AT-cut quartz-crystal vibrating piece and quartz-crystal device
#51Method of manufacturing stacked thin film piezoelectric filter
#52Piezoelectric resonator and sensing sensor
#53Elastic wave device and electronic component
#54Filter and antenna duplexer
#55Piezoelectric thin-film resonator, filter using the same, and duplexer using the same
#56Piezoelectric resonator structure and method for manufacturing a coupled resonator device
#57Mesa-shaped piezoelectric resonator element
#58Method for manufacturing an electronic component
#59Filter and antenna duplexer
#60Manufacturing method of quartz crystal resonator, apparatus therefor, and quartz crystal resonator manufactured thereby
#61Electronic component having a resonator and fabrication process