ClassID:

220553

H03H2009/02291 - CPC Classification

Classification description:

Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Vibrating means Beams

Sub-classes:
Recent Application in this class:
#1
20260066870
2026-03-05

MEMS RESONATOR

#2
20260005667
2026-01-01

RESONATOR ELEMENT

#3
20260005666
2026-01-01

RESONATOR ELEMENT

#4
20250309859
2025-10-02

DUAL-MODE MEMS RESONATORS WITH LOW SUPPORT LOSS

#5
20240007077
2024-01-04

MEMS resonator

#6
20230133733
2023-05-04

MICROELECTROMECHANICAL SYSTEM RESONATOR ASSEMBLY

#7
20220200564
2022-06-23

MEMS resonator

#8
20220140802
2022-05-05

Micromechanical resonator and resonator system including the same

#9
20200412325
2020-12-31

Differential resonator and MEMS sensor

#10
20200064367
2020-02-27

Vibrating beam accelerometer

#11
20190222196
2019-07-18

Distributed-mode beam and frame resonators for high frequency timing circuits

#12
20190028084
2019-01-24

Micromechanical resonator and resonator system including the same

#13
20180145656
2018-05-24

Resonant transducer

#14
20170288635
2017-10-05

Piezoelectric package-integrated crystal devices

#15
20170170802
2017-06-15

MEMS resonator

#16
20160352309
2016-12-01

Micro-electromechanical resonators and methods of providing a reference frequency

#17
20160336941
2016-11-17

Ultra low power thermally-actuated oscillator and driving circuit thereof

#18
20160126926
2016-05-05

Method of forming a resonator

#19
20160087600
2016-03-24

Nanomechanical resonator array and production method thereof

#20
20160006412
2016-01-07

Planar structure of a mechanical resonator decoupled by bending oscillation and expansion/compression vibrations

#21
20150357992
2015-12-10

Frequency divider apparatus

#22
20150123745
2015-05-07

MEMS/NEMS device comprising a network of electrostatically actuated resonators and having an adjustable frequency response, notably for a band-pass filter

#23
20140361844
2014-12-11

Suspended passive element for MEMS devices

#24
20140361843
2014-12-11

Monolithic body MEMS devices

#25
20140361661
2014-12-11

Temperature compensation for MEMS devices

#26
20140339963
2014-11-20

Microelectromechanical resonator

#27
20140292427
2014-10-02

Vibrator with a beam-shaped portion above a recess in a substrate, and oscillator using same

#28
20140266509
2014-09-18

Rotational MEMS resonator for oscillator applications

#29
20140266484
2014-09-18

Microelectromechanical resonators

#30
20140184347
2014-07-03

Microelectronic machine-based ariable

#31
20140078640
2014-03-20

Thin film device and method for manufacturing thin film device

#32
20130033334
2013-02-07

MEMS resonator and electrical device using the same

#33
20120295384
2012-11-22

Method of manufacturing a microelectromechanical system (MEMS) resonator

#34
20120146736
2012-06-14

MEMS vibrator, oscillator, and method for manufacturing MEMS vibrator

#35
20120091547
2012-04-19

Resonator and production method thereof

#36
20110133855
2011-06-09

Resonator, elastic wave transmission element and fabrication method thereof

#37
20090158566
2009-06-25

Method for fabricating a microelectromechanical system (MEMS) resonator

#38
18449089
2025-05-13

Techniques for adding compensating material(s) in semiconductor devices

#39
17901748
2023-09-19

Temperature stable MEMS resonator

#40
17363386
2022-10-11

Temperature stable MEMS resonator

#41
14863337
2017-01-17

Temperature stable MEMS resonator

#42
14514096
2016-11-08

Vertical differential resonator

#43
13294950
2014-11-04

Vertical differential resonator

#44
13287068
2016-08-30

Temperature compensated resonator with a pair of spaced apart internal dielectric layers