220553 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Vibrating means Beams
Sub-classes:MEMS RESONATOR
#2RESONATOR ELEMENT
#3RESONATOR ELEMENT
#4DUAL-MODE MEMS RESONATORS WITH LOW SUPPORT LOSS
#5MEMS resonator
#6MICROELECTROMECHANICAL SYSTEM RESONATOR ASSEMBLY
#7MEMS resonator
#8Micromechanical resonator and resonator system including the same
#9Differential resonator and MEMS sensor
#10Vibrating beam accelerometer
#11Distributed-mode beam and frame resonators for high frequency timing circuits
#12Micromechanical resonator and resonator system including the same
#13Resonant transducer
#14Piezoelectric package-integrated crystal devices
#15MEMS resonator
#16Micro-electromechanical resonators and methods of providing a reference frequency
#17Ultra low power thermally-actuated oscillator and driving circuit thereof
#18Method of forming a resonator
#19Nanomechanical resonator array and production method thereof
#20Planar structure of a mechanical resonator decoupled by bending oscillation and expansion/compression vibrations
#21Frequency divider apparatus
#22MEMS/NEMS device comprising a network of electrostatically actuated resonators and having an adjustable frequency response, notably for a band-pass filter
#23Suspended passive element for MEMS devices
#24Monolithic body MEMS devices
#25Temperature compensation for MEMS devices
#26Microelectromechanical resonator
#27Vibrator with a beam-shaped portion above a recess in a substrate, and oscillator using same
#28Rotational MEMS resonator for oscillator applications
#29Microelectromechanical resonators
#30Microelectronic machine-based ariable
#31Thin film device and method for manufacturing thin film device
#32MEMS resonator and electrical device using the same
#33Method of manufacturing a microelectromechanical system (MEMS) resonator
#34MEMS vibrator, oscillator, and method for manufacturing MEMS vibrator
#35Resonator and production method thereof
#36Resonator, elastic wave transmission element and fabrication method thereof
#37Method for fabricating a microelectromechanical system (MEMS) resonator
#38Techniques for adding compensating material(s) in semiconductor devices
#39Temperature stable MEMS resonator
#40Temperature stable MEMS resonator
#41Temperature stable MEMS resonator
#42Vertical differential resonator
#43Vertical differential resonator
#44Temperature compensated resonator with a pair of spaced apart internal dielectric layers