220554 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Vibrating means; Beams Comb-like, i.e. the beam comprising a plurality of fingers or protrusions along its length
Acoustic Resonator and Method of Forming the Same
#2Surface-Acoustic-Wave (SAW) Filter with Dielectric Material Disposed in a Piezoelectric Layer
#3Laterally Vibrating Bulk Acoustic Wave Resonator
#4VIBRATOR DEVICE
#5Laterally vibrating bulk acoustic wave resonator
#6Multiplexer including filters with resonators and parallel inductor
#7Frequency compensated oscillator design for process tolerances
#8Frequency compensated oscillator design for process tolerances
#9Filter device, multiplexer, radio-frequency front end circuit, and communication device
#10Resonance device
#11Mechanical resonator with a spring-mass system comprising a phase-change material
#12Mechanical resonator with a spring-mass system comprising a phase-change material
#13Resonation element, resonator, oscillator, electronic device and moving object
#14Switchable filters and design structures
#15Frequency compensated oscillator design for process tolerances
#16Frequency compensated oscillator design for process tolerances
#17Method of manufacturing switching filters and design structures
#18Inter-digital bulk acoustic resonator
#19Out-of-plane resonator
#20Out-of plane MEMS resonator with static out-of-plane deflection
#21Method of manufacturing a microelectromechanical system (MEMS) resonator
#22Micromechanical resonator
#23Out-of-plane MEMS resonator with static out-of-plane deflection
#24SWITCHING DEVICES AND RELATED METHODS
#25MEMS resonator including main and sub movable beams, and exciting electrodes excited by alternating-current signal
#26Timing oscillators and related methods
#27Micromechanical resonator
#28Method for fabricating a microelectromechanical system (MEMS) resonator
#29Frequency compensated oscillator design for process tolerances
#30Techniques for adding compensating material(s) in semiconductor devices
#31Temperature stable MEMS resonator
#32Temperature stable MEMS resonator
#33Method for manufacturing a vibrating MEMS circuit