220555 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Vibrating means; Beams Dog-bone-like structure, i.e. the elongated part of the "bone" is doubly clamped
Microelectromechanical resonator
#2Piezo-actuated MEMS
#3Microelectromechanical resonator
#4Piezo-actuated MEMS resonator with reduced nonlinear tcf
#5Microelectromechanical resonator
#6Microelectromechanical resonator
#7Piezo-actuated MEMS resonator
#8Microelectromechanical resonator
#9Piezo-actuated MEMS resonator with surface electrodes
#10Microelectronic structure comprising means of control of viscous damping
#11Temperature-engineered MEMS resonator
#12Ultra low power thermally-actuated oscillator and driving circuit thereof
#13Semiconductor device, a micro-electro-mechanical resonator and a method for manufacturing a semiconductor device
#14Method of forming a resonator
#15Multiple coil spring MEMS resonator
#16Compound spring MEMS resonators for frequency and timing generation
#17Semiconductor device with an array of lamellas and a micro-electro-mechanical resonator
#18Microelectromechanical resonators
#19Resonator
#20Out-of plane MEMS resonator with static out-of-plane deflection
#21MEMS resonators
#22Out-of-plane MEMS resonator with static out-of-plane deflection
#23Frame-shaped MEMS piezoresistive resonator